JPH10199804A5 - - Google Patents

Info

Publication number
JPH10199804A5
JPH10199804A5 JP1997330863A JP33086397A JPH10199804A5 JP H10199804 A5 JPH10199804 A5 JP H10199804A5 JP 1997330863 A JP1997330863 A JP 1997330863A JP 33086397 A JP33086397 A JP 33086397A JP H10199804 A5 JPH10199804 A5 JP H10199804A5
Authority
JP
Japan
Prior art keywords
substrate
substrate stage
projection
optical system
measurement axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997330863A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10199804A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9330863A priority Critical patent/JPH10199804A/ja
Priority claimed from JP9330863A external-priority patent/JPH10199804A/ja
Publication of JPH10199804A publication Critical patent/JPH10199804A/ja
Publication of JPH10199804A5 publication Critical patent/JPH10199804A5/ja
Pending legal-status Critical Current

Links

JP9330863A 1996-11-14 1997-11-14 投影露光装置及び投影露光方法並びにデバイス製造方法 Pending JPH10199804A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9330863A JPH10199804A (ja) 1996-11-14 1997-11-14 投影露光装置及び投影露光方法並びにデバイス製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP31865796 1996-11-14
JP8-318657 1996-11-14
JP9330863A JPH10199804A (ja) 1996-11-14 1997-11-14 投影露光装置及び投影露光方法並びにデバイス製造方法

Publications (2)

Publication Number Publication Date
JPH10199804A JPH10199804A (ja) 1998-07-31
JPH10199804A5 true JPH10199804A5 (OSRAM) 2005-11-04

Family

ID=26569458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9330863A Pending JPH10199804A (ja) 1996-11-14 1997-11-14 投影露光装置及び投影露光方法並びにデバイス製造方法

Country Status (1)

Country Link
JP (1) JPH10199804A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4731886B2 (ja) * 2004-11-12 2011-07-27 株式会社ブイ・テクノロジー 液晶表示装置用基板の製造方法
TWI553703B (zh) * 2004-11-18 2016-10-11 尼康股份有限公司 A position measuring method, a position control method, a measuring method, a loading method, an exposure method and an exposure apparatus, and a device manufacturing method

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