CN103429383B - The Ginding process of plate body - Google Patents
The Ginding process of plate body Download PDFInfo
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- CN103429383B CN103429383B CN201280013296.XA CN201280013296A CN103429383B CN 103429383 B CN103429383 B CN 103429383B CN 201280013296 A CN201280013296 A CN 201280013296A CN 103429383 B CN103429383 B CN 103429383B
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- mentioned
- plate body
- parts
- pasted
- mentioned plate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/48—Flattening arrangements
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The present invention relates to a kind of Ginding process of plate body, make plate body holding member relative with milling tool close, thereby grind the above-mentioned plate body being kept by above-mentioned plate body holding member by above-mentioned milling tool, wherein, above-mentioned plate body holding member keeps the non-abradant surface of plate body, and revolve round the sun and some actions of rotation, above-mentioned milling tool has the multiple grooves along a direction on the face that the abradant surface of above-mentioned plate body is ground, and this milling tool revolves round the sun and another action of rotation, in the Ginding process of described plate body, independent above-mentioned revolution action and the above-mentioned rotation action of controlling above-mentioned plate body holding member and above-mentioned milling tool, in the process of lapping of above-mentioned plate body, change the angular speed of above-mentioned rotation.
Description
Technical field
The present invention relates to a kind of Ginding process of plate body.
Background technology
Plate body, be especially applied in the glass plate of liquid crystal display its surface smallConcavo-convex, ripple is to cause image to produce the reason of distortion, therefore removes by lapping device that this is micro-Little concavo-convex, ripple. As this lapping device, following lapping device is generally in the public eye:The glass plate keeping on fixture is being pushed against to same on the grinding pad arranging on grinding plateTime, make grinding plate and fixture relatively rotate abrading glass plate.
The disclosed lapping device of patent documentation 1 arranges pliability film body in the bottom of fixture, andBetween film body and fixture, supply with gas-pressurized, by the pressure of this gas-pressurized, by film bodyThe glass plate of pasting is pressed on abrasive cloth and grinds. According to this lapping device, by film body and folderThe gas-pressurized existing in space between tool, the pressure that is applied to glass plate each several part becomes allEven pressure, therefore has and in abrading glass plate flatly, can remove glass pane surfaceSmall concavo-convex advantage.
And the lapping device of patent documentation 1 is supplied with slurries (lapping liquid) to grinding plate, makes thisSlurries ooze out and abrading glass plate from the surface of grinding pad. Trough of belt is disclosed in patent documentation 1Grinding pad, on the surface of this grinding pad, the spacing with 5 to 10mm forms along a directionMultiple grooves of wide by 2 to 6mm, dark 1 to 5mm. By this grinding pad, can use in grindingSlurries be discharged to the outside of grinding pad via above-mentioned groove, therefore there is grinding pad and be difficult for producing stifledPlug, the stable advantage of abrasive power.
Prior art document
Patent documentation
Patent documentation 1: the JP 2004-122351 of Japan communique
Summary of the invention
The problem that invention will solve
But, in the lapping device of patent documentation 1, there is following problem: the groove of grinding pad turnsPrint on the abradant surface of the glass plate after grinding, produce the grinding inequality of strip decorative pattern, and shouldGrind and be not local generation.
The present invention is in view of this situation, and its object is to provide a kind of Ginding process of plate body,Can remove small concavo-convex, the ripple on plate body surface, and can suppress to produce because of the groove of grinding padRaw locality is ground uneven.
For the means of dealing with problems
The present invention for achieving the above object, provides a kind of Ginding process of plate body, makes plate bodyHolding member is relative with milling tool close, thereby grinds by above-mentioned plate by above-mentioned milling toolThe above-mentioned plate body that shape body holding member keeps, wherein, above-mentioned plate body holding member keepsThe non-abradant surface of plate body, and revolve round the sun and some actions of rotation, above-mentioned grinding workTool has multiple along a direction on the face that the abradant surface of above-mentioned plate body is groundGroove, and this milling tool revolves round the sun and another action of rotation, the grinding of described plate bodyMill method is characterised in that, independent above-mentioned plate body holding member and the above-mentioned milling tool controlledAbove-mentioned revolution action and above-mentioned rotation action, in the process of lapping of above-mentioned plate body, in changeState the angular speed of rotation.
According to the present invention, move and can obtain for removing the surperficial concavo-convex of plate body by revolutionMain power, therefore can remove surperficial small concavo-convex, the ripple of plate body. And, logicalCross rotation and move the quality of abradant surface of controlled plate body processed. In rotation action, with certainWhen angular speed continues to grind, on plate body, produce the locality causing because of the groove of milling toolGrind uneven. Therefore, the present invention, in the grinding of plate body, changes the angular speed of rotation. ThisSample one, the grinding pattern of milling tool changes, and therefore can suppress to lead because of the groove of milling toolThe locality causing is ground uneven.
Ginding process of the present invention is preferred, has following operation: paste operation, above-mentioned tabularThe paste position of body, pastes plate body by the non-abradant surface of above-mentioned plate body and pastes on parts;Plate body transmits operation, by maintaining part, above-mentioned plate body is pasted to parts from above-mentioned paste positionBe sent to the abrasion site of above-mentioned plate body, wherein, above-mentioned maintaining part is installed into along configurationGuide member between above-mentioned paste position and above-mentioned abrasion site moves freely, and above-mentionedBetween paste position and above-mentioned abrasion site, carry out back and forth movement; Grinding step, by above-mentioned plateAfter shape body is pasted parts and is seated on the above-mentioned plate body holding member of above-mentioned abrasion site,Be attached to above-mentioned plate body by above-mentioned milling tool grinding sticking and paste the above-mentioned plate body on parts;Plate body unloads operation, and paste parts from above-mentioned plate body and unload above-mentioned plate body, and from above-mentionedPlate body holding member unloads this plate body and pastes parts, or, from above-mentioned plate body maintaining partPart unloads above-mentioned plate body and pastes parts, and pastes parts from this plate body and unload above-mentioned plate body;And send operation back to, on the above-mentioned plate body stickup parts that unloaded above-mentioned plate body are sent back toState paste position, in above-mentioned grinding step, above-mentioned plate body is pasted to parts and be sent toThe above-mentioned maintaining part of stating abrasion site is sent back to above-mentioned paste position.
Ginding process of the present invention is preferred, has following operation: paste operation, above-mentioned tabularThe paste position of body, pastes plate body by the non-abradant surface of above-mentioned plate body and pastes on parts;Plate body transmits operation, by the 1st maintaining part, above-mentioned plate body is pasted to parts from above-mentioned stickupPosition is sent to the 1st abrasion site of above-mentioned plate body, and wherein, above-mentioned the 1st maintaining part is pacifiedDress up along the guide member being configured between above-mentioned paste position and above-mentioned the 1st abrasion site and moveMove freely, and between above-mentioned paste position and above-mentioned the 1st abrasion site, carry out back and forth movement;The 1st grinding step, is being seated in above-mentioned the 1st grinding position by above-mentioned plate body stickup partsAfter on the above-mentioned plate body holding member of putting, by the 1st milling tool in above-mentioned milling toolGrinding sticking is attached to above-mentioned plate body and pastes the above-mentioned plate body on parts; Plate body transmits operation,By the 2nd maintaining part, above-mentioned plate body is pasted to parts and be sent to the 2nd from above-mentioned the 1st abrasion siteAbrasion site, wherein, above-mentioned the 2nd maintaining part is installed into along being configured in the above-mentioned the 1st grindsGuide member between position and above-mentioned the 2nd abrasion site moves freely, and grinds the above-mentioned the 1stBetween mill position and above-mentioned the 2nd abrasion site, carry out back and forth movement; The 2nd grinding step, is inciting somebody to actionThe above-mentioned plate body that above-mentioned plate body stickup parts are seated in above-mentioned the 2nd abrasion site keepsAfter on parts, be attached to above-mentioned tabular by the 2nd milling tool grinding sticking in above-mentioned milling toolBody is pasted the above-mentioned plate body on parts; Plate body unloads operation, from above-mentioned plate body paste sectionPart unloads above-mentioned plate body, and unloads this plate body from above-mentioned plate body holding member and paste parts,Or, unload above-mentioned plate body from above-mentioned plate body holding member and paste parts, and tabular from thisBody is pasted parts and is unloaded above-mentioned plate body; And send operation back to, will unload above-mentioned plate bodyAbove-mentioned plate body is pasted parts and is sent back to above-mentioned plate body paste position, grinds work the above-mentioned the 1stIn order, above-mentioned plate body stickup parts are sent to the above-mentioned the 1st of above-mentioned abrasion site and have keptPortion is sent back to above-mentioned paste position, in above-mentioned the 2nd grinding step, above-mentioned plate body is stickyAbove-mentioned the 2nd maintaining part that subsides parts have been sent to above-mentioned the 2nd abrasion site is sent back to the above-mentioned the 1stAbrasion site.
In batch formula lapping device, need to keep having pasted at paste position the plate body of plate bodyPaste parts, and send it to abrasion site. In prior art, make plate body holding memberMove to paste position from abrasion site, at this, plate body is pasted to parts and be installed to plate body guarantorHold on parts, afterwards, make plate body holding member move to abrasion site from paste position, fromPaste parts and transmit plate body. But, in this transfer approach, make the grinding knot of plate bodyPlate body holding member after bundle comes and goes mobile between abrasion site and paste position, therefore plateThe transmission that shape body is pasted parts needs the time of tens of seconds to several minutes, and this time is tabular to improvingThe problem of the productivity ratio of body exerts an influence. And plate body is sticky along with the maximization of plate bodyWhen subsides parts become large-scale, it is large-scale that plate body holding member also becomes, and it is tens of that its weight can reachTon. The plate body holding member of mobile this weight is required great effort on apparatus structure very much, andTranslational speed also cannot improve, and increases operating cost.
Therefore, the present invention is the required time of transmission that shortens plate body stickup parts, will be used forKeep and transmit plate body and paste the small, dedicated transfer equipment of parts and be arranged in lapping device,A kind of Ginding process of the productivity ratio that has improved plate body is in this case provided. , thisBright object to be to remove surperficial small concavo-convex, the ripple of plate body, and suppress because of grinding padThe locality that groove causes is ground and is not prerequisite, and improves the productivity ratio of plate body.
For achieving the above object, the present invention arranges by guide member and maintaining part on lapping deviceThe special transmission equipment forming, provides a kind of Ginding process that uses this special transmission equipment.
And, for achieving the above object, the present invention on lapping device, arrange by guide member,The special transmission equipment that the 1st maintaining part and the 2nd maintaining part form, provides one to use this specialWith the Ginding process of transfer equipment.
Above-mentioned maintaining part and above-mentioned the 1st maintaining part produce identical function, effect, therefore upperState in Ginding process, the latter's Ginding process is described.
Ginding process of the present invention has the operation of stickup, plate body transmits operation, the 1st and grinds workOrder, the 2nd grinding step, plate body unload operation and send operation back to, in the 1st grinding stepThe milling time of plate body (comprise that plate body is pasted to parts is installed to plate body holding memberTime) in, the 1st maintaining part that plate body paste section has been sent to the 1st abrasion site by alongGuide member sends back to paste position. And, the grinding of the plate body in the 2nd grinding stepIn time (comprising the time of plate body being pasted to parts and is installed to plate body holding member), by tabularThe 2nd maintaining part that body paste section has been sent to the 2nd abrasion site is sent back to along guide memberThe 1st abrasion site.
Therefore, utilize the milling time of the plate body in the 1st grinding step, by the 1st maintaining partSend back to paste position, thereby can utilize above-mentioned milling time, make the 1st maintaining part keep pastingNext plate body plate body paste parts. And, after the 1st grinding step finishes, canAt once the plate body of having pasted next plate body is pasted to parts and be sent to the 1st by the 1st maintaining partAbrasion site. And, utilize the milling time of the plate body in the 2nd grinding step, by the 2ndMaintaining part sends back to the 1st abrasion site, thereby can utilize above-mentioned milling time, makes the 2nd to keepPortion is in the 1st abrasion site standby. And, after the 1st grinding step finishes, can be at once by plateShape body is pasted parts and is sent to the 2nd abrasion site by the 2nd maintaining part from the 1st abrasion site.
Therefore, Ginding process of the present invention can be implemented the 1st maintaining part from milling time1 abrasion site send back to paste position operation, make maintaining part keep having pasted next plate bodyPlate body is pasted the operation of parts and the 2nd holding member is sent back to the 1st from the 2nd abrasion siteThe operation of abrasion site, therefore and make plate body holding member abrasion site and paste position itBetween come and go mobile existing Ginding process and compare, the productivity ratio of plate body significantly improves.
The Ginding process of plate body of the present invention is preferred, and above-mentioned plate body is pasted parts and is configured to squareShape, the action of revolving round the sun of above-mentioned plate body holding member, above-mentioned milling tool is by with predetermined angleThe swing of the cycle of degree scope or this cycle and the direction along the abradant surface of above-mentioned plate bodyCombination action, makes to produce relative motion between above-mentioned plate body and above-mentioned milling tool.
And the Ginding process of plate body of the present invention is preferred, above-mentioned plate body is pasted parts structureBecome rectangle, the action of revolving round the sun of above-mentioned plate body holding member, above-mentioned the 1st milling tool andAbove-mentioned the 2nd milling tool by scope cycle at a predetermined angle or this cycle with along above-mentionedThe combination action of the swing of the direction of the abradant surface of plate body, makes above-mentioned plate body and the above-mentioned the 1stBetween milling tool and between above-mentioned plate body and above-mentioned the 2nd milling tool, produce fortune relativelyMoving.
Pasting parts via plate body utilizes plate body holding member to make to exceed 1000mm's on one sideWhen the rotation of large-scale rectangular plate body and revolution, the operating range that plate body is pasted parts becomes large, because ofThis plate body is pasted parts with respect to the input of plate body holding member and is taken out need to be longer timeBetween. And the length on one side of the plate body grinding by Ginding process of the present invention is institute as aboveState, be preferably greater than 1000mm, more preferably 2000mm (for example 2200 × 2500mm) withUpper, for example, more than being further preferably 2800 (2800 × 3000mm).
Therefore be, to make to keep the plate body of the plate body stickup parts of having pasted large-scale plate body to be protectedHold the Ginding process that parts revolve round the sun, make milling tool cycle. So, plate body paste sectionThe operating range of part is compared and is diminished with above-mentioned operating range, therefore can implement at short notice tabularBody is pasted input and the taking-up of parts with respect to plate body holding member. And plate body is pastedThe operating range of parts diminishes, and therefore can be provided with lapping device narrow and small of multiple posts, beamSpace in special transmission equipment is set. Further, by making to keep having pasted the plate of plate bodyShape body is pasted the plate body holding member revolution of parts, can obtain the surface for removing plate bodySmall concavo-convex power.
Further, when milling tool sidespin is returned, in process of lapping, change angular speed,Thereby can prevent the surface state of milling tool, for example be formed at the surperficial groove quilt of milling toolBe transferred to the abradant surface of plate body. And, can realize the revolution of plate body holding member and grindWhen the abrasive action of the cycle of grinder tool, realize plate body transmission by special transmission equipmentHigh efficiency, therefore compared to the prior art can improve the productivity ratio of plate body.
The Ginding process of plate body of the present invention is preferred, and guide sections part has configured in parallelPair of guide rails transmits above-mentioned plate body paste section between this pair of guide rails by above-mentioned maintaining partPart, pastes the end of parts to distance (L2, L3) and the above-mentioned plate of above-mentioned guide rail from above-mentioned plate bodyThe length (L1) of the direction orthogonal with respect to the configuration direction of above-mentioned guide rail of shape body stickup partsThan being 0.28 to 0.35.
According to the present invention, the size of maintaining part and rigidity can be optimized, and can realize the high speed of maintaining partCycle action and plate body are pasted the high speed transmission of parts. In addition, above-mentioned optimization refers to, can makeThe big or small miniaturization of maintaining part, can suppress the deflection of maintaining part and the vibration of maintaining part.
The Ginding process of plate body of the present invention is preferred, and guide sections part has configured in parallelPair of guide rails, by above-mentioned the 1st maintaining part and above-mentioned the 2nd maintaining part between this pair of guide railsTransmit above-mentioned plate body and paste parts, the end of pasting parts from above-mentioned plate body is to above-mentioned guide railDistance (L ' 2) and above-mentioned plate body to paste the configuration direction with respect to above-mentioned guide rail of parts orthogonalThe ratio of length (L ' 1) of direction be 0.28 to 0.35.
According to the present invention, the 1st and size and the rigidity of the 2nd maintaining part can optimize, can realizeThe high-speed cyclic action of the 1 and the 2nd maintaining part and the high speed transmission that plate body is pasted parts. In addition,Above-mentioned optimization refers to, can make the big or small miniaturization of the 1st and the 2nd maintaining part, can suppress the 1st,The vibration of the deflection of 2 maintaining parts and the 1st, the 2nd maintaining part.
The Ginding process of plate body of the present invention is preferred, and above-mentioned sending back in operation, by above-mentioned tabularBody paste parts in the horizontal direction, vertical direction or with respect to horizontal direction tilt incline directionSend back to.
According to the present invention, when plate body is pasted to parts and sent back in the horizontal direction, can simplify and send back toProcessing apparatus, shortening are sent back to the time. That is, plate body is polished with horizontal attitude, therefore tabularIt is also horizontal attitude that body is pasted parts. Therefore, after the grinding of plate body finishes, as make tabularBody is pasted parts and is kept this attitude (maintenance level) to be sent back to, and the attitude of plate body stickup parts is notCan vertically or tilt, therefore can shorten the time of sending back to. And, plate body is pasted to parts and is hanging downNogata to or the incline direction that tilts with respect to horizontal direction while sending back to, can send back to efficientlyThe plate body of in-process is pasted the cleaning-drying of parts. That is, after the grinding of plate body finishes, plateShape body is pasted parts and is cleaned, therefore the moisture for cleaning at its remained on surface. By making plateShape body is pasted parts and vertically or with respect to horizontal direction is tilted, and can make under this water shunting, can be efficientBe dried plate body paste parts, shorten drying time.
Invention effect
According to the present invention, can remove surperficial small concavo-convex, the ripple of plate body, and can press downMake the grinding inequality of the locality causing because of the groove of grinding pad. And, can improve plate bodyProductivity ratio.
Brief description of the drawings
Fig. 1 is the top view that represents the unitary construction of the lapping device of embodiment.
Fig. 2 is the assembling stereogram of fixture and film frame.
Fig. 3 is the side view that represents the embodiment of grinding head and grinding table.
Fig. 4 is the stereogram that comprises the portion of partly cut-away of the structure that represents grinding plate.
Fig. 5 represents that film frame wants portion's amplification view with respect to the installation constitution of fixture.
Fig. 6 (a) represents to make film body to expand and unloads the figure of the original state of lower glass plate from film frame.
Fig. 6 (b) be from blast injection nozzle by blast injection the edge part to glass plateAnd the figure of the boundary portion between film body.
Fig. 6 (c) is the key diagram of peeling off glass plate from film body.
Fig. 6 (d) unloads and is placed on the key diagram stage body by glass plate completely from film body.
Fig. 6 (e) unloads film frame and film frame is positioned over to jack from fixture by unloading lower deviceKey diagram.
Fig. 7 is the stereogram that represents the structure of conveyer.
Fig. 8 be represent conveyer structure want portion's amplification stereogram.
Fig. 9 is the top view that represents the structure of conveyer.
Figure 10 is the top view of grinding pad.
Figure 11 be grinding pad want portion's amplification view.
Figure 12 is the key diagram of the guard shield collision of film frame and guide rail.
Figure 13 is the key diagram that represents the revolution track of glass plate.
Figure 14 is the chart that the roughness after glass plate is ground is standardized and compared.
Figure 15 is the top view that represents the big or small relation of film body and guide rail.
Detailed description of the invention
The preferred embodiment of the Ginding process of plate body of the present invention is below described in detail in detail with reference to the accompanying drawings.
Fig. 1 is the top view that represents the unitary construction of the lapping device 10 of embodiment. Fig. 2 isThe assembling stereogram of fixture 52 and film frame 14. Fig. 3 is the reality that represents grinding head 50 and grinding tableExecute the side view of mode.
Lapping device 10 is by for example one side is greater than 1000mm, thickness is 0.2mm to 0.7mmThe abradant surface of large glass plate G be ground to the required flatness of glass for liquid crystal display plateLapping device.
This lapping device 10 mainly has the glass plate of the glass plate G before the grinding moved into and moves into passingThe glass plate sending with 12, glass plate G is pasted to film frame (plate body stickup parts) 14 is pasted platform(paste position: paste operation) the 16, the 1st grinding table (the 1st abrasion site: the 1st grinding step) 18,The 2nd grinding table (the 2nd abrasion site: the 2nd grinding step) 20, the glass plate G that grinding is completedThe glass plate unloading from film frame 14 unloads leave from office (plate body unloads operation) 22, glass plate is taken out of with passingSend and be with 24, film frame rinsing table 26, film frame drying table 28 and film frame send conveyer belt back to and (send work back toOrder) 30.
Be below simplified illustration, glass plate is pasted to platform 16, the 1st grinding table the 18, the 2nd grindingPlatform 20, glass plate unload and leave office 22, film frame rinsing table 26 and film frame drying table 28 are recited as platform 16,18、20、22、26、28。
In lapping device 10, be provided with: conveyer (special transmission equipment) 150, by film frame 14 fromPlatform 16 is sent to platform 18; Conveyer 152, is sent to platform 20 by film frame 14 from platform 18; AndConveyer 154, is sent to platform 22 by film frame 14 from platform 20. These conveyers 150,152,154 structures are identical, and control the control part 200 of lapping device 10 by unification and control its action,In Fig. 1, synchronously come and go mobile at left and right directions.
Move into by glass plate glass plate G before the grinding of moving into conveyer belt 12 by be arranged on fromAbsorption layer 34 absorption of the arm 33 of motivation 32 keep. And, this glass plate G is passed through to armThe spinning movement of portion 33 is moved into and is displaced to conveyer belt 36 with conveyer belt 12 from glass plate, by passingSend and be with 36 to be sent to platform 16.
On platform 16, the glass plate G before grinding is pasted on film frame 14. This stickup is describedMethod, film frame 14 is kept by not shown lowering or hoisting gear on platform 16, and when glass plate, G is positioned at, film frame 14 declines mobile by lowering or hoisting gear, by the film shown in Fig. 2 when the below of film frame 14The film body with pliability and self-adsorptivity 38 setting up on frame 14 is pressed to glass plate G'sNon-abradant surface. By this pushing force, the non-abradant surface of glass plate G is pasted on film body 38. ItAfter, film frame 14 is kept by the conveyer 150 of Fig. 1, is sent to the platform 18 of Fig. 3, at thisBe installed on the fixture (plate body holding member) 52 of grinding head 50. In addition following film frame 14,Refer to the entirety of setting up film body 38. And, conveyer 150 is described in detail in detail after a while.
As shown in Figure 2, film frame 14 forms as follows: by the film body of the rectangle of Pasting glass plate G38 after being similarly and setting up between the upper ledge 40 of rectangle and lower frame 42, by not shown boltTighten upper ledge 40 and lower frame 42.
Then the grinding head 50 shown in key diagram 3. And, the grinding head 50 of platform 18 and platform 20Grinding head 50 structures identical, the label that therefore mark is identical describes.
Grinding head 50 has main body cover 51, is built-in with not shown public affairs in main body cover 51Turn driving mechanism portion. This revolution driving mechanism portion is made up of planetary gears portion and motor, byThe output shaft of this motor-driven planetary gears portion is connected to the main shaft hanging down to vertical direction56. And, jockey 52 on this main shaft 56. Therefore, when above-mentioned planetary gears portionWhile driving, fixture 52 and film frame 14 revolve round the sun (with reference to figure centered by the revolution center P being scheduled to13)。
Further, the main body cover 51 shown in Fig. 3 is connected to elevating mechanism via slide block 158156. Make main body cover 51 with respect to slide block 158 liftings by this elevating mechanism 156, therebyMake fixture 52 with respect to circular grinding pad (the 1st milling tool) 58 of platform 18 and the circle of platform 20Grinding pad (the 2nd milling tool) 60 advance and retreat of shape are mobile, and, with the grinding pressure be scheduled to by filmThe abradant surface of the glass plate G pasting on frame 14 is pressed to grinding pad 58,60.
In addition, also can unload sliding block 158 from lapping device 10, by main body cover 51 and literDescending mechanism 156 directly connects.
Fig. 4 is the stereogram that comprises the portion of partly cut-away of the structure that represents grinding plate 62. GrindPad 58 as shown in Figure 4, sticks on the upper surface of grinding plate 62. This grinding plate 62 is groundMill base station 64 supports to by bearing 65 and rotates freely, in its pivot and grinding pad 58On axle is set in coaxially. And, in the side of grinding plate 62, gear part 66 is set, this toothWheel portion 66 engages with the gear 67 rotating by motor 68. Further, gear part 66 formsCircular-arc for centered by the central shaft by grinding pad 58. Therefore,, by drive motors 68, makeGrinding pad 58 rotates (rotation) centered by its central shaft.
And grinding base station 64 is supported to slide by the pair of guide rails 69,69 of configured in parallel and movesMove freely. Make to grind base station 64 along the round drive division moving of guide rail 69,69 (not by havingDiagram), grinding pad 58 is swung where necessary in the horizontal direction. The swaying direction of grinding pad 58Can be the direction orthogonal with the direction of transfer of the conveyer 150 of Fig. 1, also with thisThe direction that direction of transfer is parallel. , the direction as long as grinding pad 58 is swung in the horizontal direction.
In addition, on the grinding plate 62 of Fig. 4, connect multiple flexible pipes (not shown), for to grindingThe dorsal part of pad 58 is supplied with slurries. For these flexible pipes are not intertwined, the revolving of grinding pad 58Turn and be limited, so that its angular range cycle that starts to be scheduled to from predetermined reference position. FromAbove-mentioned flexible pipe is supplied to the slurries of dorsal part of grinding pad 58 by connecting the inside of grinding pad 58Slurries supply hole and be fed into the front of grinding pad 58.
And, the cycle such as scope, the turning speed action of the cycle angle of grinding pad 58, unitThe revolution such as the revolution rotating speed of time action is by independent control of control part 200 of Fig. 1.
The each several part structure of grinding pad 60 is identical with the structure of above-mentioned grinding pad 58, in this omissionIts explanation.
On the other hand, as shown in Figure 3, straight moving guide is installed on the slide block 158 of platform 1870,70. Straight moving guide 70,70 and guide rail 72,72 are chimeric. This guide rail 72,72 as figureShown in 1 dotted line, the maintenance console 74 of safeguarding towards the main shaft 56 to platform 18, fixture 52Configuration.
And, as shown in Figure 3, straight moving guide is installed on the slide block 158 of platform 20 too70,70. Straight moving guide 70,70 and guide rail 160,160 are chimeric. This guide rail 160,160As shown in the dotted line of Fig. 1, the maintenance of safeguarding towards the main shaft 56 to platform 20, fixture 52Platform 76 configures.
And, also can unload sliding block 158 from lapping device 10, will directly move guide 70,70Directly be installed on elevating mechanism 156.
Then the fixture 52 shown in key diagram 2 and Fig. 5. Fig. 5 be represent film frame 14 with respect toThe installation constitution of fixture 52 want portion's amplification view.
In the upper periphery portion of fixture 52, by the not shown bolt framework 78 of fixedly slinging.On the flange part of framework 78 of slinging, uniformly-spaced offer through hole 80,80 with what be scheduled to ...,Projection is arranged on the sliding frame suspender of the upper surface of sliding frame 82 (slide-contactframe)84 as shown in Figure 5, connects these through holes 80,80 from below ... And, sliding frameSuspender 84 as shown in Figure 5, connects and is slinging framework 78 and sling with configuration between disc spring 86The spring 88 of slinging, and connect the through hole 90 of slinging with disc spring 86, be connected to spiral very heavyTop 92.
Therefore, screw jack 92 is moved, opposing sling spring 88 the application of force and will slideFrame lifting appliance 84 is pulled upwardly, thereby sliding frame 82 is pulled up with respect to fixture 52. ThisSample one, the film frame 14 that handling are arranged on sliding frame 82 is freely pulled up, to film body38 apply predetermined tension force.
On fixture 52, offer to air chamber 54 spray compressed-air actuated jet 98,98 ... These jets 98,98 ... the air chamber arranging via the upper surface at fixture 52100, be communicated with the air supply path 102 shown in dotted line on Fig. 3. Air supply path 102Extend and establish to the outside of grinding head 50 via the not shown swivel joint of installing on grinding head 50Put, be connected to air pump 106 through valve 104. Therefore, in the time opening valve 104, from air pump106 compressed air is via air chamber 100 and the jet 98 of air supply path 102, Fig. 5Be fed into air chamber 54. So, compressed-air actuated pressure is delivered to glass via film body 38Glass plate G, by this pressure, the abradant surface of glass plate G be pushed to Fig. 3 grinding pad 58,60 grind.
Next, the film frame 14 shown in key diagram 2 and Fig. 5 with respect to sliding frame 82The structure of handling unit.
On the upper ledge 40 of film frame 14, multiple pins 108,108 ... equally spaced projection setting,The large footpath head 110 that these pin upper ends of 108 have with fix in the bottom of sliding frame 82Hook 112 engage, thereby film frame 14 is installed to sliding frame 82. Head 110 and hook 112Engaging power because of the reaction force of the film body 38 when the screw jack 92 jack-up film body 38Grow, the grinding resistance being subject to from film body 38 in the time grinding, head 110 can be from hook 112Come off.
The grinding of glass plate G as shown in Figure 3, will have been pasted glass plate by conveyer 150The film frame 14 of G is sent to platform 18 from platform 16, has ground the abradant surface of glass plate G on platform 18After, by conveyer 152, the film frame 14 of having pasted glass plate G is transmitted successively from platform 18To platform 20, the abradant surface of abrading glass plate G on platform 20, implement with 2 stages like this.Further, finish after the grinding of glass plate G on platform 20, film frame 14 unloads from fixture 52 at thisUnder, be sent to platform 22 by conveyer 154. In addition, grinding table can according to purposes differenceIt is one, also more than two. Consider efficiency, cost, preferably there is corase grind platform and essenceTwo platforms of mill platform, but according to circumstances different, also can increase again in order to improve quality fine grinding platform.
The method that unloads film frame 14 from fixture 52 is first to make the screw jack shown in Fig. 592 to lax direction action, eliminates the tension force of film body 38. Then, make film frame 14 with respect to folderTool 52 slides, and unloads head portion 110 from hook 112. So, by film frame 14 from fixture 52Unload.
On the other hand, on the platform 22 shown in Fig. 1, from the film being sent by conveyer 154Frame 14 unloads the glass plate G finishing after grinding. The glass plate G unloading is transmitted by conveyer belt 138,And adsorbed by the adsorption head 144 of installing on the arm 142 of automatic machine 140, pass through automatic machine140 action moves to glass plate and takes out of with conveyer belt 24, takes out of the outside of lapping device 10.
Fig. 6 (a) is illustrated on platform 22 the glass plate G implementing, grinding is completed from film to 6 (d)The operation that frame 14 unloads. In addition,, to 6 (d), illustrated from film frame 14 and unloaded glass at Fig. 6 (a)After glass plate G, unload the example of film frame 14 from fixture 52, but as mentioned above, also can be from folderTool 52 unloads after film frame 14, unloads lower glass plate G from film frame 14.
As shown in Fig. 6 (a), in the time that fixture 52 is positioned at the top of the stage body 204 arranging on platform 22,To air chamber 54 air supplies, film body 38 is expanded via air supply path 102. This shapeState is the original state that glass plate G unloads. In this state, glass plate G and film body 38The skew of generation relative position, and want the elastic force that recovers smooth by glass plate G, easily willGlass plate G unloads from film body 38. , in prior art because the mandatory lower glass plate G that unloads makesWhat equipment produced burden unloads operation, is easy to carry out by film body 38 being expanded become.
For shortening the activity duration of unloading operation, enumerate other embodiments. As shown in Fig. 6 (b),After the operation of Fig. 6 (a), from multiple compressed air of the relative configuration of edge part of glass plate GInjection nozzle 206,206 arrives blast injection between the edge part and film body 38 of glass plate GBoundary portion. So,, as shown in Fig. 6 (c), glass plate G is peeled off from film body 38. FilmThe absorption affinity of body 38 declines because of compressed air, and therefore glass plate G is easy to unload from film body 38.In addition, also alternative compressed air and injection water, and simultaneously when injection water and compressed air alsoCan obtain same effect. In addition, in Fig. 6 (c), omitted nozzle 206.
Fig. 6 (d) represents that glass plate G unloads and be placed on the shape stage body 204 from film body 38 completelyState. Afterwards, glass plate G transmits by the conveyer belt 138 shown in Fig. 1, and, by oneselfMotivation 140 moves to glass plate and takes out of with conveyer belt 24, takes out of the outside of lapping device 10.
On the other hand, as shown in Fig. 6 (d), glass plate G is from film body 38 unloads completely, thenAs shown in Fig. 6 (e), by unloading lower device, film frame 14 is unloaded from fixture 52, film frame 14 is putPut on jack 208,208. This film frame 14 transmits by the conveyer belt 146 shown in Fig. 1To film frame rinsing table 26.
The film frame 14 that is sent to platform 26 is washed at this. Clean the film frame 14 finishing by transmittingBe with 148 to be sent to platform 28, be heated and be dried at this. And the dry film frame finishing 14 is logicalCross film frame and send conveyer belt 30 back to and be sent to platform 16, again for the stickup of glass plate G.
Then, with reference to Fig. 7, Fig. 8 and Fig. 9, conveyer 150 (152,154) is described. Fig. 7,8 and 9 is respectively that the stereogram that represents the structure of conveyer 150 (152,154), the portion that wants amplifyStereogram, top view.
Conveyer 150 has the jut that keeps four bights that are arranged on film frame 14 from below4 maintaining parts 162,162 of 43 ... These maintaining parts 162,162 ... be configured in platform16 and platform 18 between the both sides of transfer path of the film frame 14 that forms, be connected to small-sized automatic machine164 axle 166. Drive this axle by small-sized automatic machine 164 to vertical direction and horizontal direction166, thus drive maintaining part 162 to vertical direction and horizontal direction. In addition, from platform 16 to platform18 maintaining parts 162 that transmit film frame 14 are the 1st maintaining parts, transmit film frame from platform 18 to platform 2014 maintaining part 162 is the 2nd maintaining parts.
And, as shown in Figure 8, in the bottom of small-sized automatic machine 164 fixed guide blocks 168, shouldGuide block 168 and the guide rail (guide member) 170,170 of transfer path both sides that is configured in film frame 14Chimeric. And, the feeding spiral shell of guide block 168 and the feed screw device configuring along guide rail 170Bar 172 screws togather. So the film frame 14 of, having pasted glass plate G by conveyer 150 (152,154) maintaining part 162,162 ... keep, be sent to platform 18 from platform 16. And, by protectingHold portion 162,162 ... decline shift action, the film frame 14 that is sent to platform 18 can be putPut on the grinding pad 58 of platform 18, afterwards, by maintaining part 162,162 ... level sideTo rotation action, can make maintaining part 162,162 ... keep out of the way movement from film frame 14. And,Keep out of the way mobile maintaining part 162,162 from film frame 14 ... in the process of lapping of glass plate GSend back to platform 16. Wherein, on platform 16 place stickup next glass plate G film frame 14 byMaintaining part 162,162 ... keep, till standby transmits extremely next time. Maintaining part 162 is at platformBetween movement, with respect to the vertical direction of film frame 14 and the action of horizontal direction as shown in Figure 1Control part 200 control.
In embodiment, guide rail 170 is configured in the both sides of the transfer path of film frame 14, but leadsThe number of rail 170 is not limited to a pair of (2). Also can only be configured in film frame 14 transfer path oneSide. But in the time that guide rail 170 is configured in the both sides of transfer path, can be from relative with guide rail 170Both sides keep glass plate G, therefore can stably keep glass plate G.
Then, the effect of lapping device 10 is as constructed as above described.
(embodiment)
The specification of platform 18,20 is as follows.
Grinding pressure: 2kPa to 25kPa
Grinding milk: supply with cerium oxide is distributed to water from the slurries supply hole of grinding plateGrinding milk
Grinding pad 58: be polyurethane foam system, front has the groove (separation that makes slurries mobile4.5mm, groove width 1.5mm, groove depth 1 is to 5mm)
Grinding pad 60: be flexibel polyurethane system, suede shape, front has flows slurriesGroove (groove depth 1 is to 5mm for separation 4.5mm, groove width 1.5mm)
The thickness of glass plate G: 0.2mm to 0.7mm
The shape of glass plate G: the rectangular glass that exceedes 3000mm on one side
The non-abradant surface of glass plate G: closely sealed by forming the absorption layer of polyurethane system of film body 38Keep
As shown in figure 10, in the front of grinding pad 58 (60), same direction have multiple grooves 59,59 ... Each groove 59 as shown in figure 11, separation a=4.5mm, groove width b=1.5mm,Groove depth c=1 to 5mm.
(the 1st grinding step of platform 18)
Milling time: as requested flatness and need allowance determine (being for example 2 minutes)
The revolution diameter of fixture 52: 150mm
The revolution rotating speed of fixture 52: 110rpm
Grind the swing speed of base station 64: 180mm/min
Grind the swing stroke of base station 64: ± 100mm
The cycle scope of grinding plate 62: ± 80 °
The turning speed of grinding plate 62: 7.4 °/sec
(the 2nd grinding step of platform 20)
Milling time: last 30sec
The revolution diameter of fixture 52: 150mm
The revolution rotating speed of fixture 52: 110rpm
Grind the swing speed of base station 64: 180mm/min
Grind the swing stroke of base station 64: ± 100mm
The cycle scope of grinding plate 62: ± 80 °
The turning speed of grinding plate 62: 0.1 °/sec
More than each specification of 18,20, by these 18,20 abrading glass plates G,Thereby can remove small concavo-convex, the ripple on glass plate G surface.
And the independent like this control revolution action of fixture 52 and the cycle of grinding plate 62 are movingDo, in the milling time of glass plate G, the turning speed of grinding plate 62 (angular speed) is becomeMore low speed, thus the locality that can suppress to produce because of the groove 59 of grinding pad 58,60 is ground notAll. Wherein, the power that above-mentioned revolution action produces becomes removes the small concavo-convex of glass plate G surfacePower, the power that above-mentioned cycle action produces becomes the power of the quality of controlling abradant surface.
Figure 14 is the glass that the Ginding process by existing Ginding process and embodiment is groundThe chart that the roughness of glass plate is standardized and compared. The thick line A of this chart is embodimentGinding process under normalized roughness, fine rule B is the specification under existing Ginding processThe roughness of changing. And the longitudinal axis of this chart by the roughness under existing Ginding processLarge value is standardized as 1.0, and transverse axis is standardized maximum as 10.0. Glass plateRoughness measure use Tokyo Seimitsu Co., Ltd manufacture contact pin type shapometer (ProductName:サーフコム)。
As shown in this chart, according to the Ginding process of embodiment, and existing Ginding process phaseRatio, has improved the roughness of glass plate.
In addition, turning speed when corase grind be preferably 30 °/below sec, more preferably10 °/below sec. When fine grinding, be preferably 10 °/below sec, more preferably 3 °/below sec.
And, while making fixture 52 carry out cycle action, grinding plate 62 to revolve round the sun action,Also can obtain same effect. And, be not limited to cycle, in spinning movement, in grindingThe angular speed of rotation is changed on way, also can obtain same effect. Further, above-mentioned angular speedChange is not limited to from a high speed to low speed, also can change at a high speed from low speed.
On the other hand, in the lapping device 10 of embodiment, for improving the production of glass plate GRate, will be by maintaining part 162,162 ... and the conveyer of pair of guide rails 170,170 formations150 are arranged on lapping device 10. And, when the grinding of the glass plate G in grinding stepBetween in (comprising the time that film frame 14 is installed to fixture 52), film frame 14 has been sent to platform18 maintaining part 162 is sent back to platform 16 along pair of guide rails 170,170.
By the milling time of utilizing like this glass plate G, maintaining part 162 is sent back to from platform 18Platform 16, can utilize milling time to make maintaining part 162 keep having pasted the film frame of next glass plate G14. And, after the grinding of last glass plate G finishes, can will paste next glass at onceThe film frame 14 of plate G is sent to platform 18 by maintaining part 162.
And, utilize the milling time of the glass plate G of platform 20, film frame 14 is transmitted from platform 18The maintaining part 162 that has arrived platform 20 is sent back to platform 18 from platform 20. So, can utilizeState milling time, make the standby on platform 18 of above-mentioned maintaining part 162. And, finish at platform 18After grinding step, can at once film frame 14 be sent to platform by above-mentioned maintaining part 162 from platform 1820. In addition, by above-mentioned maintaining part 162 from platform 20 sends back to platform 18, make maintaining part 162Move to the retreating position shown in the double dot dash line of Fig. 8. So, maintaining part 162 not withGrinding pad 60 is sent back to intrusively.
,, according to the Ginding process that has used conveyer 150, in milling time, can implementBy maintaining part 162 from platform 18 send back to platform 16 operation, make maintaining part 162 keep having pastedThe operation of the film frame 14 of next glass plate G and maintaining part 162 is sent back to platform 18 from platform 20Operation, therefore and make fixture between platform 18 and platform 16, come and go mobile existing Ginding processCompare, can significantly improve the productivity ratio of glass plate G.
On the other hand, in embodiment, film frame 14 forms corresponding to the shape of glass plate GFor rectangle. And, fixture 52 action of revolving round the sun, and grinding pad 58 (60) is by be scheduled toAngular range cycle or this cycle and along the swing of the direction of the abradant surface of glass plate GCombination action, make to produce relative motion between glass plate G and grinding pad 58 (60), thereby grindGround glass plate G.
Utilize fixture 52 to make to be greater than the large-scale rectangle glass of 1000mm on one side via film frame 14In plate G rotation and when revolution,, it is large that the operating range of film frame 14 becomes, therefore film frame 14 with respect toInput and the taking-up of fixture 52 need the long period. And, as shown in figure 12, film frame 14 withThe guard shield 174 of guide rail 170 collides.
Therefore, in embodiment, Ginding process is as follows: make as illustrated in fig. 13 large-scale film frame14 (glass plate G) side revolves round the sun centered by revolution center P, makes as illustrated in fig. 4 grinding pad 58 (60)Sidespin returns.
So, the operating range of film frame 14 is compared and is diminished with above-mentioned operating range, therefore canImplement at short notice the input with respect to fixture 52 and the taking-up of film frame 14, and can preventFilm frame 14 collides with the guard shield 174 of guide rail 170. And the operating range of film frame 14 diminishes,Therefore can in the narrow space of lapping device 10 that is provided with multiple posts, beam, transmission be setDevice 150. Further, by making the 14 side revolution of film frame, can obtain the required power of grinding, logicalCross grinding pad 58 (60) sidespins are returned, can control the quality of abradant surface, therefore can prevent grinding pad58 (60) groove is transferred on glass plate G. Further, revolution and such the grinding of cycle can realizedWhen mill action, realize the high efficiency of the delivery time of glass plate G, therefore can improve glassThe productivity ratio of plate G.
And, in embodiment, as shown in figure 15, preferably from the end of film frame 14 to leadingThe configuration with respect to guide rail 170,170 of distance L 2, L3 and the film frame 14 of rail 170,170The ratio (L2/L1, L3/L1) of the length L 1 of the orthogonal direction of direction is 0.28 to 0.35.
So, size and the rigidity of maintaining part 162 (with reference to Fig. 9) can be optimized, and can realize guarantorHold the high-speed cyclic action of portion 162 and the high speed transmission of film frame 14. In addition, above-mentioned optimization refers to,The big or small miniaturization of maintaining part 162 can be made, deflection and the maintaining part 162 of maintaining part 162 can be suppressedVibration. And distance L 2 and L3 can be identical values, also different value.
And sending back in the operation of film frame 14, preferred film frame 14 in the horizontal direction, verticallyOn direction or the incline direction with respect to horizontal direction inclination, send back to.
That is, when film frame 14 is sent back in the horizontal direction, can simplify send back to processing apparatus, shorten giveThe time of returning. That is, glass plate G is polished with horizontal attitude, and therefore film frame 14 is also horizontal attitude.Therefore, after the grinding of glass plate G finishes, as make film frame 14 keep this attitude (maintenance level)Be sent back to, the attitude of film frame 14 can vertically or not tilt, and therefore can shorten the time of sending back to. AndAnd, by film frame 14 in the vertical direction or the incline direction tilting with respect to horizontal direction while sending back to,Can send efficiently the cleaning-drying of the film frame 14 of in-process back to. , the grinding of glass plate GAfter end, film frame 14 is cleaned on platform 26, therefore the water for cleaning at its remained on surfacePoint. By film frame 14 vertically or with respect to horizontal direction is tilted, can make this moisture from film frame 14Flow down, thus can be dried efficiently film frame 14, shorten drying time.
With reference to specific embodiment, the present invention is had been described in detail, but to art technologyPersonnel are apparent, if do not departed from the scope of the present invention and spirit, can carry out various corrections,Change.
The Japanese patent application 2011-056732 of the application based on application on March 15th, 2011,Its content is incorporated herein as reference.
Label declaration
G glass plate
10 lapping devices
12 glass plates are moved into and are used conveyer belt
14 film frames
16 glass plates are pasted platform
18 the 1st grinding tables
20 the 2nd grinding tables
22 glass plates unload leave from office
24 glass plates are taken out of and are used conveyer belt
26 film frame rinsing tables
28 film frame drying tables
30 film frames are sent conveyer belt back to
32 automatic machines
33 arms
34 absorption layers
36 conveyer belts
38 film bodies
40 upper ledges
42 lower frames
43 juts
50 grinding heads
51 main body covers
52 fixtures
54 air chambers
56 main shafts
58 grinding pads
60 grinding pads
62 grinding plates
64 grind base station
65 bearings
66 gear part
67 gears
68 motors
69 guide rails
70 straight moving guides
72 guide rails
74 maintenance consoles
76 maintenance consoles
78 frameworks of slinging
80 through holes
82 sliding frames
84 sliding frame suspenders
86 sling uses disc spring
88 springs of slinging
90 through holes
92 screw jack
98 jets
100 air chambers
102 air supply paths
104 valves
106 air pumps
108 pins
110 heads
112 hooks
114 pins
138 conveyer belts
140 automatic machines
142 arms
144 adsorption heads
146,148 conveyer belts
150,152,154 conveyers
160 guide rails
162 maintaining parts
164 small-sized automatic machines
166 arms
168 guide blocks
170 guide rails
172 feed screws
174 guard shields
200 control parts
204 stage bodies
206 air injection nozzles
208 jack
Claims (6)
1. a Ginding process for plate body, makes that plate body holding member is relative with milling tool to be leaned onClosely, thus grind by above-mentioned milling tool kept by above-mentioned plate body holding member above-mentionedPlate body, wherein, above-mentioned plate body holding member is by pasting the non-abradant surface of plate bodyPlate body is pasted on parts and this plate body is installed and is pasted parts, and keeps above-mentioned plate body, onState milling tool has along a side on the face that the abradant surface of above-mentioned plate body is groundTo multiple grooves, the Ginding process of described plate body is characterised in that,
Above-mentioned plate body is pasted parts and is configured to rectangle,
The independent action of controlling above-mentioned plate body holding member and above-mentioned milling tool, makes above-mentionedThe action of revolving round the sun of plate body holding member, above-mentioned milling tool carries out scope at a predetermined angle and revolvesThe rotation action of returning or carry out the pendulum of this cycle and the direction of the abradant surface along above-mentioned plate bodyMoving combination action, makes above-mentioned tabular by above-mentioned plate body holding member and above-mentioned milling toolBetween body and above-mentioned milling tool, produce relative motion.
2. the Ginding process of plate body according to claim 1, wherein,
The Ginding process of this plate body has following operation:
Paste operation, at the paste position of above-mentioned plate body, by the non-abradant surface of above-mentioned plate bodyPasting above-mentioned plate body pastes on parts;
Plate body transmits operation, by maintaining part, above-mentioned plate body is pasted to parts from above-mentioned stickupPosition is sent to the abrasion site of above-mentioned plate body, wherein, above-mentioned maintaining part be installed into alongThe guide member being configured between above-mentioned paste position and above-mentioned abrasion site moves freely, andBetween above-mentioned paste position and above-mentioned abrasion site, carry out back and forth movement;
Grinding step, is seated in above-mentioned abrasion site above-mentioned plate body being pasted to partsAfter on above-mentioned plate body holding member, be attached to above-mentioned plate body by above-mentioned milling tool grinding stickingPaste the above-mentioned plate body on parts;
Plate body unloads operation, and paste parts from above-mentioned plate body and unload above-mentioned plate body, and fromAbove-mentioned plate body holding member unloads this plate body and pastes parts, or, protect from above-mentioned plate bodyHold parts and unload above-mentioned plate body stickup parts, and paste parts from this plate body and unload above-mentioned plateShape body; And
Send operation back to, on the above-mentioned plate body stickup parts that unloaded above-mentioned plate body are sent back toState paste position,
In above-mentioned grinding step, above-mentioned plate body is pasted to parts and be sent to above-mentioned grinding positionThe above-mentioned maintaining part of putting is sent back to above-mentioned paste position.
3. the Ginding process of plate body according to claim 1, wherein,
The Ginding process of this plate body has following operation:
Paste operation, at the paste position of above-mentioned plate body, by the non-abradant surface of above-mentioned plate bodyPasting above-mentioned plate body pastes on parts;
Plate body transmits operation, by the 1st maintaining part, above-mentioned plate body is pasted to parts from above-mentionedPaste position is sent to the 1st abrasion site of above-mentioned plate body, wherein, and above-mentioned the 1st maintaining partBe installed into along the guide portion being configured between above-mentioned paste position and above-mentioned the 1st abrasion sitePart moves freely, and comes and goes fortune between above-mentioned paste position and above-mentioned the 1st abrasion siteMoving;
The 1st grinding step, is seated in the above-mentioned the 1st and grinds above-mentioned plate body being pasted to partsAfter on the above-mentioned plate body holding member of mill position, grind by the 1st in above-mentioned milling toolTool grinding sticks on above-mentioned plate body and pastes the above-mentioned plate body on parts;
Plate body transmits operation, by the 2nd maintaining part, above-mentioned plate body is pasted to parts from above-mentionedThe 1st abrasion site is sent to the 2nd abrasion site, and wherein, above-mentioned the 2nd maintaining part is installed intoMove along the guide member being configured between above-mentioned the 1st abrasion site and above-mentioned the 2nd abrasion siteMove freely, and come and go fortune between above-mentioned the 1st abrasion site and above-mentioned the 2nd abrasion siteMoving;
The 2nd grinding step, is seated in the above-mentioned the 2nd and grinds above-mentioned plate body being pasted to partsAfter on the above-mentioned plate body holding member of mill position, grind by the 2nd in above-mentioned milling toolTool grinding sticks on above-mentioned plate body and pastes the above-mentioned plate body on parts;
Plate body unloads operation, and paste parts from above-mentioned plate body and unload above-mentioned plate body, and fromAbove-mentioned plate body holding member unloads this plate body and pastes parts, or, protect from above-mentioned plate bodyHold parts and unload above-mentioned plate body stickup parts, and paste parts from this plate body and unload above-mentioned plateShape body; And
Send operation back to, on the above-mentioned plate body stickup parts that unloaded above-mentioned plate body are sent back toState plate body paste position,
In above-mentioned the 1st grinding step, above-mentioned plate body is pasted to parts and be sent to above-mentioned grindingAbove-mentioned the 1st maintaining part of mill position is sent back to above-mentioned paste position, grinds work the above-mentioned the 2ndIn order, above-mentioned plate body is pasted to parts and be sent to the above-mentioned the 2nd of above-mentioned the 2nd abrasion siteMaintaining part is sent back to above-mentioned the 1st abrasion site.
4. the Ginding process of plate body according to claim 2, wherein,
Guide sections part has the pair of guide rails of configured in parallel, by above-mentioned maintaining part this onePaste parts to transmitting above-mentioned plate body between guide rail,
The end of pasting parts from above-mentioned plate body is to the distance (L2, L3) of above-mentioned guide rail and above-mentionedPlate body is pasted the length (L1) of the direction orthogonal with respect to the configuration direction of above-mentioned guide rail of partsRatio be 0.28 to 0.35.
5. the Ginding process of plate body according to claim 3, wherein,
Guide sections part has the pair of guide rails of configured in parallel, by above-mentioned the 1st maintaining part andAbove-mentioned the 2nd maintaining part transmits above-mentioned plate body and pastes parts between this pair of guide rails,
The end of pasting parts from above-mentioned plate body is to the distance (L ' 2) of above-mentioned guide rail and above-mentioned tabularBody is pasted the ratio of the length (L ' 1) of the direction orthogonal with respect to the configuration direction of above-mentioned guide rail of parts0.28 to 0.35.
6. according to the Ginding process of the plate body described in any one of claim 2 to 5, itsIn,
Above-mentioned sending back in operation, by above-mentioned plate body paste parts in the horizontal direction, vertical directionOr the incline direction tilting with respect to horizontal direction is sent back to.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610211050.3A CN105798767B (en) | 2011-03-15 | 2012-03-12 | The Ginding process and lapping device of plate body |
| CN201610211042.9A CN105856061B (en) | 2011-03-15 | 2012-03-12 | The grinding method and grinding device of plate body |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011056732 | 2011-03-15 | ||
| JP2011-056732 | 2011-03-15 | ||
| PCT/JP2012/056308 WO2012124663A1 (en) | 2011-03-15 | 2012-03-12 | Method of polishing plate-shaped body |
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| CN201610211050.3A Division CN105798767B (en) | 2011-03-15 | 2012-03-12 | The Ginding process and lapping device of plate body |
| CN201610211042.9A Division CN105856061B (en) | 2011-03-15 | 2012-03-12 | The grinding method and grinding device of plate body |
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| Publication Number | Publication Date |
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| CN103429383A CN103429383A (en) | 2013-12-04 |
| CN103429383B true CN103429383B (en) | 2016-05-11 |
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| CN201280013296.XA Active CN103429383B (en) | 2011-03-15 | 2012-03-12 | The Ginding process of plate body |
| CN201610211042.9A Active CN105856061B (en) | 2011-03-15 | 2012-03-12 | The grinding method and grinding device of plate body |
| CN201610211050.3A Active CN105798767B (en) | 2011-03-15 | 2012-03-12 | The Ginding process and lapping device of plate body |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610211042.9A Active CN105856061B (en) | 2011-03-15 | 2012-03-12 | The grinding method and grinding device of plate body |
| CN201610211050.3A Active CN105798767B (en) | 2011-03-15 | 2012-03-12 | The Ginding process and lapping device of plate body |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2012124663A1 (en) |
| KR (2) | KR20140010073A (en) |
| CN (3) | CN103429383B (en) |
| TW (1) | TW201247362A (en) |
| WO (1) | WO2012124663A1 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101612928B1 (en) * | 2013-01-04 | 2016-04-15 | 주식회사 엘지화학 | Apparatus and method for mounting glass plate on back pad for polishing |
| JP6357260B2 (en) * | 2016-09-30 | 2018-07-11 | 株式会社荏原製作所 | Polishing apparatus and polishing method |
| IT201600130117A1 (en) | 2016-12-22 | 2018-06-22 | Breton Spa | Machine and method for grinding and / or polishing stone slabs, such as natural or agglomerated stone, ceramic and glass |
| KR102027814B1 (en) * | 2018-05-23 | 2019-10-02 | 주식회사 앤아이윈 | Upper platen of chemical mechanical polishing Equipment of large area glass for display device |
| JP7217202B2 (en) * | 2019-05-31 | 2023-02-02 | 株式会社荏原製作所 | Temperature controller and polisher |
| CN110707670B (en) * | 2019-10-24 | 2020-12-01 | 南方电网科学研究院有限责任公司 | Control method of small-resistance grounding device of transformer substation |
| CN111300240B (en) * | 2020-02-22 | 2021-02-19 | 深圳市盛鸿运科技有限公司 | Steel plate surface treatment equipment and steel plate surface treatment process |
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| JPH10291147A (en) * | 1997-04-21 | 1998-11-04 | Nippon Electric Glass Co Ltd | Method and device for polishing plate glass |
| JP2004034216A (en) * | 2002-07-02 | 2004-02-05 | Tamagawa Machinery Co Ltd | Polishing machine and polishing method |
| JP2004122351A (en) * | 2002-07-31 | 2004-04-22 | Asahi Glass Co Ltd | Method and device for polishing substrate |
| CN101157199A (en) * | 2006-10-06 | 2008-04-09 | 株式会社荏原制作所 | Substrate polishing apparatus and method |
| JP2010034479A (en) * | 2008-07-31 | 2010-02-12 | Shin Etsu Handotai Co Ltd | Polishing method of wafer |
| CN101823223A (en) * | 2009-03-06 | 2010-09-08 | 株式会社Lg化学 | Glass polishing system |
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| US5094037A (en) * | 1989-10-03 | 1992-03-10 | Speedfam Company, Ltd. | Edge polisher |
| WO2001083285A1 (en) * | 2000-05-01 | 2001-11-08 | Honda Giken Kogyo Kabushiki Kaisha | Side panel assembly line |
| DE60230819D1 (en) * | 2002-10-11 | 2009-02-26 | Bando Kiko Co | DEVICE FOR MACHINING WINDOW DISCS |
| JP4654275B2 (en) * | 2008-07-31 | 2011-03-16 | 信越半導体株式会社 | Double-side polishing equipment |
| JP5408788B2 (en) * | 2009-03-06 | 2014-02-05 | エルジー・ケム・リミテッド | Float glass polishing system |
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- 2012-03-12 CN CN201280013296.XA patent/CN103429383B/en active Active
- 2012-03-12 JP JP2013504723A patent/JPWO2012124663A1/en not_active Withdrawn
- 2012-03-12 CN CN201610211042.9A patent/CN105856061B/en active Active
- 2012-03-12 WO PCT/JP2012/056308 patent/WO2012124663A1/en active Application Filing
- 2012-03-12 KR KR1020137024240A patent/KR20140010073A/en not_active Application Discontinuation
- 2012-03-12 CN CN201610211050.3A patent/CN105798767B/en active Active
- 2012-03-12 KR KR1020187016539A patent/KR20180069925A/en active Search and Examination
- 2012-03-15 TW TW101108932A patent/TW201247362A/en unknown
Patent Citations (6)
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|---|---|---|---|---|
| JPH10291147A (en) * | 1997-04-21 | 1998-11-04 | Nippon Electric Glass Co Ltd | Method and device for polishing plate glass |
| JP2004034216A (en) * | 2002-07-02 | 2004-02-05 | Tamagawa Machinery Co Ltd | Polishing machine and polishing method |
| JP2004122351A (en) * | 2002-07-31 | 2004-04-22 | Asahi Glass Co Ltd | Method and device for polishing substrate |
| CN101157199A (en) * | 2006-10-06 | 2008-04-09 | 株式会社荏原制作所 | Substrate polishing apparatus and method |
| JP2010034479A (en) * | 2008-07-31 | 2010-02-12 | Shin Etsu Handotai Co Ltd | Polishing method of wafer |
| CN101823223A (en) * | 2009-03-06 | 2010-09-08 | 株式会社Lg化学 | Glass polishing system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105856061A (en) | 2016-08-17 |
| WO2012124663A1 (en) | 2012-09-20 |
| KR20140010073A (en) | 2014-01-23 |
| CN105798767B (en) | 2018-01-30 |
| CN105856061B (en) | 2019-06-11 |
| CN105798767A (en) | 2016-07-27 |
| TW201247362A (en) | 2012-12-01 |
| JPWO2012124663A1 (en) | 2014-07-24 |
| KR20180069925A (en) | 2018-06-25 |
| CN103429383A (en) | 2013-12-04 |
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