JPH089163Y2 - 巻取式蒸着装置 - Google Patents

巻取式蒸着装置

Info

Publication number
JPH089163Y2
JPH089163Y2 JP40434190U JP40434190U JPH089163Y2 JP H089163 Y2 JPH089163 Y2 JP H089163Y2 JP 40434190 U JP40434190 U JP 40434190U JP 40434190 U JP40434190 U JP 40434190U JP H089163 Y2 JPH089163 Y2 JP H089163Y2
Authority
JP
Japan
Prior art keywords
vapor deposition
roll
film
type vapor
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP40434190U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0492553U (enExample
Inventor
守 関口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Inc filed Critical Toppan Inc
Priority to JP40434190U priority Critical patent/JPH089163Y2/ja
Publication of JPH0492553U publication Critical patent/JPH0492553U/ja
Application granted granted Critical
Publication of JPH089163Y2 publication Critical patent/JPH089163Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP40434190U 1990-12-20 1990-12-20 巻取式蒸着装置 Expired - Fee Related JPH089163Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40434190U JPH089163Y2 (ja) 1990-12-20 1990-12-20 巻取式蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40434190U JPH089163Y2 (ja) 1990-12-20 1990-12-20 巻取式蒸着装置

Publications (2)

Publication Number Publication Date
JPH0492553U JPH0492553U (enExample) 1992-08-12
JPH089163Y2 true JPH089163Y2 (ja) 1996-03-13

Family

ID=31881986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40434190U Expired - Fee Related JPH089163Y2 (ja) 1990-12-20 1990-12-20 巻取式蒸着装置

Country Status (1)

Country Link
JP (1) JPH089163Y2 (enExample)

Also Published As

Publication number Publication date
JPH0492553U (enExample) 1992-08-12

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Legal Events

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