JPH10286759A - 基板の研磨装置 - Google Patents

基板の研磨装置

Info

Publication number
JPH10286759A
JPH10286759A JP11014797A JP11014797A JPH10286759A JP H10286759 A JPH10286759 A JP H10286759A JP 11014797 A JP11014797 A JP 11014797A JP 11014797 A JP11014797 A JP 11014797A JP H10286759 A JPH10286759 A JP H10286759A
Authority
JP
Japan
Prior art keywords
polishing
substrate
top ring
dressing
polishing table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11014797A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10286759A5 (enExample
Inventor
Kenya Ito
賢也 伊藤
Hideo Aizawa
英夫 相澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP11014797A priority Critical patent/JPH10286759A/ja
Priority to US09/058,163 priority patent/US6116994A/en
Publication of JPH10286759A publication Critical patent/JPH10286759A/ja
Publication of JPH10286759A5 publication Critical patent/JPH10286759A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP11014797A 1997-04-11 1997-04-11 基板の研磨装置 Pending JPH10286759A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11014797A JPH10286759A (ja) 1997-04-11 1997-04-11 基板の研磨装置
US09/058,163 US6116994A (en) 1997-04-11 1998-04-10 Polishing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11014797A JPH10286759A (ja) 1997-04-11 1997-04-11 基板の研磨装置

Publications (2)

Publication Number Publication Date
JPH10286759A true JPH10286759A (ja) 1998-10-27
JPH10286759A5 JPH10286759A5 (enExample) 2004-12-24

Family

ID=14528246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11014797A Pending JPH10286759A (ja) 1997-04-11 1997-04-11 基板の研磨装置

Country Status (1)

Country Link
JP (1) JPH10286759A (enExample)

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