JPH11213318A - Production of magnetic head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a production method for magnetic head which improves the property of magnetic head and improves the yield. SOLUTION: In this production method for magnetic head, nonmagnetic substrates 24 having magnetic films 25 formed on them are laminated to form magnetic head half body core blocks 27 and 28, and these magnetic head half body core blocks 27 and 28 are joined to produce a magnetic head. Grooves 30 are formed in nonmagnetic substrates 24 provided between plural magnetic films 25 of the magnetic head half body core block 27 on the joint surface of the magnetic head half body core block 27, and the surface where grooves 30 are formed of the magnetic head half body core block 27 is subjected to mirror finishing, and surfaces subjected to mirror finishing are butted to join and integrate a pair of magnetic head half body core blocks into one body.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a magnetic head, and more particularly to a method for manufacturing a magnetic head which improves the performance of the magnetic head and increases the yield.

[0002]

2. Description of the Related Art For example, in magnetic recording / reproducing apparatuses capable of high-density recording, such as video tape recorders and digital audio tape recorders, recording of information signals with shorter wavelengths for the purpose of improving image quality and the like has been promoted. Correspondingly, high coercive force magnetic recording media using ferromagnetic metal powders as magnetic powders, such as so-called metal tapes and evaporated tapes in which a ferromagnetic metal material is directly applied on a base film, are used. It is becoming. On the other hand, research is also being conducted in the field of magnetic heads to enable the use of high coercive force magnetic recording media, and magnetic heads that use metal magnetic materials for the magnetic core and have narrow tracks have been developed. ing. As an example of the above-described magnetic head, a so-called laminate type magnetic head is generally known. A laminated magnetic head is a metal magnetic film with high magnetic permeability and high saturation magnetic flux density, and a magnetic core half, which is sandwiched between substrates made of a non-magnetic substrate material, and joined together by butt glass fusion. Things.

Here, an example of a conventional method for manufacturing a magnetic head as described above will be described. First, a metal magnetic film is deposited on a non-magnetic substrate using a sputtering method or the like, and a film-formed substrate is manufactured. Then, the film-forming substrate is tilted by an angle of the azimuth angle, and a plurality of the substrates are stacked to form a bonded slice. Thereafter, the joining slice is cut to complete the magnetic core half block. next,
A mirror finish is applied to the joint surface of the magnetic core half block, and a winding groove serving as a winding window is formed. Then, the magnetic core half block is glass-fused at the bonding surface, and the surface sliding on the magnetic information recording medium is curved.
Thereafter, the magnetic core half block is cut to complete the magnetic head.

[0004]

In the above-described method for manufacturing a magnetic head, a magnetic gap is formed by fusing glass with the joining surfaces of the metal magnetic films of the magnetic core halves facing each other. . However, as shown in FIG. 11, the magnetic gap is the gap g1 at the center of the magnetic core.
There is a problem that the gap size differs between the gap g2 at the end and the gap g2 at the end. This is for the following reason.
As described above, before the magnetic core half block is fused with glass, the butted surface of the magnetic core half block is polished and mirror-finished. At this time, the end of the magnetic core half block shown in FIG. 11 has a larger polishing amount than the center of the magnetic core half, and sagging occurs. Therefore, if the magnetic core half-blocks are abutted and fused with glass, a gap dimension is shifted.

Accordingly, an object of the present invention is to solve the above-mentioned problems, and to provide a method of manufacturing a magnetic head which improves the performance of the magnetic head and increases the yield.

[0006]

SUMMARY OF THE INVENTION The object of the present invention is to provide a magnetic head half core block by laminating a non-magnetic substrate having a magnetic film formed thereon. In a method of manufacturing a magnetic head for manufacturing a magnetic head by bonding blocks, a non-magnetic substrate provided between a plurality of magnetic films of the magnetic head half core block on a bonding surface of the magnetic head half core block A magnetic head that forms a groove in the surface of the magnetic head half-core block, performs mirror finishing on the surface on which the groove is formed, and abuts the mirror-finished surface to join a pair of magnetic head half-core blocks together. Is achieved.

In the present invention, a groove is formed on the joint surface of the magnetic head half core block, and then mirror finishing is performed to join the magnetic head half core block. This allows
Since the sag generated when performing mirror finishing can be minimized, the influence of the sagging of the dimension of the magnetic gap formed on the joint surface can be eliminated.

[0008]

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Note that the embodiments described below are preferred specific examples of the present invention,
Although various technically preferable limits are given, the scope of the present invention is not limited to these modes unless otherwise specified in the following description.

FIG. 1 is a schematic perspective view showing a preferred embodiment of a magnetic head manufactured by the method of manufacturing a magnetic head according to the present invention. The magnetic head 20 will be described in detail with reference to FIG. The magnetic head 20 shown in FIG. 1 includes magnetic core halves 21, 22, a winding window 23, and the like. The joining surface 21d of the magnetic core half 21 and the joining surface 22d of the magnetic core half 22 are fused by glass or the like. Is being worn. Sliding surface 2 of magnetic core halves 21, 22 that slides on magnetic information recording medium
1e and 22e are subjected to curved surface processing,
A magnetic gap g is formed at the junction between e and 22e. Further, a winding window 23 is provided in the magnetic core half 22, and a copper wire serving as a coil is wound around the magnetic core half 22 from the winding window 23.

The magnetic core half 21 is made of a non-magnetic substrate 21a, 2
1b, a metal magnetic film 21c which is a magnetic film.
The metal magnetic film 21 is placed between the two non-magnetic substrates 21a and 21b.
c is formed, and the track width Tw of the magnetic gap g is formed.
Is regulated by the thickness of the metal magnetic film 21c. The non-magnetic substrates 21a and 21b include, for example, non-magnetic ferrite,
Zirconium oxide-based ceramics, crystallized glass, non-magnetic iron oxide-based ceramics, titanate-based ceramics, or a combination thereof are used. These materials are non-magnetic, have an appropriate coefficient of thermal expansion, and are characterized by being excellent in abrasion resistance to a magnetic information recording medium such as a magnetic tape.

As the metal magnetic film 21c, for example, Fe-
Al-Si alloy, Fe-Si-Co alloy, Fe-N
i-based alloy, Fe-Al-Ge-based alloy, Fe-Ga-Ge
Alloy, Fe-Si-Ge alloy, Fe-Si-Ga alloy, Fe-Si-Ga-Ru alloy, Fe-CoSi
-Al-based alloys and the like. Further, in order to further improve corrosion resistance, wear resistance, etc., Ti, Cr, Mn, Z
r, Nb, Mo, Ta, W, Ru, Os, Rh, Ir,
At least one of Re, Ni, Pd, Pt, Hf, and V may be added. The metal magnetic film 21c
Is a ferromagnetic amorphous metal alloy (a so-called amorphous alloy), for example, an alloy composed of one or more elements of Fe, Ni, and Co, or Al and
Ge, Be, Sn, In, Mo, W, Ti, Mn, C
metal-metalloid amorphous alloys such as alloys containing r, Zr, Hf, Nb, etc., or Co, Hf, Zr
And a metal-metal-based amorphous alloy mainly containing a transition element such as a rare earth element or the like.

Next, a method of manufacturing a magnetic head will be described in detail with reference to FIGS. First, 1 in FIG.
A sputtering method, a vacuum deposition method,
The metal magnetic film 25 is formed by a vacuum thin film forming technique typified by an ion plating method, an ion beam method, and the like.
A joint slice 26 is made. Thereafter, as shown in FIG. 3, a plurality of the joined slices 26 are prepared, and the plurality of joined slices 26 are stacked. At this time, the joining slices 26 are stacked at an angle θ with respect to the axis CL. This is because, in order to form an azimuth angle in the track width of the magnetic head 10, it is necessary to stack the magnetic heads 10 at the same angle θ as the azimuth angle. Here, the joining between the joining slices 26 is performed by, for example, a low-temperature thermal diffusion joining method in which the noble metal layers provided on the joining surface are joined by thermal diffusion, joining by a bonding glass, or other conventionally known joining methods.

Next, the laminated slice 26 is cut along the dotted line L shown in FIG.
Is formed. As shown in FIG. 5, the magnetic core half block 27 has a winding groove 29 for winding a coil.
Are formed in the direction of arrow Y. At the same time, flattening is performed on the joint surfaces 27a and 28a of the magnetic core half blocks 27 and 28.

Thereafter, as shown in FIG. 6 and FIG. 7, subdivision grooves 30 are formed in the magnetic core half blocks 27 and 28. The subdivision groove 30 in FIG. 7 is a groove having a depth S, and the depth S is formed to have a size larger than a polishing amount when mirror-finish the bonding surfaces 27a and 28a of the magnetic head described later. This is to prevent the subdivision grooves 30 from being lost by polishing during mirror finishing.

The subdivision grooves 30 are provided between the metal magnetic films 25 so as not to extend over the chip width T of the magnetic head. The reason for providing the subdivision grooves 30 is that the flatness region in FIG.
This is because the flatness becomes relatively small and the flatness of the bonding surfaces 27a and 28a can be kept uniform. That is, the amount of sag generated at the end of the region to be polished increases in proportion to the area to be polished. Conversely, the smaller the region to be polished, the less the effect of sagging due to polishing can be reduced. Therefore, when performing mirror polishing, the subdivision grooves 3
By forming 0 and subdividing the region to be mirror-polished, the amount of sag can be eliminated. Also, even if sagging occurs, the area B is much smaller than the area A, so the amount of sagging is extremely small.

After mirror finishing the magnetic core half blocks 27 and 28, the joining surfaces 27a and 28 of the magnetic core half blocks 27 and 28 as shown in FIG.
a and butted together. Magnetic core half block 27
When the magnetic core blocks 3 and 28 are aligned, the respective metal magnetic films are aligned and then joined and integrated.
1 is formed. At this time, the magnetic core half block 2
The bonding of 7, 28 is performed by, for example, a low-temperature thermal diffusion bonding method in which the noble metal layers provided on the bonding surfaces 27a, 28a are bonded by thermal diffusion, bonding by bonding glass, or another conventionally known connection method.

Thereafter, as shown in FIG. 9, the magnetic core block 31 is used to secure contact with the magnetic information recording medium.
Cylindrical polishing is performed on a surface 31a serving as a sliding surface of the magnetic head. Finally, as shown in FIG. 10, after the width regulating groove 32 is formed to hit the magnetic core block, the magnetic head is cut by the thickness T of the magnetic head. Thus, the magnetic head 20 shown in FIG. 1 is completed. At this time, since the subdivision grooves 30 are provided so as not to extend over the chip width T as shown in FIG. 7, the subdivision grooves 30 do not remain in the magnetic head 20.

According to the above embodiment, since the flatness of the gap forming surface is more uniform in the magnetic core half body than the laminated magnetic head manufactured by the conventional method, the variation in the gap size is reduced as compared with the conventional one. Is done. As a result, variations in characteristics due to variations in gap dimensions are reduced, and the yield can be improved.

Incidentally, the present invention is not limited to the above embodiment. In the above embodiment, the winding groove 23 is provided only in one magnetic core half, but the method of manufacturing a magnetic head according to the present invention is also applicable to the case where the winding groove is provided in both magnetic core halves. Can be applied. In addition, as the material of the metal magnetic film 22c, for example, a ferromagnetic alloy material having a high saturation magnetic flux density and excellent soft magnetic characteristics can be employed in addition to the above-described materials. As the ferromagnetic alloy material, any conventionally known ferromagnetic alloy material can be used, regardless of whether it is crystalline or non-crystalline.
Further, the above-described metal magnetic film is not limited to a single layer, and may be a so-called laminated film in which a metal magnetic film and an insulating layer are alternately laminated in any number of layers in order to avoid eddy current loss in a high frequency band. . Here, as the insulating layer, for example, SiO ₂ , Al
₃ , electrical insulating films such as oxides and nitrides such as SiN ₄ .

[0020]

As described above, according to the present invention,
It is possible to provide a method of manufacturing a magnetic head that improves the performance of the magnetic head and increases the yield.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing a magnetic head manufactured by a preferred embodiment of a magnetic head manufacturing method according to the present invention.

FIG. 2 is a perspective view showing a bonded slice in a preferred embodiment of the method of manufacturing a magnetic head according to the present invention.

FIG. 3 is a perspective view showing a state in which bonding slices are stacked in a preferred embodiment of the magnetic head manufacturing method of the present invention.

FIG. 4 is a top view showing a state of cutting a bonded slice in a preferred embodiment of the method of manufacturing a magnetic head according to the present invention.

FIG. 5 is a perspective view showing a state in which a winding groove is formed in a magnetic head half core in a preferred embodiment of the magnetic head manufacturing method of the present invention.

FIG. 6 is a perspective view showing a state in which a subdivision groove is formed in a magnetic head half core in a preferred embodiment of the magnetic head manufacturing method of the present invention.

FIG. 7 is a side view showing a state in which a subdivision groove is formed in a magnetic head half core in a preferred embodiment of the magnetic head manufacturing method of the present invention.

FIG. 8 is a perspective view showing a state where the magnetic head half cores are joined in a preferred embodiment of the magnetic head manufacturing method of the present invention.

FIG. 9 is a perspective view showing a state in which a sliding surface of a magnetic head core is cylindrically machined in a preferred embodiment of the magnetic head manufacturing method of the present invention.

FIG. 10 is a perspective view showing a state in which a restriction groove is formed on the magnetic head core in a preferred embodiment of the magnetic head manufacturing method of the present invention.

FIG. 11 is an enlarged perspective view showing a portion around a magnetic gap of a magnetic head manufactured by an example of a conventional magnetic head manufacturing method.

[Explanation of symbols]

20: magnetic head, 24: non-magnetic substrate, 25
..Metal magnetic film (magnetic material), 30 subdivided groove (groove),
g: magnetic gap, Tw: track width.

Claims (3)

[Claims] A magnetic head for manufacturing a magnetic head by laminating a non-magnetic substrate on which a magnetic film is formed, forming a magnetic head half core block, and joining and integrating a pair of magnetic head half core blocks. A method of manufacturing a head, comprising: forming a groove in a non-magnetic substrate provided between a plurality of magnetic films of a magnetic head half core block on a bonding surface side of the magnetic head half core block; A method for manufacturing a magnetic head, comprising: mirror-finishing a surface of a block in which a groove is formed; abutting the mirror-finished surface, and joining and integrating a pair of magnetic head half-core blocks. 2. The method according to claim 1, wherein the groove is formed at a position where a distance from the magnetic film is larger than a chip width of the magnetic head. 3. The method of manufacturing a magnetic head according to claim 1, wherein the groove is formed deeper than a polishing amount when mirror-finishing the surface on which the groove is formed.