JPH10206246A - 物体温度の非接触測定装置及び方法 - Google Patents

物体温度の非接触測定装置及び方法

Info

Publication number
JPH10206246A
JPH10206246A JP9346525A JP34652597A JPH10206246A JP H10206246 A JPH10206246 A JP H10206246A JP 9346525 A JP9346525 A JP 9346525A JP 34652597 A JP34652597 A JP 34652597A JP H10206246 A JPH10206246 A JP H10206246A
Authority
JP
Japan
Prior art keywords
temperature
conductive element
adjusting
zero
heat flux
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9346525A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10206246A5 (enExample
Inventor
L Evert John
エル エバート ジョン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Integrated Systems Inc
Original Assignee
Integrated Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Integrated Systems Inc filed Critical Integrated Systems Inc
Publication of JPH10206246A publication Critical patent/JPH10206246A/ja
Publication of JPH10206246A5 publication Critical patent/JPH10206246A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/16—Special arrangements for conducting heat from the object to the sensitive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/16—Special arrangements for conducting heat from the object to the sensitive element
    • G01K1/165—Special arrangements for conducting heat from the object to the sensitive element for application in zero heat flux sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP9346525A 1996-12-17 1997-12-16 物体温度の非接触測定装置及び方法 Pending JPH10206246A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/768915 1996-12-17
US08/768,915 US5884235A (en) 1996-12-17 1996-12-17 Non-contact, zero-flux temperature sensor

Publications (2)

Publication Number Publication Date
JPH10206246A true JPH10206246A (ja) 1998-08-07
JPH10206246A5 JPH10206246A5 (enExample) 2005-07-28

Family

ID=25083864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9346525A Pending JPH10206246A (ja) 1996-12-17 1997-12-16 物体温度の非接触測定装置及び方法

Country Status (2)

Country Link
US (1) US5884235A (enExample)
JP (1) JPH10206246A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012504750A (ja) * 2008-07-31 2012-02-23 ジーイー・インフラストラクチャー・センシング・インコーポレイテッド 温度平衡を用いる温度センサ用のシステム及び方法
US20240035894A1 (en) * 2020-12-08 2024-02-01 U Electronics Co., Ltd. Apparatus, Method, and Computer-Readable Recording Medium for Correcting Temperature of Object Using Shutter

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0103886D0 (en) * 2001-02-16 2001-04-04 Baumbach Per L Temperature measuring device
US6641301B2 (en) * 2001-04-09 2003-11-04 Exergen Corporation Radiation detector with passive air purge and reduced noise
JP3812884B2 (ja) * 2001-06-27 2006-08-23 日本電信電話株式会社 温度検出方法および温度検出器
US6907364B2 (en) * 2002-09-16 2005-06-14 Onwafer Technologies, Inc. Methods and apparatus for deriving thermal flux data for processing a workpiece
US9068895B2 (en) * 2009-04-15 2015-06-30 3M Innovative Properties Company Deep tissue temperature probe constructions
CN102458232A (zh) * 2009-04-15 2012-05-16 亚利桑特保健公司 深部组织温度探测器结构
US8226294B2 (en) * 2009-08-31 2012-07-24 Arizant Healthcare Inc. Flexible deep tissue temperature measurement devices
US8292495B2 (en) 2010-04-07 2012-10-23 Arizant Healthcare Inc. Zero-heat-flux, deep tissue temperature measurement devices with thermal sensor calibration
US8292502B2 (en) 2010-04-07 2012-10-23 Arizant Healthcare Inc. Constructions for zero-heat-flux, deep tissue temperature measurement devices
US9134186B2 (en) 2011-02-03 2015-09-15 Kla-Tencor Corporation Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces
US9354122B2 (en) 2011-05-10 2016-05-31 3M Innovative Properties Company Zero-heat-flux, deep tissue temperature measurement system
US20230287556A1 (en) * 2020-06-30 2023-09-14 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Method for controlling a flux distribution of evaporated source material, detector for measuring electromagnetic radiation reflected on a source surface and system for thermal evaporation with electromagnetic radiation

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE109274T1 (de) * 1986-06-20 1994-08-15 Lehmann Martin Verfahren zum berührungslosen messen einer temperatur von einem körper sowie anordnung hierfür.
US5294200A (en) * 1989-11-01 1994-03-15 Luxtron Corporation Autocalibrating dual sensor non-contact temperature measuring device
US5054936A (en) * 1989-11-16 1991-10-08 Jacob Fraden Sensor for active thermal detection
US5106200A (en) * 1990-12-20 1992-04-21 Applied Materials, Inc. Apparatus for measuring temperature of wafer
JP3451107B2 (ja) * 1992-10-05 2003-09-29 株式会社エコ・トゥエンティーワン 電子冷却装置
US5645349A (en) * 1994-01-10 1997-07-08 Thermoscan Inc. Noncontact active temperature sensor
US5464284A (en) * 1994-04-06 1995-11-07 Luxtron Corporation Autocalibrating non-contact temperature measuring technique employing dual recessed heat flow sensors
US5730528A (en) * 1996-08-28 1998-03-24 Lockheed Martin Energy Systems, Inc. High temperature thermometric phosphors for use in a temperature sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012504750A (ja) * 2008-07-31 2012-02-23 ジーイー・インフラストラクチャー・センシング・インコーポレイテッド 温度平衡を用いる温度センサ用のシステム及び方法
US20240035894A1 (en) * 2020-12-08 2024-02-01 U Electronics Co., Ltd. Apparatus, Method, and Computer-Readable Recording Medium for Correcting Temperature of Object Using Shutter

Also Published As

Publication number Publication date
US5884235A (en) 1999-03-16

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