JPH02256210A - Regulating method for frequency of electronic component including inductor - Google Patents

Regulating method for frequency of electronic component including inductor

Info

Publication number
JPH02256210A
JPH02256210A JP7907189A JP7907189A JPH02256210A JP H02256210 A JPH02256210 A JP H02256210A JP 7907189 A JP7907189 A JP 7907189A JP 7907189 A JP7907189 A JP 7907189A JP H02256210 A JPH02256210 A JP H02256210A
Authority
JP
Japan
Prior art keywords
electrode
pattern
trimming
frequency
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7907189A
Other languages
Japanese (ja)
Other versions
JPH0656813B2 (en
Inventor
Naotake Okamura
尚武 岡村
Teruhisa Tsuru
輝久 鶴
Tetsuo Taniguchi
哲夫 谷口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP1079071A priority Critical patent/JPH0656813B2/en
Publication of JPH02256210A publication Critical patent/JPH02256210A/en
Publication of JPH0656813B2 publication Critical patent/JPH0656813B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Filters And Equalizers (AREA)
  • Coils Or Transformers For Communication (AREA)

Abstract

PURPOSE:To prevent a shielding electrode film from cracking from a trimming hole or a pattern electrode from oxidizing by regulating a frequency by trimming the film. CONSTITUTION:First sheet layers 6, 7 made of dielectric or insulator, shielding electrode films 8, 9 and second sheet layers 10, 11 made of dielectric or insulator are sequentially formed from a body 5 of a band pass filter on both side faces of the body 5. When the central frequency of the filter is regulated, the film 8 is trimmed. Thus, since the area of the film 8 is reduced, magnetic influence of a coil pattern is reduced, the inductance of a coil pattern is increased, it can be trimmed without considerably increasing the output of trimming. Accordingly, it can suppress crack of the filter. Since the electrodes 3, 4 are not exposed, it can prevent the electrodes 3, 4 from oxidizing.

Description

【発明の詳細な説明】 産業上曵肌且公団 本発明は、共振器、フィルタ等のインダクターを含む電
子部品の周波数調整方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a frequency adjustment method for electronic components including inductors such as resonators and filters.

皿米■且歪 インダクターを含む電子部品としては、例えば第8図に
示すようなバンドパスフィルタ51がある。このバンド
パスフィルタ51は誘電体層52の表裏両面にパターン
電極53が形成され、このパターン電極53上には電極
53側から順に第1、シート層54とシールド電極膜5
5と第2シート層56とが積層されている。
An example of an electronic component including a distortion inductor is a bandpass filter 51 as shown in FIG. This band-pass filter 51 has a patterned electrode 53 formed on both the front and back sides of a dielectric layer 52, and on this patterned electrode 53, a first sheet layer 54, a shield electrode film 5, a sheet layer 54, and a shield electrode film 5 are formed in order from the electrode 53 side.
5 and a second sheet layer 56 are laminated.

ところで、上記バンドパスフィルタ510周波数特性(
中心周波数)は設計値と同一となる必要があるが、製造
工程における環境等により設計値と異なることがある。
By the way, the frequency characteristics of the bandpass filter 510 (
The center frequency) needs to be the same as the design value, but may differ from the design value depending on the environment during the manufacturing process.

そこで従来は、積層体内部のパターン電極53をトリミ
ングすることによりバンドパスフィルタ51の中心周波
数の調整を行っていた。
Conventionally, therefore, the center frequency of the bandpass filter 51 was adjusted by trimming the pattern electrode 53 inside the laminate.

しよ゛と る しかしながら、上記従来の方法では、バンドパスフィル
タ51表面(第2シートJi56表面)とパターン電極
53との距離が大きいく即ち、トリミング穴57が深い
)ため、トリミング時の出力を上げる必要がある。この
ため、トリミング穴からクラックを生じることがある。
However, in the conventional method described above, the distance between the surface of the bandpass filter 51 (the surface of the second sheet Ji 56) and the pattern electrode 53 is large (that is, the trimming hole 57 is deep), so the output during trimming is It is necessary to raise it. For this reason, cracks may occur from the trimming holes.

加えて、トリミング穴におけるパターン電極53が露出
しているため、パターン電極53が酸化することがある
In addition, since the pattern electrode 53 is exposed in the trimming hole, the pattern electrode 53 may be oxidized.

これらのことから、バンドパスフィルタ51の特性が劣
化するという課題を有していた。
For these reasons, there was a problem in that the characteristics of the bandpass filter 51 deteriorated.

そこで、本発明は上記課題を考慮してなされたものであ
り、トリミング穴からクラックが生じたり、パターン電
極が酸化するのを防止することにより、インダクターを
含む電子部品の特性を飛躍的に向上させうるインダクタ
ーを含む電子部品の周波数調整方法の提供を目的とする
Therefore, the present invention was made in consideration of the above-mentioned problems, and dramatically improves the characteristics of electronic components including inductors by preventing cracks from occurring from trimming holes and oxidation of pattern electrodes. The purpose of the present invention is to provide a method for adjusting the frequency of electronic components including transparent inductors.

i   ′ るための 上記目的を達成するため本発明は、誘電体層の少なくと
も一方の面にインダクターを構成するパターン電極が形
成され、このパターン電極上にはパターン電極側から順
に第1シート層とシールド電極膜と第2シート層とが形
成されたインダクターを含む電子部品の周波数調整方法
において、上記シールド電極膜をトリミングすることに
より周波数の調整を行うことを特徴とする。
In order to achieve the above object, the present invention includes a patterned electrode forming an inductor on at least one surface of a dielectric layer, and a first sheet layer and a first sheet layer formed on this patterned electrode in order from the patterned electrode side. A method for adjusting the frequency of an electronic component including an inductor in which a shield electrode film and a second sheet layer are formed, characterized in that the frequency is adjusted by trimming the shield electrode film.

北−U 上記の構成であれば、シールド電極膜と電子部品表面と
の距離は、パターン電極と電子部品表面との距離より小
さい。したがって、トリミングの出力を余り大きくする
ことなくトリミング可能であるので、バンドパスフィル
タにクランクが生じるのを抑制することができる。
North-U With the above configuration, the distance between the shield electrode film and the surface of the electronic component is smaller than the distance between the pattern electrode and the surface of the electronic component. Therefore, since trimming can be performed without increasing the trimming output too much, occurrence of a crank in the bandpass filter can be suppressed.

加えて、パターン電極が露出することがないので、パタ
ーン電極が酸化するのを防止することができる。
In addition, since the pattern electrode is not exposed, it is possible to prevent the pattern electrode from being oxidized.

スー」Lニガ 本発明の一実施例を、第1図乃至第7図に基づいて、以
下に説明する。
An embodiment of the present invention will be described below with reference to FIGS. 1 to 7.

第1図は本発明を適用したバンドパスフィルタの外観斜
視図であり、第2図は第1図のn−n線断面である。こ
のバンドパスフィルタは、誘電体N2と、この誘電体層
20表裏両面に形成されたパターン電極3・4とから成
る本体部5を有している。この本体部5の両面には、誘
電体又は絶縁体から成る第1シートN6・7と、シール
ド電極膜8・9と、誘電体又は絶縁体から成る第2シー
ト層10・11とが本体部5側から順に形成されている
。また、バンドパスフィルタの両側面には、入力端子電
極13と出力端子電極14とアース電極15・16とが
形成されている。
FIG. 1 is an external perspective view of a bandpass filter to which the present invention is applied, and FIG. 2 is a cross section taken along line nn in FIG. 1. This bandpass filter has a main body portion 5 consisting of a dielectric N2 and pattern electrodes 3 and 4 formed on both the front and back surfaces of this dielectric layer 20. On both sides of the main body part 5, first sheets N6 and 7 made of a dielectric or an insulator, shield electrode films 8 and 9, and second sheet layers 10 and 11 made of a dielectric or an insulator are provided. They are formed in order from the 5th side. Furthermore, an input terminal electrode 13, an output terminal electrode 14, and ground electrodes 15 and 16 are formed on both sides of the bandpass filter.

前記パターン電極3は、第3図に示すように、略コ字状
のパターン電極31と略し字状のパターン電極32とか
ら構成される一方、前記パターン電極4は略し字状のパ
ターン電極41と略コ字状のパターン電極42とから構
成される。上記4つのパターン電極31・32・41・
42のうち図中左側のパターン電極31・41は、1つ
のコンデンサ電極パターン31a・41a(C+)に各
々コイルパターン31b (Ll 、  Lz)、或い
はコイルパターン41b(L3)を接続した構造である
。上記コンデンサ電極パターン31a・41aは、前記
誘電体層2の表裏方向において対向しており、また上記
コイルパターン31b・41bは誘電体層2を貫通する
VIAホール21aを介して接続されている。更に、パ
ターン電極3の端部に形成された舌片31cは前記出力
端子電極14と接続され、パターン電極3の端部に形成
された舌片31dは前記アース電極15と接続されてい
る。
As shown in FIG. 3, the pattern electrode 3 is composed of a substantially U-shaped pattern electrode 31 and an oval-shaped pattern electrode 32, while the pattern electrode 4 is composed of an oval-shaped pattern electrode 41 and an oval-shaped pattern electrode 32. It is composed of a substantially U-shaped pattern electrode 42. The above four pattern electrodes 31, 32, 41,
42, the pattern electrodes 31 and 41 on the left side in the figure have a structure in which a coil pattern 31b (Ll, Lz) or a coil pattern 41b (L3) is connected to one capacitor electrode pattern 31a, 41a (C+), respectively. The capacitor electrode patterns 31a and 41a face each other in the front and back directions of the dielectric layer 2, and the coil patterns 31b and 41b are connected via a VIA hole 21a penetrating the dielectric layer 2. Furthermore, the tongue piece 31c formed at the end of the pattern electrode 3 is connected to the output terminal electrode 14, and the tongue piece 31d formed at the end of the pattern electrode 3 is connected to the earth electrode 15.

一方、右側のパターン電極32・42は、上記と同様に
1つのコンデンサ電極パターン32a・42a(Cz)
に各々コイルパターン32b(L6)或いはコイルパタ
ーン42b (L4 、Ls )を接続した構造であり
、上記コイルパターン32b・42bは誘電体層2を貫
通するVIAホール21bを介して接続されている。ま
た、パターン電極3の端部に形成された舌片32cは前
記アース電極16と接続され、パターン電極4の端部に
形成された舌片41cは前記入力端子電極13と接続さ
れている。更に、パターン電極31の内方に形成された
舌片31eとパターン電極42の内方に形成された舌片
42eとは前記誘電体N2を挟んで対向しており、これ
によってコンデンサC3を構成している。
On the other hand, the pattern electrodes 32 and 42 on the right side are one capacitor electrode pattern 32a and 42a (Cz) in the same manner as above.
A coil pattern 32b (L6) or a coil pattern 42b (L4, Ls) is connected to each of the coil patterns 32b and 42b, and the coil patterns 32b and 42b are connected via a VIA hole 21b penetrating the dielectric layer 2. Further, the tongue piece 32c formed at the end of the pattern electrode 3 is connected to the ground electrode 16, and the tongue piece 41c formed at the end of the pattern electrode 4 is connected to the input terminal electrode 13. Further, the tongue piece 31e formed on the inside of the pattern electrode 31 and the tongue piece 42e formed on the inside of the pattern electrode 42 face each other with the dielectric N2 in between, thereby forming a capacitor C3. ing.

上記の構造であれば、第4図の等価回路に示すようなバ
ンドパスフィルタを構成する。
With the above structure, a bandpass filter as shown in the equivalent circuit of FIG. 4 is constructed.

ここで、上記バンドパスフィルタの中心周波数の調整を
行う場合には、第5図及び第6図に示すように、シール
ド電極膜8のトリミングを行う。
Here, when adjusting the center frequency of the bandpass filter, the shield electrode film 8 is trimmed as shown in FIGS. 5 and 6.

そうすると、シールド電極膜8の面積が減少するので、
コイルパターンに対する磁気的影響が小さ(なりコイル
パターンのインダクタンスが大きくなる。このため、第
7図に示すようにバンドパスフィルタの中心周波数が低
下する。
In this case, the area of the shield electrode film 8 decreases, so
The magnetic influence on the coil pattern is small (and the inductance of the coil pattern is large). Therefore, as shown in FIG. 7, the center frequency of the bandpass filter is lowered.

この際、シールド電極膜8・9とバンドパスフィルタ表
面との距離は20〜40pmであるので、トリミング穴
45の深さは約50μmでよい。したがって、トリミン
グの出力を余り大きくすることなくトリミング可能であ
るため、バンドパスフィルタにクランクが生じるのを抑
制することができる。加えて、パターン電極3・4が露
出することがないので、パターン電極3・4が酸化する
のを防止することができる。
At this time, since the distance between the shield electrode films 8 and 9 and the surface of the bandpass filter is 20 to 40 pm, the depth of the trimming hole 45 may be about 50 μm. Therefore, since trimming can be performed without increasing the trimming output too much, occurrence of a crank in the bandpass filter can be suppressed. In addition, since the pattern electrodes 3 and 4 are not exposed, it is possible to prevent the pattern electrodes 3 and 4 from being oxidized.

尚、トリミング穴45の径を余り大きくするとシールド
効果が悪化するので、シールド効果が悪化しない程度の
径にする必要がある。
Incidentally, if the diameter of the trimming hole 45 is made too large, the shielding effect will deteriorate, so it is necessary to set the diameter to an extent that does not deteriorate the shielding effect.

また、上記実施例においては6箇所にトリミングを施し
たが、これに限定するものではなく、中心周波数が余り
ズしていない場合にはトリミング数を少なくする一方、
中心周波数が大きくズしている場合にはトリミング数を
更に多くして調整することが可能である。
Also, in the above embodiment, trimming was performed at six locations, but the invention is not limited to this, and if the center frequency does not shift too much, the number of trimmings may be reduced.
If the center frequency deviates significantly, it is possible to adjust by increasing the number of trimmings.

l夙夏羞来 以上説明したように本発明によれば、トリミングの出力
を余り大きくすることなくトリミング可能であるので、
バンドパスフィルタにクラックが生じるのを抑制するこ
とができる。加えて、パターン電極が露出することがな
いので、パターン電極が酸化するのを防止することがで
きる。
As explained above, according to the present invention, trimming is possible without increasing the trimming output too much.
Cracks can be suppressed from occurring in the bandpass filter. In addition, since the pattern electrode is not exposed, it is possible to prevent the pattern electrode from being oxidized.

これらのことから、インダクターを含む電子部品のの特
性を飛躍的に向上させることができるという効果を奏す
る。
For these reasons, it is possible to dramatically improve the characteristics of electronic components including inductors.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はバンドパスフィルタの外観斜視図、第2図は第
1図のn−n線断面図、第3図はバンドパスフィルタ本
体の平面図、第4図はバンドパスフィルタの等価回路図
、第5図は第1図のバンドパスフィルタの周波数調整を
行った後の外観斜視図、第6図は第5図のVl−Vl線
断面図、第7図は本発明により調整したバンドパスフィ
ルタの周波数特性を示すグラフ、第8図は従来の方法で
周波数調整を行った場合の断面図である。 第1図 2−・・誘電体層、3・4・・・パターン電極、6・7
・・・第1シート層、8・9・・・シールド電極膜、1
011・・・第2シート層、45・・・トリミング穴。 特許出願人二株式会社村田製作所
Fig. 1 is an external perspective view of the bandpass filter, Fig. 2 is a sectional view taken along line nn in Fig. 1, Fig. 3 is a plan view of the bandpass filter main body, and Fig. 4 is an equivalent circuit diagram of the bandpass filter. , FIG. 5 is a perspective view of the appearance of the bandpass filter in FIG. 1 after frequency adjustment, FIG. 6 is a sectional view taken along the line Vl-Vl in FIG. 5, and FIG. 7 is a bandpass filter adjusted according to the present invention. FIG. 8, a graph showing the frequency characteristics of the filter, is a cross-sectional view when frequency adjustment is performed using a conventional method. Fig. 1 2--Dielectric layer, 3, 4, pattern electrode, 6, 7
...First sheet layer, 8, 9... Shield electrode film, 1
011...Second sheet layer, 45...Trimming hole. Patent applicant 2 Murata Manufacturing Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] (1)誘電体層の少なくとも一方の面にインダクターを
構成するパターン電極が形成され、このパターン電極上
にはパターン電極側から順に第1シート層とシールド電
極膜と第2シート層とが形成されたインダクターを含む
電子部品の周波数調整方法において、 上記シールド電極膜をトリミングすることにより周波数
の調整を行うことを特徴とするインダクターを含む電子
部品の周波数調整方法。
(1) A patterned electrode constituting an inductor is formed on at least one surface of the dielectric layer, and a first sheet layer, a shield electrode film, and a second sheet layer are formed on this patterned electrode in this order from the patterned electrode side. A method for adjusting the frequency of an electronic component including an inductor, characterized in that the frequency is adjusted by trimming the shield electrode film.
JP1079071A 1989-03-29 1989-03-29 Frequency adjustment method for electronic components including inductors Expired - Lifetime JPH0656813B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1079071A JPH0656813B2 (en) 1989-03-29 1989-03-29 Frequency adjustment method for electronic components including inductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1079071A JPH0656813B2 (en) 1989-03-29 1989-03-29 Frequency adjustment method for electronic components including inductors

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP15633495A Division JP3178990B2 (en) 1995-06-22 1995-06-22 Frequency adjustment method for multilayer electronic components

Publications (2)

Publication Number Publication Date
JPH02256210A true JPH02256210A (en) 1990-10-17
JPH0656813B2 JPH0656813B2 (en) 1994-07-27

Family

ID=13679655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1079071A Expired - Lifetime JPH0656813B2 (en) 1989-03-29 1989-03-29 Frequency adjustment method for electronic components including inductors

Country Status (1)

Country Link
JP (1) JPH0656813B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09121133A (en) * 1996-08-23 1997-05-06 Murata Mfg Co Ltd Method for adjusting frequency of resonator
US5952901A (en) * 1996-11-20 1999-09-14 Alps Electric Co., Ltd. Laminated electronic component with trimmable parallel electrodes

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713717A (en) * 1980-06-23 1982-01-23 Hull Corp Trimmer operable electric inductance and method of producing same
JPS6119122A (en) * 1984-07-05 1986-01-28 Nec Corp Heat treatment equipment of semiconductor integrated circuit device
JPS6220981U (en) * 1985-07-16 1987-02-07
JPS63104452A (en) * 1986-10-22 1988-05-09 Oki Electric Ind Co Ltd Nanufacture of semiconductor device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713717A (en) * 1980-06-23 1982-01-23 Hull Corp Trimmer operable electric inductance and method of producing same
JPS6119122A (en) * 1984-07-05 1986-01-28 Nec Corp Heat treatment equipment of semiconductor integrated circuit device
JPS6220981U (en) * 1985-07-16 1987-02-07
JPS63104452A (en) * 1986-10-22 1988-05-09 Oki Electric Ind Co Ltd Nanufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09121133A (en) * 1996-08-23 1997-05-06 Murata Mfg Co Ltd Method for adjusting frequency of resonator
US5952901A (en) * 1996-11-20 1999-09-14 Alps Electric Co., Ltd. Laminated electronic component with trimmable parallel electrodes

Also Published As

Publication number Publication date
JPH0656813B2 (en) 1994-07-27

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