JP2687540B2 - Trimming device for multilayer capacitors - Google Patents

Description

TECHNICAL FIELD The present invention relates to a trimming device for a multilayer capacitor,
In particular, the present invention relates to a multilayer capacitor trimming device that adjusts the capacitance value of a multilayer ceramic capacitor built into a ceramic substrate.

Conventional technology Conventionally, the capacitance of a capacitor cannot be adjusted at the manufacturing stage.Therefore, when manufacturing a capacitor that requires high accuracy, the capacitance value should be measured in the post-manufacturing inspection to classify the accuracy. There is.

In such a conventional method for manufacturing a capacitor, since the accuracy is divided after the capacitors are almost finished, it is inevitable that a large number of defective products will occur and the yield will be remarkably reduced.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made to eliminate such drawbacks of the conventional art, and the object thereof is to:
It is an object of the present invention to provide a trimming device for a laminated capacitor in which the yield is improved by adjusting the capacitance value during manufacturing.

Structure of the Invention A trimming device for a multilayer capacitor according to the present invention comprises:
Conveying means for moving the multilayer capacitor in a horizontal plane, a capacitance measuring device for measuring the capacitance value of the multilayer capacitor, and a processing optical system for irradiating the electrode part of the multilayer capacitor with a laser beam to form a notch. And a control means for repeatedly controlling the capacitance measurement and the notch operation until the measured value reaches a predetermined value by providing a notch in the electrode by the processing optical system when the measurement location of the capacitance measuring device is not a predetermined value. It is characterized by including and.

Embodiment Next, an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic configuration diagram of one embodiment of the present invention. The monolithic ceramic capacitor substrate 6 is mounted on the transfer unit 7 which is movable in the XYZ directions, and a signal for starting the work is given to the control device 1. The carrier unit 7 has a multilayer ceramic capacitor substrate 6 on the measurement terminal of the capacitance measuring device 2 for measuring capacitance.
Position the part of the area to be trimmed at once in the XYZ directions and set the measuring terminal of the capacitor to be trimmed to VHF.
It is selected by the signal switching device 3.

After that, the capacitance is measured by the capacitance measuring device 2. If the measured value is larger than the desired capacitance, place the electrode of the capacitor to be trimmed.
As shown in FIG. 2, one electrode 10 of the electrodes 10 and 11 is positioned by the processing optical system 5 to position the laser beam, and then the laser beam is emitted to cut and cut. After disconnection, the capacitance is remeasured, and if the desired capacitance is not reached, the electrode of the capacitor is further disconnected, and this operation is repeated until the desired capacitance value is obtained.

After the desired capacitance is obtained, the measurement terminal of the next capacitor to be trimmed is selected by the VHF signal switching device 3 and the same laser trimming process is performed. After laser trimming of all capacitors at this portion, the portion to be trimmed next to the laminated ceremic capacitor substrate 6 is moved to the measuring terminal by the transport unit 7 and positioned, and laser trimming is performed.

After trimming all capacitors on the monolithic ceramic capacitor substrate 6, the monolithic ceramic capacitor substrate 6
Is moved to the discharge position by the transport unit 7, and laser trimming of the laminated ceramic capacitor substrate 6 is completed. The above-described series of movements are program-controlled by the control device 1.

EFFECTS OF THE INVENTION As described above, according to the present invention, by performing laser trimming of a capacitor on a laminated ceramic capacitor substrate, a highly accurate capacitor can be manufactured with a high yield, and even a capacitor that is defective in the past can be manufactured. This has the effect of omitting the molding process and sorting process that were performed.

[Brief description of the drawings]

1 is a block diagram of an embodiment of the present invention, FIG. 2 (A) is a plan view of a monolithic ceramic capacitor, and FIG. 2 (B) is a sectional view taken along line AA of FIG. 2 (A). Is. Description of symbols of main parts 1 ... Control device 2 ... Capacitance measuring device 4 ... Laser oscillator 5 ... Processing optical system 6 ... Multilayer ceramic capacitor substrate 7 ... Transport unit 10,11 ... Electrodes

Claims (1)

(57) [Claims] 1. A conveying means for moving a multilayer capacitor in a horizontal plane, a capacitance measuring device for measuring the capacitance value of the multilayer capacitor, and a cutout formed by irradiating an electrode portion of the multilayer capacitor with a laser beam. A machining optical system provided with, and when the measured value of the capacitance measuring device is not a predetermined value, a notch is provided in the electrode by the machining optical system, and the capacitance measurement and the notch operation are performed until the measured value reaches a predetermined value. A trimming device for a multilayer capacitor, comprising: a control unit for repeatedly controlling.