JPS61206257U - - Google Patents

Info

Publication number
JPS61206257U
JPS61206257U JP8976785U JP8976785U JPS61206257U JP S61206257 U JPS61206257 U JP S61206257U JP 8976785 U JP8976785 U JP 8976785U JP 8976785 U JP8976785 U JP 8976785U JP S61206257 U JPS61206257 U JP S61206257U
Authority
JP
Japan
Prior art keywords
ion source
insulating plate
electrode
heat
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8976785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8976785U priority Critical patent/JPS61206257U/ja
Publication of JPS61206257U publication Critical patent/JPS61206257U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP8976785U 1985-06-14 1985-06-14 Pending JPS61206257U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8976785U JPS61206257U (enExample) 1985-06-14 1985-06-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8976785U JPS61206257U (enExample) 1985-06-14 1985-06-14

Publications (1)

Publication Number Publication Date
JPS61206257U true JPS61206257U (enExample) 1986-12-26

Family

ID=30644156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8976785U Pending JPS61206257U (enExample) 1985-06-14 1985-06-14

Country Status (1)

Country Link
JP (1) JPS61206257U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63221540A (ja) * 1987-03-09 1988-09-14 Tokyo Electron Ltd 電子ビ−ム励起イオン源

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63221540A (ja) * 1987-03-09 1988-09-14 Tokyo Electron Ltd 電子ビ−ム励起イオン源

Similar Documents

Publication Publication Date Title
JPS61206257U (enExample)
JPS6253558U (enExample)
JPS6251648U (enExample)
JPS5912258U (ja) 電子線照射装置
JPS5974659U (ja) イオン注入装置のイオン発生装置
JPH01104638U (enExample)
GB1507087A (en) Extractor ion source
JPS6311560U (enExample)
JPS62193659U (enExample)
JPH0237440U (enExample)
JPS6258855U (enExample)
JPH0379153U (enExample)
JPH0334261U (enExample)
JPS5821949U (ja) イオン源装置
JPS62193661U (enExample)
JPS62135349U (enExample)
JPS61161948U (enExample)
JPH01158640U (enExample)
JPH0574901B2 (enExample)
JPH01152075U (enExample)
JPS63201363U (enExample)
JPH03118600U (enExample)
JPS60193657U (ja) 質量分析装置等用イオン源
JPS6296255U (enExample)
JPS60121252U (ja) 質量分析装置用イオン源