JP2933272B2 - Manufacturing method of resonator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a resonator in which the capacitance of a resonator is adjusted by trimming to adjust the frequency.

[0002]

2. Description of the Related Art The above-described frequency adjustment of a resonator has conventionally been performed as follows. That is, trimming is performed using a trimming device such as a laser trimmer while measuring the resonance frequency using a measuring device such as a network analyzer.

[0003]

Therefore, according to the conventional method, one measuring device and one trimming device are required for trimming one product, and the trimming device has a long waiting time and a high production efficiency. However, there was a disadvantage that it did not rise. Further, as shown in FIG. 7, for example, a conventional trimming electrode 20 is formed by printing or the like on a surface of an electronic component manufactured in a laminated structure, with a part thereof connected to a circuit provided inside. Therefore, an error occurs in the distance a from the end of the resonator to the trimming electrode 20, and the manufactured resonator is set at a predetermined set position.
Since the trimming is performed as described above, an error occurs in the distance b from the end of the resonator to the trimming position (indicated by a dashed line) due to a positional shift during setting. For this reason, even if the trimming device is accurately moved from its standby position to a desired position, the position on the electrode to be trimmed is shifted by about 0.3 to 0.5 mm, and accurate trimming cannot be performed. Was defective.

The present invention has been made in order to solve such a problem, and even if there is an error in forming a trimming electrode and a positional error in setting a resonator, regardless of the error, It is an object of the present invention to provide a method of manufacturing a resonator which can perform trimming accurately, improve the yield, and improve the operation rate of the trimming device.

[0005]

In order to solve the above-mentioned problems, a method of manufacturing a resonator according to the present invention comprises providing a pair of shield electrode layers at both ends of a coil electrode layer with a dielectric layer interposed therebetween. A first step of manufacturing a plurality of resonators each having a trimming capacitor electrode having a predetermined area formed outside of at least one shield electrode layer via a dielectric layer;
A second step of dividing the plurality of resonators fabricated on each product number of target frequency, each of the segmented resonators
A third step of performing a work of trimming a central area of the trimming capacitor electrode by a single area by a single trimming by a single trimming line for each section. And

[0006]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be specifically described below. FIG. 1 is a plan view showing an electronic component on which an example of a trimming electrode used in the present invention is formed. This electronic component is manufactured so as to constitute, for example, a resonator. For example, as shown in FIG. 2, a coil electrode layer 1 is provided at a center portion in a thickness direction, and a gap is provided below the coil electrode layer 1. A shield electrode layer 5 is formed with the dielectric layer 3 interposed therebetween, and a protective layer 9 is further formed below the shield electrode layer 5.

On the other hand, a shield electrode layer 4 is formed on the upper side of the coil electrode layer 1 with a dielectric layer 2 interposed therebetween, and the shield electrode layer 4 is provided between the shield electrode layer 4 and the coil electrode layer 1. And a portion 2a of the dielectric layer 2 between
The counter electrode 6 is formed in the presence of the above. On the upper side of the shield electrode layer 4, for example, a rectangular trimming electrode 8 is formed with a dielectric layer 7 interposed therebetween. ing.

[0008] On the side surface of the laminated structure, there are two opposing surfaces.
External connection terminals 11 and 12 are formed at locations, and both ends of the coil electrode layer 1 formed on the dielectric layer 3 are connected to the external connection terminals 11 and 12 as shown in FIG. Have been. In addition, one external connection terminal 12 is connected to FIG.
As shown by a broken line, one end of the shield electrode layer 4 formed below the dielectric layer 7 is connected. The shield electrode layer 5 is also formed as shown by a broken line in FIG. The other external connection terminal 11 is connected to one end of the counter electrode 6 on one side of the shield electrode layer 4 and one end of the trimming electrode 8. The rectangular trimming electrode above the shield electrode layer 4. Numeral 8 is manufactured for trimming, and has a smaller area than the lower counter electrode 6.

Therefore, in the resonator having such a configuration, when the external connection terminals 11 and 12 are connected to predetermined external terminals, the coil electrode layer 1 functions as a coil, and the upper and lower shield electrode layers 4 are connected to each other. The opposing electrode 6 and the trimming electrode 8 oppose each other to form a capacitor with the shield electrode layer 4. FIG. 5 is an equivalent circuit diagram. Therefore, when the trimming electrode 8 is trimmed, the capacitance changes and the frequency can be adjusted.

Next, the case where the above resonator is trimmed by the method of the present invention will be described as an example. First, the resonator is operated and set at a set position arranged around a trimming device such as a laser trimmer (not shown). Thereafter, the trimming device is moved from the standby position, and the center of the trimming electrode 8 is trimmed into a square by a single closed line D shown by a dashed line in FIG. As a result, a portion of the trimming electrode 8 surrounded by the closed line D is electrically disconnected. Thereby, the trimming is completed.

The trimming electrode 8 is formed in a predetermined area sufficiently larger than the trimming portion, and the area of the portion surrounded by the closed line D is also constant. Therefore, when the trimming is performed in this manner, the area of the remaining electrode portion becomes constant for each product even when the closed line D moves left, right, up and down as a whole. As a result, the capacitance of the capacitor formed by the remaining portion of the trimming electrode 8 formed in a fixed area by printing or the like becomes a desired value, and the frequency of the resonator is adjusted to the target frequency.

Therefore, in the case of the present invention, even if there is a slight positional error when forming the trimming electrode or when setting the electronic components, each product is required to have the same amount of required capacitance. Only the frequency can be trimmed, and the frequency can be adjusted accurately. Therefore, the process of manufacturing a product can be performed as follows. That is, a large number of electronic components within a range where the frequency can be adjusted by trimming are manufactured in advance. Next, the electronic components are classified according to the number of products having the target frequency. The divided electronic components are trimmed by the method of the present invention. After that, the frequency characteristics of each electronic component are measured and the electronic components are sorted into non-defective products and defective products.

Therefore, a large number of electronic components can be continuously trimmed only by the trimming device and only measured by the measuring device. When trimming a single product as in the conventional case, the measuring device can be used. Since both the trimming device and the trimming device are not required at the same time, the operating rates of the trimming device and the measuring device can be improved. According to the present invention, the frequency of the resonator is adjusted in the above embodiment.
It goes without saying that the present invention can be similarly applied to a filter having two trimming electrodes 8 as shown in FIG. D in FIG. 6 indicates a trimming line as before.

Further, in the above embodiment, the trimming electrode is formed on the surface of the electronic component. However, the trimming electrode is formed inside the electronic component and on a surface layer portion that can be trimmed from the outside. Is also good.

[0015]

As described in detail above, according to the present invention, it is possible to trim only a predetermined amount of capacitance, and the area of the remaining electrode portion can be set to a constant value. The frequency can be adjusted and the product yield can be improved. In addition, there is no need to measure characteristics when performing trimming, so that the waiting time of the trimming device can be reduced. Further, there is an excellent effect that the production efficiency can be improved by manufacturing the electronic component by performing the trimming and the characteristic measurement in different steps.

[Brief description of the drawings]

FIG. 1 is a plan view showing an electronic component used in the present invention.

FIG. 2 is a side sectional view of the electronic component shown in FIG.

FIG. 3 is a plan view showing a portion near a coil electrode layer of FIG. 2;

FIG. 4 is a plan view showing a portion near a trimming electrode of FIG. 2;

FIG. 5 is an equivalent circuit diagram of the electronic component of FIG. 2;

FIG. 6 is a plan view showing a filter having two trimming electrodes to which the present invention can be applied.

FIG. 7 is an explanatory diagram of a conventional method.

[Explanation of symbols]

 Reference Signs List 1 coil electrode layer 2, 3 dielectric layer 4, 5 shield electrode layer 7 dielectric layer 8 trimming electrode 10 electronic component

Continued on the front page (72) Inventor Teruhisa Tsuru 2-26-10 Tenjin, Nagaokakyo-shi, Kyoto Inside Murata Manufacturing Co., Ltd. (72) Inventor Ken Tonegawa 2-26-10 Tenjin, Nagaokakyo-shi, Kyoto Murata Co., Ltd. (56) References JP-A-2-224513 (JP, A) JP-A-2-256210 (JP, A) JP-A-63-292809 (JP, A) JP-A-2-78212 (JP, A) ) Japanese Utility Model Showa 62-20981 (JP, U)

Claims (1)

(57) [Claims] A pair of shield electrode layers are provided at both ends of a coil electrode layer with a dielectric layer interposed therebetween, and a trimming capacitor electrode having a predetermined area is provided outside the at least one shield electrode layer via the dielectric layer. a first step of manufacturing a plurality of resonators but made formed, a second step of dividing into individual product number of target frequency a plurality of resonators fabricated, for each of the segmented resonators A third step of performing, for each section, an operation of trimming a central portion of the trimming capacitor electrode by a single trimming by a single trimming line by a predetermined area. Method of manufacturing the vessel.