JP2008093662A - Coating apparatus and coating method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a coating apparatus and a coating method for coating accurately predetermined coating regions of a substrate with a liquid by supplying the liquid from a nozzle to the substrate while moving the nozzle relatively to the substrate. <P>SOLUTION: An organic EL material is ejected toward non-coating regions 12 of a substrate 1 while keeping the non-coating regions 12 of the substrate 1 at test coating positions and moving back and forth a nozzle along the X direction, so as to form coating lines CL on the non-coating regions 12 of the substrate 1. Optical images Icl of the coating lines CL are captured by a CCD camera and then the image data showing the coating lines CL are stored temporarily in the memory of a control part. Furthermore, optical images I11 of grooves 11 of the substrate 1 are captured by a CCD camera while keeping coating regions 11 of the substrate 1 at coating positions and then the image data showing the grooves 11 are stored temporarily in the memory of the control part. The substrate 1 is positioned so that the coating lines CL match the grooves 11 from these image data. Subsequently coating is performed. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a coating apparatus and a coating method for coating a liquid on a predetermined coating region of the substrate by supplying a liquid from the nozzle to the substrate while relatively moving the substrate and a nozzle. .

  As this type of coating apparatus, there is an apparatus described in Patent Document 1, for example. This coating apparatus is an apparatus for coating an organic EL material as a liquid on a glass substrate. In this apparatus, the organic EL material from the nozzle is poured into the groove by relatively moving the substrate and the nozzle so that the nozzle is aligned with the groove formed in the substrate in advance. The organic EL material is applied to the (application region).

  In this way, when the organic EL material is applied to the groove as the application region by relatively moving the substrate and the nozzle, if the relative displacement between the substrate and the nozzle occurs, the organic EL material is It will be applied to the surroundings. Therefore, in the above-described conventional apparatus, the alignment marks formed at the four corners of the substrate are imaged with a CCD camera, and after calculating the coating start point based on the image data and the groove layout data given in advance. The nozzle and the substrate are relatively moved to position the nozzle at a position immediately above the start point. Subsequently, the organic EL material is ejected from the nozzle while moving the nozzle, and the organic EL material is applied to the groove.

JP 2002-75640 A

  By the way, the organic EL material discharged from the nozzle has a substantially columnar shape, but the shape and discharge direction are not always stable, and the flow rate of the organic EL material and the environment (temperature, The humidity may vary depending on the humidity. For this reason, the application trajectory, that is, the trajectory of the organic EL material applied onto the substrate when the organic EL material is ejected while moving the nozzle relative to the substrate, depends on the flow rate of the organic EL material. May fluctuate. If the application trajectory fluctuates due to those factors (flow rate change, environmental change, etc.) and deviates from the groove (application region), a product defect is caused.

  Therefore, if the nozzle is simply positioned at the start point before the coating process by the nozzle as in the conventional device, the above-described factors (flow rate change, environmental change, etc.) cause a positional shift between the coating locus and the groove (coating area). There was a problem that it could not be prevented.

  This invention is made in view of the said subject, and it aims at providing the coating device and the coating method which can apply | coat a liquid to an application | coating area | region accurately.

  This invention is a coating apparatus that applies a liquid to a predetermined application region of a substrate by supplying the liquid from the nozzle to the substrate while relatively moving the substrate and the nozzle. Image processing for imaging both ends of the application locus formed by ejecting liquid from the nozzle while moving the nozzle relative to the substrate, and image processing of application locus information relating to the application locus output from the imaging means And a control means for adjusting the relative positional relationship between the substrate and the nozzle so that the coating locus coincides with the coating region, the coating region and the non-coating region are provided on the substrate, An application locus is formed in the non-application area.

  In the invention configured as described above, a liquid is ejected from the nozzle while moving the nozzle relative to the substrate, and a coating locus is formed as a trial coating in a non-coating region on the substrate, and both ends of the coating locus are imaged. Imaged by means. The relative positional relationship between the substrate and the nozzle is adjusted so that the application trajectory information regarding the application trajectory output from the imaging unit is subjected to image processing, so that the application trajectory matches the application region. That is, even if the application trajectory fluctuates due to factors such as flow rate changes and environmental changes, the relative positional relationship between the substrate and the nozzle is adjusted in accordance with the fluctuations. For this reason, the application process is executed while the application locus is coincident with the application area, and the liquid is applied to the application area with high accuracy. Further, since the application locus is formed in the non-application area of the substrate, a separate member for trial application is not required, the apparatus configuration can be simplified, and the apparatus cost can be reduced.

  Here, as a holding form of the substrate, for example, the substrate may be held by a stage that is relatively movable with respect to the nozzle. In this case, the stage driving mechanism unit that drives the stage is controlled to The positional relationship can be adjusted with high accuracy.

  Furthermore, the present invention is an application method for applying a liquid to a predetermined application region on a substrate by supplying the liquid from the nozzle to the substrate while relatively moving the substrate and the nozzle. In order to achieve this, the following first step and second step are performed prior to the application of the liquid to the application region. That is, the first step is a step of ejecting liquid from the nozzle while moving the nozzle relative to the substrate to form an application locus in the non-application region on the substrate, and the second step is an end of the application locus. This is a step of moving at least one of the substrate and the nozzle so that the application trajectory and the application region coincide with each other by performing image processing.

  In the invention configured as described above, both ends of the application locus formed in the non-application area on the substrate as a trial coating are imaged, and image processing is performed so that the application locus matches the application area. After the relative positional relationship is adjusted, application of liquid to the application area (application process) is executed. For this reason, even if the application trajectory fluctuates due to factors such as flow rate changes and environmental changes, the relative positional relationship between the substrate and the nozzle is adjusted in response to the fluctuation, that is, the application trajectory matches the application area. In this state, the application process is executed, and the liquid is applied to the application area with high accuracy.

  According to the present invention, the liquid is ejected from the nozzle while moving the nozzle relative to the substrate to form a coating locus in the non-coating region on the substrate, and the substrate and the substrate so that the coating locus coincides with the coating region. Since it is configured to adjust the relative positional relationship with the nozzle, even if the application trajectory fluctuates due to factors such as flow rate changes and environmental changes, the application process always keeps the application trajectory in line with the application area. The liquid can be applied to the application region with high accuracy. Further, since the application locus is formed in the non-application area of the substrate, a separate member for trial application is not required, the apparatus configuration can be simplified, and the apparatus cost can be reduced.

  FIG. 1 is a view showing a first embodiment of a coating apparatus according to the present invention. FIG. 2 is a diagram schematically showing the positional relationship among the substrate, mask and nozzle in the coating apparatus of FIG. This coating apparatus is an organic EL coating apparatus that coats a liquid organic EL material on a groove 11 formed on a substrate 1, and each groove 11 corresponds to the “coating region” of the present invention, and the organic EL material. Corresponds to the “liquid” of the present invention.

  In this coating apparatus, a stage 2 on which the substrate 1 is placed is provided. The stage 2 is slidable in the Y direction and is rotatable in the θ direction with respect to the vertical axis. In addition, a stage drive mechanism 21 is connected to the stage 2, and the stage 2 is moved in the Y direction by operating the stage drive mechanism 21 in response to an operation command from the controller 3 that controls the entire apparatus. Or the substrate 1 on the stage 2 can be positioned by rotating in the θ direction.

  Further, a mask 4 formed by forming one opening 42 having a shape corresponding to each groove 11 in an endless belt (mask main body) 41 is disposed above the stage 2. The endless belt 41 is stretched around four rollers 43 to 46. When the mask drive mechanism 47 is actuated in response to a drive command from the controller 3, the roller 43 rotates to circulate and move the mask 4 in the arrow direction X along a predetermined orbit. For this reason, by controlling the mask drive mechanism 47 by the controller 3, the opening 42 formed in the mask 4 can be disposed opposite to the groove 11 on the substrate 1 as shown in FIG. Further, the opening 42 can be moved to a position away from the substrate 1 in the X direction. In FIG. 2, in order to clarify the positional relationship among the substrate 1, the mask 4, and the nozzle described below, the substrate 1, the mask 4, and the nozzle are spaced apart from each other in the vertical direction Z. Is illustrated.

  In addition, a nozzle 5 is disposed inside the circulation loop formed by the mask 4. The nozzle 5 is connected to a nozzle drive mechanism 51, and the nozzle 5 can be reciprocated in the X direction by operating the nozzle drive mechanism 51 in accordance with an operation command from the controller 3. Therefore, when the nozzle 5 is moved in the X direction in a state where the mask 4 is positioned at a position (application position) where the opening 42 is opposed to the groove 11 on the substrate 1 as described above, the nozzle 5 opens the opening of the mask 4. 42 will move along.

  The nozzle 5 is connected to an organic EL material supply unit by piping, and the organic EL material pumped from the supply unit can be discharged toward the mask 4. Therefore, when the organic EL material is ejected toward the mask 4 positioned at the application position as shown in FIG. 2, only the organic EL material ejected from the nozzle 5 has passed through the opening 42 of the mask 4. It is applied to the substrate 1. That is, the organic EL material is selectively applied to the groove 11 of the substrate 1. On the other hand, the organic EL material discharged to other than the opening 42 of the mask 4 adheres to the mask 4 and is prevented from being supplied to the substrate 1. As a result, the organic EL material is applied to the substrate surface other than the groove 11. Can be surely prevented.

  When the nozzle 5 is moved in the X direction while the mask 4 is fixed at the application position, the organic EL material is applied in a line shape to the grooves 11 extending in the X direction. Also at this time, since only the organic EL material discharged from the nozzle 5 passes through the opening 42 is supplied to the substrate 1 and applied, the organic EL material can be accurately applied to the groove 11. Reference numeral 52 in the drawing denotes a nozzle cleaning unit for cleaning and removing the organic EL material adhering to the tip of the nozzle 5. When nozzle cleaning is required, a nozzle cleaning through-hole provided in the mask 4 is appropriately provided. The tip of the nozzle 5 is immersed in the nozzle cleaning unit 52 via 48 to perform nozzle cleaning.

  When the coating process by the nozzle 5 is performed as described above, an extra portion is present in the peripheral portion of the opening 42 of the mask 4, particularly in the peripheral portion 49 located on the extended line of the movement path (arrow P in FIG. 2) of the nozzle 5. The organic EL material easily adheres, and it is desired to remove the organic EL material from the mask 4. Therefore, in this embodiment, the liquid recovery portions 6 and 6 that specially remove the organic EL material adhering to the peripheral portion 49 of the opening 42 of the mask 4 are arranged corresponding to the peripheral portion 49. That is, as shown in FIG. 1, the liquid recovery units 6 and 6 are respectively arranged at both ends of the movement range of the nozzle 5 (a range approximately equal to the substrate size in the X direction).

  FIG. 3 is a perspective view showing the configuration of the liquid recovery unit. The liquid recovery unit 6 is disposed on the downstream side in the circumferential direction X of the mask 4 and is connected to a liquid suction mechanism unit (not shown) by piping. When the recovery drive mechanism 61 (FIG. 1) is activated in response to a liquid recovery command from the control unit 3, a negative pressure is applied from the liquid suction mechanism to the liquid recovery unit 6. The organic EL material L is sucked from the peripheral portion 49 through the recovery port 62 provided so as to face the peripheral portion 49, and recovered and removed to a predetermined recovery tank. In FIG. 3, only the downstream liquid recovery unit 6 is illustrated, but the upstream liquid recovery unit 6 also has the same configuration, and sucks the organic EL material from the peripheral portion 49 on the upstream side. Remove.

  In this embodiment, in order to clean and remove the organic EL material adhering to the mask 4, the mask cleaning unit 7 collects the liquid on the downstream side (right hand side in FIG. 1) in the circumferential direction X of the mask 4, more specifically on the downstream side. It is arranged between the part 6 and the roller 44. Hereinafter, the configuration of the mask cleaning unit will be described with reference to FIGS. 4 and 5.

  4 is a perspective view showing the configuration of the mask cleaning unit, and FIG. 5 is a cross-sectional view of the mask cleaning unit of FIG. As shown in these drawings, the mask cleaning unit 7 includes a solvent discharge section 71 disposed on the upstream side in the X direction and a cleaning object collection section 72 disposed on the downstream side. The solvent discharge unit 71 includes an upper discharge unit 711 and a lower discharge unit 712 that are symmetrically arranged in the vertical direction Z with the mask 4 interposed therebetween. Both the upper and lower discharge portions 711 and 712 have the same configuration. That is, these discharge units 711 and 712 are connected to a solvent supply unit (not shown) by piping, and when the cleaning drive mechanism unit 73 (FIG. 1) is activated in response to a solvent discharge command from the control unit 3, the solvent supply unit is supplied. A solvent for dissolving the organic EL material is pumped from the section to the discharge sections 711 and 712.

  Then, in the upper discharge part 711 which has received this solvent supply, as shown in FIG. 5, the solvent is pumped through a flow path 711b formed inside the main body 711a, and the inner peripheral surface S1 of the mask 4 from the discharge port 711c. Discharged. Thereby, the organic EL material adhering to the inner peripheral surface S1 of the mask 4 is cleaned. In the lower discharge unit 712 that has received this solvent supply, the solvent is discharged in the same manner as the upper discharge unit 711. That is, also in the lower discharge part 712, as shown in FIG. 5, the solvent pumped through the flow path 712b formed in the main body 712a is discharged from the discharge port 712c to the outer peripheral surface S2 of the mask 4. Thereby, the organic EL material adhering to the outer peripheral surface S2 of the mask 4 is cleaned. In this embodiment, the solvent discharged from each of the discharge units 711 and 712 and the dissolved organic EL material, that is, the cleaning object, is supplied to the cleaning object recovery unit 72 along the inner peripheral surface S1 and the outer peripheral surface S2 of the mask 4. The discharge direction of the solvent is adjusted so that it flows.

  As shown in FIG. 5, the cleaning object collection unit 72 includes an upper collection unit 721 and a lower collection unit 722 that are arranged symmetrically in the vertical direction Z with the mask 4 interposed therebetween. Both the upper and lower recovery units 721 and 722 have the same configuration. That is, these recovery units 721 and 722 are connected to a cleaning object suction mechanism unit (not shown) by piping, and when the cleaning drive mechanism unit 73 (FIG. 1) is operated in response to a cleaning object recovery command from the control unit 3. A negative pressure is applied to the recovery portions 721 and 722 from the cleaning object suction mechanism portion, and the mask 4 passes through the recovery ports 721a and 722a provided so as to face the inner peripheral surface S1 and the outer peripheral surface S2. The washed product (solvent + organic EL material) is sucked and collected in a predetermined collection tank.

  Furthermore, in this embodiment, two CCD cameras 81 and 82 for imaging the inner peripheral surface S 1 of the mask 4 are provided, and output signals from the CCD cameras 81 and 82 are output to the image processing unit 83. It is configured as follows. The image processing unit 83 performs predetermined image processing on the image signals from the CCD cameras 81 and 82, and then outputs the image data after the image processing to the control unit 3. Upon receiving this image data, the control unit 3 performs an alignment process, which will be described in detail later, so that the application trajectory by the nozzle 5 and the groove 11 (application area) on the substrate 1 are accurately matched to each other. To increase.

  Next, the operation of the coating apparatus configured as described above will be described with reference to FIGS. FIG. 6 is a flowchart showing the operation of the coating apparatus of FIG. In this coating apparatus, when an unprocessed substrate 1 is placed on the stage 2 by a transport robot (not shown) (step S1), the control unit 3 follows a program stored in a memory (not shown) in advance. Each part of the apparatus is controlled as follows to execute the alignment process (step S2).

  FIG. 7 is a flowchart of the alignment process. FIG. 8 is a schematic diagram showing the contents of the alignment process. This alignment process is a process for precisely matching the coating locus by the nozzle 5 with the groove 11 (coating region) on the substrate 1.

  In this alignment process, first, as shown in FIG. 8A, the mask 4 is positioned at the trial coating position (step S21). The “trial coating position” is a position where the portion of the endless belt 41 where the opening 42 is not formed faces the substrate 1. Then, the nozzle drive mechanism 51 is operated in accordance with an operation command from the controller 3 to reciprocate the nozzle 5 in the X direction and discharge the organic EL material toward the mask 4 (step S22). As a result, a coating locus CL is formed on the inner peripheral surface of the mask 4. Then, the optical image Icl of the coating locus CL is picked up by the CCD cameras 81 and 82 (step S23). Thereby, for example, an optical image Icl of the application locus CL as shown in the images I81 and I82 in FIG. 8A is picked up, and after appropriate image processing is performed by the image processing unit 83, the application locus CL is changed to the application locus CL. The image data shown is output to the control unit 3 as “application trajectory information” of the present invention and temporarily stored in the memory.

  In the next step S24, the mask drive mechanism 47 is actuated in accordance with the drive command from the controller 3, and the mask 4 is moved in the X direction to be positioned at the application position ((b) in the figure). Further, since the belt region in which the coating locus CL is formed with the movement of the mask is conveyed to the mask cleaning unit 7, the cleaning drive mechanism 73 (see FIG. 5) according to the solvent discharge command from the controller 3 along with the movement of the mask. 1) operates to perform mask cleaning (step S25). As a result, the coating locus CL formed on the mask 4 for trial coating is removed.

  Since the opening 42 of the mask 4 is disposed opposite to the groove (application region) 11 of the substrate 1 at the application position, the optical image I11 of the groove 11 is picked up by the CCD cameras 81 and 82 (step S26). For example, in FIG. 5B, an optical image I11 of the groove (application region) 11 as shown in the images I81 and I82 is taken, and after appropriate image processing is performed by the image processing unit 83, the groove (application region). 11 is output to the control unit 3 as “application area information” of the present invention and temporarily stored in the memory. In order to facilitate understanding of the relative relationship between the groove 11 and the application trajectory CL, virtual lines (one-dot chain lines) indicating the application trajectory CL are attached to the images I81 and I82. Here, it can be seen that the optical image I11 of the groove 11 and the coating locus CL are not parallel, and the coating locus CL and the groove 11 do not coincide.

  Therefore, in this embodiment, as shown in FIG. 8 (c), the controller 3 in the θ direction based on the image data (application region information) of the optical image I11 and the image data (application locus information) of the optical image Icl. After calculating the inclination amount of the groove 11 with respect to the coating locus CL (step S27), the stage drive mechanism portion 21 is actuated in accordance with an operation command from the control portion 3 to rotate the stage 2 in the θ direction by the inclination amount. Then, the substrate 1 on the stage 2 is positioned so that the coating locus CL and the groove 11 are parallel (step S28). If the coating locus CL is deviated from the center of the groove 11 simply by rotating and positioning the substrate 1, the stage 2 is further moved in the Y direction so that the coating locus CL is positioned at the center of the groove 11. Control. By doing so, the coating locus CL and the groove 11 as the coating region can be completely matched.

  Thus, when the alignment process of the substrate 1 is completed, the process proceeds to step S3 in FIG. 6 to execute the coating process. FIG. 9 is a flowchart of the coating process. In this coating process, the nozzle drive mechanism 51 operates in response to an operation command from the controller 3, and the nozzle 5 starts at the start point, that is, the upstream end of the groove 11 disposed opposite to the opening 42 (FIG. 8D). ) At the position corresponding to the left end) (step S31). Then, the nozzle drive mechanism 51 is operated in accordance with the operation command from the control unit 3 to move the nozzle 5 in the (+ X) direction, and discharge the organic EL material toward the mask 4 (step S32). At this time, only the organic EL material discharged from the nozzle 5 that has passed through the opening 42 of the mask 4 is selectively applied to the groove 11 facing the opening 42. Then, the organic EL material discharged to other than the opening 42 of the mask 4 adheres to the mask 4 and is prevented from being supplied to the substrate 1. As a result, the organic EL material is applied to the substrate surface other than the groove 11. Can be surely prevented. Further, as the nozzle 5 moves, the organic EL material is applied to the groove 11 in a line shape. In particular, in the present embodiment, the alignment process (step S2) is performed prior to the line application so that the application locus CL by the nozzle 5 is completely coincident with the groove 11, so that the organic EL material is reliably applied to the groove 11. can do.

  In this embodiment, the upstream liquid recovery section 6 is operated to recover and remove the organic EL material adhering to the upstream peripheral portion 49 (FIG. 2) of the mask 4 during line coating (step S33). . However, if the flow of the organic EL material discharged from the nozzle 5 is disturbed by the operation of the upstream side liquid recovery unit 6, the coating accuracy is adversely affected. Therefore, the upstream side liquid recovery unit 6 is operated within a range where this adverse effect does not occur. For example, the nozzle 5 may be controlled to operate only while moving the nozzle 5 at a position away from the liquid recovery unit 6 by a predetermined distance. In this regard, the same applies to the downstream liquid recovery unit 6 described later.

  When the nozzle 5 moves to the folding position, that is, to the position corresponding to the downstream end of the groove 11 during the line coating process (the right end in FIG. 8D), “YES” is determined in the step S34. Then, in order to recover and remove the organic EL material adhering to the downstream peripheral portion 49 (FIG. 2) of the mask 4 as in the upstream side, the downstream liquid recovery unit 6 is operated (step S35).

  In step S36, it is determined whether or not the organic EL material is applied to all the grooves 11 to be applied. If “NO” is determined in this step S 36, that is, if the uncoated groove 11 remains, the stage drive mechanism unit 21 operates in accordance with the operation command from the control unit 3 to move the stage 2 in the Y direction. After moving by a predetermined pitch (step S37), the process proceeds to step S38, and line coating is performed on the next groove 11.

  That is, the moving direction of the nozzle 5 is reversed, and the nozzle driving mechanism 51 is operated in accordance with an operation command from the control unit 3 to move the nozzle 5 in the (−X) direction. Only the discharged organic EL material that has passed through the opening 42 of the mask 4 is selectively applied to the groove 11 facing the opening 42.

  Further, when the nozzle 5 is moved backward, the downstream liquid recovery section 6 is operated in order to recover and remove the organic EL material adhering to the downstream peripheral portion 49 of the mask 4 as in the forward movement (step). S39).

  When the nozzle 5 moves to the position corresponding to the start point, that is, the downstream end of the groove 11 during the line coating process (the left end in FIG. 8D), “YES” is determined in the step S40. In order to recover the organic EL material adhering to the upstream peripheral portion 49 of the mask 4, the upstream liquid recovery unit 6 is activated (step S 41).

  Next, when the nozzle 5 returns to the start point, “YES” is determined in step S40, and it is further determined in step S42 whether or not the organic EL material has been applied to all the grooves 11 to be applied. In step S42, “NO” is determined. That is, while the uncoated groove 11 remains, the stage drive mechanism 21 operates in response to an operation command from the controller 3 to move the stage 2 in the Y direction. After moving by a predetermined pitch (step S43), the process proceeds to step S32, and the above-described series of line coating is performed on the next groove 11.

  On the other hand, if "YES" is determined in the step S42, the coating process is ended, and the process proceeds to the step S4 in FIG.

  In this step S4, the mask drive mechanism 47 is operated in accordance with the drive command from the controller 3 to move the mask 4 in the X direction, and the processed substrate 1 is unloaded from the stage 2 by the transfer robot, Transport to the next processing unit.

  Further, since the belt region in which the opening 42 is formed in accordance with the movement of the mask is transported to the mask cleaning unit 7, the cleaning drive mechanism 73 (FIG. 1) according to the solvent discharge command from the controller 3 along with the movement of the mask. ) Operates to perform mask cleaning (step S6). Thereby, excess organic EL material adhering to the peripheral portion of the opening 42 is removed from the mask 4 and can be reused.

  As described above, according to this embodiment, since the alignment process (step S2) is performed prior to the coating process (step S3), the coating locus CL fluctuates due to factors such as a flow rate change and an environmental change. However, the relative positional relationship between the substrate 1 and the nozzle 5 is adjusted in accordance with the fluctuation, that is, the coating locus CL is in a state of matching with the groove 11. And since an application | coating process is performed in this state, organic electroluminescent material can be reliably apply | coated to the groove | channel 11. FIG.

  In addition, since the organic EL material discharged from the nozzle 5 is supplied to the substrate 1 through the opening 42 of the mask 4 and applied, the groove 11 on the substrate 1 facing the opening 42 is formed. The organic EL material can be selectively applied to the organic EL material, and the organic EL material can be reliably prevented from being applied to the region other than the groove 11. Therefore, the organic EL material can be accurately applied to the groove 11 by using this coating apparatus.

  Further, the coating locus CL adheres to the mask 4 by the alignment process (step S2), and the organic EL material that has been removed from the opening 42 among the organic EL materials discharged from the nozzle 5 by the coating process (step S3) is applied to the mask 4. Although it adheres, the mask cleaning unit 7 for cleaning the mask 4 is provided and the mask cleaning is performed every time. Therefore, the mask 4 can be used repeatedly, and the running cost can be reduced.

  Further, in the above-described embodiment, since a part of the endless belt 41 that circulates and moves on a predetermined circular orbit is used as the mask 4, the plate-shaped mask is used as the mask accommodating portion, the application position, and the like. Compared to the case where the reciprocating transfer is performed by a transfer device such as a mask transfer robot, the device configuration can be simplified, and the size and cost of the device can be reduced. In addition, when the coating process is performed as described above, the organic EL material adheres to the peripheral portion 49 of the opening 42 in the belt portion in which the opening 42 is formed. When moved along the circular orbit, it is possible to prevent the organic EL material attached to the mask 4 from being separated from the substrate 1 by the belt portion forming the opening 42 being separated from the mask 4 and reattaching to the substrate 1. In addition, the belt portion to which the organic EL material is adhered by the movement of the endless belt 41 is transported to the mask cleaning unit 7 disposed on the circular track, and the mask cleaning can be performed simultaneously with the mask transport, thereby improving the throughput of the coating apparatus. can do.

  FIG. 10 is a view showing a second embodiment of the coating apparatus according to the present invention. The coating apparatus according to the second embodiment does not have a configuration related to the mask 4 and is configured to apply the organic EL material directly from the nozzle 5 to the groove (application region) 11 of the substrate 1. The point that the application trajectory for trial application is applied to the non-application region of the substrate 1 is different from that of the first embodiment, and other configurations are basically the same as those of the first embodiment. Therefore, the same components are denoted by the same reference numerals and the description of the components is omitted.

  FIG. 11 is a flowchart showing the operation of the coating apparatus of FIG. In this coating apparatus, when an unprocessed substrate 1 is placed on the stage 2 by a transport robot (not shown) (step S1), the control unit 3 follows a program stored in a memory (not shown) in advance. Each part of the apparatus is controlled as follows to execute the alignment process (step S20). In this alignment process, a coating locus is formed in a non-coating region of the substrate 1, and the coating locus by the nozzle 5 and the substrate 1 are adjusted by adjusting the relative positional relationship between the substrate 1 and the nozzle 5 using the coating locus. This is a process for accurately matching the upper groove 11 (application region). Hereinafter, this will be described in detail with reference to FIGS.

  FIG. 12 is a flowchart of the alignment process. FIG. 13 is a schematic diagram showing the contents of the alignment process. In the initial state of the coating apparatus, as shown in FIG. 13A, the nozzle 5 stands by in the nozzle cleaning unit 52. Note that reference symbols A81 and A82 in FIG. 13 indicate the imaging areas of the CCD cameras 81 and 82, respectively.

  When a start command for alignment processing is given from the control unit 3, the stage drive mechanism unit 21 operates in accordance with the start command to move the stage 2 in the Y direction, and the non-application area 12 of the substrate 1 is moved to the nozzle 5. On the movement route R (two-dot chain line) (step S201). This position corresponds to the “trial coating position” of the present invention. Then, the nozzle drive mechanism 51 operates in accordance with an operation command from the control unit 3 to reciprocate the nozzle 5 in the X direction, and discharges the organic EL material toward the non-application area 12 of the substrate 1 (step) S202). As a result, the application locus CL is formed on the non-application area 12 of the substrate 1. Then, the optical image Icl of the coating locus CL is picked up by the CCD cameras 81 and 82 (step S203). Thereby, for example, an optical image Icl of the application locus CL as shown in the images I81 and I82 in FIG. 13B is picked up, and after appropriate image processing is performed by the image processing unit 83, the application locus CL is changed to the application locus CL. The image data shown is output to the control unit 3 as “application trajectory information” of the present invention and temporarily stored in the memory.

  In the next step S204, the stage drive mechanism 21 operates in accordance with the drive command to move the stage 2 in the Y direction, and the nozzle 5 moves the application region 11 of the substrate 1 as shown in FIG. It is located on the route R (step S204). This position corresponds to the “application position” of the present invention. At the application position, the optical image I11 of the groove 11 is picked up by the CCD cameras 81 and 82 (step S205). As a result, for example, an optical image I11 of the groove (coating region) 11 as shown in images I81 and I82 in FIG. 8C is picked up and subjected to appropriate image processing by the image processing unit 83, and then the groove Image data indicating (application region) 11 is output to the control unit 3 as “application region information” of the present invention, and is temporarily stored in the memory. In order to facilitate understanding of the relative relationship between the groove 11 and the application trajectory CL, virtual lines (one-dot chain lines) indicating the application trajectory CL are attached to the images I81 and I82. Here, it can be seen that the optical image I11 of the groove 11 and the coating locus CL are not parallel, and the coating locus CL and the groove 11 do not coincide.

  Therefore, in the second embodiment, as shown in FIG. 13D, the control unit 3 performs θ based on the image data (application region information) of the optical image I11 and the image data (application trajectory information) of the optical image Icl. After calculating the inclination amount of the groove 11 with respect to the application trajectory CL in the direction (step S206), the stage drive mechanism unit 21 is actuated in accordance with an operation command from the control unit 3, and the stage 2 is inclined in the θ direction. And the substrate 1 on the stage 2 is positioned so that the coating locus CL and the groove 11 are parallel to each other (step S207). If the coating locus CL is deviated from the center of the groove 11 simply by rotating and positioning the substrate 1, the stage 2 is further moved in the Y direction so that the coating locus CL is positioned at the center of the groove 11. Control. By doing so, the coating locus CL and the groove 11 as the coating region can be completely matched.

  Thus, when the alignment process of the substrate 1 is completed, the process proceeds to step S30 in FIG. 11 to execute the coating process. FIG. 14 is a flowchart of the coating process. In this coating process, the nozzle drive mechanism 51 operates in accordance with an operation command from the controller 3 to position the nozzle 5 at a position corresponding to the start point, that is, one end of the groove 11 (step S301). Then, the nozzle drive mechanism 51 is operated in accordance with the operation command from the control unit 3 to move the nozzle 5 in the (+ X) direction and discharge the organic EL material toward the substrate 1 (step S302). In this embodiment, since the coating locus CL is matched with the groove 11 by the alignment process in advance, the organic EL material from the nozzle 5 is reliably supplied to the groove 11. Further, as the nozzle 5 moves, the organic EL material is applied to the groove 11 in a line shape.

  When the nozzle 5 moves to the folding position, that is, to the position corresponding to the other end of the groove 11 during the line coating process, “YES” is determined in the step S303, and all of the nozzles 5 are further determined in the step S304. It is determined whether or not the organic EL material is applied to the groove 11 to be applied. If “NO” is determined in this step S304, that is, if the uncoated groove 11 remains, the stage drive mechanism 21 operates in response to an operation command from the controller 3, and the stage 2 is moved in the Y direction. After moving by a predetermined pitch (step S305), the process proceeds to step S306, and line coating is performed on the next groove 11.

  That is, the moving direction of the nozzle 5 is reversed, the nozzle drive mechanism 51 operates according to the operation command from the control unit 3 to move the nozzle 5 in the (−X) direction, and the organic EL material to the substrate 1 Is continued (step S306). Also at this time, the organic EL material discharged from the nozzle 5 is reliably applied to the groove 11 as in the forward movement.

  Next, when the nozzle 5 returns to the start point, “YES” is determined in step S307, and it is further determined in step S308 whether or not the organic EL material is applied to all the grooves 11 to be applied. In step S308, “NO” is determined. That is, while the uncoated groove 11 remains, the stage drive mechanism 21 operates in response to an operation command from the controller 3 to move the stage 2 in the Y direction. After moving by a predetermined pitch (step S309), the process proceeds to step S302, and the series of line coating is performed on the next groove 11.

  On the other hand, if “YES” is determined in the step S308, the coating process is ended, and the process proceeds to a step S5 in FIG. 11, and the processed substrate 1 is unloaded from the stage 2 by the transfer robot and transferred to the next processing apparatus.

  As described above, in the second embodiment as well, the alignment process (step S20) is performed prior to the coating process (step S30), as in the first embodiment. Even if the coating locus CL fluctuates due to the above factors, the relative positional relationship between the substrate 1 and the nozzle 5 is adjusted corresponding to the variation, that is, the coating locus CL matches the groove 11. Yes. And since an application | coating process is performed in this state, organic electroluminescent material can be reliably apply | coated to the groove | channel 11. FIG.

  Further, in the second embodiment, since it is not necessary to provide the mask 4 and the configuration related thereto, the device configuration can be simplified and the device cost can be reduced.

  Further, the application locus CL adheres to the non-application area 12 of the substrate 1 by the alignment process (step S20). Since the non-application area 12 is an area not directly related to the final product, the application locus CL is left as it is. It may be left. If it is desirable to remove the mask, a mask cleaning unit for cleaning only the non-application area 12 may be further provided.

  The present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, in the above embodiment, the application trajectory information and the application region information are acquired in this order, but it goes without saying that this order may be changed.

  In the above embodiment, the coating locus CL and the groove (coating region) 11 are imaged by the two CCD cameras 81 and 82, and these CCD cameras 81 and 82 function as the “imaging means” of the present invention. However, the number and arrangement positions of the cameras constituting the imaging means are not limited to the above-described embodiment, and are arbitrary. For example, the application locus CL and the groove (application region) 11 are imaged by a single camera. You may do it.

  In the above-described embodiment, the application trajectory CL and the groove (application region) 11 are imaged by the CCD cameras 81 and 82 as imaging means to acquire “application trajectory information” and “application region information” of the present invention. The “application area information” may be obtained by other methods. For example, since the layout of the grooves 11 on the substrate 1 is designed using CAD (Computer Aided Design), “application area information” may be obtained based on the layout data.

  Moreover, in the said embodiment, although the board | substrate 1 and the nozzle 5 are comprised so that relative movement is possible by comprised so that the nozzle 5 may move to a X direction and the board | substrate 1 may move to a Y direction, either The present invention may be configured to move only one, and the present invention supplies the liquid from the nozzle to the substrate while relatively moving the substrate and the nozzle, so that the liquid is applied to a predetermined application region of the substrate. It can be applied to any coating apparatus that coats.

  In the above-described embodiment, one nozzle corresponds to one groove 11 in the nozzle 5, but a plurality of nozzles are integrally arranged side by side to form a plurality of grooves from one opening 42 of the mask 4. May be applied simultaneously. Further, a plurality of discharge ports may be provided in the nozzle 5 and a plurality of grooves may be applied simultaneously, or a single groove 11 may be applied.

  In the first embodiment, the mask 4 in which one opening 42 is provided in the endless belt 41 is used. However, the number and arrangement positions of the openings 42 are not particularly limited. You may make it provide. In addition, the use of the endless belt 41 is not an essential component, and the present invention can also be applied to a coating apparatus that performs a coating process using, for example, a plate-shaped mask.

  In the first and second embodiments, the present invention is applied to a coating apparatus that applies an organic EL material to the substrate 1 on which a plurality of one-line grooves 11 are formed in the X direction. However, a coating apparatus that applies an organic EL material to a substrate in which grooves of two or more lines are formed in the X direction, a coating apparatus that directly applies an organic EL material to a predetermined surface region of the substrate without providing a groove, and the like. The present invention can also be applied to. In particular, in a coating apparatus using a mask, a mask having an opening corresponding to the coating area (the groove or a predetermined surface area) may be used. In a coating apparatus that directly applies an organic EL material to a substrate without using a mask. The discharge timing of the organic EL material from the nozzle 5 may be controlled.

  Furthermore, the application target of the present invention is not limited to an organic EL coating apparatus, and a photoresist solution on various substrates such as a semiconductor wafer, a glass substrate, a glass substrate for liquid crystal display, a glass substrate for plasma display, a substrate for optical disk, The present invention can be applied to a coating apparatus that applies a coating liquid such as a developer or an etching liquid. That is, the present invention can be applied to all coating apparatuses that apply a liquid to a coating region on a substrate.

It is a figure which shows 1st Embodiment of the coating device concerning this invention. It is a figure which shows typically the positional relationship of the board | substrate, the mask, and nozzle in the coating device of FIG. It is a perspective view which shows the structure of a liquid collection | recovery part. It is a perspective view which shows the structure of a mask cleaning unit. It is sectional drawing of the mask washing | cleaning unit of FIG. It is a flowchart which shows operation | movement of the coating device of FIG. It is a flowchart of the alignment process in 1st Embodiment. It is a schematic diagram which shows the content of the alignment process in 1st Embodiment. It is a flowchart of the application | coating process in 1st Embodiment. It is a figure which shows 2nd Embodiment of the coating device concerning this invention. It is a flowchart which shows operation | movement of the coating device of FIG. It is a flowchart of the alignment process in 2nd Embodiment. It is a schematic diagram which shows the content of the alignment process in 2nd Embodiment. It is a flowchart of the application | coating process in 2nd Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Board | substrate 2 ... Stage 3 ... Control part (control means)
4 ... Mask 5 ... Nozzle 7 ... Mask cleaning unit 11 ... Groove (application area)
DESCRIPTION OF SYMBOLS 12 ... Non-application | coating area | region 21 ... Stage drive mechanism part 41 ... Endless belt (belt main body)
47 ... Mask drive mechanism 42 ... Opening 81, 82 ... CCD camera (imaging means)

Claims (3)

In the coating apparatus for applying the liquid to a predetermined application region of the substrate by supplying the liquid from the nozzle to the substrate while relatively moving the substrate and the nozzle,
Imaging means for imaging both ends of a coating locus formed by discharging liquid from the nozzle while moving the nozzle relative to the substrate;
Control for adjusting the relative positional relationship between the substrate and the nozzle so that the application locus coincides with the application region by performing image processing on the application locus information regarding the application locus output from the imaging unit. Means and
The coating apparatus, wherein the coating area and the non-coating area are provided on the substrate, and the coating locus is formed in the non-coating area. A stage that is relatively movable with respect to the nozzle while holding the substrate; and a stage drive mechanism that drives the stage;
The coating apparatus according to claim 1, wherein the control unit controls the stage driving mechanism unit to adjust the positional relationship. In the application method for applying the liquid to a predetermined application region on the substrate by supplying the liquid from the nozzle to the substrate while relatively moving the substrate and the nozzle,
Prior to application of the liquid to the application area, the following first and second steps are performed.
The first step is a step of discharging a liquid from the nozzle while moving the nozzle relative to the substrate to form a coating locus in a non-coating region on the substrate,
The second step is a step of moving at least one of the substrate and the nozzle so that the application trajectory and the application region coincide with each other by imaging both ends of the application trajectory and performing image processing.

Images