JPH10116769A - 投影露光装置 - Google Patents

投影露光装置

Info

Publication number
JPH10116769A
JPH10116769A JP8270601A JP27060196A JPH10116769A JP H10116769 A JPH10116769 A JP H10116769A JP 8270601 A JP8270601 A JP 8270601A JP 27060196 A JP27060196 A JP 27060196A JP H10116769 A JPH10116769 A JP H10116769A
Authority
JP
Japan
Prior art keywords
mark
reticle
alignment
wafer
best focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8270601A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10116769A5 (enExample
Inventor
Kazuo Mazaki
和生 真崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP8270601A priority Critical patent/JPH10116769A/ja
Publication of JPH10116769A publication Critical patent/JPH10116769A/ja
Publication of JPH10116769A5 publication Critical patent/JPH10116769A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP8270601A 1996-10-14 1996-10-14 投影露光装置 Pending JPH10116769A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8270601A JPH10116769A (ja) 1996-10-14 1996-10-14 投影露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8270601A JPH10116769A (ja) 1996-10-14 1996-10-14 投影露光装置

Publications (2)

Publication Number Publication Date
JPH10116769A true JPH10116769A (ja) 1998-05-06
JPH10116769A5 JPH10116769A5 (enExample) 2004-10-21

Family

ID=17488377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8270601A Pending JPH10116769A (ja) 1996-10-14 1996-10-14 投影露光装置

Country Status (1)

Country Link
JP (1) JPH10116769A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002329646A (ja) * 2001-04-27 2002-11-15 Canon Inc 合焦位置検出方法、合焦位置検出装置及び露光装置
JP2006186177A (ja) * 2004-12-28 2006-07-13 Oki Electric Ind Co Ltd 半導体装置の製造方法
JP2023136106A (ja) * 2022-03-16 2023-09-29 キヤノン株式会社 計測装置、露光装置、及び物品の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002329646A (ja) * 2001-04-27 2002-11-15 Canon Inc 合焦位置検出方法、合焦位置検出装置及び露光装置
JP2006186177A (ja) * 2004-12-28 2006-07-13 Oki Electric Ind Co Ltd 半導体装置の製造方法
JP2023136106A (ja) * 2022-03-16 2023-09-29 キヤノン株式会社 計測装置、露光装置、及び物品の製造方法

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