JPH04100253U - - Google Patents

Info

Publication number
JPH04100253U
JPH04100253U JP849691U JP849691U JPH04100253U JP H04100253 U JPH04100253 U JP H04100253U JP 849691 U JP849691 U JP 849691U JP 849691 U JP849691 U JP 849691U JP H04100253 U JPH04100253 U JP H04100253U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP849691U
Other languages
Japanese (ja)
Other versions
JPH089164Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1991008496U priority Critical patent/JPH089164Y2/ja
Publication of JPH04100253U publication Critical patent/JPH04100253U/ja
Application granted granted Critical
Publication of JPH089164Y2 publication Critical patent/JPH089164Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1991008496U 1991-01-31 1991-01-31 蒸着装置 Expired - Lifetime JPH089164Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1991008496U JPH089164Y2 (ja) 1991-01-31 1991-01-31 蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1991008496U JPH089164Y2 (ja) 1991-01-31 1991-01-31 蒸着装置

Publications (2)

Publication Number Publication Date
JPH04100253U true JPH04100253U (cs) 1992-08-31
JPH089164Y2 JPH089164Y2 (ja) 1996-03-13

Family

ID=31740874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1991008496U Expired - Lifetime JPH089164Y2 (ja) 1991-01-31 1991-01-31 蒸着装置

Country Status (1)

Country Link
JP (1) JPH089164Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007239070A (ja) * 2006-03-10 2007-09-20 Fujifilm Corp 真空蒸着装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60155670A (ja) * 1984-01-25 1985-08-15 Hitachi Ltd ハ−ス構造
JPS62167874A (ja) * 1986-01-17 1987-07-24 Sumitomo Electric Ind Ltd 蒸着るつぼ交換装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60155670A (ja) * 1984-01-25 1985-08-15 Hitachi Ltd ハ−ス構造
JPS62167874A (ja) * 1986-01-17 1987-07-24 Sumitomo Electric Ind Ltd 蒸着るつぼ交換装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007239070A (ja) * 2006-03-10 2007-09-20 Fujifilm Corp 真空蒸着装置

Also Published As

Publication number Publication date
JPH089164Y2 (ja) 1996-03-13

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term