JPH10291147A - Method and device for polishing plate glass - Google Patents

Method and device for polishing plate glass

Info

Publication number
JPH10291147A
JPH10291147A JP10359197A JP10359197A JPH10291147A JP H10291147 A JPH10291147 A JP H10291147A JP 10359197 A JP10359197 A JP 10359197A JP 10359197 A JP10359197 A JP 10359197A JP H10291147 A JPH10291147 A JP H10291147A
Authority
JP
Japan
Prior art keywords
polishing
plate
glass material
surface plate
sheet glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP10359197A
Other languages
Japanese (ja)
Inventor
Fumiaki Toyama
文章 外山
Masahiko Yoshikawa
雅彦 吉川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Electric Glass Co Ltd
Original Assignee
Nippon Electric Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Glass Co Ltd filed Critical Nippon Electric Glass Co Ltd
Priority to JP10359197A priority Critical patent/JPH10291147A/en
Publication of JPH10291147A publication Critical patent/JPH10291147A/en
Withdrawn legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a method and device for polishing plate glasses capable of efficiently providing approximately uniform and flat polishing surface by applying an Oscar polishing machine irrespective of the amount of polishing. SOLUTION: A polishing device for plate glass is provided with a lower surface plate 1 which is rotated with its upper surface as a polishing surface 1a, an upper surface plate 2 which is arranged opposedly over the lower surface plate 1 and holds a plate glass material 4, and a rotating arm 3 which supports the upper surface plate 2 rotatably through a supporting shaft 5 at its top end and grinds one surface of the plate glass material 4 by reciprocatedly rotating the upper surface plate 2 within the area around one side of the lower surface plate 1 except for its rotating center part with the position eccentric to one side relative to the rotating center O1 of the lower surface plate 1 taken as a center O2 . Also it polishes the plate glass material 4 efficiently within the area on the lower surface plate 1 where peripheral speed is high and less in peripheral speed difference.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、プラズマディスプ
レー用板ガラスや液晶用ガラス基板、その他、厳しい表
面平坦度が要求される各種電子部品用板ガラス等に用い
られる板ガラス素材を高精度の平坦面に研磨する板ガラ
スの研磨方法及び装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat glass plate used for plate glass for plasma displays, glass substrates for liquid crystals, and various other electronic components requiring strict surface flatness. The present invention relates to a method and an apparatus for polishing a glass sheet.

【0002】[0002]

【従来の技術】一般に、成形された板ガラス素材は、表
面に微小な凹凸が残っており、前記した用途に適用する
には、研磨が必要である。そこで、従来からオスカー式
研磨装置を使用して板ガラス素材の表面を研磨してい
る。
2. Description of the Related Art Generally, a formed glass sheet material has minute irregularities on its surface, and requires polishing for application to the above-mentioned applications. Therefore, conventionally, the surface of the sheet glass material has been polished using an Oscar type polishing apparatus.

【0003】このオスカー式研磨装置は、図3に示すよ
うに、上面を研磨面とする下定盤10と、この下定盤1
0の上方に対向して配置され、板ガラス素材11を保持
する上定盤12とを備え、この上定盤12を揺動腕13
の先端部に垂下した支持軸14の下端部に回転自在に支
持し、板ガラス素材11を下定盤10の研磨面10aに
押し付けた状態で、研磨面10aに酸化セリウム等の研
磨剤を含むスラリーを下定盤10の上方から供給しなが
ら下定盤10を一定速度で回転させ、上定盤12を下定
盤10の回転を利用して、又は、積極的に回転させなが
ら下定盤10の上で揺動させることにより、板ガラス素
材11の片面を下定盤10の研磨面10aと研磨剤とに
よって研磨させるものである。
As shown in FIG. 3, this Oscar-type polishing apparatus comprises a lower surface plate 10 having an upper surface as a polishing surface, and a lower surface plate 1
And an upper stool 12 for holding the sheet glass material 11. The upper stool 12 is
A slurry containing an abrasive such as cerium oxide is polished on the polishing surface 10a while the plate glass material 11 is pressed against the polishing surface 10a of the lower stool 10 while being rotatably supported on the lower end of the support shaft 14 hanging down at the tip of the substrate. The lower platen 10 is rotated at a constant speed while being supplied from above the lower platen 10, and the upper platen 12 is swung on the lower platen 10 by utilizing the rotation of the lower platen 10 or while being positively rotated. By doing so, one surface of the sheet glass material 11 is polished by the polishing surface 10a of the lower platen 10 and the polishing agent.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、従来の
オスカー式研磨装置においては、揺動腕13により揺動
せしめられる板ガラス素材11の揺動範囲は、下定盤1
0の回転中心点Oを通過するように設定されていたた
め、研磨条痕が発生し、均一で高精度の平坦面をもつ板
ガラスを得ることができなかった。
However, in the conventional Oscar-type polishing apparatus, the swing range of the sheet glass material 11 which is swung by the swing arm 13 is lower than the lower platen 1.
Since it was set so as to pass through the rotation center point O of 0, polishing streaks were generated, and it was not possible to obtain a flat glass plate having a uniform and high-precision flat surface.

【0005】その理由は、揺動腕13により揺動せしめ
られる板ガラス素材11の揺動範囲を下定盤10の回転
中心点Oを通過するように設定した場合、板ガラス素材
11は、揺動腕13の揺動範囲の一端となる周速度の大
きい下定盤10の外周領域から周速度の小さい中心領域
を通過して揺動範囲の他端となる周速度の大きい外周領
域へ移動し、再び、逆方向へ移動し、このような往復動
を反復しながら研磨されるものであることに起因するも
のと判断される。換言すれば、板ガラス素材11は、下
定盤10の周速度の最大領域から周速度ゼロの点(中心
点O)を通過して再び周速度の最大領域へ移動する動作
を繰り返しているのであり、このような動作と共に揺動
腕13の先端部の支持軸14の回りで下定盤10から受
ける接触摩擦力により従動的に、又は、モータ等で積極
的に回転している板ガラス素材11においては、その外
周部に比較して中心部の研磨量が少なくなる(研磨条痕
が残る)傾向があり、成形後の面精度を上げるための
(或る程度の研磨量が生じるような)研磨に使用する場
合には、研磨ムラが発生することになる。そのため、従
来では、仕上げ研磨などの研磨量が比較的少ない研磨に
のみオスカー式研磨装置を適用していた。
[0005] The reason is that when the swing range of the sheet glass material 11 swung by the swing arm 13 is set so as to pass through the rotation center point O of the lower platen 10, the sheet glass material 11 Move from the outer peripheral region of the lower surface plate 10 having a large peripheral speed, which is one end of the swing range, to the peripheral region having a large peripheral speed, which is the other end of the swing range, through the central region having a small peripheral speed. It is determined that polishing is performed while moving in such a direction as to repeat such reciprocation. In other words, the sheet glass material 11 repeats the operation of moving from the maximum peripheral speed region of the lower platen 10 to the peripheral speed maximum region through the point of zero peripheral speed (center point O), Along with such an operation, the sheet glass material 11 that is driven by the contact frictional force received from the lower platen 10 around the support shaft 14 at the tip end portion of the swing arm 13 or actively rotated by a motor or the like, The polishing amount in the center tends to be smaller (polishing streaks remain) than in the outer peripheral portion, and it is used for polishing (to produce a certain amount of polishing) to increase the surface accuracy after molding. In such a case, polishing unevenness occurs. Therefore, conventionally, the Oscar type polishing apparatus has been applied only to polishing with a relatively small polishing amount such as finish polishing.

【0006】本発明の目的は、研磨量の大小に拘らずオ
スカー式研磨装置を適用して、研磨ムラの少ない略均一
で平坦な研磨面を能率良く得ることができる板ガラスの
研磨方法及び装置を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a method and an apparatus for polishing a glass sheet which can efficiently obtain a substantially uniform and flat polished surface with less polishing unevenness by using an Oscar type polishing apparatus regardless of the amount of polishing. To provide.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するため
本発明の方法は、上面を研磨面として回転する下定盤の
研磨面の回転中心部を除く一側周辺部にのみ、板ガラス
素材の揺動範囲を設定して前記板ガラス素材の片面を研
磨することを特徴としている。
In order to attain the above object, the method of the present invention comprises the steps of swinging a sheet glass material only on one side peripheral portion of a polishing surface of a lower platen which rotates with an upper surface as a polishing surface, except for a rotation center portion. The method is characterized in that one side of the glass sheet material is polished by setting a moving range.

【0008】板ガラス素材の揺動範囲を、下定盤の研磨
面の回転中心部を除く一側周辺部にのみ設定して、板ガ
ラス素材の片面を研磨させると、板ガラス素材は、下定
盤の周速度が大きい周辺部の領域で能率良く研磨され、
しかも、周速度差が少ない範囲で研磨されることになる
ため、研磨ムラが少なくなり、略均一で平坦に研磨され
る。
[0008] When the swing range of the sheet glass material is set only on one side peripheral portion except for the rotation center of the polishing surface of the lower surface plate, and one surface of the sheet glass material is polished, the peripheral speed of the lower surface plate is reduced. Is efficiently polished in the peripheral area where
Moreover, since polishing is performed in a range where the peripheral speed difference is small, polishing unevenness is reduced, and polishing is performed substantially uniformly and flatly.

【0009】また、本発明の装置は、上面を研磨面とし
て回転する下定盤と、下定盤の上方に対向配置されて板
ガラス素材を保持する上定盤と、先端に支持軸を介して
前記上定盤を回転可能に支持し、前記下定盤の回転中心
に対して一側に片寄った位置を中心として前記下定盤の
回転中心部を除く一側周辺部の範囲で前記上定盤を往復
揺動させて板ガラス素材の片面を研磨する揺動腕とを備
えていることを特徴としている。この構成によって、板
ガラス素材を、下定盤の周速度の大きい領域で、しか
も、周速度差の少ない範囲で略均一かつ平坦に能率良く
研磨することができる。
Further, the apparatus of the present invention comprises a lower stool rotating with the upper surface as a polishing surface, an upper stool which is disposed above the lower stool to hold a sheet glass material, and a support shaft at a tip end of the upper stool. The platen is rotatably supported, and the upper platen is reciprocally oscillated in a range around one side excluding the rotation center portion of the lower platen around a position offset to one side with respect to the rotation center of the lower platen. And a swinging arm for moving one side of the sheet glass material to be polished. With this configuration, the sheet glass material can be polished efficiently and substantially uniformly and flatly in a region where the peripheral speed of the lower platen is large and in a range where the peripheral speed difference is small.

【0010】[0010]

【発明の実施の形態】以下、本発明の実施の形態を添付
図面を参照して説明する。図1は本発明の実施例装置の
概略平面図、図2はその概略縦断側面図であって、1は
下定盤、2は上定盤、3は揺動腕、4は板ガラス素材を
示している。
Embodiments of the present invention will be described below with reference to the accompanying drawings. 1 is a schematic plan view of an apparatus according to an embodiment of the present invention, and FIG. 2 is a schematic longitudinal sectional side view thereof, wherein 1 is a lower platen, 2 is an upper platen, 3 is a swing arm, and 4 is a sheet glass material. I have.

【0011】下定盤1は、上面を研磨面1aとし、定位
置で回転可能に支持され、モータ等の適当な駆動手段
(図示省略)によって一定回転数で回転駆動される。こ
の下定盤1の研磨面1aの大きさは、板ガラス素材4の
大きさにより適宜設定されるが、研磨効率を向上させる
には、大きい方がよい。
The lower surface plate 1 has a polishing surface 1a on the upper surface, is rotatably supported at a fixed position, and is driven to rotate at a constant rotation speed by a suitable driving means (not shown) such as a motor. The size of the polished surface 1a of the lower stool 1 is appropriately set according to the size of the glass sheet material 4, but the larger the better, the better the polishing efficiency.

【0012】上定盤2は、下面に板ガラス素材4の片面
を剥離可能な適宜の接着剤2aを介して貼り付けて下定
盤1の研磨面1aに押し付けるものである。通常、上定
盤2は、板ガラス素材4の脱着を行うために、下定盤1
に対して、シリンダ等により上下に昇降可能に構成さ
れ、かつ、適宜の手段で研磨圧を付与可能とされてい
る。
The upper surface plate 2 is attached to the lower surface of the lower surface plate 1 with an appropriate adhesive 2a capable of peeling one surface of the sheet glass material 4 and pressed against the polishing surface 1a of the lower surface plate 1. Usually, the upper stool 2 is used to attach and detach the sheet glass material 4.
Is configured to be able to move up and down by a cylinder or the like, and to be able to apply a polishing pressure by an appropriate means.

【0013】揺動腕3は、先端に支持軸5を介して上定
盤2を回転可能に支持しており、かつ、下定盤1の回転
中心O1 に対して一側に片寄った位置を中心O2 として
前記下定盤1の回転中心部を除く一側周辺部の範囲で前
記上定盤2を往復揺動させて板ガラス素材4の片面を研
磨させるものである。揺動腕3の基端は、揺動付与機構
6に連結されている。この揺動付与機構6は、図面で
は、モータ6aと、このモータ6aにより回転するクラ
ンク6bと、このクランク6bに揺動腕3の基端を連結
する連結杆6c及びレバー6dとで構成した場合を例示
しているが、他の構成でもよい。揺動腕3の揺動範囲の
調整は、クランク6bの半径を変更するか、レバー6d
の長さを変更することによって行われる。
The swinging arm 3 rotatably supports the upper stool 2 at the tip thereof via a support shaft 5, and shifts the position offset to one side with respect to the rotation center O 1 of the lower stool 1. The upper surface plate 2 is reciprocally oscillated within a range of one side peripheral portion excluding the rotation center portion of the lower surface plate 1 as the center O 2 to grind one surface of the sheet glass material 4. A base end of the swing arm 3 is connected to a swing applying mechanism 6. In the drawing, the swing applying mechanism 6 includes a motor 6a, a crank 6b rotated by the motor 6a, and a connecting rod 6c and a lever 6d connecting the base end of the swing arm 3 to the crank 6b. However, other configurations may be used. The swing range of the swing arm 3 is adjusted by changing the radius of the crank 6b or by adjusting the lever 6d.
This is done by changing the length.

【0014】板ガラス素材4は、図面では、矩形の場合
を例示しているが、円形、その他の形状でもよい。
Although the sheet glass material 4 is illustrated in the drawings as having a rectangular shape, it may have a circular shape or another shape.

【0015】また、図1において二点鎖線で示したよう
に、下定盤1に対して、2つの上定盤2を使用すること
により、板ガラス素材4を2枚同時に研磨することもで
きる。この場合は、揺動腕3の揺動付与機構6の駆動源
を共用するのが好ましい。
Further, as shown by the two-dot chain line in FIG. 1, by using two upper platens 2 with respect to the lower platen 1, two sheet glass materials 4 can be polished simultaneously. In this case, it is preferable to share the drive source of the swing applying mechanism 6 of the swing arm 3.

【0016】本発明の実施例装置の構成は以上の通りで
あって、方法発明は、上記装置を使用して実施される。
次に、上記装置による板ガラス素材4の研磨作業を説明
する。先ず、下定盤1を回転させ、上定盤2の下面に板
ガラス素材4の一面を貼り付けて下定盤1の研磨面1a
に押し付け、研磨面1aの上方から研磨スラリーを供給
しつつ揺動付与機構6による揺動腕3の揺動により、上
定盤2を揺動させながら、板ガラス素材4の片面を研磨
させる。この場合、板ガラス素材4の揺動範囲、即ち、
揺動腕3の先端の揺動範囲を、下定盤1の研磨面1aの
回転中心部O1を除く一側周辺部にのみ設定して、板ガ
ラス素材4の片面を研磨させることにより、板ガラス素
材4は、下定盤1の周速度が大きい周辺部の領域で能率
良く研磨され、しかも、周速度差が少ない範囲で研磨さ
れることになるため、研磨ムラが少なくなり、略均一で
平坦に研磨される。
The configuration of the apparatus according to the embodiment of the present invention is as described above, and the method invention is implemented using the above-described apparatus.
Next, the polishing operation of the sheet glass material 4 by the above-described apparatus will be described. First, the lower platen 1 is rotated, and one surface of a sheet glass material 4 is attached to the lower surface of the upper platen 2 to polish the polishing surface 1a of the lower platen 1.
, And while the polishing slurry is being supplied from above the polishing surface 1a, one side of the sheet glass material 4 is polished while the upper platen 2 is rocked by the rocking of the rocking arm 3 by the rocking application mechanism 6. In this case, the swing range of the sheet glass material 4, that is,
The swing range of the tip of the oscillating arm 3, by setting only one side periphery except for the rotation center O 1 of the polishing surface 1a of the lower platen 1, by polishing the one surface of the glass sheet material 4, the glass sheet material No. 4 is polished efficiently in a peripheral area where the peripheral speed of the lower stool 1 is high, and is polished in a range where the peripheral speed difference is small. Is done.

【0017】揺動腕3の先端の揺動範囲を上記のように
設定するには、図1に示すように、下定盤1の回転中心
1 に対して一側に片寄った位置を中心O2 として揺動
腕3を揺動させればよく、このようにすれば、前記下定
盤1の回転中心部を除く一側周辺部の範囲で前記上定盤
2を往復揺動させて板ガラス素材4の片面を、下定盤1
の周速度の大きい領域で、しかも、周速度差の少ない範
囲で略均一かつ平坦に能率良く研磨させることができ
る。
[0017] The swing range of the front end of the swing arm 3 to be set as described above, as shown in FIG. 1, about the position offset to one side with respect to the rotation center O 1 of the lower stool 1 O The swing arm 3 may be swung as 2 so that the upper platen 2 is reciprocated and swung in a range of one side peripheral portion excluding the rotation center portion of the lower platen 1 to make the sheet glass material. 4 on one side, lower platen 1
In a region where the peripheral speed is large, and in a range where the peripheral speed difference is small, it is possible to perform polishing substantially uniformly, flatly and efficiently.

【0018】なお、上記下定盤1は、その研磨面1aを
環形状あるいは回転中心部を凹として形成してもよい。
The lower surface plate 1 may have a polished surface 1a formed in a ring shape or a concave center of rotation.

【0019】[0019]

【発明の効果】本発明の方法によれば、板ガラス素材
は、下定盤の周速度が大きい周辺部の領域で能率良く研
磨され、しかも、周速度差が少ない範囲で研磨されるこ
とになるため、研磨ムラが少なくなり、略均一で平坦に
研磨される。
According to the method of the present invention, the sheet glass material is efficiently polished in the peripheral region where the peripheral speed of the lower platen is large, and is polished in a range where the peripheral speed difference is small. Polishing unevenness is reduced, and the polishing is performed substantially uniformly and flatly.

【0020】また、本発明の装置によれば、上定盤によ
り板ガラス素材を、回転する下定盤の研磨面に押し付け
た状態で、揺動腕の揺動により、下定盤の回転中心部を
除く一側周辺部の範囲で板ガラス素材を往復揺動させて
板ガラス素材の片面を略均一かつ平坦に能率良く研磨す
ることができ、前記方法発明を容易に実施することがで
きる。
Further, according to the apparatus of the present invention, while the plate glass material is pressed against the polishing surface of the rotating lower surface plate by the upper surface plate, the rotation center of the lower surface plate is removed by swinging of the swing arm. One side of the sheet glass material can be polished approximately uniformly and flatly and efficiently by reciprocatingly swinging the sheet glass material in the range of one side peripheral portion, and the method invention can be easily carried out.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施例装置の概略平面図。FIG. 1 is a schematic plan view of an apparatus according to an embodiment of the present invention.

【図2】図1の概略縦断側面図。FIG. 2 is a schematic vertical sectional side view of FIG.

【図3】従来のオスカー式研磨装置の概略平面図。FIG. 3 is a schematic plan view of a conventional Oscar-type polishing apparatus.

【符号の説明】[Explanation of symbols]

1 下定盤 1a 研磨面 2 上定盤 3 揺動腕 4 板ガラス素材 5 支持軸 6 揺動付与機構 DESCRIPTION OF SYMBOLS 1 Lower surface plate 1a Polishing surface 2 Upper surface plate 3 Oscillating arm 4 Sheet glass material 5 Support shaft 6 Oscillating mechanism

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 上面を研磨面として回転する下定盤の研
磨面の回転中心部を除く一側周辺部にのみ、板ガラス素
材の揺動範囲を設定して前記板ガラス素材の片面を研磨
することを特徴とする板ガラスの研磨方法。
1. A swinging range of a sheet glass material is set only on one side peripheral portion of a polishing surface of a lower platen which rotates with an upper surface as a polishing surface, except for a rotation center portion, and one surface of the sheet glass material is polished. A feature of the method for polishing plate glass.
【請求項2】 上面を研磨面として回転する下定盤と、
下定盤の上方に対向配置されて板ガラス素材を保持する
上定盤と、先端に支持軸を介して前記上定盤を回転可能
に支持し、前記下定盤の回転中心に対して一側に片寄っ
た位置を中心として前記下定盤の回転中心部を除く一側
周辺部の範囲で前記上定盤を往復揺動させて板ガラス素
材の片面を研磨する揺動腕とを備えていることを特徴と
する板ガラスの研磨装置。
2. A lower platen which rotates with the upper surface as a polishing surface;
An upper surface plate which is disposed above the lower surface plate and holds the sheet glass material, and rotatably supports the upper surface plate via a support shaft at a tip, and is biased to one side with respect to a rotation center of the lower surface plate. And a swing arm for polishing the one surface of the sheet glass material by reciprocatingly swinging the upper platen in a range of one side peripheral portion excluding a rotation center portion of the lower platen with the center as a center. Plate glass polishing equipment.
JP10359197A 1997-04-21 1997-04-21 Method and device for polishing plate glass Withdrawn JPH10291147A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10359197A JPH10291147A (en) 1997-04-21 1997-04-21 Method and device for polishing plate glass

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10359197A JPH10291147A (en) 1997-04-21 1997-04-21 Method and device for polishing plate glass

Publications (1)

Publication Number Publication Date
JPH10291147A true JPH10291147A (en) 1998-11-04

Family

ID=14358020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10359197A Withdrawn JPH10291147A (en) 1997-04-21 1997-04-21 Method and device for polishing plate glass

Country Status (1)

Country Link
JP (1) JPH10291147A (en)

Cited By (5)

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Publication number Priority date Publication date Assignee Title
KR100413031B1 (en) * 2000-12-21 2003-12-31 주식회사 신안에스엔피 LCD glass grinding apparatus and grinding method using the same
JP2007098542A (en) * 2005-10-07 2007-04-19 Nikon Corp Double-sided polishing device
WO2012124663A1 (en) * 2011-03-15 2012-09-20 旭硝子株式会社 Method of polishing plate-shaped body
CN110587486A (en) * 2019-10-11 2019-12-20 蓝思科技(长沙)有限公司 Grinding jig, grinding device containing grinding jig and grinding method
CN113787398A (en) * 2021-08-19 2021-12-14 安徽富亚玻璃技术有限公司 Glass plate plane particle polishing device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100413031B1 (en) * 2000-12-21 2003-12-31 주식회사 신안에스엔피 LCD glass grinding apparatus and grinding method using the same
JP2007098542A (en) * 2005-10-07 2007-04-19 Nikon Corp Double-sided polishing device
WO2012124663A1 (en) * 2011-03-15 2012-09-20 旭硝子株式会社 Method of polishing plate-shaped body
CN103429383A (en) * 2011-03-15 2013-12-04 旭硝子株式会社 Method of polishing plate-shaped body
CN103429383B (en) * 2011-03-15 2016-05-11 旭硝子株式会社 The Ginding process of plate body
CN105798767A (en) * 2011-03-15 2016-07-27 旭硝子株式会社 Method of polishing plate-shaped body and polishing device
CN105798767B (en) * 2011-03-15 2018-01-30 旭硝子株式会社 The Ginding process and lapping device of plate body
CN110587486A (en) * 2019-10-11 2019-12-20 蓝思科技(长沙)有限公司 Grinding jig, grinding device containing grinding jig and grinding method
CN113787398A (en) * 2021-08-19 2021-12-14 安徽富亚玻璃技术有限公司 Glass plate plane particle polishing device
CN113787398B (en) * 2021-08-19 2023-08-29 安徽富亚玻璃技术有限公司 Glass plate plane particle polishing device

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