JPH0493108U - - Google Patents

Info

Publication number
JPH0493108U
JPH0493108U JP9420090U JP9420090U JPH0493108U JP H0493108 U JPH0493108 U JP H0493108U JP 9420090 U JP9420090 U JP 9420090U JP 9420090 U JP9420090 U JP 9420090U JP H0493108 U JPH0493108 U JP H0493108U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9420090U
Other languages
Japanese (ja)
Other versions
JPH087603Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9420090U priority Critical patent/JPH087603Y2/ja
Publication of JPH0493108U publication Critical patent/JPH0493108U/ja
Application granted granted Critical
Publication of JPH087603Y2 publication Critical patent/JPH087603Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Microwave Tubes (AREA)
JP9420090U 1990-05-17 1990-09-07 マグネトロンスパッタ装置 Expired - Lifetime JPH087603Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9420090U JPH087603Y2 (ja) 1990-05-17 1990-09-07 マグネトロンスパッタ装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2-51538 1990-05-17
JP5153890 1990-05-17
JP9420090U JPH087603Y2 (ja) 1990-05-17 1990-09-07 マグネトロンスパッタ装置

Publications (2)

Publication Number Publication Date
JPH0493108U true JPH0493108U (enExample) 1992-08-13
JPH087603Y2 JPH087603Y2 (ja) 1996-03-04

Family

ID=31948554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9420090U Expired - Lifetime JPH087603Y2 (ja) 1990-05-17 1990-09-07 マグネトロンスパッタ装置

Country Status (1)

Country Link
JP (1) JPH087603Y2 (enExample)

Also Published As

Publication number Publication date
JPH087603Y2 (ja) 1996-03-04

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Legal Events

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EXPY Cancellation because of completion of term