JPH089164Y2 - 蒸着装置 - Google Patents
蒸着装置Info
- Publication number
- JPH089164Y2 JPH089164Y2 JP1991008496U JP849691U JPH089164Y2 JP H089164 Y2 JPH089164 Y2 JP H089164Y2 JP 1991008496 U JP1991008496 U JP 1991008496U JP 849691 U JP849691 U JP 849691U JP H089164 Y2 JPH089164 Y2 JP H089164Y2
- Authority
- JP
- Japan
- Prior art keywords
- hearth
- vapor deposition
- opening
- mounting table
- exchange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007740 vapor deposition Methods 0.000 title claims description 48
- 230000007246 mechanism Effects 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 24
- 238000003825 pressing Methods 0.000 claims description 15
- 239000000126 substance Substances 0.000 claims description 6
- 230000003028 elevating effect Effects 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 20
- 238000001816 cooling Methods 0.000 description 11
- 239000000498 cooling water Substances 0.000 description 11
- 230000032258 transport Effects 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 230000008020 evaporation Effects 0.000 description 8
- 238000001704 evaporation Methods 0.000 description 8
- 238000005755 formation reaction Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 241000258957 Asteroidea Species 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1991008496U JPH089164Y2 (ja) | 1991-01-31 | 1991-01-31 | 蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1991008496U JPH089164Y2 (ja) | 1991-01-31 | 1991-01-31 | 蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04100253U JPH04100253U (cs) | 1992-08-31 |
| JPH089164Y2 true JPH089164Y2 (ja) | 1996-03-13 |
Family
ID=31740874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1991008496U Expired - Lifetime JPH089164Y2 (ja) | 1991-01-31 | 1991-01-31 | 蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH089164Y2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4762763B2 (ja) * | 2006-03-10 | 2011-08-31 | 富士フイルム株式会社 | 真空蒸着装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60155670A (ja) * | 1984-01-25 | 1985-08-15 | Hitachi Ltd | ハ−ス構造 |
| JPS62167874A (ja) * | 1986-01-17 | 1987-07-24 | Sumitomo Electric Ind Ltd | 蒸着るつぼ交換装置 |
-
1991
- 1991-01-31 JP JP1991008496U patent/JPH089164Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04100253U (cs) | 1992-08-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |