WO2023024331A1 - 三室磁控溅射镀膜装置 - Google Patents

三室磁控溅射镀膜装置 Download PDF

Info

Publication number
WO2023024331A1
WO2023024331A1 PCT/CN2021/137361 CN2021137361W WO2023024331A1 WO 2023024331 A1 WO2023024331 A1 WO 2023024331A1 CN 2021137361 W CN2021137361 W CN 2021137361W WO 2023024331 A1 WO2023024331 A1 WO 2023024331A1
Authority
WO
WIPO (PCT)
Prior art keywords
chamber
coating
drive
magnetron sputtering
workpiece turret
Prior art date
Application number
PCT/CN2021/137361
Other languages
English (en)
French (fr)
Inventor
孙桂红
黄国兴
祝海生
梁红
陈立
唐莲
唐红波
Original Assignee
湘潭宏大真空技术股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 湘潭宏大真空技术股份有限公司 filed Critical 湘潭宏大真空技术股份有限公司
Publication of WO2023024331A1 publication Critical patent/WO2023024331A1/zh

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Definitions

  • the utility model relates to the field of vacuum coating, in particular to a three-chamber magnetron sputtering coating device.
  • the main purpose of this utility model is to provide a three-chamber magnetron sputtering coating device, aiming to solve the above technical problems.
  • a three-chamber magnetron sputtering coating device proposed by the utility model includes a running mechanism, a transmission part, an antechamber and a coating chamber.
  • the anterior chamber is connected with the coating chamber, and the conveying part, the anterior chamber and the coating chamber form the coating channel of the coated piece, the anterior chamber and the coating chamber are independently provided with vacuum equipment, and the workpiece turret is placed in the coating chamber through the operating mechanism
  • a blocking device is provided between the front chamber and the coating chamber, and the blocking device is used to block the coating channel so that the front chamber and the coating chamber are separate sealed chambers.
  • the running mechanism includes a revolution assembly and an autorotation assembly
  • the workpiece turret is provided with a plurality of autorotation axes
  • the workpiece turret is rotated by the revolution assembly
  • the autorotation axis is rotated by the autorotation assembly.
  • the transfer part is provided with a transfer mechanism
  • the transfer mechanism is provided with a first moving unit and a second moving unit
  • the workpiece turntable is transferred to the front chamber through the first moving unit
  • the workpiece turntable The racks are transferred to the antechamber by the second mobile unit.
  • the first moving unit is provided with a first driving assembly, a slide rail and a slider, and the slide rail is slid on the slide rail; when moving, the workpiece turret is located on the slider, and the The first drive assembly drives the workpiece turret to move along the slide rail.
  • the second moving unit is provided with a moving frame and a second driving assembly.
  • the workpiece turntable is located on the second driving assembly, and the second driving assembly is installed on the moving frame.
  • the first drive assembly drives the moving frame to move, and drives the workpiece turret to move; the second drive assembly drives the workpiece turret to move to the front chamber
  • the blocking device includes a partition body and a driving mechanism, and the drive mechanism is connected with the partition body to drive the partition body to move up and down.
  • the partition body includes a valve body, a valve, and a drive motor, and a through hole is opened on the valve body, and the through hole communicates the coating chamber with the coating chamber, and the valve is set at The through hole is connected with the driving motor, so that the driving motor drives the valve to close or open the through hole.
  • the partition body further includes a connecting portion, which is arranged on the top of the valve body and connected to the driving mechanism.
  • the driving mechanism includes two driving units, and the two driving units are respectively arranged on two sides of the valve body and connected to the valve body.
  • the drive unit includes a drive body and an output shaft, the output shaft is connected to the connecting portion, the drive body is connected to the output shaft to drive the output shaft to extend along its own extension direction .
  • the partition device also includes a drive mechanism connected to the partition body, the drive mechanism can drive the partition body to move up and down, so that the distance between the top of the partition body and the ground can be adjusted, so that the partition body can adapt to different front chambers and coatings Therefore, the compatibility of the partition body can be improved, so that the partition device can be used in a variety of different heights or different types of work rooms.
  • Fig. 1 is the structural representation of the multi-chamber vacuum magnetron sputtering coating device of the utility model embodiment
  • Fig. 2 is the bottom view of the multi-chamber vacuum magnetron sputtering coating device of the utility model embodiment
  • Fig. 3 is the structural representation of the coating chamber of the utility model embodiment
  • FIG. 4 is a schematic diagram of the internal structure of the front chamber of the utility model embodiment
  • Fig. 5 is the structural representation of the workpiece turret of the utility model embodiment
  • Fig. 6 is a structural schematic diagram when the partition device for the magnetron sputtering coating machine according to the embodiment of the present invention is opened;
  • Fig. 7 is a schematic structural view of the shut-off device for the magnetron sputtering coating machine according to the embodiment of the present invention.
  • the utility model provides a three-chamber magnetron sputtering coating device.
  • the three-chamber magnetron sputtering coating device provided by the embodiment of the present invention includes a running mechanism, a transmission part, an anterior chamber 2 and a coating chamber 3, and the coating piece is arranged on a workpiece turret 4, and the The transfer part is connected to the front chamber 2, and the front chamber 2 is connected to the coating chamber 3.
  • the transfer part, the front chamber 2 and the coating chamber 3 form a coating channel for the plated parts.
  • the front chamber 2 and the coating chamber 3 are independently provided with a vacuum Equipment 5, the workpiece turret 4 rotates in the coating chamber 3 through the operating mechanism, and a blocking device is provided between the front chamber 2 and the coating chamber 3, and the blocking device is used to block the coating channel so that The front chamber 2 and the coating chamber 3 are separate sealed chambers.
  • the time for vacuuming the coating chamber 3 can be reduced, energy can be saved, and the coated pieces with coatings can be sorted into the coating chamber 3 in order, which improves the working efficiency of the coating, and at the same time through
  • the partition body 10 is arranged between the front chamber 2 and the coating chamber 3 of the magnetron sputtering coating machine, so that the front chamber 2 and the coating chamber 3 can be cut off and sealed or opened and communicated by the partition body 10.
  • the partition device It also includes a drive mechanism connected to the partition body 10, the drive mechanism can drive the partition body 10 to move up and down, so that the distance between the top of the partition body 10 and the ground can be adjusted, so that the partition body 10 can be adapted to different front chambers 2 Cooperating with the coating chamber 3, the compatibility of the partition body 10 can be improved, so that the partition device can be used between various chambers of different heights or different models.
  • the coating machine is a vertical coating machine, with two transmission parts, one front chamber 2, one coating chamber 3, and a preparation part, along the coating direction of the first workpiece turret 4. , followed by the first conveying part, the first front chamber 2, the coating chamber 3, the second front chamber 2, and the second conveying part. rack 4.
  • the preparation part is set between two transfer parts, that is, at the entrance of the first transfer part and the outlet of the second transfer part, so that the coating machine is arranged in a "mouth" shape, which is convenient for the transfer of workpieces and saves Reduced manual operation time and improved work efficiency.
  • the workpiece turret 4 includes a top plate 41, a bottom plate 42, a support column and a side plate 43, the support column is fixed between the top plate 41 and the bottom plate 42, and a plurality of side plates 43 are provided, surrounding the top plate 41 and the bottom plate The outer circumference of 42, during coating, the plated frame is arranged on the side plate 43.
  • the conveying part is provided with a conveying mechanism 1, and the conveying mechanism 1 is provided with a first moving unit and a second moving unit, and the workpiece turret 4 in the conveying part is conveyed to the front chamber 2 through the first moving unit , the workpiece turret 4 is transferred to the front chamber 2 through the second moving unit.
  • the first mobile unit is provided with a first drive assembly, a slide rail 12 and a slide block 13, and the slide rail 12 is slid on the slide rail 12; when moving, the workpiece turret 4 is positioned on the slide block 13 Above, the first drive assembly drives the workpiece turret 4 to move along the slide rail 12, which is set in the X direction.
  • the second moving unit is provided with a moving frame 11 and a second driving assembly. When moving, the workpiece turntable 4 is located on the second driving assembly, and the second driving assembly is installed on the moving frame 11.
  • the first The driving assembly drives the moving frame 11 to move, and drives the workpiece turret 4 to move; the second driving assembly drives the workpiece turret 4 to move to the front chamber 2, which is set in the Y direction, and the X direction and the Y direction are perpendicular to each other.
  • the first driving assembly comprises a rack 14, a motor and a gear 15, the rack 14 is installed on the frame of the transmission part, the motor is installed on the moving frame 11, the gear 15 is fixedly connected with the rotating shaft of the motor, the gear 15 and the gear The bars 14 are engaged, and the motor drives the gear 15 to roll along the rack 14, so that the moving frame 11 and the workpiece turret 4 move in the X direction.
  • Slide rail 12 is provided with root.
  • the second drive assembly includes a transmission chain 16, a motor, a drive wheel and a drive shaft, the drive wheel is fixed on the drive shaft, and the motor drives the transmission chain 16 to rotate through the drive shaft and the drive wheel.
  • a first isolation door is provided at the connection between the front chamber 2 and the transmission part.
  • the first isolation door is arc-shaped.
  • a second isolation door is provided between the front chamber 2 and the coating chamber 3, and the second isolation door is a blocking device for maintaining the vacuum degree of the coating chamber 3 and reducing the time for vacuuming after the workpiece turret 4 enters the coating chamber 3 ,Improve work efficiency.
  • the isolation door generally adopts pneumatic door.
  • Front chamber 2 is provided with heating mechanism 6, first transfer mechanism 22 and first jacking mechanism 21, and described heating mechanism 6 is arranged on the chamber wall of front chamber 2, and heating mechanism 6 can adopt the heating of coating chamber 3 in the prior art Mechanism 6, there are multiple heating mechanisms 6, located at multiple corners of the front chamber 2.
  • the first transfer mechanism 22 is located at the bottom of the front chamber 2, and adopts chain transmission.
  • the bottom of the front chamber 2 is provided with the first bevel gear 15, and the first bevel gear 15 is driven by a motor.
  • the first transfer mechanism 22 is provided with a rotating shaft, and the end of the rotating shaft A second bevel gear 15 meshing with the first bevel gear 15 is provided.
  • the bottom of the front chamber 2 is also provided with a track, and the rotating shaft is provided with rollers rolling on the track.
  • the chain is driven by the transmission of two bevel gears 15.
  • the workpiece turret 4 moves in the front chamber 2 through the first transfer mechanism 22, the workpiece turret 4 is driven into the anterior chamber 2 by the second drive assembly, the first transfer mechanism 22 moves the workpiece turret 4 to the middle of the anterior chamber 2, and Carry out preheating to the plated piece on the workpiece turret 4.
  • the first jacking mechanism 21 is installed at the bottom of the front chamber 2 .
  • the first jacking mechanism 21 can adopt a cylinder or a screw lifting mechanism.
  • the first jacking mechanism 21 includes a driving part 211 and a bearing seat 212, the bearing seat 212 is installed on the driving part 211, and the bearing seat 212 can rotate with the work turntable, and the driving part 211 does not follow the workpiece. Turntable 4 rotates.
  • the top of the front chamber 2 is provided with a first power mechanism 7, and the first power mechanism 7 drives the workpiece turret 4 to rotate.
  • the power mechanism 7 can adopt the top rotating motor of the vacuum coating machine in the prior art.
  • the center of the workpiece turret 4 is provided with a hollow hole, and the power mechanism 7 is provided with a rotating disk 71, and the rotating disk 71 can be inserted into the hollow hole to drive the workpiece turret 4 to rotate.
  • the rotating disc 71 is provided with a positioning member, which can make the rotating disc 71 integrated with the workpiece turret 4 after being inserted into the hollow hole.
  • the front chamber 2 can be used as the preheating chamber of the coating chamber 3.
  • an evaporation coating source or a measurement and control sputtering coating source can be added to the front chamber 2.
  • the coating chamber 3 is provided with a coating mechanism, a heating mechanism 6 , a second transfer mechanism 31 and an operating mechanism.
  • the coating mechanism and the heating mechanism 6 are installed on the wall of the coating chamber 3 .
  • the coating mechanism adopts the target mechanism in the existing vertical coating machine.
  • the coating chamber 3 is provided with a second transfer mechanism 31 , and the workpiece turret 4 moves in the coating chamber 3 through the second transfer mechanism 31 .
  • the structure of the second transfer mechanism 31 is the same as that of the first transfer mechanism 22 .
  • Both the front chamber 2 and the coating chamber 3 are provided with position sensors for detecting whether the workpiece turret 4 has moved to a preset position.
  • the revolving assembly includes a second power mechanism 7 arranged at the top, and the structure of the second power mechanism 7 is the same as that of the first power mechanism 7 .
  • the coating chamber 3 is provided with a second jacking mechanism 32 , and the second jacking mechanism 32 is installed at the bottom of the coating chamber 3 .
  • the second jacking mechanism 32 has the same structure as the first jacking mechanism 21 .
  • the coating chamber 3 is provided with a film thickness monitoring mechanism, and the film thickness monitoring mechanism is provided with a film thickness controller, a film thickness sensor and an oscillator, and the film thickness controller is arranged on the electrical control unit of the coating machine. cabinet, and the film thickness sensor is installed on the top plate baffle plate 33 in the coating chamber 3 .
  • the coating machine is further provided with a preparation part, the preparation part is connected with the transmission part, and the preparation part is provided with a third drive assembly 8, and the structure of the third drive assembly 8 adopts chain transmission.
  • the workpiece turret 4 includes a top plate 41, a bottom plate 42, a plurality of rotation frames, and a plurality of rotation shafts 44.
  • the rotation shafts 44 are arranged between the top plate 41 and the bottom plate 42 and arranged along the circumferential direction.
  • the frame is mounted on an axis of rotation 44. Bearings are provided at the connection between the rotation shaft 44 and the top plate 41 and the bottom plate 42 , and the rotation frame is evenly arranged along the circumference of the top plate 41 and the bottom plate 42 .
  • the running mechanism includes a revolution assembly and an autorotation assembly 9
  • the workpiece turret 4 is rotated by the revolution assembly
  • the revolution assembly is the same as the embodiment, which is the power mechanism 7 .
  • Rotation assembly 9 rotates and comprises motor, driving wheel 91, transmission wheel 92 and rotation wheel 93, and driving wheel 91, transmission wheel 92 and rotation wheel 93 are gear 15, and the diameter of driving wheel 91 and rotation wheel 93 is less than transmission wheel 92
  • the motor is installed at the bottom of the workpiece turret 4, the rotating shaft of the motor drives a conveyor pulley, and the driven wheel of the conveyor belt and the driving wheel 91 of the rotation assembly 9 are fixedly installed on a rotating shaft.
  • the motor drives the driving wheel 91 to rotate, the driving wheel 91 meshes with the inner ring teeth of the transmission wheel 92 , and all the self-rotating wheels 93 mesh with the outer ring teeth of the transmission wheel 92 .
  • the substrate when in use, the substrate is installed on the workpiece turret 4 first, and the workpiece turret 4 enters from the front chamber 2 on the left side.
  • the workpiece turret 4 is sent to the entrance of the front chamber 2 through the first transmission part, the first isolation door is opened, the workpiece turret 4 enters the antechamber 2 through the first transfer mechanism 22, the first isolation door is closed, and the first jacking mechanism 21
  • the workpiece turret 4 is raised, the rotating disc 71 is inserted into the hollow hole, the first power mechanism 7 drives the workpiece turret 4 to rotate, and the preheating starts after vacuuming.
  • the blocking device After preheating, the blocking device is opened, and the first lifting mechanism 21 lowers the workpiece turret 4 to the first transfer mechanism 22, and then the first transfer mechanism 22 moves the workpiece turret 4 to the coating chamber 3, and the second transfer mechanism 31 moves the workpiece turret 4 to a predetermined position in the coating chamber 3, the blocking device is closed, and the second jacking mechanism 32 raises the workpiece turret 4 while vacuuming; when the vacuum degree reaches a predetermined value, the second power mechanism 7 drives The workpiece turret 4 rotates to start sputtering coating.
  • the second jacking mechanism 32 descends, the isolation door between the coating chamber 3 and the right front chamber 2 is opened, and the second transfer mechanism 31 sends the workpiece turret 4 to the right front chamber 2, and the right front chamber 2
  • the transfer mechanism in the center moves the workpiece turret 4 to the right antechamber 2, the isolation door is closed, the coating chamber 3 is completely isolated from the antechamber 2, and the workpiece turret 4 is sent out from the right antechamber 2.
  • the partition body 10 includes a valve body 111, a valve 112 and a drive motor
  • the valve body 111 is provided with a through hole 113
  • the through hole 113 connects the pretreatment chamber and the The coating chamber 3 is connected
  • the valve 112 is arranged at the through hole 113 and connected with the driving motor, so that the driving motor drives the valve 112 to close or open the through hole 113 .
  • the drive motor is embedded in the valve body 111 and connected to the valve 112. When it needs to be opened or closed, the drive motor can drive the valve 112 to move to open or close the through hole 113, so as to achieve sealing or The role of connectivity.
  • the partition body 10 also includes a connection part, which is arranged on the top of the valve body 111 and connected with the driving mechanism.
  • the driving mechanism can drive the valve body 111 to move through the connecting portion.
  • the three-chamber magnetron sputtering coating device provided by the embodiment of the present invention includes a running mechanism, a transmission part, an anterior chamber 2 and a coating chamber 3, and the coating piece is arranged on a workpiece turret 4, and the The transfer part is connected to the front chamber 2, and the front chamber 2 is connected to the coating chamber 3.
  • the transfer part, the front chamber 2 and the coating chamber 3 form a coating channel for the plated parts.
  • the front chamber 2 and the coating chamber 3 are independently provided with a vacuum Equipment 5, the workpiece turret 4 rotates in the coating chamber 3 through the operating mechanism, and a blocking device is provided between the front chamber 2 and the coating chamber 3, and the blocking device is used to block the coating channel so that The front chamber 2 and the coating chamber 3 are separate sealed chambers.
  • the time for vacuuming the coating chamber 3 can be reduced, energy can be saved, and the coated pieces with coatings can be sorted into the coating chamber 3 in order, which improves the working efficiency of the coating, and at the same time through
  • the partition body 10 is arranged between the front chamber 2 and the coating chamber 3 of the magnetron sputtering coating machine, so that the front chamber 2 and the coating chamber 3 can be cut off and sealed or opened and communicated by the partition body 10.
  • the partition device It also includes a drive mechanism connected to the partition body 10, the drive mechanism can drive the partition body 10 to move up and down, so that the distance between the top of the partition body 10 and the ground can be adjusted, so that the partition body 10 can be adapted to different front chambers 2 Cooperating with the coating chamber 3, the compatibility of the partition body 10 can be improved, so that the partition device can be used between various chambers of different heights or different models.
  • the coating machine is a vertical coating machine, with two transmission parts, one front chamber 2, one coating chamber 3, and a preparation part, along the coating direction of the first workpiece turret 4. , followed by the first conveying part, the first front chamber 2, the coating chamber 3, the second front chamber 2, and the second conveying part. rack 4.
  • the preparation part is set between two transfer parts, that is, at the entrance of the first transfer part and the outlet of the second transfer part, so that the coating machine is arranged in a "mouth" shape, which is convenient for the transfer of workpieces and saves Reduced manual operation time and improved work efficiency.
  • the workpiece turret 4 includes a top plate 41, a bottom plate 42, a support column and a side plate 43, the support column is fixed between the top plate 41 and the bottom plate 42, and a plurality of side plates 43 are provided, surrounding the top plate 41 and the bottom plate The outer circumference of 42, during coating, the plated frame is arranged on the side plate 43.
  • the conveying part is provided with a conveying mechanism 1, and the conveying mechanism 1 is provided with a first moving unit and a second moving unit, and the workpiece turret 4 in the conveying part is conveyed to the front chamber 2 through the first moving unit , the workpiece turret 4 is transferred to the front chamber 2 through the second moving unit.
  • the first mobile unit is provided with a first drive assembly, a slide rail 12 and a slide block 13, and the slide rail 12 is slid on the slide rail 12; when moving, the workpiece turret 4 is positioned on the slide block 13 Above, the first drive assembly drives the workpiece turret 4 to move along the slide rail 12, which is set in the X direction.
  • the second moving unit is provided with a moving frame 11 and a second driving assembly. When moving, the workpiece turntable 4 is located on the second driving assembly, and the second driving assembly is installed on the moving frame 11.
  • the first The driving assembly drives the moving frame 11 to move, and drives the workpiece turret 4 to move; the second driving assembly drives the workpiece turret 4 to move to the front chamber 2, which is set in the Y direction, and the X direction and the Y direction are perpendicular to each other.
  • the first driving assembly comprises a rack 14, a motor and a gear 15, the rack 14 is installed on the frame of the transmission part, the motor is installed on the moving frame 11, the gear 15 is fixedly connected with the rotating shaft of the motor, the gear 15 and the gear The bars 14 are engaged, and the motor drives the gear 15 to roll along the rack 14, so that the moving frame 11 and the workpiece turret 4 move in the X direction.
  • Slide rail 12 is provided with root.
  • the second drive assembly includes a transmission chain 16, a motor, a drive wheel and a drive shaft, the drive wheel is fixed on the drive shaft, and the motor drives the transmission chain 16 to rotate through the drive shaft and the drive wheel.
  • a first isolation door is provided at the connection between the front chamber 2 and the transmission part.
  • the first isolation door is arc-shaped.
  • a second isolation door is provided between the front chamber 2 and the coating chamber 3, and the second isolation door is a blocking device for maintaining the vacuum degree of the coating chamber 3 and reducing the time for vacuuming after the workpiece turret 4 enters the coating chamber 3 ,Improve work efficiency.
  • the isolation door generally adopts pneumatic door.
  • Front chamber 2 is provided with heating mechanism 6, first transfer mechanism 22 and first jacking mechanism 21, and described heating mechanism 6 is arranged on the chamber wall of front chamber 2, and heating mechanism 6 can adopt the heating of coating chamber 3 in the prior art Mechanism 6, there are multiple heating mechanisms 6, located at multiple corners of the front chamber 2.
  • the first transfer mechanism 22 is located at the bottom of the front chamber 2, and adopts chain transmission.
  • the bottom of the front chamber 2 is provided with the first bevel gear 15, and the first bevel gear 15 is driven by a motor.
  • the first transfer mechanism 22 is provided with a rotating shaft, and the end of the rotating shaft A second bevel gear 15 meshing with the first bevel gear 15 is provided.
  • the bottom of the front chamber 2 is also provided with a track, and the rotating shaft is provided with rollers rolling on the track.
  • the chain is driven by the transmission of two bevel gears 15.
  • the workpiece turret 4 moves in the front chamber 2 through the first transfer mechanism 22, the workpiece turret 4 is driven into the anterior chamber 2 by the second drive assembly, the first transfer mechanism 22 moves the workpiece turret 4 to the middle of the anterior chamber 2, and Carry out preheating to the plated piece on the workpiece turret 4.
  • the first jacking mechanism 21 is installed at the bottom of the front chamber 2 .
  • the first jacking mechanism 21 can adopt a cylinder or a screw lifting mechanism.
  • the first jacking mechanism 21 includes a driving part 211 and a bearing seat 212, the bearing seat 212 is installed on the driving part 211, and the bearing seat 212 can rotate with the work turntable, and the driving part 211 does not follow the workpiece. Turntable 4 rotates.
  • the top of the front chamber 2 is provided with a first power mechanism 7, and the first power mechanism 7 drives the workpiece turret 4 to rotate.
  • the power mechanism 7 can adopt the top rotating motor of the vacuum coating machine in the prior art.
  • the center of the workpiece turret 4 is provided with a hollow hole, and the power mechanism 7 is provided with a rotating disk 71, and the rotating disk 71 can be inserted into the hollow hole to drive the workpiece turret 4 to rotate.
  • the rotating disc 71 is provided with a positioning member, which can make the rotating disc 71 integrated with the workpiece turret 4 after being inserted into the hollow hole.
  • the front chamber 2 can be used as the preheating chamber of the coating chamber 3.
  • an evaporation coating source or a measurement and control sputtering coating source can be added to the front chamber 2.
  • the coating chamber 3 is provided with a coating mechanism, a heating mechanism 6 , a second transfer mechanism 31 and an operating mechanism.
  • the coating mechanism and the heating mechanism 6 are installed on the wall of the coating chamber 3 .
  • the coating mechanism adopts the target mechanism in the existing vertical coating machine.
  • the coating chamber 3 is provided with a second transfer mechanism 31 , and the workpiece turret 4 moves in the coating chamber 3 through the second transfer mechanism 31 .
  • the structure of the second transfer mechanism 31 is the same as that of the first transfer mechanism 22 .
  • Both the front chamber 2 and the coating chamber 3 are provided with position sensors for detecting whether the workpiece turret 4 has moved to a preset position.
  • the revolving assembly includes a second power mechanism 7 arranged at the top, and the structure of the second power mechanism 7 is the same as that of the first power mechanism 7 .
  • the coating chamber 3 is provided with a second jacking mechanism 32 , and the second jacking mechanism 32 is installed at the bottom of the coating chamber 3 .
  • the second jacking mechanism 32 has the same structure as the first jacking mechanism 21 .
  • the coating chamber 3 is provided with a film thickness monitoring mechanism, and the film thickness monitoring mechanism is provided with a film thickness controller, a film thickness sensor and an oscillator, and the film thickness controller is arranged on the electrical control unit of the coating machine. cabinet, and the film thickness sensor is installed on the top plate baffle plate 33 in the coating chamber 3 .
  • the coating machine is further provided with a preparation part, the preparation part is connected with the transmission part, and the preparation part is provided with a third drive assembly 8, and the structure of the third drive assembly 8 adopts chain transmission.
  • the workpiece turret 4 includes a top plate 41, a bottom plate 42, a plurality of rotation frames, and a plurality of rotation shafts 44.
  • the rotation shafts 44 are arranged between the top plate 41 and the bottom plate 42 and arranged along the circumferential direction.
  • the frame is mounted on an axis of rotation 44.
  • Rotation shaft 44 is provided with bearing at top plate 41 and base plate 42 joints, and rotation frame is evenly arranged along the circumference of top plate 41 and base plate 42.
  • the running mechanism includes a revolution assembly and an autorotation assembly 9
  • the workpiece turret 4 is rotated by the revolution assembly
  • the revolution assembly is the same as the embodiment, which is the power mechanism 7 .
  • Rotation assembly 9 rotates and comprises motor, driving wheel 91, transmission wheel 92 and rotation wheel 93, and driving wheel 91, transmission wheel 92 and rotation wheel 93 are gear 15, and the diameter of driving wheel 91 and rotation wheel 93 is less than transmission wheel 92
  • the motor is installed at the bottom of the workpiece turret 4, the rotating shaft of the motor drives a conveyor pulley, and the driven wheel of the conveyor belt and the driving wheel 91 of the rotation assembly 9 are fixedly installed on a rotating shaft.
  • the motor drives the driving wheel 91 to rotate, the driving wheel 91 meshes with the inner ring teeth of the transmission wheel 92 , and all the self-rotating wheels 93 mesh with the outer ring teeth of the transmission wheel 92 .
  • the substrate when in use, the substrate is installed on the workpiece turret 4 first, and the workpiece turret 4 enters from the front chamber 2 on the left side.
  • the workpiece turret 4 is sent to the entrance of the front chamber 2 through the first transmission part, the first isolation door is opened, the workpiece turret 4 enters the antechamber 2 through the first transfer mechanism 22, the first isolation door is closed, and the first jacking mechanism 21
  • the workpiece turret 4 is raised, the rotating disc 71 is inserted into the hollow hole, the first power mechanism 7 drives the workpiece turret 4 to rotate, and the preheating starts after vacuuming.
  • the blocking device After preheating, the blocking device is opened, and the first lifting mechanism 21 lowers the workpiece turret 4 to the first transfer mechanism 22, and then the first transfer mechanism 22 moves the workpiece turret 4 to the coating chamber 3, and the second transfer mechanism 31 moves the workpiece turret 4 to a predetermined position in the coating chamber 3, the blocking device is closed, and the second jacking mechanism 32 raises the workpiece turret 4 while vacuuming; when the vacuum degree reaches a predetermined value, the second power mechanism 7 drives The workpiece turret 4 rotates to start sputtering coating.
  • the second jacking mechanism 32 descends, the isolation door between the coating chamber 3 and the right front chamber 2 is opened, and the second transfer mechanism 31 sends the workpiece turret 4 to the right front chamber 2, and the right front chamber 2
  • the transfer mechanism in the center moves the workpiece turret 4 to the right antechamber 2, the isolation door is closed, the coating chamber 3 is completely isolated from the antechamber 2, and the workpiece turret 4 is sent out from the right antechamber 2.
  • the partition body 10 includes a valve body 111, a valve 112 and a drive motor
  • the valve body 111 is provided with a through hole 113
  • the through hole 113 connects the pretreatment chamber and the The coating chamber 3 is connected
  • the valve 112 is arranged at the through hole 113 and connected with the driving motor, so that the driving motor drives the valve 112 to close or open the through hole 113 .
  • the drive motor is embedded in the valve body 111 and connected to the valve 112. When it needs to be opened or closed, the drive motor can drive the valve 112 to move to open or close the through hole 113, so as to achieve sealing or The role of connectivity.
  • the partition body 10 also includes a connecting portion 130, which is arranged on the top of the valve body 111 and connected with the driving mechanism.
  • the driving mechanism can drive the valve body 111 through the connecting portion 130 to move.
  • the driving mechanism includes two driving units 120 , and the two driving units 120 are arranged on two sides of the valve body 111 and connected to the valve body 111 .
  • the drive unit 120 By disposing the drive unit 120 on both sides of the valve body 111 , when the partition body 10 is driven to move up and down by the drive unit 120 , it can move stably.
  • the drive unit 120 includes a drive body 121 and an output shaft, the output shaft is connected to the connecting portion 130, and the drive body 121 is connected to the output shaft to drive the output shaft to extend along its own extension direction. .
  • the connecting part 130 is moved by driving the output shaft through the driving body 121 , so that the valve body 111 is driven to move through the connecting part 130 .
  • the driving mechanism includes two driving units 120 , and the two driving units 120 are arranged on two sides of the valve body 111 and connected to the valve body 111 .
  • the drive unit 120 includes a drive body 121 and an output shaft, the output shaft is connected to the connecting portion 130, and the drive body 121 is connected to the output shaft to drive the output shaft to extend along its own extension direction.
  • the connecting part 130 is moved by driving the output shaft through the driving body 121 , so that the valve body 111 is driven to move through the connecting part 130 .

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

一种三室磁控溅射镀膜装置，三室磁控溅射镀膜装置包括运转机构、传送部、前室（2）以及镀膜室（3），镀件设于一工件转架（4）上，传送部与前室（2）衔接，前室（2）与镀膜室（3）衔接，传送部、前室（2）和镀膜室（3）形成镀件的镀膜通道，前室（2）与镀膜室（3）独立设置真空设备（5），工件转架（4）通过运转机构在镀膜室（3）内转动，前室（2）与镀膜室（3）之间设置有阻挡装置，阻挡装置用于阻挡镀膜通道以使前室（2）和镀膜室（3）为单独的密封腔室，通过隔断本体（10）将前室（2）和镀膜室（3）进行隔断密封或进行开启连通从而提高了密封性。

Description

三室磁控溅射镀膜装置 技术领域
本实用新型涉及真空镀膜领域，尤其涉及一种三室磁控溅射镀膜装置。
背景技术
一般在连续式的真空镀膜设备中，由于各个腔体的功能有所不同，其所需要的真空度亦有所差异，因此腔体与腔体之间需要隔开，避免各腔体在作业时产生相互干扰的情形。由于镀膜过程必须在真空环境下进行，因此该插板阀的阀门板必须紧闭、密合，否则一旦有真空度不佳的现象发生，镀膜过程势必发生瑕疵而造成整批工件良品率不足的缺陷。
实用新型内容
本实用新型的主要目的是提供一种三室磁控溅射镀膜装置，旨在解决上述技术问题。
为实现上述目的，本实用新型提出的一种三室磁控溅射镀膜装置包括运转机构、传送部、前室以及镀膜室，镀件设于一工件转架上，所述传送部与前室衔接，所述前室与镀膜室衔接，所述传送部、前室和镀膜室形成镀件的镀膜通道，所述前室与镀膜室独立设置真空设备，所述工件转架通过运转机构在镀膜室内转动，所述前室与所述镀膜室之间设置有阻挡装置，所述阻挡装置用于阻挡所述镀膜通道以使所述前室和镀膜室为单独的密封腔室。
在本实施例中，所述运转机构包括公转组件和自转组件，所述工件转架设有多个自转轴，所述工件转架通过公转组件转动，所述自转轴通过自转组件转动。
在本实施例中，所述传送部设有传送机构，所述传送机构设有第一移动单元和第二移动单元，所述工件转架通过第一移动单元传送至前室，所述工件转架通过第二移动单元传送至前室。
在本实施例中，所述第一移动单元设有第一驱动组件、滑轨和滑块，所 述滑轨滑设于滑轨上；移动时，所述工件转架位于滑块上，所述第一驱动组件驱动工件转架沿滑轨移动。
在本实施例中，所述第二移动单元设有移动架、第二驱动组件，移动时，所述工件转架位于第二驱动组件上，所述第二驱动组件安装于移动架上，所述第一驱动组件驱动移动架移动，带动工件转架移动；所述第二驱动组件驱动工件转架移动至前室
在本实施例中，所述阻挡装置包括隔断本体以及驱动机构，所述驱动机构与所述隔断本体连接以驱动所述隔断本体进行上下移动。
在本实施例中，所述隔断本体包括阀体、阀门以及驱动电机，所述阀体上开设有通孔，所述通孔将所述镀膜室和所述镀膜室连通，所述阀门设置在所述通孔处并与所述驱动电机连接，以使所述驱动电机驱动所述阀门关闭或开启所述通孔。
在本实施例中，所述隔断本体还包括连接部，所述连接部设置在所述阀体的顶部并与所述驱动机构连接。
在本实施例中，所述驱动机构包括两个驱动单元，两个所述驱动单元分设在所述阀体的两侧并均与所述阀体连接。
在本实施例中，所述驱动单元包括驱动本体以及输出轴，所述输出轴与所述连接部连接，所述驱动本体与所述输出轴连接以驱动所述输出轴沿其自身延伸方向延伸。
本实用新型的技术方案中，通过将隔断本体设置在磁控溅射镀膜机的前室和镀膜室之间，从而可以通过隔断本体将前室和镀膜室进行隔断密封或进行开启连通，另外，该隔断装置还包括与隔断本体连接的驱动机构，驱动机构能够驱动隔断本体进行上下移动，从而使得隔断本体的最顶端与地面的距离可以进行调节，使得隔断本体能够适配不同的前室和镀膜室的配合，因此能够提高隔断本体的兼容性，使得该隔断装置能够用于多种不同高度或不同型号的工室之间。
附图说明
为了更清楚地说明本实用新型实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地， 下面描述中的附图仅仅是本实用新型的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图示出的结构获得其他的附图。
图1为本实用新型实施例的多室真空磁控溅射镀膜装置的结构示意图；
图2为本实用新型实施例的多室真空磁控溅射镀膜装置的仰视图；
图3为本实用新型实施例的镀膜室的结构示意图；
图4为本实用新型实施例的前室的内部结构示意图；
图5为本实用新型实施例的工件转架的结构示意图；
图6为本实用新型实施例的用于磁控溅射镀膜机的隔断装置打开时的结构示意图；
图7为本实用新型实施例的用于磁控溅射镀膜机的隔断装置关闭时的结构示意图。
附图标号说明：1、传送机构；11、移动架；12、滑轨；13、滑块；14、齿条；15、齿轮；16、传送链；2、前室；21、第一顶升机构；211、驱动件；212、承载轴承座；22、第一转送机构；3、镀膜室；31、第二转送机构；32、第二顶升机构；33、顶盘挡板；4、工件转架；41、顶板；42、底板；43、侧板；44、自转轴；5、真空设备；6、加热机构；7、动力机构；71、转动盘；8、第三驱动组件；9、自转组件；91、主动轮；92、传动轮；93、自转轮；10、隔断本体；111、阀体；112、阀门；113、通孔；120、驱动单元；121、驱动本体；130、连接部。
本实用新型目的的实现、功能特点及优点将结合实施例，参照附图做进一步说明。
具体实施方式
下面将结合本实用新型实施例中的附图，对本实用新型实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本实用新型的一部分实施例，而不是全部的实施例。基于本实用新型中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本实用新型保护的范围。
需要说明，本实用新型实施例中所有方向性指示(诸如上、下、左、右、 前、后……)仅用于解释在某一特定姿态(如附图所示)下各部件之间的相对位置关系、运动情况等，如果该特定姿态发生改变时，则该方向性指示也相应地随之改变。
另外，在本实用新型中如涉及“第一”、“第二”等的描述仅用于描述目的，而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本实用新型的描述中，“多个”的含义是至少两个，例如两个，三个等，除非另有明确具体的限定。
并且，本实用新型各个实施例之间的技术方案可以相互结合，但是必须是以本领域普通技术人员能够实现为基础，当技术方案的结合出现相互矛盾或无法实现时应当认为这种技术方案的结合不存在，也不在本实用新型要求的保护范围之内。
本实用新型提供一种三室磁控溅射镀膜装置。
如图1-5所示，本实用新型实施例提供的三室磁控溅射镀膜装置包括运转机构、传送部、前室2以及镀膜室3，镀件设于一工件转架4上，所述传送部与前室2衔接，所述前室2与镀膜室3衔接，所述传送部、前室2和镀膜室3形成镀件的镀膜通道，所述前室2与镀膜室3独立设置真空设备5，所述工件转架4通过运转机构在镀膜室3内转动，所述前室2与所述镀膜室3之间设置有阻挡装置，所述阻挡装置用于阻挡所述镀膜通道以使所述前室2和镀膜室3为单独的密封腔室。
在本实施例中，通过设置传送部和前室2，能够减少镀膜室3抽真空的时间，节约能源，并且带镀膜的镀件能够依次排序进入镀膜室3，提高了镀膜工作效率，同时通过将隔断本体10设置在磁控溅射镀膜机的前室2和镀膜室3之间，从而可以通过隔断本体10将前室2和镀膜室3进行隔断密封或进行开启连通，另外，该隔断装置还包括与隔断本体10连接的驱动机构，驱动机构能够驱动隔断本体10进行上下移动，从而使得隔断本体10的最顶端与地面的距离可以进行调节，使得隔断本体10能够适配不同的前室2和镀膜室3的配合，因此能够提高隔断本体10的兼容性，使得该隔断装置能够用于多种不同高度或不同型号的工室之间。
本实施例中，镀膜机为立式镀膜机，传送部设有个，前室2设有个，镀 膜室3设有一个，还设有一个预备部，沿第一个工件转架4镀膜方向，依次为第一传送部、第一前室2、镀膜室3、第二前室2、第二传送部，预备部位于第一传送部上料口处，用于运送待镀件的工件转架4。本实施例中，将预备部设于连个传送部之间，即位于第一传送部入口和第二传送部出口处，使镀膜机形成“口”字型排布，便于工件的转运，节省了人工运作时间，提高工作效率。
本实施例中，工件转架4包括顶板41、底板42、支撑柱和侧板43，支撑柱固定于顶板41和底板42之间，侧板43设有多个，围设于顶板41和底板42的外圆周，镀膜时，镀件架设置于侧板43上。
本实施例中，传送部设有传送机构1，所述传送机构1设有第一移动单元和第二移动单元，所述传送部所述工件转架4通过第一移动单元传送至前室2，所述工件转架4通过第二移动单元传送至前室2。
本实施例中，第一移动单元设有第一驱动组件、滑轨12和滑块13，所述滑轨12滑设于滑轨12上；移动时，所述工件转架4位于滑块13上，所述第一驱动组件驱动工件转架4沿滑轨12移动，设为X方向。所述第二移动单元设有移动架11、第二驱动组件，移动时，所述工件转架4位于第二驱动组件上，所述第二驱动组件安装于移动架11上，所述第一驱动组件驱动移动架11移动，带动工件转架4移动；所述第二驱动组件驱动工件转架4移动至前室2，设为Y方向，X方向和Y方向相垂直。第一驱动组件包括齿条14、电机和齿轮15，齿条14安装于传送部的机架上，所述电机安装于移动架11，所述齿轮15与电机的转轴固定连接，齿轮15和齿条14啮合，电机驱动齿轮15沿齿条14滚动，使移动架11和工件转架4在X方向移动。滑轨12设有根。第二驱动组件包括传送链16、电机、驱动轮和驱动轴，驱动轮固定于驱动轴，电机通过驱动轴和驱动轮带动传送链16转动。
本实施例中，所述前室2与传送部衔接处设有第一隔离门，为了节省空间，第一隔离门为圆弧形。所述前室2与镀膜室3之间设有第二隔离门，第二隔离门为阻挡装置，用于保持镀膜室3的真空度，减少工件转架4进入镀膜室3后抽真空的时间，提高工作效率。隔离门一般采用气动门。前室2设有加热机构6、第一转送机构22和第一顶升机构21，所述加热机构6设于前室2的室壁，加热机构6可以采用现有技术中镀膜室3的加热机构6，加热机 构6设有多个，位于前室2的多个角。第一转送机构22设于前室2底部，采用链条传动，前室2底部设有第一锥齿轮15，第一锥齿轮15通过电机驱动，第一转送机构22设有转轴，转轴的端部设有与第一锥齿轮15啮合的第二锥齿轮15。前室2底部还设有轨道，转轴上设有在轨道上滚动的滚轮。链条通过两个锥齿轮15的传动带动传动。工件转架4通过第一转送机构22移动于前室2内，工件转架4由第二驱动组件驱动进入前室2，第一转送机构22将工件转架4移动至前室2中部，并对工件转架4上的镀件进行预加热。所述第一顶升机构21安装于前室2底部。第一顶升机构21可采用气缸或螺旋升降机构。第一顶升机构21包括驱动件211和承载轴承座212，所述承载轴承座212安装于驱动件211上，所述承载轴承座212能够随着工作转架转动，而驱动件211不随着工件转架4转动。
本实施例中，前室2的顶部设有第一动力机构7，第一动力机构7驱动工件转架4转动。动力机构7采用现有技术中真空镀膜机的顶部转动电机即可。工件转架4的中心设有中空孔，动力机构7设有转动盘71，所述转动盘71可插入中空孔中，带动工件转架4转动。转动盘71设有定位件，能够使转动盘71插入中空孔后与工件转架4构成一体。
本实施例中，前室2可以作为镀膜室3的预热室，实际上，如果是需要多工序镀膜，那可以再前室2加设蒸发镀膜源或者测控溅射镀膜源。
本实施例中，镀膜室3设有镀膜机构、加热机构6、第二转送机构31和运转机构，所述镀膜机构和加热机构6安装于镀膜室3的室壁。镀膜机构采用现有立式镀膜机中的靶材机构。所述镀膜室3设有第二转送机构31，所述工件转架4通过第二转送机构31移动于镀膜室3。第二转送机构31的结构与第一转送机构22相同。前室2和镀膜室3中均设有位置感应器，用于检测工件转架4是否行进至预设位置。公转组件包括设于顶部的第二动力机构7，第二动力机构7与第一动力机构7的结构相同。
本实施例中，所述镀膜室3设有第二顶升机构32，所述第二顶升机构32安装于镀膜室3的底部。第二顶升机构32与第一顶升机构21结构相同。
本实施例中，所述镀膜室3设有膜厚监测机构，所述膜厚监测机构设有膜厚控制仪、膜厚传感器和振荡器，所述膜厚控制仪设于镀膜机的电气控制柜，所述膜厚传感器安装于镀膜室3内的顶盘挡板33上。
本实施例中，所述镀膜机还设有预备部所述预备部与传动部衔接，所述预备部设有第三驱动组件8，第三驱动组件8结构采用链条传动。
另外，本实施例中，工件转架4包括顶板41、底板42、多个自转架、多个自转轴44，自转轴44设于顶板41和底板42之间，沿圆周方向设置，每个自转架安装于一个自转轴44上。自转轴44与顶板41和底板42连接处设有轴承，自转架沿顶板41和底板42的圆周均匀布设。
本实施例中，运转机构包括公转组件和自转组件9，所述工件转架4通过公转组件转动，公转组件与实施例相同，为动力机构7。自转组件9转动包括电机、主动轮91、传动轮92和自转轮93，主动轮91、传动轮92和自转轮93为齿轮15，主动轮91和自转轮93的直径小于传动轮92，电机安装于工件转架4底部，电机的转轴带动一传送带轮，传送带的从动轮与自转组件9的主动轮91固定安装在一个转轴上。
本实施例中，电机带动主动轮91转动，主动轮91与传动轮92的内圈齿啮合，所有自转轮93与传动轮92的外圈齿啮合。
其中，在使用时，先将基片安装于工件转架4上，工件转架4从左侧的前室2进入。工件转架4通过第一传送部送至前室2入口处，第一隔离门打开，工件转架4通过第一转送机构22进入前室2，第一隔离门关闭，第一顶升机构21将工件转架4升高，转动盘71插入中空孔中，第一动力机构7带动工件转架4转动，抽真空后开始预热。预热后阻挡装置打开，第一顶升机构21将工件转架4下降至第一转送机构22上，然后由第一转送机构22将工件转架4移动至镀膜室3处，第二转送机构31将工件转架4移动至镀膜室3中预定位置，阻挡装置关闭，第二顶升机构32将工件转架4升高，同时抽真空；真空度到达预定值时，第二动力机构7带动工件转架4转动开始溅射镀膜。镀膜后，第二顶升机构32下降，镀膜室3与右侧前室2的隔离门打开，第二转送机构31将工件转架4送至右侧的前室2处，右侧前室2中的转送机构将工件转架4移动至右侧前室2，隔离门关闭，镀膜室3与前室2完全隔离，工件转架4再由右侧前室2送出。
其中，请参考图6-7，所述隔断本体10包括阀体111、阀门112以及驱动电机，所述阀体111上开设有通孔113，所述通孔113将所述前处理室和所述镀膜室3连通，所述阀门112设置在所述通孔113处并与所述驱动电机连接， 以使所述驱动电机驱动所述阀门112关闭或开启所述通孔113。在本实施例中，驱动电机内嵌在阀体111内并与阀门112连接，在需要开启或关闭时，可通过驱动电机驱动阀门112进行移动，以开启或封闭通孔113，从而达到密封或连通的作用。
进一步地，所述隔断本体10还包括连接部，所述连接部设置在所述阀体111的顶部并与所述驱动机构连接。在本实施例中，通过将连接部设置在阀体111的顶部并令连接部与驱动机构连接，从而需要调节阀体111的高度时，可通过驱动机构通过连接部带动阀体111进行移动。
如图1-5所示，本实用新型实施例提供的三室磁控溅射镀膜装置包括运转机构、传送部、前室2以及镀膜室3，镀件设于一工件转架4上，所述传送部与前室2衔接，所述前室2与镀膜室3衔接，所述传送部、前室2和镀膜室3形成镀件的镀膜通道，所述前室2与镀膜室3独立设置真空设备5，所述工件转架4通过运转机构在镀膜室3内转动，所述前室2与所述镀膜室3之间设置有阻挡装置，所述阻挡装置用于阻挡所述镀膜通道以使所述前室2和镀膜室3为单独的密封腔室。
在本实施例中，通过设置传送部和前室2，能够减少镀膜室3抽真空的时间，节约能源，并且带镀膜的镀件能够依次排序进入镀膜室3，提高了镀膜工作效率，同时通过将隔断本体10设置在磁控溅射镀膜机的前室2和镀膜室3之间，从而可以通过隔断本体10将前室2和镀膜室3进行隔断密封或进行开启连通，另外，该隔断装置还包括与隔断本体10连接的驱动机构，驱动机构能够驱动隔断本体10进行上下移动，从而使得隔断本体10的最顶端与地面的距离可以进行调节，使得隔断本体10能够适配不同的前室2和镀膜室3的配合，因此能够提高隔断本体10的兼容性，使得该隔断装置能够用于多种不同高度或不同型号的工室之间。
本实施例中，镀膜机为立式镀膜机，传送部设有个，前室2设有个，镀膜室3设有一个，还设有一个预备部，沿第一个工件转架4镀膜方向，依次为第一传送部、第一前室2、镀膜室3、第二前室2、第二传送部，预备部位于第一传送部上料口处，用于运送待镀件的工件转架4。本实施例中，将预备部设于连个传送部之间，即位于第一传送部入口和第二传送部出口处，使镀膜机形成“口”字型排布，便于工件的转运，节省了人工运作时间，提高工作效 率。
本实施例中，工件转架4包括顶板41、底板42、支撑柱和侧板43，支撑柱固定于顶板41和底板42之间，侧板43设有多个，围设于顶板41和底板42的外圆周，镀膜时，镀件架设置于侧板43上。
本实施例中，传送部设有传送机构1，所述传送机构1设有第一移动单元和第二移动单元，所述传送部所述工件转架4通过第一移动单元传送至前室2，所述工件转架4通过第二移动单元传送至前室2。
本实施例中，第一移动单元设有第一驱动组件、滑轨12和滑块13，所述滑轨12滑设于滑轨12上；移动时，所述工件转架4位于滑块13上，所述第一驱动组件驱动工件转架4沿滑轨12移动，设为X方向。所述第二移动单元设有移动架11、第二驱动组件，移动时，所述工件转架4位于第二驱动组件上，所述第二驱动组件安装于移动架11上，所述第一驱动组件驱动移动架11移动，带动工件转架4移动；所述第二驱动组件驱动工件转架4移动至前室2，设为Y方向，X方向和Y方向相垂直。第一驱动组件包括齿条14、电机和齿轮15，齿条14安装于传送部的机架上，所述电机安装于移动架11，所述齿轮15与电机的转轴固定连接，齿轮15和齿条14啮合，电机驱动齿轮15沿齿条14滚动，使移动架11和工件转架4在X方向移动。滑轨12设有根。第二驱动组件包括传送链16、电机、驱动轮和驱动轴，驱动轮固定于驱动轴，电机通过驱动轴和驱动轮带动传送链16转动。
本实施例中，所述前室2与传送部衔接处设有第一隔离门，为了节省空间，第一隔离门为圆弧形。所述前室2与镀膜室3之间设有第二隔离门，第二隔离门为阻挡装置，用于保持镀膜室3的真空度，减少工件转架4进入镀膜室3后抽真空的时间，提高工作效率。隔离门一般采用气动门。前室2设有加热机构6、第一转送机构22和第一顶升机构21，所述加热机构6设于前室2的室壁，加热机构6可以采用现有技术中镀膜室3的加热机构6，加热机构6设有多个，位于前室2的多个角。第一转送机构22设于前室2底部，采用链条传动，前室2底部设有第一锥齿轮15，第一锥齿轮15通过电机驱动，第一转送机构22设有转轴，转轴的端部设有与第一锥齿轮15啮合的第二锥齿轮15。前室2底部还设有轨道，转轴上设有在轨道上滚动的滚轮。链条通过两个锥齿轮15的传动带动传动。工件转架4通过第一转送机构22移动于 前室2内，工件转架4由第二驱动组件驱动进入前室2，第一转送机构22将工件转架4移动至前室2中部，并对工件转架4上的镀件进行预加热。所述第一顶升机构21安装于前室2底部。第一顶升机构21可采用气缸或螺旋升降机构。第一顶升机构21包括驱动件211和承载轴承座212，所述承载轴承座212安装于驱动件211上，所述承载轴承座212能够随着工作转架转动，而驱动件211不随着工件转架4转动。
本实施例中，前室2的顶部设有第一动力机构7，第一动力机构7驱动工件转架4转动。动力机构7采用现有技术中真空镀膜机的顶部转动电机即可。工件转架4的中心设有中空孔，动力机构7设有转动盘71，所述转动盘71可插入中空孔中，带动工件转架4转动。转动盘71设有定位件，能够使转动盘71插入中空孔后与工件转架4构成一体。
本实施例中，前室2可以作为镀膜室3的预热室，实际上，如果是需要多工序镀膜，那可以再前室2加设蒸发镀膜源或者测控溅射镀膜源。
本实施例中，镀膜室3设有镀膜机构、加热机构6、第二转送机构31和运转机构，所述镀膜机构和加热机构6安装于镀膜室3的室壁。镀膜机构采用现有立式镀膜机中的靶材机构。所述镀膜室3设有第二转送机构31，所述工件转架4通过第二转送机构31移动于镀膜室3。第二转送机构31的结构与第一转送机构22相同。前室2和镀膜室3中均设有位置感应器，用于检测工件转架4是否行进至预设位置。公转组件包括设于顶部的第二动力机构7，第二动力机构7与第一动力机构7的结构相同。
本实施例中，所述镀膜室3设有第二顶升机构32，所述第二顶升机构32安装于镀膜室3的底部。第二顶升机构32与第一顶升机构21结构相同。
本实施例中，所述镀膜室3设有膜厚监测机构，所述膜厚监测机构设有膜厚控制仪、膜厚传感器和振荡器，所述膜厚控制仪设于镀膜机的电气控制柜，所述膜厚传感器安装于镀膜室3内的顶盘挡板33上。
本实施例中，所述镀膜机还设有预备部所述预备部与传动部衔接，所述预备部设有第三驱动组件8，第三驱动组件8结构采用链条传动。
另外，本实施例中，工件转架4包括顶板41、底板42、多个自转架、多个自转轴44，自转轴44设于顶板41和底板42之间，沿圆周方向设置，每个自转架安装于一个自转轴44上。自转轴44与顶板41和底板42连接处设有 轴承，自转架沿顶板41和底板42的圆周均匀布设。
本实施例中，运转机构包括公转组件和自转组件9，所述工件转架4通过公转组件转动，公转组件与实施例相同，为动力机构7。自转组件9转动包括电机、主动轮91、传动轮92和自转轮93，主动轮91、传动轮92和自转轮93为齿轮15，主动轮91和自转轮93的直径小于传动轮92，电机安装于工件转架4底部，电机的转轴带动一传送带轮，传送带的从动轮与自转组件9的主动轮91固定安装在一个转轴上。
本实施例中，电机带动主动轮91转动，主动轮91与传动轮92的内圈齿啮合，所有自转轮93与传动轮92的外圈齿啮合。
其中，在使用时，先将基片安装于工件转架4上，工件转架4从左侧的前室2进入。工件转架4通过第一传送部送至前室2入口处，第一隔离门打开，工件转架4通过第一转送机构22进入前室2，第一隔离门关闭，第一顶升机构21将工件转架4升高，转动盘71插入中空孔中，第一动力机构7带动工件转架4转动，抽真空后开始预热。预热后阻挡装置打开，第一顶升机构21将工件转架4下降至第一转送机构22上，然后由第一转送机构22将工件转架4移动至镀膜室3处，第二转送机构31将工件转架4移动至镀膜室3中预定位置，阻挡装置关闭，第二顶升机构32将工件转架4升高，同时抽真空；真空度到达预定值时，第二动力机构7带动工件转架4转动开始溅射镀膜。镀膜后，第二顶升机构32下降，镀膜室3与右侧前室2的隔离门打开，第二转送机构31将工件转架4送至右侧的前室2处，右侧前室2中的转送机构将工件转架4移动至右侧前室2，隔离门关闭，镀膜室3与前室2完全隔离，工件转架4再由右侧前室2送出。
其中，请参考图6-7，所述隔断本体10包括阀体111、阀门112以及驱动电机，所述阀体111上开设有通孔113，所述通孔113将所述前处理室和所述镀膜室3连通，所述阀门112设置在所述通孔113处并与所述驱动电机连接，以使所述驱动电机驱动所述阀门112关闭或开启所述通孔113。在本实施例中，驱动电机内嵌在阀体111内并与阀门112连接，在需要开启或关闭时，可通过驱动电机驱动阀门112进行移动，以开启或封闭通孔113，从而达到密封或连通的作用。
进一步地，所述隔断本体10还包括连接部130，所述连接部130设置在 所述阀体111的顶部并与所述驱动机构连接。在本实施例中，通过将连接部130设置在阀体111的顶部并令连接部130与驱动机构连接，从而需要调节阀体111的高度时，可通过驱动机构通过连接部130带动阀体111进行移动。
具体地，所述驱动机构包括两个驱动单元120，两个所述驱动单元120分设在所述阀体111的两侧并均与所述阀体111连接。通过在阀体111的两侧均设置驱动单元120，使得在通过驱动单元120驱动隔断本体10上下移动时，能够稳定地进行运动。
其中，所述驱动单元120包括驱动本体121以及输出轴，所述输出轴与所述连接部130连接，所述驱动本体121与所述输出轴连接以驱动所述输出轴沿其自身延伸方向延伸。通过驱动本体121驱动输出轴对连接部130进行移动，从而通过连接部130带动阀体111进行移动。具体地，所述驱动机构包括两个驱动单元120，两个所述驱动单元120分设在所述阀体111的两侧并均与所述阀体111连接。通过在阀体111的两侧均设置驱动单元120，使得在通过驱动单元120驱动隔断本体10上下移动时，能够稳定地进行运动。
其中，所述驱动单元120包括驱动本体121以及输出轴，所述输出轴与所述连接部130连接，所述驱动本体121与所述输出轴连接以驱动所述输出轴沿其自身延伸方向延伸。通过驱动本体121驱动输出轴对连接部130进行移动，从而通过连接部130带动阀体111进行移动。
以上所述仅为本实用新型的优选实施例，并非因此限制本实用新型的专利范围，凡是在本实用新型的构思下，利用本实用新型说明书及附图内容所作的等效结构变换，或直接/间接运用在其他相关的技术领域均包括在本实用新型的专利保护范围内。

Claims (10)

  1. 一种三室磁控溅射镀膜装置，其特征在于，所述三室磁控溅射镀膜装置包块运转机构、传送部、前室以及镀膜室，镀件设于一工件转架上，所述传送部与前室衔接，所述前室与镀膜室衔接，所述传送部、前室和镀膜室形成镀件的镀膜通道，所述前室与镀膜室独立设置真空设备，所述工件转架通过运转机构在镀膜室内转动，所述前室与所述镀膜室之间设置有阻挡装置，所述阻挡装置用于阻挡所述镀膜通道以使所述前室和镀膜室为单独的密封腔室。
  2. 根据权利要求1所述的三室磁控溅射镀膜装置，其特征在于，所述运转机构包括公转组件和自转组件，所述工件转架设有多个自转轴，所述工件转架通过公转组件转动，所述自转轴通过自转组件转动。
  3. 根据权利要求2所述的三室磁控溅射镀膜装置，其特征在于，所述传送部设有传送机构，所述传送机构设有第一移动单元和第二移动单元，所述工件转架通过第一移动单元传送至前室，所述工件转架通过第二移动单元传送至前室。
  4. 根据权利要求3所述的三室磁控溅射镀膜装置，其特征在于，所述第一移动单元设有第一驱动组件、滑轨和滑块，所述滑轨滑设于滑轨上；移动时，所述工件转架位于滑块上，所述第一驱动组件驱动工件转架沿滑轨移动。
  5. 根据权利要求4所述的三室磁控溅射镀膜装置，其特征在于，所述第二移动单元设有移动架、第二驱动组件，移动时，所述工件转架位于第二驱动组件上，所述第二驱动组件安装于移动架上，所述第一驱动组件驱动移动架移动，带动工件转架移动；所述第二驱动组件驱动工件转架移动至前室。
  6. 根据权利要求1所述的三室磁控溅射镀膜装置，其特征在于，所述阻挡装置包括隔断本体以及驱动机构，所述驱动机构与所述隔断本体连接以驱 动所述隔断本体进行上下移动。
  7. 根据权利要求6所述的三室磁控溅射镀膜装置，其特征在于，所述隔断本体包括阀体、阀门以及驱动电机，所述阀体上开设有通孔，所述通孔将所述镀膜室和所述镀膜室连通，所述阀门设置在所述通孔处并与所述驱动电机连接，以使所述驱动电机驱动所述阀门关闭或开启所述通孔。
  8. 根据权利要求7所述的三室磁控溅射镀膜装置，其特征在于，所述隔断本体还包括连接部，所述连接部设置在所述阀体的顶部并与所述驱动机构连接。
  9. 根据权利要求8所述的三室磁控溅射镀膜装置，其特征在于，所述驱动机构包括两个驱动单元，两个所述驱动单元分设在所述阀体的两侧并均与所述阀体连接。
  10. 根据权利要求9所述的三室磁控溅射镀膜装置，其特征在于，所述驱动单元包括驱动本体以及输出轴，所述输出轴与所述连接部连接，所述驱动本体与所述输出轴连接以驱动所述输出轴沿其自身延伸方向延伸。
PCT/CN2021/137361 2021-08-24 2021-12-13 三室磁控溅射镀膜装置 WO2023024331A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202121998295.8U CN215887213U (zh) 2021-08-24 2021-08-24 三室磁控溅射镀膜装置
CN202121998295.8 2021-08-24

Publications (1)

Publication Number Publication Date
WO2023024331A1 true WO2023024331A1 (zh) 2023-03-02

Family

ID=80341850

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2021/137361 WO2023024331A1 (zh) 2021-08-24 2021-12-13 三室磁控溅射镀膜装置

Country Status (2)

Country Link
CN (1) CN215887213U (zh)
WO (1) WO2023024331A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117568771B (zh) * 2023-12-08 2024-07-02 成都国泰真空设备有限公司 一种磁控溅射镀膜传动装置
CN117467969B (zh) * 2023-12-28 2024-04-16 湖南振添光学玻璃科技有限公司 一种光学玻璃镜片ito镀膜设备及使用方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6899795B1 (en) * 2000-01-18 2005-05-31 Unaxis Balzers Aktiengesellschaft Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers
CN209412304U (zh) * 2018-11-30 2019-09-20 浙江上方电子装备有限公司 一种工艺气体分布均匀的磁控溅射真空镀膜设备
CN112080731A (zh) * 2020-07-22 2020-12-15 湘潭宏大真空技术股份有限公司 多室连续光学镀膜机
CN213507173U (zh) * 2020-11-10 2021-06-22 湘潭宏大真空技术股份有限公司 用于磁控溅射镀膜机的隔断装置及磁控溅射镀膜机

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6899795B1 (en) * 2000-01-18 2005-05-31 Unaxis Balzers Aktiengesellschaft Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers
CN209412304U (zh) * 2018-11-30 2019-09-20 浙江上方电子装备有限公司 一种工艺气体分布均匀的磁控溅射真空镀膜设备
CN112080731A (zh) * 2020-07-22 2020-12-15 湘潭宏大真空技术股份有限公司 多室连续光学镀膜机
CN213507173U (zh) * 2020-11-10 2021-06-22 湘潭宏大真空技术股份有限公司 用于磁控溅射镀膜机的隔断装置及磁控溅射镀膜机

Also Published As

Publication number Publication date
CN215887213U (zh) 2022-02-22

Similar Documents

Publication Publication Date Title
WO2023024321A1 (zh) 多室真空磁控溅射镀膜装置
WO2023024331A1 (zh) 三室磁控溅射镀膜装置
CN112080731B (zh) 多室连续光学镀膜机
CN208100694U (zh) 陶瓷杯内壁自动上釉机构
CN106563991B (zh) 一种集夹取、磨削、涂抹和卸料于一体的加工装置
CN211497759U (zh) 一种用于卧式真空镀膜机的进出料机构
CN114887831B (zh) 一种晶圆自动涂胶设备
CN108247821A (zh) 一种自动供液抹釉装置
CN211823640U (zh) 加工医药中间体用的真空电热式干燥机
CN112827697A (zh) 一种自动化炊具喷涂工装及喷涂方法
CN221166704U (zh) 一种用于证件加工的安全防伪镀膜机
CN207227542U (zh) 一种新型镀膜设备
CN113040245A (zh) 一种艾茶饼加工设备
CN113063550A (zh) 一种阀门封装用气密性检测系统及检测方法
CN220977120U (zh) 一种自动上下料的镜片真空镀膜机
CN219442351U (zh) 一种铝板喷漆用均匀烘干装置
CN216427402U (zh) 多功能复合材料气相沉积炉
CN216303972U (zh) 一种金属化电容器用薄膜的真空蒸发镀膜机
CN218203019U (zh) 一种刀具用超硬膜离子镀膜机
CN216296686U (zh) 一种粉末浮选药剂加药装置
CN117961659B (zh) 一种汽车异形工件表面处理装置及处理方法
CN207293559U (zh) 取料装置
CN219097084U (zh) 一种印记法自动贴膜机
CN114713418B (zh) 回转体工件喷涂设备及五金容器喷涂方法
CN219193635U (zh) 阳极氧化生产线上料装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21954847

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE