JPH10269519A - Magnetic head and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the magnetic characteristic of the metal magnetic film, which forms a magnetic core, and to obtain a good magnetic reproducing characteristic by allowing the substrate to have a parallel surface parallel to a substrate surface, and a tilted surface tilted with respect to the parallel surface at a prescribed angle, forming magnetic layer on the parallel surface and the top surface of the tilted surface and joining a pair of magnetic core half bodies and the end face of the magnetic layer formed on the tilted surface. SOLUTION: A metal magnetic film is formed on a projected part 4A of a non-magnetic substrate 4 of a magnetic head. The film consists of a parallel section 6A formed on a parallel surface 4B and a tilted section 6B formed on a tilted surface 4C. Moreover, the film has a coil forming groove 6C which forms a coil at an approximate center of the height of the tilted section. Thus, the film is divided in the front and back direction at the two joint surfaces of magnetic core half bodies 2 and 3 and has an exposed front section butting surface 10 and a back section butting surface 11. Moreover, the electromagnetic conversion characteristic is improved by the magnetic layer having a good magnetic characteristic.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head having a magnetic path formed by a metal magnetic film and a method of manufacturing the same.

[0002]

2. Description of the Related Art For example, in a magnetic recording / reproducing apparatus such as a video tape recorder, digital recording for digitizing and recording a signal in order to improve image quality has been promoted. The recording frequency has been increased.

By the way, as magnetic recording density and recording frequency increase, magnetic heads mounted on magnetic recording / reproducing apparatuses are required to have high output in a high frequency range and low noise. . For example, a so-called composite-type metal-in-gap type magnetic head in which a metal magnetic film is formed on a ferrite material, which has been widely used as a conventional magnetic head for a VTR, and then wound, has a large inductance and an output per inductance. Because of the decrease, it is difficult to sufficiently cope with digital image recording that requires a high frequency and a high density because the output is low in a high frequency region.

[0004] Under such circumstances, a so-called thin film type magnetic head manufactured in a thin film forming process is being studied as a magnetic head compatible with high frequency.

As shown in FIG. 15, this thin-film magnetic head includes a pair of magnetic core halves 101 and 102 having a metal magnetic film 100, and a pair of magnetic core halves 101 and 102 via a non-magnetic metal material 103. It is formed by joining the bodies 101 and 102. The magnetic core halves 101 and 102
Includes a non-magnetic substrate 104 and a metal magnetic film 100 formed on the non-magnetic substrate 104. In this magnetic head, the joining surface of the pair of magnetic core halves 101 and 102 is filled with glass 105 or the like. Although not shown, the magnetic head has a thin-film coil formed on a joint surface.

In this magnetic head, the metal magnetic film 100 is formed on an inclined surface 104A formed by cutting out a part of the non-magnetic substrate 104, and is inclined at a predetermined angle with respect to the joint surface. Is formed.

In the magnetic head thus configured, a magnetic gap is formed by abutting a pair of metal magnetic films 100 via a non-magnetic metal material 103. At this time, in this magnetic head, the width between the butted metal magnetic films 100 is the track width. In this magnetic head, the pair of metal magnetic films 100 serves as a magnetic core, and the magnetic core is magnetized when performing recording / reproducing on a magnetic recording medium.

In this magnetic head, a plurality of magnetic core halves 101 and 102 are simultaneously formed in a line in the track width direction. Magnetic core half 1
Nos. 01 and 102 form a metal magnetic film 100 after subjecting a substantially flat substrate to predetermined groove processing, and thereafter,
5 and a coil.

The magnetic head has a plurality of magnetic core halves 101, formed in a line in the track width direction.
It is formed by bonding 102 and then separating it into individual magnetic heads.

In the method of manufacturing such a magnetic head, when forming the metal magnetic film 100, a thin film forming method such as a sputtering method is used as shown in FIG. In this sputtering method, a metal magnetic material constituting the metal magnetic film 100 is used as a target 106, and a substrate 107 is arranged in parallel with the target 106.

From the target 106, metal magnetic particles are scattered by so-called sputtering. At this time, the metal magnetic particles scatter in a direction substantially perpendicular to the plane of the target 106 (indicated by an arrow in FIG. 16).

The substrate 107 serves as the non-magnetic substrate 104 in the plurality of magnetic core halves 101 and 102, and includes a plurality of projections 1 corresponding to the inclined surface 104A.
07A.

When the metal magnetic film 100 is formed, sputtering is performed with the target 106 and the substrate 107 arranged so as to be substantially parallel to each other. As described above, the metal magnetic particles scatter from the target 106 and
Deposit on top. Thereafter, metal magnetic particles are deposited until a predetermined film thickness is obtained, and a metal magnetic film 100 is formed.

[0014]

By the way, in this magnetic head, it is preferable that the metal magnetic film 100 constituting the magnetic core has good magnetic properties, especially good magnetic permeability. In a magnetic layer formed by using the sputtering method, the magnetic permeability depends on the deposition direction of the scattered metal magnetic particles. Therefore, the relationship between the deposition direction of the metal magnetic particles and the magnetic permeability was measured using an experimental device as schematically shown in FIG.

In this experimental apparatus, an experimental target 11
The angle of the experimental substrate 111 with respect to 0 (indicated by θ in FIG. 17) was changed to various values, and a metal magnetic film was formed on the experimental substrate 111. At this time, the experimental target 110
Was used to form a sendust film as a metal magnetic film. Then, the magnetic permeability of the sendust film formed at various angles θ was measured. FIG. 18 shows the relationship between the angle θ thus measured and the magnetic permeability.

As is apparent from FIG. 18, when θ = 0 °, the highest magnetic permeability is exhibited. However, when θ = 20 °, the magnetic permeability is reduced by half compared to when θ = 0 °. When θ = 40 °, the magnetic permeability is further reduced. As described above, there is a close relationship between the deposition direction of the metal magnetic particles and the magnetic permeability, and deposition in the direction perpendicular to the experimental substrate 111 results in high magnetic permeability.

In the above-described magnetic head, in the above-described sputtering method, the substrate 107 is disposed substantially parallel to the target 106. In this case, a portion formed by sputtering on the slope of the projection 107A corresponding to the slope 104A becomes the metal magnetic film 100 in the magnetic head. That is, the metal magnetic film 100 is obliquely opposed to the target 106, and is formed by depositing the metal magnetic particles in the oblique direction. Therefore, in the conventional magnetic head, there is a problem that the magnetic permeability of the metal magnetic film 100 is not good, and the electromagnetic conversion characteristics are poor.

To solve this problem, it is conceivable to arrange the substrate 107 obliquely with respect to the target 106 as shown in FIG. Specifically, the slope of the convex portion 107A corresponding to the slope 104A of the magnetic head is
It is arranged so as to be parallel to the target 106. Thus, the metal magnetic film 100 forming the magnetic core has metal magnetic particles deposited in the vertical direction, and has improved magnetic permeability.

However, as shown in FIG.
When 07 is arranged, each of the plurality of convex portions 107A faces the target 106 at different distances. The fact that the distance from the target is different means that the thickness of the formed metal magnetic film 100 is different depending on the projection 107A. The thickness of the metal magnetic film 100 needs to be strictly controlled and equalized in order to have a track width dimension in the magnetic head.

However, in the case shown in FIG. 19, since the substrate 107 is arranged obliquely with respect to the target 106, it is impossible to make all the metal magnetic films 100 uniform. Was. In addition, for the purpose of mass production, especially when the size of the substrate 107 is increased,
At both ends of the substrate 107, the difference in distance from the target 106 becomes larger. For this reason, this method cannot use a relatively large substrate 107,
Productivity deteriorates.

Therefore, the present invention solves the above-mentioned problems of the conventional magnetic head and the method of manufacturing the same, and improves the magnetic characteristics of the metal magnetic film forming the magnetic core. An object of the present invention is to provide a magnetic head having good recording / reproducing characteristics and a method for manufacturing the same.

[0022]

A magnetic head according to the present invention that has attained the above-mentioned object has a pair of magnetic core halves each having a substrate and a magnetic layer formed on the substrate. A magnetic head in which a magnetic gap is formed by abutting the magnetic layers so as to be opposed to each other with the magnetic layer interposed therebetween, wherein the substrate has a parallel surface parallel to the substrate surface and an inclined surface inclined at a predetermined angle from the parallel surface. At the same time, the magnetic layer is formed on the upper surface of the parallel surface and the inclined surface, and a pair of magnetic core halves joins the end surfaces of the magnetic layer formed on the inclined surface to form a magnetic gap. Things.

In the magnetic head according to the present invention configured as described above, the magnetic layer formed on the parallel plane formed parallel to the substrate has good magnetic characteristics. In this magnetic head, a magnetic core is formed by a magnetic layer having good magnetic properties. For this reason, the magnetic head exhibits good recording and reproducing characteristics because the electromagnetic conversion characteristics of the magnetic core are improved.

On the other hand, in the method of manufacturing a magnetic head according to the present invention which has solved the above-mentioned problems, a pair of magnetic core halves having a substrate and a magnetic layer formed on the substrate are made of a non-magnetic material. A magnetic gap formed by abutting the magnetic layers so as to face each other with a magnetic gap therebetween, wherein the substrate is inclined at a predetermined angle from a parallel surface parallel to the substrate surface and from the parallel surface. The magnetic layer is formed so as to have a tilted surface, and the magnetic layer is formed such that a film forming direction when forming the magnetic layer is perpendicular to the parallel surface. The magnetic gap is formed by abutting the end faces of the magnetic layer.

According to the method of manufacturing a magnetic head according to the present invention as described above, since the parallel surface is perpendicular to the film forming direction, a magnetic film having good magnetic properties is formed on the parallel surface. be able to. In the manufactured magnetic head, the magnetic layer forms a magnetic core. Therefore, according to this method, a magnetic head having a magnetic core having good electromagnetic conversion characteristics can be manufactured.

[0026]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a magnetic head and a method of manufacturing the same according to the present invention will be described in detail with reference to the drawings.

As shown in FIGS. 1 and 2, the magnetic head 1 according to the present invention is formed by joining a pair of magnetic core halves 2 and 3 via a gap material G made of a nonmagnetic material. . The pair of magnetic core halves 2 and 3 include a non-magnetic substrate 4 and
And a metal magnetic film 6 formed on the non-magnetic substrate 4. Also, a pair of magnetic core halves 2,
The coil 3 for excitation or for detecting an induced electromotive voltage is formed at least on one side. In the magnetic head 1, the metal magnetic film 6 forms a magnetic core in a state where the pair of magnetic core halves 2 and 3 are joined at the joining surfaces 2A and 3A via the gap material G. The magnetic head 1 reproduces or reproduces a signal magnetic field recorded on the magnetic recording medium by sliding the magnetic recording medium in a direction indicated by an arrow A in FIG. 1 in a state where the magnetic core halves 2 and 3 are joined. A signal magnetic field is recorded on a magnetic recording medium.

The magnetic head 1 is provided with a contact width regulating groove 8 for adjusting the contact area with the magnetic recording medium. The contact width regulating grooves 8 are formed on both side surfaces of the magnetic head 1 in parallel with the sliding direction A of the magnetic recording medium. Further, in this magnetic head, the sliding surface of the magnetic recording medium has an arc shape in order to adjust the contact state with the magnetic recording medium.

In the magnetic head 1, the metal magnetic film 6
Is formed on the convex portion 4A of the non-magnetic substrate 4 as a thin film.
The convex portion 4A of the non-magnetic substrate 4 has a parallel surface 4B formed so as to be parallel to the bonding surfaces 2A and 3A, and a parallel surface 4B.
B has an inclined surface 4C formed at one end.

Then, the magnetic head 1 has the projections 4
The metal magnetic film 6 is provided on the parallel plane 4B and the inclined plane 4C of A. Therefore, the metal magnetic film 6 has the parallel surface 4B
It consists of a parallel part 6A formed on the upper part and an inclined part 6B formed on the inclined surface 4C. The metal magnetic film 6 has a coil forming groove 6C in which the coil 7 is formed at substantially the center of the height of the inclined portion 6B. For this reason,
The metal magnetic film 6 is formed on the joining surfaces 2A, 3 of the magnetic core halves 2, 3.
A has a front butting surface 10 and a rear butting surface 11 that are divided and exposed in the front-rear direction.

In the magnetic head 1, one magnetic core half 2 and the other magnetic core half 3 are joined so that the end faces of the inclined portion 6B face each other. This allows
A pair of front butting surfaces 10 form a magnetic gap, and a rear butting surface 11 forms a back gap.

In the magnetic head 1, the metal magnetic film 6 is configured such that three metal magnetic layers are stacked via a non-magnetic layer. The magnetic head according to the present invention is not limited to a configuration in which three metal magnetic layers are stacked as shown in the present embodiment. That is, the magnetic head according to the present invention may have, for example, a single-layer metal magnetic thin film, or may have tens of metal magnetic thin films.

In the magnetic core halves 2 and 3, the non-magnetic substrate 4 is made of, for example, a MnO—NiO-based non-magnetic material, but is not limited to this. Calcium titanate, barium titanate, zirconium oxide ( Zirconia), alumina, alumina titanium carbide, SiO ₂ , Zn ferrite, crystallized glass, high hardness glass and the like may be used. The metal magnetic film 6 is made of, for example, Fe-A
It is made of a metallic magnetic material such as an l-Si alloy (Sendust), but is not limited thereto. Fe-Al alloy, Fe-Si-
Co alloy, Fe-Ga-Si alloy, Fe-Ga-Si-
What is necessary is just to consist of crystalline alloys, such as Ru alloy, Fe-Al-Ge alloy, Fe-Ga-Ge alloy, Fe-Si-Ge alloy, Fe-Co-Si-Al alloy, and Fe-Ni alloy. Alternatively, the metal magnetic film 6 is made of Fe, Co, Ni.
Consisting of at least one of the above elements and one or more of the elements P, C, B and Si,
1, Ge, Be, Sn, In, Mo, W, Ti, Mn,
Metal-metalloid amorphous alloys typified by alloys containing Cr, Zr, Hf, Nb, etc .;
It may be made of an amorphous alloy such as a metal-metal amorphous alloy containing a transition metal such as f or Zr and a rare earth element as main components.

Further, in the magnetic head 1, the coils 7 are formed on the pair of magnetic core halves 2 and 3, respectively. The coil 7 has a coil-forming recess 12 formed on the joining surfaces 2A and 3A of the pair of magnetic core halves 2 and 3, and a thin film is formed in the coil-forming recess 12. The coil 7 has one end 7A on the center side thereof connected to the coil connection terminal 13. Then, the coil 7 has a rear abutting surface 11 with the coil connection terminal 13 as a base end.
Is formed so as to draw a circle around the center.

The coil connection terminals 13 formed on the pair of magnetic core halves 2 and 3 are formed in the coil forming recesses 12, and are substantially the center of the coil 7, and are formed on the rear butting surface 11. It is formed in the vicinity. The coil connection terminal 13 is connected to the joint surface 2 of the pair of magnetic core halves 2 and 3.
The heights are adjusted so as to be flush with A and 3A. In this magnetic head 1, when the pair of magnetic core halves 2 and 3 are joined, the pair of coil connection terminals 13 are also joined. This allows
In the magnetic head 1, when the pair of magnetic core halves 2 and 3 are joined, the pair of coils 7 are electrically connected.

In the magnetic head 1, when joining the pair of magnetic core halves 2 and 3, metal diffusion bonding, which will be described in detail later, is used. In this case, a non-magnetic conductive material such as gold is formed on the bonding surfaces 2A and 3A, and they are abutted. As a result, the pair of front butting surfaces 10 are butted via the non-magnetic conductive material to form a magnetic gap. That is, in the magnetic head 1, as the above-mentioned gap material G, a non-magnetic conductive material used in metal diffusion bonding is used.

The other end of the coil 7 on the opposite side is drawn out to the side opposite to the magnetic gap. The other end of the coil 7 is connected to an external connection terminal 14. The external connection terminal 14 is configured by burying a conductive material such as copper in a terminal groove 15 formed in the width direction of the pair of magnetic core halves 2 and 3 with a predetermined depth. . The external connection terminals 14 can be electrically connected to the outside and the coil 7 by being exposed on the side surface of the magnetic head 1. The pair of external connection terminals 14 are formed at different positions on the pair of magnetic core halves 2 and 3 so as not to cause a short circuit when the pair of magnetic core halves 2 and 3 are joined. ing.

In the magnetic head 1 according to the present embodiment configured as described above, when recording a signal on a magnetic recording medium or reproducing a signal magnetic field, the above-described pair of metal magnetic films 6 are joined. The magnetic flux flows through the magnetic core.

Specifically, when a magnetic signal recorded on a magnetic recording medium is reproduced using the magnetic head 1, a signal magnetic field from the magnetic recording medium is applied to the vicinity of the magnetic gap. When the direction of the applied signal magnetic field changes, the direction of the magnetic flux flowing through the magnetic core changes.
As a result, electromagnetic induction occurs in the magnetic head 1, and a predetermined current flows through the coil 7.

When recording a magnetic signal on a magnetic recording medium using the magnetic head 1, a predetermined current is supplied to the coil 7. In the magnetic head 1, a predetermined magnetic flux flows through the magnetic core by the magnetic field generated from the coil 7. As a result, in the magnetic head 1, a leakage magnetic field is generated across the magnetic gap. Magnetic head 1
Records a magnetic signal by applying this leakage magnetic field to a magnetic recording medium.

As described above, in this magnetic head 1,
When recording and reproducing a magnetic signal, a predetermined magnetic flux flows through the magnetic core. In the magnetic head 1, improving the electromagnetic conversion characteristics at the time of recording / reproducing means improving the recording / reproducing characteristics.

In the magnetic head 1, the metal magnetic film 6 has a parallel portion 6A, and a magnetic core is formed by abutting the pair of metal magnetic films 6 via a gap material. The details of the metal magnetic film 6 will be described later.
It is formed using a thin film forming method such as a sputtering method. At this time, the metal magnetic film 6 is formed as a thin film from a direction perpendicular to the parallel surface 4B. Therefore, the metal magnetic film 6
The parallel portion 6A has good magnetic properties, particularly high magnetic permeability.

Thus, in the magnetic head 1, the electromagnetic conversion characteristics of the magnetic core are improved. On the other hand, in the case of the magnetic head as described in the section of the related art, the metal magnetic film forming the magnetic core has a configuration that does not have the parallel portion 6A, and thus the entire magnetic core is transparent. Relatively low magnetic susceptibility. Therefore, in the conventional magnetic head, the electromagnetic conversion characteristics of the magnetic core are not good, and the recording / reproducing characteristics are not good.

Therefore, as shown in FIG. 3, the outputs of the magnetic head 1 shown in the above-described embodiment and the conventional magnetic head were measured and compared. As is apparent from FIG. 3, the magnetic head according to the present embodiment showed better recording and reproducing characteristics than the conventional magnetic head at any frequency without depending on the frequency of the signal.

Next, a method for manufacturing a magnetic head according to the present invention will be described in detail with reference to the drawings. Here, a manufacturing method for manufacturing the above-described magnetic head 1 will be described.

In the magnetic head 1 according to the present embodiment, a plurality of magnetic core halves 2 and 3 are formed on the same substrate. The magnetic head 1 is formed by bonding a pair of the substrates and separating the substrates into individual magnetic heads 1.

First, to manufacture the magnetic head 1,
As shown in FIG. 4, a substantially flat substrate 21 is prepared. This substrate 21 is to be the non-magnetic substrate 4 of the magnetic head 1, and is made of a non-magnetic material such as MnO-NiO. The substrate 21 has, for example, a thickness of about 2 mm and a length and a width of about 30 mm.

Next, as shown in FIG.
The first groove processing is performed on the one side surface 21A of the first groove. In the first groove processing, the first magnetic core forming groove 23 and the second magnetic core forming groove 24 are alternately formed in parallel on the one side surface 21A using a grindstone or the like. The first magnetic core forming groove 23 is for forming a ridge 23A on one side surface 21A of the substrate 21. The second magnetic core forming groove 24 is formed on the ridge 23A, and is for forming the inclined surface 24A and the parallel surface 24B.

Here, the first magnetic core forming groove 23 is not limited to the groove shape, but may be any groove shape capable of forming the ridge 23A. In this case, it is preferable that the first magnetic core forming groove 23 has a depth of 30 μm and a width of 300 μm.

The second magnetic core forming groove 24 forms the inclined surface 24A and the parallel surface 24B so that the inclined angle of the inclined surface 24A is, for example, 45 °. The inclined surface 24A formed here preferably has an inclination angle of about 25 to 60 degrees with respect to the substrate plane, but more preferably about 35 to 50 degrees in consideration of the pseudo gap and track width accuracy. Here, the second magnetic core forming groove 24 is
Preferably, the depth dimension is 10 μm and the width dimension is 150 μm.

Next, as shown in FIG. 6, a metal magnetic film 6 made of the above-described material is formed on the surface of the substrate 21 on which the parallel surface 24B is formed. In this film forming step, for example, a sputtering method is used. In this sputtering method, metal magnetic particles are scattered and formed on one side surface 21A of the substrate 21 using the metal magnetic material constituting the metal magnetic film 6 as described above as a target.

At this time, the scattering direction of the metal magnetic particles is substantially perpendicular to the parallel surface 24B. That is, the parallel portions 6A of the metal magnetic film 6 are formed by depositing the metal magnetic particles scattered from the substantially vertical direction on the parallel surface 24B. Then, the inclined portions 6B of the metal magnetic film 6 are formed by depositing the metal magnetic particles scattered from the oblique direction on the inclined surface 24A.

In this sputtering, the parallel plane 2
Since the metal magnetic particles are scattered in a direction substantially perpendicular to 4B, the one side surface 21A of the substrate 21 and the target are set to be substantially parallel. Thus, in this method, the parallel planes 24B formed in a plurality of lines have substantially the same distance from the target. Therefore, according to this method, the metal magnetic film 6 having a substantially uniform thickness is formed on the parallel surface 24B formed in a plurality of lines by sputtering. At this time, the metal magnetic film 6 is formed such that three layers of metal magnetic materials are laminated via a nonmagnetic layer. This film forming step is performed, for example, by a PVD method such as a magnetron sputtering method or a CV method.
It may be performed by the D method or the like.

Further, the metal magnetic film 6 is not limited to the one having a plurality of metal magnetic layers, but may have a structure composed of a single metal magnetic layer.

In the present embodiment, the metal magnetic film 6 is
In the case of a multi-layer structure, for example, Fe-Al-Si
0.15 μm of alumina was alternately laminated on 5 μm of the alloy (Sendust) to form a structure having three Fe—Al—Si alloy layers. When the metal magnetic film 6 is composed of a plurality of layers, materials such as alumina, SiO _2, and SiO are used alone or as a mixture for the non-magnetic layer. The thickness of the non-magnetic layer needs to be large enough to allow insulation between adjacent metal magnetic layers.

Next, as shown in FIG. 7, a second groove is formed on the surface on which the metal magnetic film 6 is formed in a direction substantially perpendicular to the first magnetic core forming groove 23. In the second groove processing, a separation groove 26 formed to separate the magnetic core into a desired size, and a winding for forming a coil forming recess in each magnetic core separated by the separation groove 26. Wire groove 27
Are formed.

Here, the separation groove 26 is formed by connecting the magnetic core to the substrate 2.
1 is a groove for forming each magnetic core by magnetically separating the magnetic core in the front-rear direction, and forming a closed magnetic path in each magnetic core. Although two separation grooves 26 are formed in the example of FIG. 7, the separation grooves 26 need to be provided by the number of rows of the magnetic core halves 2 and 3 to be formed. The separation groove 26 is formed so as to have a depth dimension such that the metal magnetic film 6 is completely cut in order to magnetically separate the magnetic cores arranged side by side in the front-rear direction. There is. Specifically, the separation groove 26
The depth dimension is 20 μm deeper than the parallel surface 24B, that is, 30 μm. As described above, in this method, the separation groove 26 for completely cutting the metal magnetic film 6 is formed to be shallower than when a conventional magnetic head is manufactured. Therefore, according to this method, the time required for forming the separation groove 26 can be shortened, and the life of the grindstone used for forming the separation groove 26 can be extended.

On the other hand, the winding groove 27 forms a magnetic core having the front butting surface 10 and the rear butting surface 11 and forms the coil forming recess 12 so that the metal magnetic film 6 is not cut. It must be formed with a depth dimension. The shape of the winding groove 27 is determined according to the length of the front butting surface 10 and the back gap 11. Here, the width is about 140 μm, and the length of the front butting surface 10 is about 140 μm. The dimensions are about 300 μm, and the length dimension of the rear butting surface 11 is about 85 μm. The winding groove 27 may have such a depth that the metal magnetic film 6 is not cut. However, if the winding groove 27 is too deep, the magnetic path length may be increased and the efficiency of magnetic flux transmission may be reduced. In addition, winding groove 2
The depth dimension of the coil 7 depends on the thickness dimension of the coil 7 formed in a step described later.
And Further, the shape of the winding groove 27 is not limited, but here, for example, the front butting surface 9
The side surface is an inclined surface 27A of about 45 °. As a result, the metal magnetic film 6 has a structure in which the magnetic flux is concentrated on the front butting surface 9 side, thereby improving the sensitivity.

Next, as shown in FIG. 8, the first magnetic core forming groove 23 and the second magnetic core forming groove 2 are formed as described above.
4. One main surface of the substrate 21 on which the separation groove 26 and the winding groove 27 are formed is filled with the molten low-melting glass 29. Then, a surface flattening process is performed on one main surface filled with the low-melting glass 29. In this method, as described above, since the depth dimension of the separation groove 26 and the like is relatively shallow, the amount of the low-melting glass 29 can be small. Therefore, this method can be said to improve productivity because the low-melting glass 29 can be reduced. Reducing the amount of the low-melting glass 29 to be filled in these grooves suppresses the generation of bubbles generated in the low-melting glass 29, and can also improve the corrosion resistance.

Next, as shown in FIG. 9, a terminal groove 30 is formed by grinding using a grindstone or the like. The terminal groove 30 is formed so as to be located immediately above the above-described separation groove 26, and has a width of about 200 μm and a depth of about 100 μm. And this terminal groove 3
0 is filled with a good conductor such as Cu by a plating method or the like. After that, a flattening process is performed. The good conductor such as Cu filled in the terminal groove 30 serves as the external connection terminal 14 in the magnetic head 1 described above.

Next, as shown in FIG. 10, a coil forming recess 12 in which the coil 7 is formed as a thin film is formed. The coil forming concave portion 12 is formed in a substantially rectangular shape with the rear abutting surface 11 substantially at the center, and is formed by etching a portion excluding the rear abutting surface 11. In addition, the coil forming recess 12 is provided with a groove 1 that reaches the terminal groove 30 from one end thereof.
2A.

Next, as shown in FIG. 11, a thin film of the coil 7 is formed in the coil forming recess 12. This coil 7
Has a shape wound many times so as to draw a circle with the end near the rear butting surface 11 as one end 7A. The coil 7 is pulled out into a groove 12A formed at one end of the coil forming recess 12, and the other end 7B is connected to the terminal groove 30.
Is electrically connected to the external connection terminal 14 made of a good conductor filled in the substrate.

When the coil 7 is formed, first, the above-described coil shape is patterned by a photoresist. Next, a good conductor, such as Cu, is formed in the coil forming recess 12 by plating or the like so as to have a thickness of about 3 μm. Then, by removing the photoresist, the coil 7 having a patterned coil shape can be formed. In forming the coil 7, not only the plating method described above, but also
A sputtering method, an evaporation method, or the like can be used.

Next, as shown in FIG. 12, a coil connection terminal 13 is formed at one end 7A of the coil 7. The coil connection terminal 13 is formed on one end 7 </ b> A of the coil 7 near the rear butting surface 11. The coil connection terminal 13 is made of a good conductor material and has a height dimension substantially equal to the joining surfaces 2A and 3A of the pair of magnetic core halves 2 and 3.

Next, a protective layer (not shown) for protecting the coil 7 from contact with the outside air is formed. This protective layer is formed by the coil forming recess 12 in which the above-described coil 7 is formed.
Is formed so as to be embedded. After that, a planarization process is performed on the surface on which the protective layer is formed. This flattening process is performed until the front butting surface 10, the rear butting surface 11, and the coil connection terminal 13 are exposed to the outside.

Next, as shown in FIG. 13, a substrate in which a plurality of magnetic core halves 2 and 3 are formed in parallel is used. One magnetic core half 2 and the other magnetic core half 3 are arranged in one row. And then joined by metal diffusion bonding so that the surfaces on which the coils 7 are formed face each other. For this metal diffusion bonding, a nonmagnetic metal material, for example, gold is used. Accordingly, a magnetic gap is formed by depositing this gold between the front butting surfaces 10 and performing metal diffusion bonding.

Next, as shown in FIG. 14, the magnetic head block 32 is separated into individual magnetic heads 1. At this time, the magnetic head block 32 is cut at a portion indicated by line BB in FIG.

Thus, the magnetic head 1 having a magnetic gap between the front butting surfaces 10 is formed. Then, although not shown, the magnetic sliding surface of the magnetic head 1 is polished so that the surface has a cylindrical shape. Also,
In order to improve the contact characteristics with the magnetic recording medium, a contact restricting groove 8 is formed on the sliding surface of the medium. The contact restriction groove 8 is formed so as to be substantially parallel to the sliding direction of the magnetic recording medium, and regulates friction with the magnetic recording medium.

In the method for manufacturing a magnetic head according to the present invention as described above, the parallel portion 6A is formed by the metal magnetic particles on the parallel surface 23.
It is formed by depositing vertically on B. Therefore, the parallel portion 6A has a high value of magnetic permeability. Therefore, according to this method, the magnetic permeability of the entire metal magnetic film 6 is improved, and a magnetic core having excellent electromagnetic conversion characteristics can be formed. In other words, according to this method, a magnetic head having excellent recording / reproducing characteristics can be manufactured.

[0070]

As described in detail above, in the magnetic head according to the present invention, since the magnetic layer has a portion formed so as to be parallel to the substrate, a magnetic core having excellent magnetic properties is provided. Will have. Therefore, this magnetic head has excellent recording and reproducing characteristics.

According to the method of manufacturing a magnetic head of the present invention, a magnetic layer parallel to the substrate can be formed. Therefore, according to this method, a magnetic head having a magnetic core having excellent electromagnetic conversion characteristics can be manufactured.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view of a magnetic head according to the present invention.

FIG. 2 is a perspective view of a main part of a medium sliding surface of the magnetic head.

FIG. 3 is a characteristic diagram comparing outputs of a simultaneous machine head and a conventional magnetic head.

FIG. 4 is a view for explaining the method for manufacturing the magnetic head according to the present invention, and is a perspective view showing a substrate.

FIG. 5 is a view for explaining the method of manufacturing the magnetic head according to the present invention, and is a perspective view of the substrate on which the first groove processing has been performed.

FIG. 6 is a view for explaining the method for manufacturing the magnetic head according to the present invention, and is a perspective view of a substrate on which a metal magnetic film is formed.

FIG. 7 is a view for explaining the method of manufacturing the magnetic head according to the present invention, and is a perspective view of the substrate on which the second groove processing has been performed.

FIG. 8 is a diagram for explaining the method of manufacturing the magnetic head according to the present invention, and is a perspective view of the substrate in a state where each groove is filled with low-melting glass.

FIG. 9 is a view for explaining the method for manufacturing the magnetic head according to the present invention, and is a perspective view of a substrate in which terminal grooves are formed in low-melting glass.

FIG. 10 is a diagram for explaining the method for manufacturing the magnetic head according to the present invention, and is a perspective view of a main part of the substrate on which the coil-forming concave portion is formed.

FIG. 11 is a diagram for explaining the method for manufacturing the magnetic head according to the present invention, and is a perspective view of a main part of a substrate on which a coil is formed.

FIG. 12 is a diagram for explaining the method for manufacturing the magnetic head according to the present invention, and is a perspective view of a main part of a substrate on which coil connection terminals are formed.

FIG. 13 is a view for explaining the method for manufacturing the magnetic head according to the present invention, and is a perspective view showing a state where blocks on which the magnetic core halves are formed are butted.

FIG. 14 is a view for explaining the method for manufacturing the magnetic head according to the present invention, and is a perspective view of the magnetic head block.

FIG. 15 is a perspective view of a conventional magnetic head.

FIG. 16 is a schematic configuration diagram schematically showing a sputtering method in a conventional magnetic head manufacturing method.

FIG. 17 is a schematic configuration diagram of a measuring device for measuring the relationship between the scattering direction of metal magnetic particles and magnetic permeability.

FIG. 18 is a characteristic diagram showing a relationship between a scattering direction of metal magnetic particles and magnetic permeability.

FIG. 19 is a schematic configuration diagram schematically showing another sputtering method in the conventional magnetic head manufacturing method.

[Explanation of symbols]

1 magnetic head, 2, 3 magnetic core half, 4 non-magnetic substrate, 6 metal magnetic film, 7 coil, 8 width control groove,
10 front butting surface, 11 rear butting surface, 12 concave portion for coil formation, 13 terminal for coil connection

Claims (9)

[Claims] A pair of magnetic core halves each having a substrate and a magnetic layer formed on the substrate are butted so that the magnetic layers face each other via a non-magnetic material to form a magnetic gap. In the magnetic head, the substrate has a parallel surface parallel to the substrate surface and an inclined surface inclined at a predetermined angle from the parallel surface, and the magnetic layer is formed on the upper surface of the parallel surface and the inclined surface. And a magnetic gap formed by joining a pair of magnetic core halves with end faces of a magnetic layer formed on the inclined surface. 2. The magnetic head according to claim 1, wherein a thin-film coil for winding the magnetic layer is formed on at least one of the pair of magnetic core halves. 3. The magnetic head according to claim 1, wherein the magnetic layer is made of a metal magnetic thin film. 4. The magnetic head according to claim 3, wherein the metal magnetic thin film is formed by laminating a plurality of metal magnetic layers via a non-magnetic layer. 5. A pair of magnetic core halves having a substrate and a magnetic layer formed on the substrate are butted so that the magnetic layers face each other via a non-magnetic material to form a magnetic gap. In the method for manufacturing a magnetic head, the substrate is formed so as to have a parallel surface parallel to the substrate surface and an inclined surface inclined at a predetermined angle from the parallel surface. The magnetic layer is formed so that a film forming direction is perpendicular to the parallel plane, and a magnetic gap is formed by abutting end faces of the magnetic layer formed on the inclined surface. A method of manufacturing a magnetic head. 6. The method of manufacturing a magnetic head according to claim 5, wherein a thin-film coil for winding the magnetic layer is formed on at least one of the pair of magnetic core halves. 7. The method according to claim 5, wherein the magnetic layer is formed by a sputtering method. 8. The method according to claim 5, wherein the magnetic layer is made of a metal magnetic thin film. 9. The method according to claim 8, wherein the metal magnetic thin film is formed by laminating a plurality of metal magnetic layers via a non-magnetic layer.