CN105798767A - Method of polishing plate-shaped body and polishing device - Google Patents
Method of polishing plate-shaped body and polishing device Download PDFInfo
- Publication number
- CN105798767A CN105798767A CN201610211050.3A CN201610211050A CN105798767A CN 105798767 A CN105798767 A CN 105798767A CN 201610211050 A CN201610211050 A CN 201610211050A CN 105798767 A CN105798767 A CN 105798767A
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- China
- Prior art keywords
- mentioned
- plate body
- grinding
- abrasion site
- affixed component
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/48—Flattening arrangements
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
This invention relates to a method of polishing a plate-shaped body, in which a plate-shaped body holding member, which holds the to-be-not-polished surface of a plate-shaped body and undergoes one of orbital revolution and axial rotation, and a polishing tool, which is provided with many grooves along one direction on a surface for polishing the to-be-polished surface of the plate-shaped body and undergoes the other of orbital revolution and axial rotation, are relatively moved toward each other such that the plate-shaped body held by the plate-shaped body holding member is polished by the polishing tool, wherein the movement of orbital revolution and the movement of axial rotation of the plate-shaped body holding member and the polishing tool are controlled independently, such that the angular velocity of the axial rotation is changed during the polishing of the plate-shaped body.
Description
The application is that JIUYUE in 2013 13 days is that submit to, application number be 201280013296.X, denomination of invention be the divisional application of application of " Ginding process of plate body ".
Technical field
The present invention relates to the Ginding process of a kind of plate body and lapping device.
Background technology
Plate body, being particularly applied in the glass plate of liquid crystal display, small concavo-convex, the ripple on its surface is the reason causing image to produce distortion, therefore removes this small concavo-convex, ripple by lapping device.As this lapping device, following lapping device is generally in the public eye: while being pushed against by the glass plate kept on fixture on the grinding pad arranged on grinding plate, make grinding plate and fixture rotate against abrading glass plate.
Lapping device disclosed in patent documentation 1 arranges pliability film body in the bottom of fixture, and to supplying gas-pressurized between film body and fixture, by the pressure of this gas-pressurized, is pressed to by the glass plate that film body is pasted on abrasive cloth and grinds.According to this lapping device, by the gas-pressurized existed in the space between film body and fixture, the pressure being applied to glass plate each several part becomes uniform pressure, the advantage therefore with the minute asperities that can remove glass pane surface while flatly abrading glass plate.
Further, the lapping device of patent documentation 1 supplies serosity (lapping liquid) to grinding plate, makes this serosity ooze out and abrading glass plate from the surface of grinding pad.Patent Document 1 discloses the grinding pad of trough of belt, on the surface of this grinding pad, form multiple grooves of wide 2 to 6mm, deep 1 to 5mm along a direction with the spacing of 5 to 10mm.By this grinding pad, the serosity used in grinding can be discharged to via above-mentioned groove the outside of grinding pad, therefore there is grinding pad and be not likely to produce the advantage that blocking, abrasive power are stable.
Prior art literature
Patent documentation
Patent documentation 1: Japanese Laid-Open 2004-122351 publication
Summary of the invention
The problem that invention to solve
But, there is problems in that in the lapping device of patent documentation 1 groove of grinding pad be transferred to grinding after glass plate abradant surface on, the grinding producing strip decorative pattern is uneven, and this grinding is not local and produces.
The present invention, in view of this situation, its object is to provide the Ginding process of a kind of plate body, can remove the minute asperities on plate body surface, ripple, and the locality produced because of the groove of grinding pad can be suppressed to grind inequality.
Means for solving the above
The present invention is for achieving the above object, the Ginding process of a kind of plate body is provided, make plate body holding member and milling tool relatively close, the above-mentioned plate body kept by above-mentioned plate body holding member is ground thereby through above-mentioned milling tool, wherein, above-mentioned plate body holding member keeps the non-abrasive side of plate body, and carry out revolving round the sun and some action of rotation, above-mentioned milling tool has the multiple grooves along a direction on the face that the abradant surface of above-mentioned plate body is ground, and this milling tool carries out revolving round the sun and another action of rotation, the Ginding process of described plate body is characterised by, the independent above-mentioned revolution action controlling above-mentioned plate body holding member and above-mentioned milling tool and above-mentioned rotation action, in the process of lapping of above-mentioned plate body, change the angular velocity of above-mentioned rotation.
According to the present invention, it is available for removing the concavo-convex main power on the surface of plate body by revolution action, therefore can remove the minute asperities on the surface of plate body, ripple.Further, the quality of the abradant surface of plate body can be controlled by rotation action.In rotation action, when continuing to grind with certain angular velocity, the locality producing to cause because of the groove of milling tool on plate body grinds inequality.Therefore, the present invention, in the grinding of plate body, changes the angular velocity of rotation.So, the grinding pattern of milling tool changes, and the locality caused because of the groove of milling tool therefore can be suppressed to grind inequality.
The Ginding process of the present invention is preferred, has following operation: adhering processes, at the paste position of above-mentioned plate body, the non-abrasive side of above-mentioned plate body is pasted on plate body affixed component；Plate body transmits operation, by maintaining part, above-mentioned plate body affixed component is sent to from above-mentioned paste position the abrasion site of above-mentioned plate body, wherein, the guide member that above-mentioned maintaining part is installed into along being arranged between above-mentioned paste position and above-mentioned abrasion site moves freely, and carries out back and forth movement between above-mentioned paste position and above-mentioned abrasion site；Grinding step, after being installed to by above-mentioned plate body affixed component and being positioned on the above-mentioned plate body holding member of above-mentioned abrasion site, is attached to the above-mentioned plate body on above-mentioned plate body affixed component by above-mentioned milling tool grinding sticking；Plate body unloads operation, unload above-mentioned plate body from above-mentioned plate body affixed component, and unload this plate body affixed component from above-mentioned plate body holding member, or, unload above-mentioned plate body affixed component from above-mentioned plate body holding member, and unload above-mentioned plate body from this plate body affixed component；And send operation back to, the above-mentioned plate body affixed component having unloaded above-mentioned plate body is sent back to above-mentioned paste position, in above-mentioned grinding step, the above-mentioned maintaining part that above-mentioned plate body affixed component has been sent to above-mentioned abrasion site is sent back to above-mentioned paste position.
The Ginding process of the present invention is preferred, has following operation: adhering processes, at the paste position of above-mentioned plate body, the non-abrasive side of above-mentioned plate body is pasted on plate body affixed component；Plate body transmits operation, by the 1st maintaining part, above-mentioned plate body affixed component is sent to from above-mentioned paste position the 1st abrasion site of above-mentioned plate body, wherein, the guide member that above-mentioned 1st maintaining part is installed into along being arranged between above-mentioned paste position and above-mentioned 1st abrasion site moves freely, and carries out back and forth movement between above-mentioned paste position and above-mentioned 1st abrasion site；1st grinding step, after being installed to by above-mentioned plate body affixed component on the above-mentioned plate body holding member being positioned at above-mentioned 1st abrasion site, is attached to the above-mentioned plate body on above-mentioned plate body affixed component by the 1st milling tool grinding sticking in above-mentioned milling tool；Plate body transmits operation, by the 2nd maintaining part, above-mentioned plate body affixed component is sent to the 2nd abrasion site from above-mentioned 1st abrasion site, wherein, the guide member that above-mentioned 2nd maintaining part is installed into along being arranged between above-mentioned 1st abrasion site and above-mentioned 2nd abrasion site moves freely, and carries out back and forth movement between above-mentioned 1st abrasion site and above-mentioned 2nd abrasion site；2nd grinding step, after being installed to by above-mentioned plate body affixed component on the above-mentioned plate body holding member being positioned at above-mentioned 2nd abrasion site, is attached to the above-mentioned plate body on above-mentioned plate body affixed component by the 2nd milling tool grinding sticking in above-mentioned milling tool；Plate body unloads operation, unload above-mentioned plate body from above-mentioned plate body affixed component, and unload this plate body affixed component from above-mentioned plate body holding member, or, unload above-mentioned plate body affixed component from above-mentioned plate body holding member, and unload above-mentioned plate body from this plate body affixed component；And send operation back to, the above-mentioned plate body affixed component having unloaded above-mentioned plate body is sent back to above-mentioned plate body paste position, in above-mentioned 1st grinding step, above-mentioned 1st maintaining part that above-mentioned plate body affixed component has been sent to above-mentioned abrasion site is sent back to above-mentioned paste position, in above-mentioned 2nd grinding step, above-mentioned 2nd maintaining part that above-mentioned plate body affixed component has been sent to above-mentioned 2nd abrasion site is sent back to above-mentioned 1st abrasion site.
In batch lapping device, it is necessary to keep the plate body affixed component having pasted plate body at paste position, and send it to abrasion site.In prior art, make plate body holding member move to paste position from abrasion site, at this, plate body affixed component is installed on plate body holding member, afterwards, plate body holding member is made to move to abrasion site from paste position, thus transmitting plate body affixed component.But, in this transfer approach, the grinding making plate body terminate after plate body holding member reciprocate between abrasion site and paste position, therefore transmitting of plate body affixed component needs tens of seconds to time of several minutes, and the problem of this time productivity ratio on improving plate body produces impact.Further, when becoming large-scale along with the maximization of plate body and plate body affixed component, plate body holding member also becomes large-scale, and its weight can reach tens of ton.The plate body holding member of mobile this weight, requires great effort on apparatus structure, and translational speed also cannot improve very much, and increases operating cost.
Therefore, the present invention is the time needed for the transmission of shortening plate body affixed component, keep being used for and transmit the small, dedicated of plate body affixed component transmitting equipment and being arranged in lapping device, it is provided that the Ginding process of a kind of productivity ratio that improve plate body in this case.That is, the purpose of the present invention is to remove the minute asperities on the surface of plate body, ripple, and suppresses the locality caused because of the groove of grinding pad to grind premised on inequality, and improves the productivity ratio of plate body.
For achieving the above object, the present invention arranges the special transmission equipment being made up of guide member and maintaining part on lapping device, it is provided that a kind of Ginding process employing this special transmission equipment.
Further, for achieving the above object, the present invention arranges the special transmission equipment being made up of guide member, the 1st maintaining part and the 2nd maintaining part on lapping device, it is provided that a kind of Ginding process employing this special transmission equipment.
Above-mentioned maintaining part produces identical function, effect with above-mentioned 1st maintaining part, therefore in above-mentioned Ginding process, the Ginding process of the latter is described.
The Ginding process of the present invention has adhering processes, plate body transmits operation, the 1st grinding step, the 2nd grinding step, plate body unload operation and send operation back to, in the milling time (including the time that plate body affixed component is installed to plate body holding member) of the plate body in the 1st grinding step, the 1st maintaining part that plate body paste section has been sent to the 1st abrasion site is sent back to paste position along guide member.And, in the milling time (including the time that plate body affixed component is installed to plate body holding member) of the plate body in the 2nd grinding step, the 2nd maintaining part that plate body paste section has been sent to the 2nd abrasion site is sent back to the 1st abrasion site along guide member.
Therefore, utilize the milling time of plate body in the 1st grinding step, the 1st maintaining part is sent back to paste position, thus available above-mentioned milling time, make the 1st maintaining part keep having pasted the plate body affixed component of next plate body.Further, after the 1st grinding step terminates, at once the plate body affixed component having pasted next plate body can be sent to the 1st abrasion site by the 1st maintaining part.Further, utilize the milling time of plate body in the 2nd grinding step, the 2nd maintaining part is sent back to the 1st abrasion site, thus available above-mentioned milling time, make the 2nd maintaining part standby at the 1st abrasion site.Further, after the 1st grinding step terminates, at once plate body affixed component can be sent to the 2nd abrasion site by the 2nd maintaining part from the 1st abrasion site.
Therefore, the Ginding process of the present invention can be implemented the 1st maintaining part to be sent back to the operation of paste position from the 1st abrasion site, make maintaining part keep having pasted the operation of the plate body affixed component of next plate body and the 2nd holding member sending back to from the 2nd abrasion site the operation of the 1st abrasion site in milling time, therefore and make the existing Ginding process that plate body holding member reciprocates between abrasion site and paste position compare, the productivity ratio of plate body is greatly improved.
The Ginding process of the plate body of the present invention is preferred, above-mentioned plate body affixed component is configured to rectangle, above-mentioned plate body holding member carries out revolution action, above-mentioned milling tool, by scope cycle at a predetermined angle or this cycle and the combinative movement of the swing in the direction of the abradant surface along above-mentioned plate body, makes generation relative motion between above-mentioned plate body and above-mentioned milling tool.
And, the Ginding process of the plate body of the present invention is preferred, above-mentioned plate body affixed component is configured to rectangle, above-mentioned plate body holding member carries out revolution action, above-mentioned 1st milling tool and above-mentioned 2nd milling tool, by scope cycle at a predetermined angle or this cycle and the combinative movement of the swing in the direction of the abradant surface along above-mentioned plate body, make between above-mentioned plate body and above-mentioned 1st milling tool and produce relative motion between above-mentioned plate body and above-mentioned 2nd milling tool.
Plate body holding member is utilized to make via plate body affixed component while when large-scale rectangular plate body rotation more than 1000mm and revolution, the operating range of plate body affixed component becomes big, and therefore plate body affixed component needs the long period relative to input and the taking-up of plate body holding member.And, the length on the one side of the plate body ground by the Ginding process of the present invention is described above, it is preferably greater than 1000mm, more preferably more than 2000mm (such as 2200 × 2500mm), is further preferably more than 2800 (such as 2800 × 3000mm).
Therefore, it is the plate body holding member revolution of the plate body affixed component making maintenance paste large-scale plate body, makes the Ginding process of milling tool cycle.So, the operating range of plate body affixed component is compared with above-mentioned operating range and is diminished, and therefore can implement plate body affixed component at short notice relative to the input of plate body holding member and taking-up.Further, the operating range of plate body affixed component diminishes, and therefore can arrange special transmission equipment being provided with in the narrow space of lapping device of multiple post, beam.Further, by making maintenance paste the plate body holding member revolution of plate body affixed component of plate body, it is available for removing the power of minute asperities on the surface of plate body.
Further, while making milling tool sidespin return, process of lapping changes angular velocity, thus the apparent condition of milling tool can be prevented, be such as formed at the groove on the surface of milling tool and be transferred to the abradant surface of plate body.Further, while the abrasive action of the cycle of the revolution and milling tool that realize plate body holding member, can realize, by special transmission equipment, the high efficiency that plate body transmits, therefore compared to the prior art can improve the productivity ratio of plate body.
The Ginding process of the plate body of the present invention is preferred, guide sections part has the pair of guide rails of configured in parallel, transmitting above-mentioned plate body affixed component between this pair of guide rails by above-mentioned maintaining part, the ratio (L2/L1, L3/L1) of the length (L1) in the direction orthogonal relative to the configuration direction of above-mentioned guide rail of above-mentioned plate body affixed component and the distance (L2, L3) from the end of above-mentioned plate body affixed component to above-mentioned guide rail is 0.28 to 0.35.
Can optimize according to the present invention, the size of maintaining part and rigidity, it may be achieved the high-speed cyclic action of maintaining part and the High Speed Transfer of plate body affixed component.Additionally, above-mentioned optimization refers to, the size miniaturization of maintaining part can be made, the flexure of maintaining part and the vibration of maintaining part can be suppressed.
The Ginding process of the plate body of the present invention is preferred, guide sections part has the pair of guide rails of configured in parallel, between this pair of guide rails, above-mentioned plate body affixed component is transmitted by above-mentioned 1st maintaining part and above-mentioned 2nd maintaining part, and the ratio of the length (L ' 1) in the orthogonal direction, configuration direction relative to above-mentioned guide rail of above-mentioned plate body affixed component and the distance (L ' 2) from the end of above-mentioned plate body affixed component to above-mentioned guide rail (L ' 2/L ' 1, L ' 3/L ' 1) it is 0.28 to 0.35.
According to the present invention, size and the rigidity of the 1st and the 2nd maintaining part can optimize, it may be achieved the high-speed cyclic action of the 1st and the 2nd maintaining part and the High Speed Transfer of plate body affixed component.Additionally, above-mentioned optimization refers to, the size miniaturization of the 1st and the 2nd maintaining part can be made, can suppress the 1st, the vibration of the flexure of the 2nd maintaining part and the 1st, the 2nd maintaining part.
The Ginding process of the plate body of the present invention is preferred, above-mentioned sends back in operation, by above-mentioned plate body affixed component in the horizontal direction, vertical direction or the incline direction that tilts relative to horizontal direction send back to.
According to the present invention, when plate body affixed component is sent back in the horizontal direction, can simplify send back to processing apparatus, shorten send the time back to.That is, plate body is ground with horizontal attitude, and therefore plate body affixed component is also horizontal attitude.Therefore, after the grinding of plate body terminates, as made plate body affixed component keep this attitude (maintenance level) to be sent back to, then the attitude of plate body affixed component will not vertically or tilt, therefore can shorten the time of sending back to.Further, by plate body affixed component in the vertical direction or relative to horizontal direction tilt incline direction send back to time, can carry out sending back to the cleaning-drying of the plate body affixed component of in-process efficiently.That is, after the grinding of plate body terminates, plate body affixed component is cleaned by, and is therefore used for the moisture cleaned at its remained on surface.By making plate body affixed component vertical or tilting relative to horizontal direction, this moisture can be made to flow down, plate body affixed component can be dried efficiently, shorten drying time.
Invention effect
According to the present invention, the minute asperities on the surface of plate body, ripple can be removed, and the grinding inequality of the locality caused because of the groove of grinding pad can be suppressed.Further, the productivity ratio of plate body can be improved.
Accompanying drawing explanation
Fig. 1 indicates that the top view of the unitary construction of the lapping device of embodiment.
Fig. 2 is fixture and the assembling stereogram of film frame.
Fig. 3 indicates that the side view of the embodiment of grinding head and grinding table.
Fig. 4 is the axonometric chart including representing the portion of partly cut-away of the structure of grinding plate.
Fig. 5 indicates that the film frame enlarged view of a portion relative to the installation constitution of fixture.
Fig. 6 (a) indicates that the figure of the original state making film body expand and to unload lower glass plate from film frame.
Fig. 6 (b) is the figure from the boundary portion blast injection nozzle edge part and film body by blast injection to glass plate.
Fig. 6 (c) is the explanation figure peeling off glass plate from film body.
Fig. 6 (d) is the explanation figure being unloaded completely from film body by glass plate and being placed on stage body.
Fig. 6 (e) unloads film frame from fixture and film frame is positioned over the explanation figure of jack by unloading device.
Fig. 7 indicates that the axonometric chart of the structure of transporter.
What Fig. 8 indicated that the structure of transporter wants portion's amplification stereogram.
Fig. 9 indicates that the top view of the structure of transporter.
Figure 10 is the top view of grinding pad.
Figure 11 is the enlarged view of a portion of grinding pad.
The explanation figure that Figure 12 is film frame to be collided with the guard shield of guide rail.
Figure 13 indicates that the explanation figure of the revolution track of glass plate.
Figure 14 is the chart that the roughness after being ground by glass plate is standardized and compared.
Figure 15 indicates that the top view of the relation of the size of film body and guide rail.
Label declaration
G glass plate
10 lapping devices
12 glass plates are moved into and are used conveyer belt
14 film frames
16 glass plates paste platform
18 the 1st grinding tables
20 the 2nd grinding tables
22 glass plates unload leave from office
24 glass plates take out of uses conveyer belt
26 film frame rinsing tables
28 film frame drying tables
Conveyer belt sent back to by 30 film frames
32 automats
33 arms
34 absorption layers
36 conveyer belts
38 film bodies
40 upper ledges
42 lower frames
43 juts
50 grinding heads
51 main body covers
52 fixtures
54 air chambers
56 main shafts
58 grinding pads
60 grinding pads
62 grinding plates
64 grind base station
65 bearings
66 gear part
67 gears
68 motors
69 guide rails
70 direct acting guides
72 guide rails
74 maintenance consoles
76 maintenance consoles
78 sling framework
80 through holes
82 sliding frames
84 sliding frame suspenders
86 sling uses disc spring
88 sling spring
90 through holes
92 screw jack
98 jets
100 air chambers
102 air feed paths
104 valves
106 air pumps
108 pins
110 heads
112 hooks
114 pins
138 conveyer belts
140 automats
142 arms
144 adsorption heads
146,148 conveyer belt
150,152,154 transporter
160 guide rails
162 maintaining parts
164 small-sized automats
166 arms
168 guide blocks
170 guide rails
172 feed screws
174 guard shields
200 control portions
204 stage bodies
206 air injection nozzles
208 jack
Detailed description of the invention
The preferred implementation of the Ginding process of the plate body of the present invention is described in detail in detail below according to accompanying drawing.
Fig. 1 indicates that the top view of the unitary construction of the lapping device 10 of embodiment.Fig. 2 is fixture 52 and the assembling stereogram of film frame 14.Fig. 3 indicates that the side view of the embodiment of grinding head 50 and grinding table.
Lapping device 10 is by such as while abradant surface more than the large glass plate G that 1000mm, thickness are 0.2mm to 0.7mm is ground to the lapping device of the flatness needed for glass for liquid crystal display plate.
This lapping device 10 mainly has the glass plate of the glass plate G before moving into grinding and moves into conveyer belt 12, the glass plate that glass plate G pastes film frame (plate body affixed component) 14 pastes platform (paste position: adhering processes) 16, 1st grinding table (the 1st abrasion site: the 1st grinding step) 18, 2nd grinding table (the 2nd abrasion site: the 2nd grinding step) 20, the glass plate G ground is unloaded leave from office (plate body unloads operation) 22 from the glass plate that film frame 14 unloads, glass plate takes out of with conveyer belt 24, film frame rinsing table 26, conveyer belt (sending operation back to) 30 sent back to by film frame drying table 28 and film frame.
Hereinafter illustrate for simplifying, glass plate is pasted platform the 16, the 1st grinding table the 18, the 2nd grinding table 20, glass plate unloads leave from office 22, film frame rinsing table 26 and film frame drying table 28 and is recited as platform 16,18,20,22,26,28.
Lapping device 10 is provided with: transporter (special transmission equipment) 150, film frame 14 is sent to platform 18 from platform 16；Transporter 152, is sent to platform 20 by film frame 14 from platform 18；And transporter 154, film frame 14 is sent to platform 22 from platform 20.These transporter 150,152,154 structures are identical, control its action by being uniformly controlled the control portion 200 of lapping device 10, synchronously reciprocate at left and right directions in FIG.
Glass plate G before moving into, by glass plate, the grinding moved into conveyer belt 12 is adsorbed maintenance by the absorption layer 34 of the arm 33 being arranged on automat 32.Further, this glass plate G is moved into from glass plate by the spinning movement of arm 33 and is displaced to conveyer belt 36 with conveyer belt 12, be sent to platform 16 by conveyer belt 36.
On platform 16, the glass plate G before grinding is pasted on film frame 14.This method of attaching is described, film frame 14 is kept by not shown lowering or hoisting gear on platform 16, when glass plate G is positioned at the lower section of film frame 14, film frame 14 declines mobile by lowering or hoisting gear, and the film body 38 with pliability and oneself's adsorptivity of erection on the film frame 14 shown in Fig. 2 is pressed to the non-abrasive side of glass plate G.The non-abrasive side of glass plate G is made to paste on film body 38 by this pushing force.Afterwards, film frame 14 is kept by the transporter 150 of Fig. 1, is sent to the platform 18 of Fig. 3, is installed at this on fixture (plate body holding member) 52 of grinding head 50.Additionally, following film frame 14 refers to that erection has the entirety of film body 38.Further, transporter 150 is described in detail after a while in detail.
As in figure 2 it is shown, film frame 14 is constituted as follows: by the film body 38 of the rectangle of Pasting glass plate G being similarly between the upper ledge 40 of rectangle and lower frame 42 after erection, tightened upper ledge 40 and lower frame 42 by not shown bolt.
Grinding head 50 shown in Fig. 3 is then described.Further, the grinding head 50 of platform 18 and grinding head 50 structure of platform 20 are identical, and the label that therefore labelling is identical illustrates.
Grinding head 50 has main body cover 51, is built-in with not shown revolution driving mechanism portion in main body cover 51.This revolution driving mechanism portion is made up of planetary gears portion and motor, the output shaft in this motor-driven planetary gears portion be connected to the main shaft 56 hung down to vertical direction.Further, jockey 52 on this main shaft 56.Therefore, when above-mentioned planetary gears portion is driven, fixture 52 and film frame 14 revolve round the sun (with reference to Figure 13) centered by predetermined revolution center P.
Further, the main body cover 51 shown in Fig. 3 is connected to elevating mechanism 156 via slide block 158.Main body cover 51 is made to lift relative to slide block 158 by this elevating mechanism 156, so that fixture 52 is retreated mobile relative to the circular grinding pad (the 2nd milling tool) 60 of the circular grinding pad (the 1st milling tool) 58 of platform 18 and platform 20, further, with predetermined grinding pressure, the abradant surface of the glass plate G pasted on film frame 14 is pressed to grinding pad 58,60.
In addition it is also possible to unload sliding block 158 from lapping device 10, main body cover 51 and elevating mechanism 156 are directly connected to.
Fig. 4 is the axonometric chart including representing the portion of partly cut-away of the structure of grinding plate 62.Grinding pad 58 as shown in Figure 4, is pasted onto the upper surface of grinding plate 62.This grinding plate 62 is ground base station 64 and supports into by bearing 65 rotatable, and the central shaft of its center of rotation and grinding pad 58 is set on coaxially.Further, arranging gear part 66 in the side of grinding plate 62, this gear part 66 is engaged with the gear 67 rotated by motor 68.Further, gear part 66 is configured to the arc-shaped centered by the central shaft of grinding pad 58.Therefore, by drive motor 68, make grinding pad 58 rotate (rotation) centered by its central shaft.
Further, the pair of guide rails 69,69 that grinding base station 64 is arranged in parallel supports into and moves freely.Make grinding base station 64 come and go the drive division (not shown) of action along guide rail 69,69 by having, make grinding pad 58 swing in the horizontal direction when necessary.The swaying direction of grinding pad 58 can be the direction that the direction of transfer of the transporter 150 with Fig. 1 is orthogonal, it is possible to be the direction parallel with this direction of transfer.That is, as long as make the direction that grinding pad 58 swings in the horizontal direction.
Additionally, the grinding plate 62 of Fig. 4 connects multiple flexible pipe (not shown), for supplying serosity to the dorsal part of grinding pad 58.For making these flexible pipes not be intertwined, the rotation of grinding pad 58 is limited, so that it starts from predetermined reference position with predetermined angular range cycle.The serosity being supplied to the dorsal part of grinding pad 58 from above-mentioned flexible pipe is fed into the front of grinding pad 58 by the serosity supply hole of the inside of through grinding pad 58.
Further, the revolution actions such as the cycle action such as the scope of cycle angle of grinding pad 58, turning speed, the revolution rotating speed of unit interval are controlled by the control portion 200 of Fig. 1 is independent.
The Each part of grinding pad 60 is identical with the structure of above-mentioned grinding pad 58, and at this, the description thereof will be omitted.
On the other hand, as it is shown on figure 3, install direct acting guide 70,70 on the slide block 158 of platform 18.Direct acting guide 70,70 is chimeric with guide rail 72,72.This guide rail 72,72 as indicated by the dashed line in figure 1, configures towards the maintenance console 74 that the main shaft 56 of platform 18, fixture 52 are safeguarded.
Further, as it is shown on figure 3, install direct acting guide 70,70 on the slide block 158 of platform 20 too.Direct acting guide 70,70 is chimeric with guide rail 160,160.This guide rail 160,160 as indicated by the dashed line in figure 1, configures towards the maintenance console 76 that the main shaft 56 of platform 20, fixture 52 are safeguarded.
And, it is possible to unload sliding block 158 from lapping device 10, direct acting guide 70,70 be to be mounted directly on elevating mechanism 156.
Fixture 52 shown in Fig. 2 and Fig. 5 is then described.Fig. 5 indicates that the film frame 14 enlarged view of a portion relative to the installation constitution of fixture 52.
In the upper periphery portion of fixture 52, by the fixing framework 78 of slinging of not shown bolt.The flange part of framework 78 of slinging offers through hole 80,80 at equal intervals with predetermined ..., projection is arranged on the sliding frame suspender 84 of the upper surface of sliding frame 82 (slide-contactframe) as it is shown in figure 5, these through holes 80,80 through from below ....Further, sliding frame suspender 84 is as it is shown in figure 5, through at the spring 88 of slinging of framework 78 and configuration of slinging between with disc spring 86 of slinging, and through slings with the through hole 90 of disc spring 86, is connected to screw jack 92.
Therefore, make screw jack 92 action, resist the force of spring 88 of slinging and sliding frame suspender 84 is pulled upwardly, thus sliding frame 82 is pulled up relative to fixture 52.So, the film frame 14 being detachably arranged on sliding frame 82 is pulled up, and applies predetermined tension force to film body 38.
Fixture 52 is offered oriented air chamber 54 and sprays compressed-air actuated jet 98,98 ....These jets 98,98 ... via the air chamber 100 that the upper surface at fixture 52 is arranged, connect with the air feed path 102 shown in the dotted line on Fig. 3.Air feed path 102 is extended to the outside of grinding head 50 via the not shown swivel joint installed on grinding head 50, is connected to air pump 106 through valve 104.Therefore, when opening valve 104, the compression air from air pump 106 is fed into air chamber 54 via air feed path 102, the air chamber 100 of Fig. 5 and jet 98.So, compressed-air actuated pressure is delivered to glass plate G via film body 38, and by this pressure, the abradant surface of glass plate G is pushed to the grinding pad 58,60 of Fig. 3 and is ground.
It follows that the structure of the handling unit relative to sliding frame 82 of the film frame 14 shown in Fig. 2 and Fig. 5 is described.
On the upper ledge 40 of film frame 14, multiple pins 108,108 ... equally spaced projection is arranged, the big footpath head 110 that the upper end of these pins 108 has engages with the hook 112 fixing in the bottom of sliding frame 82, thus film frame 14 is installed to sliding frame 82.The card of head 110 and hook 112 makes a concerted effort to become strong because of the counteracting force of the film body 38 during by screw jack 92 jack-up film body 38, and when grinding from the grinding resistance that film body 38 is subject to, head 110 will not come off from hook 112.
The grinding of glass plate G is as shown in Figure 3, by transporter 150, the film frame 14 having pasted glass plate G is sent to platform 18 from platform 16, after platform 18 has ground the abradant surface of glass plate G, by transporter 152, the film frame 14 having pasted glass plate G is sequentially transmitted platform 20 from platform 18, the abradant surface of abrading glass plate G on platform 20, so implements with 2 stages.Further, after terminating the grinding of glass plate G on platform 20, film frame 14 unloads from fixture 52 at this, is sent to platform 22 by transporter 154.Additionally, grinding table can be one according to purposes difference, it is possible to be more than two.Consider efficiency, cost, it is preferable that there are rough grinding and two platforms of finish grinding, but according to circumstances different, it is possible to it is further added by finish grinding to improve quality.
The method unloading film frame 14 from fixture 52 is, first makes the screw jack 92 shown in Fig. 5 to the action of lax direction, eliminates the tension force of film body 38.Then, make film frame 14 slide relative to fixture 52, unload head portion 110 from hook 112.So, film frame 14 is unloaded from fixture 52.
On the other hand, on the platform 22 shown in Fig. 1, unload the glass plate G terminated after grinding from the film frame 14 transmitted by transporter 154.The glass plate G unloaded is transmitted by conveyer belt 138, and is adsorbed by the adsorption head 144 installed on the arm 142 of automat 140, moves to glass plate by the action of automat 140 and takes out of with conveyer belt 24, takes out of the outside of lapping device 10.
Fig. 6 (a) to 6 (d) represent on platform 22 implement, by the glass plate G the ground operation unloaded from film frame 14.Additionally, in Fig. 6 (a) to 6 (d), describe after unloading lower glass plate G from film frame 14, unload the example of film frame 14 from fixture 52, but as mentioned above, it is possible to after unloading film frame 14 from fixture 52, unload lower glass plate G from film frame 14.
As shown in Fig. 6 (a), when fixture 52 is positioned at the top of the stage body 204 of setting on platform 22, supplies air via air feed path 102 to air chamber 54, make film body 38 expand.This state is the glass plate G original state unloaded.In this state, glass plate G and film body 38 produce relative offset, and want to recover smooth elastic force by glass plate G, it is easy to unloaded from film body 38 by glass plate G.That is, in prior art because of mandatory unload lower glass plate G and make equipment produce burden unload operation, become prone to carry out by making film body 38 expand.
For shortening the activity duration unloading operation, enumerate other embodiments.As shown in Fig. 6 (b), after the operation of Fig. 6 (a), the multiple blast injection nozzles 206,206 being oppositely disposed from the edge part of glass plate G are by the boundary portion the blast injection edge part to glass plate G and film body 38.So, as shown in Fig. 6 (c), glass plate G is peeled off from film body 38.The absorption affinity of film body 38 declines because of compression air, and therefore glass plate G is prone to unload from film body 38.Additionally, also alternative compression air and spray water, and simultaneously injection water and compression air time also can obtain same effect.Additionally, eliminate nozzle 206 in Fig. 6 (c).
Fig. 6 (d) represents that glass plate G unloads and be placed on the state stage body 204 from film body 38 completely.Afterwards, glass plate G is transmitted by the conveyer belt 138 shown in Fig. 1, and, move to glass plate by automat 140 and take out of with conveyer belt 24, take out of the outside of lapping device 10.
On the other hand, as shown in Fig. 6 (d), after glass plate G unloads completely from film body 38, then as shown in Fig. 6 (e), by unloading device, film frame 14 is unloaded from fixture 52, film frame 14 is placed on jack 208,208.This film frame 14 is sent to film frame rinsing table 26 by the conveyer belt 146 shown in Fig. 1.
The film frame 14 being sent to platform 26 is washed with water at this.Clean the film frame 14 terminated and be sent to platform 28 by conveyer belt 148, be heated at this and dry.Further, the dry film frame 14 terminated is sent conveyer belt 30 back to by film frame and is sent to platform 16, again for the stickup of glass plate G.
Then, with reference to Fig. 7, Fig. 8 and Fig. 9, transporter 150 (152,154) is described.Fig. 7,8 and 9 indicate that respectively transporter 150 (152,154) structure axonometric chart, want portion's amplification stereogram, top view.
Transporter 150 has 4 maintaining parts 162,162 of the jut 43 in four corners being held from below being arranged on film frame 14 ....These maintaining parts 162,162 ... be arranged between platform 16 and platform 18 formed film frame 14 transmit path both sides, be connected to the axle 166 of small-sized automat 164.This axle 166 is driven to vertical direction and horizontal direction, thus driving maintaining part 162 to vertical direction and horizontal direction by small-sized automat 164.Additionally, the maintaining part 162 transmitting film frame 14 from platform 16 to platform 18 is the 1st maintaining part, the maintaining part 162 transmitting film frame 14 from platform 18 to platform 20 is the 2nd maintaining part.
Further, as shown in Figure 8, in the bottom fixed guide blocks 168 of small-sized automat 164, this guide block 168 is chimeric with the guide rail (guide member) 170,170 transmitting both sides, path being arranged in film frame 14.Further, guide block 168 screws togather with the feed screw 172 of the feed screw device along guide rail 170 configuration.So, the film frame 14 maintaining part 162,162 by transporter 150 (152,154) of glass plate G has been pasted ... keep, be sent to platform 18 from platform 16.And, by maintaining part 162,162 ... decline shift action, it is possible to will be delivered to the film frame 14 of platform 18 and be placed on the grinding pad 58 of platform 18, afterwards, by maintaining part 162,162 ... the rotational action of horizontal direction, maintaining part 162,162 can be made ... keep out of the way movement from film frame 14.Further, the maintaining part 162,162 of movement is kept out of the way from film frame 14 ... send back to platform 16 in the process of lapping of glass plate G.Wherein, the film frame 14 having pasted next glass plate G platform 16 placed is by maintaining part 162,162 ... keep, standby to transmitting next time.The maintaining part 162 movement between platform, control relative to the action control portion 200 as shown in Figure 1 of the vertical direction of film frame 14 and horizontal direction.
In embodiments, guide rail 170 is arranged in the both sides transmitting path of film frame 14, but the number of guide rail 170 is not limited to a pair (2).Also the side transmitting path of film frame 14 can be only arranged in.But when guide rail 170 is arranged in the both sides transmitting path, it is possible to keep glass plate G from the both sides relative with guide rail 170, therefore can stably keep glass plate G.
Then, the effect of lapping device 10 as constructed as above is described.
(embodiment)
The specification of platform 18,20 is as follows.
Grinding pressure: 2kPa to 25kPa
Grinding milk: supply the grinding milk being distributed to water by cerium oxide from the serosity supply hole of grinding plate
Grinding pad 58: for polyurethane foam system, front has the groove (separation 4.5mm, groove width 1.5mm, groove depth 1 to 5mm) making serosity flow
Grinding pad 60: for flexibel polyurethane system, suede shape, front has the groove (separation 4.5mm, groove width 1.5mm, groove depth 1 to 5mm) making serosity flow
The thickness of glass plate G: 0.2mm to 0.7mm
The shape of glass plate G: more than the rectangular glass of 3000mm
The non-abrasive side of glass plate G: by constituting the closely sealed maintenance of absorption layer of the polyurethane of film body 38
As shown in Figure 10, in the front of grinding pad 58 (60), there is in same direction multiple groove 59,59 ....Each groove 59 as shown in figure 11, separation a=4.5mm, groove width b=1.5mm, groove depth c=1 to 5mm.
(the 1st grinding step of platform 18)
Milling time: as requested flatness and need allowance determine (being such as 2 minutes)
The revolution diameter of fixture 52: 150mm
The revolution rotating speed of fixture 52: 110rpm
Grind the swing speed of base station 64: 180mm/min
Grind the swing stroke of base station 64: ± 100mm
The cycle scope of grinding plate 62: ± 80 °
The turning speed of grinding plate 62: 7.4 °/sec
(the 2nd grinding step of platform 20)
Milling time: last 30sec
The revolution diameter of fixture 52: 150mm
The revolution rotating speed of fixture 52: 110rpm
Grind the swing speed of base station 64: 180mm/min
Grind the swing stroke of base station 64: ± 100mm
The cycle scope of grinding plate 62: ± 80 °
The turning speed of grinding plate 62: 0.1 °/sec
It is above each specification of 18,20, by these 18,20 abrading glass plate G, thus the minute asperities on glass plate G surface, ripple can be removed.
And, the cycle action of the so independent revolution action controlling fixture 52 and grinding plate 62, the locality produced because of the groove 59 of grinding pad 58,60 in the milling time of glass plate G, the turning speed (angular velocity) of grinding plate 62 is changed to low speed, thus can be suppressed to grind inequality.Wherein, the power that above-mentioned revolution action produces becomes the power of the minute asperities removing glass plate G surface, and the power that above-mentioned cycle action produces becomes the power of the quality controlling abradant surface.
Figure 14 is the chart that the roughness of the glass plate ground by the Ginding process of existing Ginding process and embodiment is standardized and compared.The thick line A of this chart is the normalized roughness under the Ginding process of embodiment, and fine rule B is the normalized roughness under existing Ginding process.Further, the maximum of the roughness under existing Ginding process is standardized by the longitudinal axis of this chart as 1.0, and maximum is standardized by transverse axis as 10.0.The roughness of glass plate measures the contact pin type shapometer (ProductName: サ Off U system) using Tokyo Seimitsu Co., Ltd to manufacture.
As indicates, the Ginding process according to embodiment, compare with existing Ginding process, improve the roughness of glass plate.
Additionally, turning speed is preferably 30 °/below sec when corase grind, more preferably 10 °/below sec.10 °/below sec it is preferably, more preferably 3 °/below sec during fine grinding.
Further, make fixture 52 carry out cycle action, grinding plate 62 is when carrying out revolution action, it is possible to obtain same effect.Further, it is not limited to cycle, in spinning movement, changes, grinding midway, the angular velocity rotated, it is possible to obtain same effect.Further, the change of above-mentioned angular velocity is not limited to from a high speed to low speed, it is possible to be changed at a high speed from low speed.
On the other hand, in the lapping device 10 of embodiment, for improve glass plate G productivity ratio, will by maintaining part 162,162 ... and pair of guide rails 170,170 constitute transporter 150 be arranged on lapping device 10.Further, in the milling time (including the time that film frame 14 is installed to fixture 52) of the glass plate G in grinding step, the maintaining part 162 that film frame 14 has been sent to platform 18 is sent back to platform 16 along pair of guide rails 170,170.
By utilizing the milling time of glass plate G that from platform 18, maintaining part 162 is sent back to platform 16 like this, available milling time makes maintaining part 162 keep having pasted the film frame 14 of next glass plate G.Further, after the grinding of previous glass plate G terminates, at once the film frame 14 having pasted next glass plate G can be sent to platform 18 by maintaining part 162.
Further, utilize the milling time of the glass plate G of platform 20, the maintaining part 162 that film frame 14 has been sent to platform 20 from platform 18 is sent back to platform 18 from platform 20.So, available above-mentioned milling time, make above-mentioned maintaining part 162 standby on platform 18.Further, after platform 18 terminates grinding step, at once film frame 14 can be sent to platform 20 by above-mentioned maintaining part 162 from platform 18.Additionally, before above-mentioned maintaining part 162 is sent back to platform 18 from platform 20, make maintaining part 162 move to the retreating position shown in the double dot dash line of Fig. 8.So, maintaining part 162 is not sent back to intrusively with grinding pad 60.
Namely, according to the Ginding process employing transporter 150, can implement maintaining part 162 to be sent back to the operation of platform 16 from platform 18, make maintaining part 162 keep having pasted the operation of the film frame 14 of next glass plate G and maintaining part 162 sending back to from platform 20 operation of platform 18 in milling time, therefore, compared with the existing Ginding process making fixture reciprocate between platform 18 and platform 16, the productivity ratio of glass plate G can be greatly improved.
On the other hand, in embodiments, film frame 14 is formed as rectangle corresponding to the shape of glass plate G.And, fixture 52 carries out revolution action, and grinding pad 58 (60) is by the combinative movement of swing in direction with predetermined angular range cycle or this cycle and the abradant surface along glass plate G, make generation relative motion between glass plate G and grinding pad 58 (60), thus abrading glass plate G.
Utilizing fixture 52 to make via film frame 14 while when large-scale rectangular glass G rotation more than 1000mm and revolution, the operating range of film frame 14 becomes big, therefore the input relative to fixture 52 of film frame 14 and taking-up need the long period.Further, as shown in figure 12, film frame 14 collides with the guard shield 174 of guide rail 170.
Therefore, Ginding process is as follows in embodiments: makes large-scale film frame 14 (glass plate G) side revolve round the sun centered by revolution center P as illustrated in fig. 13, makes grinding pad 58 (60) sidespin return as illustrated in fig. 4.
So, the operating range of film frame 14 is compared with above-mentioned operating range and is diminished, and therefore can implement the input relative to fixture 52 and the taking-up of film frame 14 at short notice, and can prevent the guard shield 174 of film frame 14 and guide rail 170 from colliding.Further, the operating range of film frame 14 diminishes, therefore, it is possible to arrange transporter 150 being provided with in the narrow space of lapping device 10 of multiple post, beam.Further, by making film frame 14 side revolve round the sun, can obtain and grind required power, by making grinding pad 58 (60) sidespin return, the quality of abradant surface can be controlled, the groove of grinding pad 58 (60) therefore can be prevented to be transferred on glass plate G.Further, can while realizing revolution and the such abrasive action of cycle, it is achieved the high efficiency of the delivery time of glass plate G, therefore can improve the productivity ratio of glass plate G.
And, in embodiments, as shown in figure 15, it is preferable that the ratio (L2/L1, L3/L1) relative to the configuration orthogonal length L1 in direction in direction of guide rail 170,170 and the end from film frame 14 to the distance L2 of guide rail 170,170, L3 of film frame 14 is 0.28 to 0.35.
So, the size of maintaining part 162 (with reference to Fig. 9) and rigidity can optimize, it may be achieved the high-speed cyclic action of maintaining part 162 and the High Speed Transfer of film frame 14.Additionally, above-mentioned optimization refers to, the size miniaturization of maintaining part 162 can be made, the flexure of maintaining part 162 and the vibration of maintaining part 162 can be suppressed.Further, distance L2 and L3 can be identical value, it is possible to be different value.
Further, in the operation sending film frame 14 back to, it is preferable that film frame 14 in the horizontal direction, vertical direction or relative to horizontal direction tilt incline direction on send back to.
That is, when film frame 14 being sent back in the horizontal direction, can simplify send back to processing apparatus, shorten send the time back to.That is, glass plate G is ground with horizontal attitude, and therefore film frame 14 is also horizontal attitude.Therefore, after the grinding of glass plate G terminates, as made film frame 14 keep this attitude (maintenance level) to be sent back to, then the attitude of film frame 14 will not vertically or tilt, therefore can shorten the time of sending back to.Further, by film frame 14 in the vertical direction or relative to horizontal direction tilt incline direction send back to time, can carry out sending back to the cleaning-drying of the film frame 14 of in-process efficiently.That is, after the grinding of glass plate G terminates, film frame 14 is cleaned by platform 26, is therefore used for the moisture cleaned at its remained on surface.By making film frame 14 vertical or tilting relative to horizontal direction, this moisture can be made to flow down from film frame 14, thus can efficiently desciccator diaphragm frame 14, shorten drying time.
With reference to specific embodiment, the present invention is described in detail, but will be apparent to persons skilled in the art, as without departing from scope and spirit of the present invention, various correction, change can be carried out.
The Japanese patent application 2011-056732 that the application applied for based on March 15th, 2011, its content is as with reference to being incorporated herein.
Claims (9)
1. a Ginding process for plate body, has following operation:
Adhering processes, at the paste position of plate body, pastes the non-abrasive side of above-mentioned plate body on plate body affixed component；
Plate body transmits operation, by above-mentioned plate body affixed component being sent to above-mentioned abrasion site from above-mentioned paste position towards the maintaining part of abrasion site, wherein, the above-mentioned maintaining part towards abrasion site is installed into and moves freely along the guide member being arranged between above-mentioned paste position and above-mentioned abrasion site, and between above-mentioned paste position and above-mentioned abrasion site, carry out back and forth movement, there is the milling tool of the abradant surface grinding above-mentioned plate body at above-mentioned abrasion site；
Grinding step, after being installed to by above-mentioned plate body affixed component and being located on the plate body holding member of above-mentioned abrasion site, is attached to the above-mentioned plate body on above-mentioned plate body affixed component by above-mentioned milling tool grinding sticking；
Plate body unloads operation, unload above-mentioned plate body from above-mentioned plate body affixed component, and unload this plate body affixed component from above-mentioned plate body holding member, or, unload above-mentioned plate body affixed component from above-mentioned plate body holding member, and unload above-mentioned plate body from this plate body affixed component；And
Send operation back to, the above-mentioned plate body affixed component having unloaded above-mentioned plate body sent back to above-mentioned paste position,
The Ginding process of above-mentioned plate body is characterised by,
In above-mentioned grinding step, the independent action controlling above-mentioned plate body holding member and above-mentioned milling tool, above-mentioned plate body holding member is made to carry out revolution action, above-mentioned milling tool carries out the rotation action of scope cycle at a predetermined angle or carries out the combinative movement of this cycle and the swing in the direction of the abradant surface along above-mentioned plate body, makes generation relative motion between above-mentioned plate body and above-mentioned milling tool by above-mentioned plate body holding member and above-mentioned milling tool.
2. the Ginding process of plate body according to claim 1, wherein,
In above-mentioned grinding step, the above-mentioned maintaining part towards abrasion site that above-mentioned plate body affixed component has been sent to above-mentioned abrasion site is sent back to above-mentioned paste position.
3. the Ginding process of plate body according to claim 1, wherein,
Above-mentioned plate body unloads operation and includes following operation:
The operation of above-mentioned plate body affixed component is unloaded from above-mentioned plate body holding member；
Plate body transmits operation, above-mentioned plate body affixed component is sent to above-mentioned plate body from above-mentioned abrasion site unloads leave from office by unloading the maintaining part of leave from office towards plate body, above-mentioned unload, towards plate body, the guide member that the maintaining part of leave from office is installed into along being arranged in above-mentioned abrasion site and above-mentioned plate body unloads between leave from office and move freely, and unload at above-mentioned abrasion site and above-mentioned plate body and between leave from office, carry out back and forth movement；And
The operation of above-mentioned plate body is unloaded from above-mentioned plate body affixed component.
4. a Ginding process for plate body, has following operation:
Adhering processes, at the paste position of plate body, pastes the non-abrasive side of above-mentioned plate body on plate body affixed component；
Plate body transmits operation, by above-mentioned plate body affixed component being sent to above-mentioned 1st abrasion site from above-mentioned paste position towards the maintaining part of the 1st abrasion site, wherein, the guide member that the above-mentioned maintaining part towards the 1st abrasion site is installed into along being arranged between above-mentioned paste position and above-mentioned 1st abrasion site moves freely, and between above-mentioned paste position and above-mentioned 1st abrasion site, carry out back and forth movement, there is the 1st milling tool of the abradant surface grinding above-mentioned plate body at above-mentioned 1st abrasion site；
1st grinding step, after being installed to by above-mentioned plate body affixed component on the plate body holding member being located at above-mentioned 1st abrasion site, is attached to the above-mentioned plate body on above-mentioned plate body affixed component by above-mentioned 1st milling tool grinding sticking；
2nd plate body transmits operation, by above-mentioned plate body affixed component being sent to above-mentioned 2nd abrasion site from above-mentioned 1st abrasion site towards the maintaining part of the 2nd abrasion site, wherein, the guide member that the above-mentioned maintaining part towards the 2nd abrasion site is installed into along being arranged between above-mentioned 1st abrasion site and above-mentioned 2nd abrasion site moves freely, and between above-mentioned 1st abrasion site and above-mentioned 2nd abrasion site, carry out back and forth movement, there is the 2nd milling tool of the abradant surface grinding above-mentioned plate body at above-mentioned 2nd abrasion site；
2nd grinding step, after being installed to by above-mentioned plate body affixed component on the plate body holding member being located at above-mentioned 2nd abrasion site, is attached to the above-mentioned plate body on above-mentioned plate body affixed component by above-mentioned 2nd milling tool grinding sticking；
Plate body unloads operation, unload above-mentioned plate body from above-mentioned plate body affixed component, and unload this plate body affixed component from above-mentioned plate body holding member, or, unload above-mentioned plate body affixed component from above-mentioned plate body holding member, and unload above-mentioned plate body from this plate body affixed component；And
Send operation back to, the above-mentioned plate body affixed component having unloaded above-mentioned plate body sent back to above-mentioned paste position,
The Ginding process of above-mentioned plate body is characterised by,
In above-mentioned 1st grinding step and above-mentioned 2nd grinding step, the independent action controlling above-mentioned plate body holding member and above-mentioned 1st milling tool and above-mentioned 2nd milling tool, above-mentioned plate body holding member is made to carry out revolution action, above-mentioned 1st milling tool and above-mentioned 2nd milling tool carry out the rotation action of scope cycle at a predetermined angle or carry out the combinative movement of this cycle and the swing in the direction of the abradant surface along above-mentioned plate body, generation relative motion between above-mentioned plate body and above-mentioned 1st milling tool and above-mentioned 2nd milling tool is made by above-mentioned plate body holding member and above-mentioned 1st milling tool and above-mentioned 2nd milling tool.
5. the Ginding process of plate body according to claim 4, wherein,
In above-mentioned 1st grinding step and above-mentioned 2nd grinding step, the above-mentioned maintaining part towards the 1st abrasion site that above-mentioned plate body affixed component has been sent to above-mentioned 1st abrasion site is sent back to above-mentioned paste position, the above-mentioned maintaining part towards the 2nd abrasion site that above-mentioned plate body affixed component has been sent to above-mentioned 2nd abrasion site is sent back to above-mentioned 1st abrasion site.
6. the Ginding process of plate body according to claim 4, wherein,
Above-mentioned plate body unloads operation and includes following operation:
The operation of above-mentioned plate body affixed component is unloaded from above-mentioned plate body holding member；
Plate body transmits operation, above-mentioned plate body affixed component is sent to above-mentioned plate body from above-mentioned 2nd abrasion site unloads leave from office by unloading the maintaining part of leave from office towards plate body, above-mentioned unload, towards plate body, the guide member that the maintaining part of leave from office is installed into along being arranged in above-mentioned 2nd abrasion site and above-mentioned plate body unloads between leave from office and move freely, and unload at above-mentioned 2nd abrasion site and above-mentioned plate body and between leave from office, carry out back and forth movement；And
The operation of above-mentioned plate body is unloaded from above-mentioned plate body affixed component.
7. a lapping device, has:
Glass plate is moved into conveyer belt, moves into the glass plate before grinding；
Glass plate pastes platform, is pasted on film frame by above-mentioned glass plate；
1st grinding table, has the 1st milling tool of the abradant surface grinding above-mentioned glass plate；
2nd grinding table, has the 2nd milling tool of the abradant surface grinding above-mentioned glass plate；
Glass plate unloads leave from office, is unloaded from above-mentioned film frame by the glass plate ground；
Glass plate takes out of uses conveyer belt；
Conveyer belt sent back to by film frame, the above-mentioned film frame having unloaded above-mentioned glass plate sends back to above-mentioned glass plate and pastes platform；
1st maintaining part, is installed into the guide member along being arranged between above-mentioned glass plate stickup platform and above-mentioned 1st grinding table and moves freely, and paste at above-mentioned glass plate and carry out back and forth movement between platform and above-mentioned 1st grinding table；
Plate body holding member, is located at above-mentioned 1st grinding table, installs the above-mentioned film frame having pasted above-mentioned glass plate, and is ground above-mentioned glass plate by above-mentioned 1st milling tool；
2nd maintaining part, is installed into the guide member along being arranged between above-mentioned 1st grinding table and above-mentioned 2nd grinding table and moves freely, and carry out back and forth movement between above-mentioned 1st grinding table and above-mentioned 2nd grinding table；And
Plate body holding member, is located at above-mentioned 2nd grinding table, installs the above-mentioned film frame having pasted above-mentioned glass plate, and is ground above-mentioned glass plate by above-mentioned 2nd milling tool,
Above-mentioned lapping device is characterised by,
There is control portion, above-mentioned control portion independently controls above-mentioned plate body holding member and the action of above-mentioned 1st milling tool and above-mentioned 2nd milling tool, making above-mentioned plate body holding member carry out revolution action, above-mentioned 1st milling tool and above-mentioned 2nd milling tool carry out the rotation action of scope cycle at a predetermined angle or carry out the combinative movement of this cycle and the swing in the direction of the abradant surface along above-mentioned plate body.
8. lapping device according to claim 7, wherein,
Above-mentioned control portion is controlled as follows: when grinding above-mentioned glass plate in above-mentioned 1st grinding table, above-mentioned 1st maintaining part that above-mentioned film frame has been sent to above-mentioned 1st grinding table is sent back to above-mentioned glass plate stickup platform, when above-mentioned 2nd grinding table grinds above-mentioned glass plate, above-mentioned 2nd maintaining part that above-mentioned film frame has been sent to above-mentioned 2nd grinding table is sent back to above-mentioned 1st grinding table.
9. lapping device according to claim 7, wherein,
Guide sections part has the pair of guide rails of configured in parallel, transmits above-mentioned film frame by above-mentioned 1st maintaining part and above-mentioned 2nd maintaining part between this pair of guide rails,
It is 0.28 to 0.35 from the end of above-mentioned film frame to the distance of above-mentioned guide rail relative to the ratio relative to the length in the orthogonal direction, configuration direction of above-mentioned guide rail of above-mentioned film frame.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-056732 | 2011-03-15 | ||
| JP2011056732 | 2011-03-15 | ||
| CN201280013296.XA CN103429383B (en) | 2011-03-15 | 2012-03-12 | The Ginding process of plate body |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201280013296.XA Division CN103429383B (en) | 2011-03-15 | 2012-03-12 | The Ginding process of plate body |
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| CN105798767A true CN105798767A (en) | 2016-07-27 |
| CN105798767B CN105798767B (en) | 2018-01-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610211042.9A Active CN105856061B (en) | 2011-03-15 | 2012-03-12 | The grinding method and grinding device of plate body |
| CN201280013296.XA Active CN103429383B (en) | 2011-03-15 | 2012-03-12 | The Ginding process of plate body |
| CN201610211050.3A Active CN105798767B (en) | 2011-03-15 | 2012-03-12 | The Ginding process and lapping device of plate body |
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| CN201610211042.9A Active CN105856061B (en) | 2011-03-15 | 2012-03-12 | The grinding method and grinding device of plate body |
| CN201280013296.XA Active CN103429383B (en) | 2011-03-15 | 2012-03-12 | The Ginding process of plate body |
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| Country | Link |
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| JP (1) | JPWO2012124663A1 (en) |
| KR (2) | KR20140010073A (en) |
| CN (3) | CN105856061B (en) |
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| WO (1) | WO2012124663A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110707670A (en) * | 2019-10-24 | 2020-01-17 | 南方电网科学研究院有限责任公司 | Transformer substation small-resistance grounding device and control method thereof |
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|---|---|---|---|---|
| KR101612928B1 (en) * | 2013-01-04 | 2016-04-15 | 주식회사 엘지화학 | Apparatus and method for mounting glass plate on back pad for polishing |
| JP6357260B2 (en) * | 2016-09-30 | 2018-07-11 | 株式会社荏原製作所 | Polishing apparatus and polishing method |
| IT201600130117A1 (en) | 2016-12-22 | 2018-06-22 | Breton Spa | Machine and method for grinding and / or polishing stone slabs, such as natural or agglomerated stone, ceramic and glass |
| KR102027814B1 (en) * | 2018-05-23 | 2019-10-02 | 주식회사 앤아이윈 | Upper platen of chemical mechanical polishing Equipment of large area glass for display device |
| JP7217202B2 (en) * | 2019-05-31 | 2023-02-02 | 株式会社荏原製作所 | Temperature controller and polisher |
| CN111300240B (en) * | 2020-02-22 | 2021-02-19 | 深圳市盛鸿运科技有限公司 | Steel plate surface treatment equipment and steel plate surface treatment process |
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- 2012-03-12 CN CN201280013296.XA patent/CN103429383B/en active Active
- 2012-03-12 KR KR1020187016539A patent/KR20180069925A/en active Search and Examination
- 2012-03-12 JP JP2013504723A patent/JPWO2012124663A1/en not_active Withdrawn
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Also Published As
| Publication number | Publication date |
|---|---|
| CN105856061A (en) | 2016-08-17 |
| CN105798767B (en) | 2018-01-30 |
| KR20180069925A (en) | 2018-06-25 |
| CN103429383A (en) | 2013-12-04 |
| KR20140010073A (en) | 2014-01-23 |
| CN103429383B (en) | 2016-05-11 |
| JPWO2012124663A1 (en) | 2014-07-24 |
| TW201247362A (en) | 2012-12-01 |
| WO2012124663A1 (en) | 2012-09-20 |
| CN105856061B (en) | 2019-06-11 |
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