JPH10280155A5 - - Google Patents

Info

Publication number
JPH10280155A5
JPH10280155A5 JP1997083733A JP8373397A JPH10280155A5 JP H10280155 A5 JPH10280155 A5 JP H10280155A5 JP 1997083733 A JP1997083733 A JP 1997083733A JP 8373397 A JP8373397 A JP 8373397A JP H10280155 A5 JPH10280155 A5 JP H10280155A5
Authority
JP
Japan
Prior art keywords
cylindrical member
applying
voltage
carbon film
hard carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997083733A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10280155A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9083733A priority Critical patent/JPH10280155A/ja
Priority claimed from JP9083733A external-priority patent/JPH10280155A/ja
Publication of JPH10280155A publication Critical patent/JPH10280155A/ja
Publication of JPH10280155A5 publication Critical patent/JPH10280155A5/ja
Pending legal-status Critical Current

Links

JP9083733A 1997-04-02 1997-04-02 円筒状部材内周面への硬質カーボン膜の形成方法 Pending JPH10280155A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9083733A JPH10280155A (ja) 1997-04-02 1997-04-02 円筒状部材内周面への硬質カーボン膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9083733A JPH10280155A (ja) 1997-04-02 1997-04-02 円筒状部材内周面への硬質カーボン膜の形成方法

Publications (2)

Publication Number Publication Date
JPH10280155A JPH10280155A (ja) 1998-10-20
JPH10280155A5 true JPH10280155A5 (enExample) 2005-02-24

Family

ID=13810734

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9083733A Pending JPH10280155A (ja) 1997-04-02 1997-04-02 円筒状部材内周面への硬質カーボン膜の形成方法

Country Status (1)

Country Link
JP (1) JPH10280155A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5155579B2 (ja) * 2007-03-13 2013-03-06 Hoya株式会社 モールドプレス成形型の製造方法、並びにガラス光学素子の製造方法
JP6583254B2 (ja) 2016-12-27 2019-10-02 日亜化学工業株式会社 非水系二次電池用正極材料、非水系二次電池および非水系二次電池用正極材料の製造方法

Similar Documents

Publication Publication Date Title
EP2233606A3 (en) Plasma discharge apparatus
EP0658918A3 (en) Plasma processing apparatus
TW469534B (en) Plasma processing method and apparatus
EP0997926A3 (en) Plasma treatment apparatus and method
WO2002012587A3 (en) Processing apparatus and cleaning method
JPH10280155A5 (enExample)
JPS61226925A (ja) 放電反応装置
JP2000357683A5 (enExample)
JP2001152335A5 (enExample)
JPH10195635A5 (enExample)
JPH0469465U (enExample)
JPS57131373A (en) Plasma etching device
MY128221A (en) Master medium cleaning method
EP0834593A3 (en) Plasma thin-film forming apparatus and method
JPS5524941A (en) Dry etching apparatus
JP3409881B2 (ja) Rf放電型イオン源
JPS5812339B2 (ja) イオンエツチングホウホウ
JP2002184759A5 (enExample)
JPH07300395A (ja) ダイヤモンド表面吸着水素量の低減方法
JPH11124671A5 (enExample)
JPS629324Y2 (enExample)
JPS5924358Y2 (ja) イオン化装置
JP3769313B2 (ja) イオンプレーティング装置
JPS62171748A (ja) プラズマ処理装置
JPS5776188A (en) Gas plasma etching device