JPH087603Y2 - マグネトロンスパッタ装置 - Google Patents

マグネトロンスパッタ装置

Info

Publication number
JPH087603Y2
JPH087603Y2 JP9420090U JP9420090U JPH087603Y2 JP H087603 Y2 JPH087603 Y2 JP H087603Y2 JP 9420090 U JP9420090 U JP 9420090U JP 9420090 U JP9420090 U JP 9420090U JP H087603 Y2 JPH087603 Y2 JP H087603Y2
Authority
JP
Japan
Prior art keywords
target
magnet
magnetron sputtering
magnetic field
annular magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9420090U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0493108U (enExample
Inventor
義彦 栗山
輝雄 梅原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP9420090U priority Critical patent/JPH087603Y2/ja
Publication of JPH0493108U publication Critical patent/JPH0493108U/ja
Application granted granted Critical
Publication of JPH087603Y2 publication Critical patent/JPH087603Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Microwave Tubes (AREA)
JP9420090U 1990-05-17 1990-09-07 マグネトロンスパッタ装置 Expired - Lifetime JPH087603Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9420090U JPH087603Y2 (ja) 1990-05-17 1990-09-07 マグネトロンスパッタ装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2-51538 1990-05-17
JP5153890 1990-05-17
JP9420090U JPH087603Y2 (ja) 1990-05-17 1990-09-07 マグネトロンスパッタ装置

Publications (2)

Publication Number Publication Date
JPH0493108U JPH0493108U (enExample) 1992-08-13
JPH087603Y2 true JPH087603Y2 (ja) 1996-03-04

Family

ID=31948554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9420090U Expired - Lifetime JPH087603Y2 (ja) 1990-05-17 1990-09-07 マグネトロンスパッタ装置

Country Status (1)

Country Link
JP (1) JPH087603Y2 (enExample)

Also Published As

Publication number Publication date
JPH0493108U (enExample) 1992-08-13

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