JPH08979Y2 - 反応管の保持装置 - Google Patents

反応管の保持装置

Info

Publication number
JPH08979Y2
JPH08979Y2 JP1987061799U JP6179987U JPH08979Y2 JP H08979 Y2 JPH08979 Y2 JP H08979Y2 JP 1987061799 U JP1987061799 U JP 1987061799U JP 6179987 U JP6179987 U JP 6179987U JP H08979 Y2 JPH08979 Y2 JP H08979Y2
Authority
JP
Japan
Prior art keywords
reaction tube
manifold
ring
holding device
connecting portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987061799U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63168029U (en:Method
Inventor
光明 小美野
忠 犬飼
Original Assignee
東京エレクトロン東北株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン東北株式会社 filed Critical 東京エレクトロン東北株式会社
Priority to JP1987061799U priority Critical patent/JPH08979Y2/ja
Publication of JPS63168029U publication Critical patent/JPS63168029U/ja
Application granted granted Critical
Publication of JPH08979Y2 publication Critical patent/JPH08979Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Devices For Use In Laboratory Experiments (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP1987061799U 1987-04-23 1987-04-23 反応管の保持装置 Expired - Lifetime JPH08979Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987061799U JPH08979Y2 (ja) 1987-04-23 1987-04-23 反応管の保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987061799U JPH08979Y2 (ja) 1987-04-23 1987-04-23 反応管の保持装置

Publications (2)

Publication Number Publication Date
JPS63168029U JPS63168029U (en:Method) 1988-11-01
JPH08979Y2 true JPH08979Y2 (ja) 1996-01-17

Family

ID=30895463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987061799U Expired - Lifetime JPH08979Y2 (ja) 1987-04-23 1987-04-23 反応管の保持装置

Country Status (1)

Country Link
JP (1) JPH08979Y2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119710650B (zh) * 2025-02-28 2025-06-20 罗博特科智能科技股份有限公司 一种pecvd反应装置及调节方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147408U (en:Method) * 1980-04-04 1981-11-06
JPS60198155A (ja) * 1984-03-23 1985-10-07 株式会社日立製作所 センサ−防熱滅菌装置

Also Published As

Publication number Publication date
JPS63168029U (en:Method) 1988-11-01

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