JPH09121133A - Method for adjusting frequency of resonator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To attain improvement in the product stop of a product by trimming the center part of a trimming electrode which is formed to be a prescribed largeness area to be a rectangular shape in the portion of a fixed area by means of one closed line through the use of a trimming equipment. SOLUTION: External connecting terminals 11 and 12 are connected to the both end parts of a coil electrode layer 1 which is formed at an upper side of a dielectric layer 3. When the terminals 11 and 12 are connected to the prescribed external terminal, the electrode layer 1 works as a coil and a counter electrode 6 opposing to a shield electode layer 4 at upper and lower parts and the trimming electrode 8 respectively form capacitors with the shield electrode layer 4. A resonator is worked and set at a setting position Which is arranged in the circumference of the trimming equipment such as a laser trimmer, etc., which is not shown in the Fig. After that, the trimming equipment is moved from a stand-by position and the center part of the trimming electrode 8 is trimmed to be the rectangular shape by one lind D indicated by alternate long and short dash lines. THus, a part surrounded by the closed line D in the electrode 8 is electrically parted and trimmed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a frequency adjusting method for adjusting the frequency by adjusting the capacitor capacity of a resonator by trimming.

[0002]

2. Description of the Related Art The above-mentioned frequency adjustment of the resonator has been conventionally performed as follows. That is, trimming is performed using a trimming device such as a laser trimmer while measuring the resonance frequency using a measuring device such as a network analyzer.

[0003]

Therefore, according to the conventional method, one measuring device and one trimming device are required for trimming one product, and the trimming device has a long waiting time and the production efficiency is high. There was a drawback that it did not go up. Further, for example, as shown in FIG. 7, a conventional trimming electrode 20 is formed on a surface of an electronic component having a laminated structure by printing or the like in a state where a part of the trimming electrode 20 is connected to a circuit provided inside. Therefore, an error occurs in the distance a from the end of the resonator to the trimming electrode 20, and the manufactured resonator is set at a predetermined set position, and thereafter,
Since the trimming is performed as described above, an error occurs in the distance b from the end of the resonator to the trimming position (shown by the alternate long and short dash line) due to the positional deviation during setting. Therefore, no matter how accurately the trimming device is moved from its standby position to a desired position, the position on the electrode to be trimmed is displaced by about 0.3 to 0.5 mm, and accurate trimming cannot be performed. Was a defective product.

The present invention has been made to solve the above problems, and regardless of an error in forming a trimming electrode or a positional error in setting a resonator, regardless of the error. It is an object of the present invention to provide a frequency adjusting method capable of performing accurate trimming, improving the yield, and improving the operating rate of the trimming device.

[0005]

In order to solve the above problems, a method of adjusting the frequency of a resonator according to the present invention is such that a pair of shield electrode layers are provided on both sides of a coil electrode layer with a dielectric layer interposed therebetween. A resonator having a capacitor electrode for trimming formed outside the at least one shield electrode layer via a dielectric layer is set at a predetermined position, and the trimmer is relatively moved to partially move the electrode. In the frequency adjustment method of adjusting the frequency of the resonator by trimming,
The area of the trimming capacitor electrode is formed in a predetermined area, and the central portion of the trimming capacitor electrode is
It is characterized in that trimming for a certain area is performed by one closed trimming line.

[0006]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be specifically described below. FIG. 1 is a plan view showing an electronic component having an example of a trimming electrode used in the present invention. This electronic component is manufactured, for example, to form a resonator. For example, as shown in FIG. 2, the coil electrode layer 1 is disposed in the central portion in the thickness direction, and the coil electrode layer 1 has a space below the coil electrode layer 1. A shield electrode layer 5 is formed on both sides of the dielectric layer 3, and a protective layer 9 is formed below the shield electrode layer 5.

On the other hand, a shield electrode layer 4 is formed on the upper side of the coil electrode layer 1 with a dielectric layer 2 interposed therebetween, and between the shield electrode layer 4 and the coil electrode layer 1, a shield electrode layer 4 is formed. And a part 2a of the dielectric layer 2 between them.
The counter electrode 6 is formed in a state in which there exists a counter electrode 6 on the upper side of the shield electrode layer 4, and a dielectric layer 7 is interposed between the counter electrode 6 and the counter electrode 6 to form, for example, a rectangular trimming electrode 8. ing.

On the side surface of such a laminated structure, 2
External connection terminals 11 and 12 are formed at the locations, and both ends of the coil electrode layer 1 formed on the upper side of the dielectric layer 3 are connected to the both external connection terminals 11 and 12, as shown in FIG. Has been done. In addition, one of the external connection terminals 12 has a structure shown in FIG.
One end of the shield electrode layer 4 formed on the lower side of the dielectric layer 7 is connected as indicated by the broken line. The shield electrode layer 5 is also formed as shown by the broken line in the figure, and is similarly connected to the external connection terminal 12. The other external connection terminal 11 is connected to one ends of the counter electrode 6 and the trimming electrode 8 on both sides of the shield electrode layer 4, and is a rectangular trimming electrode above the shield electrode layer 4. 8 is made for trimming and has a smaller area than the counter electrode 6 on the lower side.

Therefore, in the resonator thus constructed, when the external connection terminals 11 and 12 are connected to a predetermined external terminal, the coil electrode layer 1 functions as a coil, and the coil electrode layer 1 and the shield electrode layer 4 are disposed above and below. The counter electrode 6 and the trimming electrode 8 which face each other form a capacitor between the shield electrode layer 4 and the counter electrode 6. FIG. 5 is an equivalent circuit diagram thereof. Therefore, when the trimming electrode 8 is trimmed, the capacitance changes and the frequency can be adjusted.

Next, the case where the above resonator is trimmed by the method of the present invention will be described as an example. First, the resonator is operated and set at a set position arranged around a trimming device such as a laser trimmer (not shown). After that, the trimming device is moved from the standby position, and the central portion of the trimming electrode 8 is trimmed into a square shape by a single closed line D shown by a dashed line in FIG. As a result, the portion of the trimming electrode 8 surrounded by the closed line D is electrically separated. Thereby, the trimming is completed.

The trimming electrode 8 is formed in a predetermined area that is sufficiently larger than the trimming portion, and the area surrounded by the closed line D is also constant. Therefore, when trimming is performed in this manner, the area of the remaining electrode portion is constant for each product even if the closed line D is moved vertically and horizontally. As a result, the capacitance of the capacitor formed by the remaining portion of the trimming electrode 8 formed in a fixed area by printing or the like becomes a desired value, and the frequency of the resonator is adjusted to the target frequency.

Therefore, in the case of the present invention, even if there is some positional error when forming the trimming electrodes or when setting the electronic parts, the same amount of each product can be stored in the required amount. It can be trimmed only and the frequency can be adjusted accurately. Therefore, the process of manufacturing a product can be performed as follows. That is, a large number of electronic components within a range where the frequency can be adjusted by trimming are manufactured in advance. Next, the electronic components are classified according to the number of products having the target frequency. The divided electronic components are trimmed by the method of the present invention. After that, the frequency characteristics of each electronic component are measured and the electronic components are sorted into non-defective products and defective products.

Therefore, a large number of electronic parts can be continuously trimmed by the trimming device and only measured by the measuring device. When trimming one product as in the conventional case, the measuring device can be used. Since both the trimming device and the trimming device are not required at the same time, it is possible to improve the operating rates of the trimming device and the measuring device. In addition, according to the present invention, the frequency of the resonator is adjusted in the above-described embodiment.
It is needless to say that the present invention can be similarly applied to a filter having two trimming electrodes 8 as shown in (4) and other electronic components having a capacitor component. D in FIG. 6 indicates a trimming line as before.

Further, in the above embodiment, the trimming electrode is formed on the surface of the electronic component. However, the trimming electrode is formed inside the electronic component and on the surface layer portion which can be trimmed from the outside. Good.

[0015]

As described in detail above, according to the present invention, it is possible to perform trimming by a certain amount of capacitance, and the area of the remaining electrode portions can be made to have a certain value. The frequency can be adjusted and the product yield can be improved. In addition, it is not necessary to measure the characteristics when performing trimming, so that the waiting time of the trimming device can be reduced. Further, there is an excellent effect that the production efficiency can be improved by manufacturing the electronic component by performing the trimming and the characteristic measurement in different steps.

[Brief description of the drawings]

FIG. 1 is a plan view showing an electronic component used in the present invention.

FIG. 2 is a side sectional view of the electronic component shown in FIG.

FIG. 3 is a plan view showing a portion near a coil electrode layer of FIG.

FIG. 4 is a plan view showing a portion in the vicinity of a trimming electrode shown in FIG.

5 is an equivalent circuit diagram of the electronic component of FIG.

FIG. 6 is a plan view showing a filter having two trimming electrodes to which the present invention can be applied.

FIG. 7 is an explanatory diagram of a conventional method.

[Explanation of symbols]

 1 Coil Electrode Layer 2,3 Dielectric Layer 4,5 Shield Electrode Layer 7 Dielectric Layer 8 Trimming Electrode 10 Electronic Component

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Ken Tonegawa 2-10-10 Tenjin, Nagaokakyo, Kyoto Prefecture Murata Manufacturing Co., Ltd.

Claims (1)

[Claims] 1. A pair of shield electrode layers are provided on both sides of a coil electrode layer with a dielectric layer interposed therebetween, and trimming capacitor electrodes are formed outside the at least one shield electrode layer with the dielectric layer interposed therebetween. The resonator is set at a predetermined position, the trimming device is moved relatively to trim a part of the electrode to adjust the frequency of the resonator, and the area of the trimming capacitor electrode is set to a predetermined value. Of the trimming capacitor electrode, and the central portion of the trimming capacitor electrode is trimmed by one closed trimming line for a certain area.