JPS6311560U - - Google Patents
Info
- Publication number
- JPS6311560U JPS6311560U JP10642586U JP10642586U JPS6311560U JP S6311560 U JPS6311560 U JP S6311560U JP 10642586 U JP10642586 U JP 10642586U JP 10642586 U JP10642586 U JP 10642586U JP S6311560 U JPS6311560 U JP S6311560U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- substrate
- film forming
- ion beam
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims 2
- 239000010408 film Substances 0.000 claims 1
- 230000007935 neutral effect Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10642586U JPS6311560U (enExample) | 1986-07-10 | 1986-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10642586U JPS6311560U (enExample) | 1986-07-10 | 1986-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6311560U true JPS6311560U (enExample) | 1988-01-26 |
Family
ID=30981771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10642586U Pending JPS6311560U (enExample) | 1986-07-10 | 1986-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6311560U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100295617B1 (ko) * | 1998-12-23 | 2001-10-26 | 홍상복 | 고진공마그네트론스퍼터링방법 |
-
1986
- 1986-07-10 JP JP10642586U patent/JPS6311560U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100295617B1 (ko) * | 1998-12-23 | 2001-10-26 | 홍상복 | 고진공마그네트론스퍼터링방법 |
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