JPH0864731A - Heat conducting member and cooler and electronic apparatus employing the same - Google Patents

Heat conducting member and cooler and electronic apparatus employing the same

Info

Publication number
JPH0864731A
JPH0864731A JP6195140A JP19514094A JPH0864731A JP H0864731 A JPH0864731 A JP H0864731A JP 6195140 A JP6195140 A JP 6195140A JP 19514094 A JP19514094 A JP 19514094A JP H0864731 A JPH0864731 A JP H0864731A
Authority
JP
Japan
Prior art keywords
heat
conducting member
generating
film
conducting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6195140A
Other languages
Japanese (ja)
Inventor
Shigeo Ohashi
繁男 大橋
Toshio Hatada
敏夫 畑田
Noriyuki Ashiwake
範之 芦分
Susumu Iwai
進 岩井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6195140A priority Critical patent/JPH0864731A/en
Publication of JPH0864731A publication Critical patent/JPH0864731A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation

Abstract

PURPOSE: To provide a heat conducting member which has a flexible structure which can follow the variation of a distance between a heat generating member and a heat radiation member and produces a proper pressing force and can transmit the heat with a low thermal resistance and an electronic apparatus employing the heat conducting member. CONSTITUTION: A flat spring 5 which is spread in a surface direction so as to produce a force against the contact plane is enclosed in a bag of a flexible film 6 with grease 4 having a high thermal conductivity to provide a heat conducting member 1. The heat conducting member 1 is provided between a heat generating member 21 mounted on a wiring board 2 and a heat radiation member 3. The flat spring 5 is made of copper system alloy. The fluid grease 4 is enclosed in the bag of the flexible film 6.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、熱伝導部材及びそれを
用いた、冷却装置、電子機器に係り、特に発熱部材と放
熱部材との間に介在され、発熱部材で発生する熱を放熱
部材に熱伝達して発熱部材を所定の温度に保つようにす
る熱伝導部材及びそれを用いた冷却装置、電子機器に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat-conducting member and a cooling device and an electronic device using the same, and more particularly to a heat-dissipating member interposed between a heat-generating member and a heat-dissipating member. The present invention relates to a heat conducting member that transfers heat to a member to keep the heat generating member at a predetermined temperature, a cooling device using the same, and an electronic device.

【0002】[0002]

【従来の技術】従来の熱伝導部材としては、特開昭61
−244050号公報、特開昭56−125896号公
報、特開平4−48797号公報に記載のように、金属
板を板バネ状にして発熱部材と放熱部材との間に介在さ
せて冷却する例が示されている。また、特開昭55−1
25699号公報、特開昭63−28098号公報に記
載されているように、弾力性を有する樹脂を発熱部材と
放熱部材との間に介在させて冷却する例が示されてい
る。さらに、特開平2−166755号公報には、ゲル
状樹脂に格子状の溝を設け小さい力で接触させる例が示
されている。
2. Description of the Related Art As a conventional heat conducting member, Japanese Patent Application Laid-Open No. 61-61
As described in JP-A-244050, JP-A-56-125896, and JP-A-4-48797, an example in which a metal plate is shaped like a leaf spring and is interposed between a heat generating member and a heat radiating member to cool it It is shown. In addition, JP-A-55-1
As described in JP-A-25699 and JP-A-63-28098, an example in which an elastic resin is interposed between a heat-generating member and a heat-dissipating member and cooled is shown. Further, Japanese Patent Application Laid-Open No. 2-166755 discloses an example in which a grid-like groove is provided in a gel-like resin and the resin is brought into contact with a small force.

【0003】[0003]

【発明が解決しようとする課題】上記従来例で板バネ構
造のものは、小さい力で接触させるためには金属板の肉
厚を薄くする必要がある。それに伴い、板バネの断面積
が小さくなり、発熱部材と放熱部材との間の熱抵抗が大
きくなって十分な冷却性能が得られないという問題があ
った。一方、弾力性樹脂を用いる例では、発熱部材と放
熱部材との間の距離が、外部から加わる衝撃や熱変形に
よって変化した場合、樹脂自体には弾力性があっても、
大きな力が加わらないと接触面全体が厚み方向へ変形し
ない構造のものであり、発熱部材にダメージを与えてし
まうという問題がある。さらに、発熱部材と放熱部材と
の間の距離が、大きくなった時にその変位に追従できな
い構造のものであり、接触面に隙間が生じた場合、熱を
伝えられなくなるという問題がある。特開平2−166
755号公報に記載の例は、この問題を解決するために
面上に溝を形成しているが、力を緩和するには溝幅を大
きくする必要があり、その結果熱伝導に寄与する断面積
が小さくなり、十分な冷却性能が得られないという問題
があった。さらに、これらの弾力性を有する樹脂を用い
る例では、発熱部材の接触面内に温度分布がある場合、
熱伝導率が比較的小さいため、面方向へ熱が拡散されず
熱伝導部材の断面が有効に生かされていなかった。
In the above-mentioned conventional leaf spring structure, it is necessary to reduce the thickness of the metal plate in order to bring them into contact with each other with a small force. Along with this, the cross-sectional area of the leaf spring is reduced, the thermal resistance between the heat generating member and the heat radiating member is increased, and sufficient cooling performance cannot be obtained. On the other hand, in the example of using the elastic resin, when the distance between the heat generating member and the heat radiating member changes due to external impact or thermal deformation, even if the resin itself has elasticity,
The structure is such that the entire contact surface is not deformed in the thickness direction unless a large force is applied, which causes a problem of damaging the heat generating member. Furthermore, the distance between the heat-generating member and the heat-dissipating member is such that the displacement cannot be followed when the distance becomes large, and there is a problem that heat cannot be transferred if a gap is created on the contact surface. JP-A-2-166
In the example described in Japanese Patent No. 755 publication, a groove is formed on the surface in order to solve this problem, but it is necessary to increase the groove width in order to relax the force, and as a result, a disconnection that contributes to heat conduction. There is a problem that the area becomes small and sufficient cooling performance cannot be obtained. Further, in the example using the resin having elasticity, when there is a temperature distribution in the contact surface of the heat generating member,
Since the thermal conductivity is relatively small, heat was not diffused in the surface direction, and the cross section of the thermal conductive member was not effectively utilized.

【0004】本発明の第1の目的は、発熱部材と放熱部
材との間の距離が変動してもそれに追従して適正な押し
つけ力を発生する柔軟な構造の熱伝導部材及びそれを用
いた冷却装置、電子機器を提供することにある。
A first object of the present invention is to use a heat conducting member having a flexible structure which follows the fluctuation of the distance between the heat generating member and the heat radiating member and generates an appropriate pressing force, and the heat conducting member. To provide a cooling device and an electronic device.

【0005】本発明の第2の目的は、柔軟な構造で、か
つ発熱部材の接触面方向に熱拡散させることによって小
さい熱抵抗で熱を伝導する熱伝導部材及びそれを用いた
冷却装置、電子機器を提供することにある。
A second object of the present invention is to provide a heat conducting member which has a flexible structure and which conducts heat with a small thermal resistance by diffusing the heat in the contact surface direction of the heating member, a cooling device using the same, and an electronic device. To provide equipment.

【0006】本発明の第3の目的は、上記第1、第2の
目的を同時に達成できる熱伝導部材及びそれを用いた冷
却装置、電子機器を提供することにある。
A third object of the present invention is to provide a heat conducting member capable of simultaneously achieving the first and second objects, a cooling device using the same, and an electronic apparatus.

【0007】[0007]

【課題を解決するための手段】上記第1の目的を達成す
るために、本発明の熱伝導部材は、発熱部材と放熱部材
との間に介在され、該発熱部材で発生する熱を放熱部材
に伝熱する熱伝導部材であって、該熱伝導部材が、袋状
に形成された可とう性の膜と、該袋状の膜内に封入され
た流動性を有する液状媒体と前記膜に押し付け力を発生
するバネ部材とを備えていることを特徴とするものであ
る。
In order to achieve the first object, the heat conducting member of the present invention is interposed between a heat generating member and a heat radiating member to radiate heat generated by the heat generating member. A heat-conducting member for transferring heat to a flexible film formed in a bag shape, a liquid medium having fluidity enclosed in the bag-shaped film, and the film. And a spring member that generates a pressing force.

【0008】又、前記熱伝導部材が、前記放熱部材に形
成された凹部に流動性を有する液状媒体とバネ部材を収
納するとともに可とう性の膜により膜内に封入されたも
のであり、前記バネ部材が前記膜に押し付け力を発生す
るように構成されていることを特徴とするものである。
Further, the heat conducting member is one in which a liquid medium having fluidity and a spring member are housed in a concave portion formed in the heat radiating member, and the heat conducting member is sealed in the film by a flexible film. The spring member is configured to generate a pressing force against the film.

【0009】又、前記バネ部材が板バネであって、複数
の舌片部を具備するものである。又、前記可とう性の膜
が、外側は融点の比較的高い樹脂層、中間はアルミ箔
層、内側は最外層の樹脂より融点の低い樹脂層でフィル
ム状に構成され、内側の樹脂層の熱融着によってフィル
ム同士が接着されているものである。
Further, the spring member is a leaf spring and is provided with a plurality of tongue pieces. Further, the flexible film is formed into a film shape by a resin layer having a relatively high melting point on the outer side, an aluminum foil layer on the middle side, and a resin layer having a lower melting point than the resin of the outermost layer on the inner side. The films are adhered to each other by heat fusion.

【0010】上記第2の目的を達成するために、本発明
の熱伝導部材は、発熱部材と放熱部材との間に介在さ
れ、該発熱部材で発生する熱を放熱部材に伝熱する熱伝
導部材であって、該熱伝導部材が、袋状に形成された可
とう性の膜と、該袋状の膜内に封入された高い熱伝導性
を有する液状媒体と前記膜に押し付け力を発生し発熱部
材との接触面と平行な方向に拡がる面を有する高い熱伝
導性を有するバネ部材とを備えていることを特徴とする
ものである。
In order to achieve the second object, the heat conducting member of the present invention is interposed between a heat generating member and a heat radiating member and transfers heat generated by the heat generating member to the heat radiating member. A member, wherein the heat-conducting member generates a flexible film formed in a bag shape, a liquid medium having a high heat conductivity enclosed in the bag-shaped film, and a pressing force to the film. And a spring member having a high thermal conductivity and having a surface extending in a direction parallel to the contact surface with the heat generating member.

【0011】又、前記発熱部材が複数個搭載されている
ものであって、前記バネ部材の複数の舌片部が前記複数
の発熱部材に対応する位置に形成されているものであ
る。又、前記熱伝導部材の厚さが5mm以下であるもの
である。又、前記液状媒が、シリコンオイル中にZn
O、ダイヤモンド、あるいは金属系の粒子を混入したも
のである。又、前記フィンが2つ設けられるものであっ
て、該2つのフィンを組み合わせて配置し、面その組み
合わせ部に前記ゲル状樹脂を充填したものである。
Further, a plurality of the heat generating members are mounted, and a plurality of tongue pieces of the spring member are formed at positions corresponding to the plurality of heat generating members. The thickness of the heat conducting member is 5 mm or less. Further, the liquid medium is Zn in silicon oil.
It is a mixture of O, diamond, or metal particles. In addition, two fins are provided, the two fins are arranged in combination, and the combination of the surfaces is filled with the gel resin.

【0012】上記第3の目的を達成するために、本発明
の熱伝導部材は、発熱部材と放熱部材との間に介在さ
れ、該発熱部材で発生する熱を放熱部材に伝熱する熱伝
導部材であって、該熱伝導部材が、袋状に形成された可
とう性の膜を有するものであり、高い熱伝導性を有する
液状媒体と、発熱部材との接触面と平行な方向に拡がる
面のベースを有するフィンと、前記膜に押し付け力を発
生する高い熱伝導性を有するバネ部材を前記袋状の膜内
に封入して形成されていることを特徴とするものであ
る。
In order to achieve the third object, the heat conducting member of the present invention is interposed between a heat generating member and a heat radiating member and transfers heat generated in the heat generating member to the heat radiating member. A member, wherein the heat conducting member has a flexible film formed in a bag shape, and spreads in a direction parallel to a contact surface between the liquid medium having high heat conductivity and the heat generating member. It is characterized in that a fin having a surface base and a spring member having a high thermal conductivity for generating a pressing force against the film are enclosed in the bag-shaped film.

【0013】又、複数の発熱部材と放熱部材との間に介
在され、該複数の発熱部材で発生する熱を放熱部材に伝
熱する熱伝導部材であって、該熱伝導部材が、前記複数
の発熱部材に接触する袋状に形成された可とう性の膜
と、該袋状の膜内に封入された高い熱伝導性を有する液
状媒体と前記膜に前記複数の発熱部材の個々に対応した
押し付け力を発生し発熱部材との接触面と平行な方向に
拡がる面を有する高い熱伝導性を有するバネ部材とを備
えていることを特徴とするものである。
Further, the heat conducting member is interposed between the plurality of heat generating members and the heat radiating member and transfers the heat generated in the plurality of heat generating members to the heat radiating member, wherein the heat conducting member is the plurality of heat conducting members. A flexible film formed in a bag shape that contacts the heat generating member, a liquid medium having high heat conductivity enclosed in the bag film, and the film corresponding to each of the plurality of heat generating members. And a spring member having a high thermal conductivity and having a surface that spreads in a direction parallel to a contact surface with the heat generating member that generates the pressing force.

【0014】又、該熱伝導部材が、発熱部材との接触面
と平行な方向に拡がる面のベースを有するフィンの一部
をフィンの底部が空間を有するようにゲル状樹脂中に入
り込ませて成形されているものであることを特徴とする
ものである。
Further, the heat-conducting member has a part of a fin having a base whose surface extends in a direction parallel to a contact surface with the heat-generating member, and is inserted into the gel-like resin so that the bottom of the fin has a space. It is characterized in that it is molded.

【0015】又、該熱伝導部材が、ゲル状樹脂中に発熱
部材との接触面と平行な方向に拡がる面を有する金属板
を設け、かつ前記放熱部材に形成された凹凸部の一部を
該凹凸部の底部が空間を有するようにゲル状樹脂中に入
り込ませて成形されているものであることを特徴とする
ものである。
Further, the heat conducting member is provided with a metal plate having a surface extending in a direction parallel to the contact surface with the heat generating member in the gel-like resin, and part of the uneven portion formed on the heat radiating member is provided. It is characterized in that it is formed by being inserted into a gel-like resin so that the bottom of the uneven portion has a space.

【0016】上記1から3の目的を達成するために、本
発明の冷却装置は、請求項2、3、5、6のいずれかに
記載の熱伝導部材を発熱部材側に前記平行な方向に拡が
る面を有するバネ部材もしくはベースを配置して前記発
熱部材と放熱部材との間に介在させて構成したことを特
徴とするものである。
In order to achieve the above-mentioned objects 1 to 3, the cooling device of the present invention has the heat conducting member according to any one of claims 2, 3, 5 and 6 in the direction parallel to the heat generating member side. The present invention is characterized in that a spring member or base having an expanding surface is arranged and is interposed between the heat generating member and the heat radiating member.

【0017】上記1から3の目的を達成するために、本
発明の電子機器は、複数の半導体素子を搭載した電子回
路基板及びその周辺装置が金属面を有する筐体内に収容
されてなる電子機器において、請求項1から13のいず
れかに記載の熱伝導部材を前記半導体素子と前記筐体の
金属面との間に介在させたことを特徴とするものであ
る。
In order to achieve the above objects 1 to 3, an electronic device according to the present invention is an electronic device in which an electronic circuit board having a plurality of semiconductor elements mounted thereon and its peripheral devices are housed in a housing having a metal surface. In the above, the heat conducting member according to any one of claims 1 to 13 is interposed between the semiconductor element and the metal surface of the housing.

【0018】又、複数の半導体素子を搭載した電子回路
基板及びその周辺装置が金属製の筐体内に収容されてな
る電子機器において、半導体素子を搭載した電子回路基
板のうち特定の半導体素子が搭載された面を筐体の金属
壁面と対向して設置し、該特定の半導体素子と前記筐体
の金属壁面との間に請求項1から13のいずれかに記載
の熱伝導部材を介在させたことを特徴とするものであ
る。
Further, in an electronic device in which an electronic circuit board on which a plurality of semiconductor elements are mounted and its peripheral devices are housed in a metal casing, a specific semiconductor element is mounted on the electronic circuit board on which the semiconductor elements are mounted. The heat conducting member according to any one of claims 1 to 13 is interposed between the specific semiconductor element and the metal wall surface of the housing. It is characterized by that.

【0019】[0019]

【作用】本発明の熱伝導部材及びそれを用いた電子機器
は、上記のように構成しているので、次のような作用を
有する。
The heat conducting member of the present invention and the electronic equipment using the same have the following actions because they are configured as described above.

【0020】熱伝導部材は、可とう性膜の袋中に流動性
を有するグリースが封入されているので柔軟性を有す
る。又、板バネを封入しているので、板バネの押し付け
力によって発熱部材と放熱部材との間の距離が外部から
加わる衝撃や熱変形によって変化しても、それに追従し
て適正な力で発熱部材と放熱部材とに押し付けられる。
また、板バネは、発熱部材との接触面方向に広がった金
属面を有するので、熱伝導率の高い金属によって、接触
面方向に熱が拡散される。このため、熱伝導部材の全断
面が熱伝導に寄与し、熱伝導性グリースの大きい熱伝導
率によって小さい熱抵抗で発熱部材から放熱部材に熱が
伝わり、発熱部材が効率よく冷却される。
The heat conducting member has flexibility because the fluid grease is enclosed in a flexible film bag. Also, because the leaf spring is enclosed, even if the distance between the heat generating member and the heat radiating member changes due to external impact or thermal deformation due to the pressing force of the leaf spring, it will follow it and generate heat with an appropriate force. It is pressed against the member and the heat dissipation member.
Further, since the leaf spring has a metal surface that spreads in the contact surface direction with the heat generating member, heat is diffused in the contact surface direction by the metal having high thermal conductivity. For this reason, the entire cross section of the heat conducting member contributes to heat conduction, the heat is transmitted from the heat generating member to the heat radiating member with a small thermal resistance due to the high thermal conductivity of the heat conductive grease, and the heat generating member is efficiently cooled.

【0021】また、高熱伝導性のゲル状樹脂中に、フィ
ンの一部を樹脂中に入り込ませて成形しているので、発
熱部材と放熱部材との間の距離が外部から加わる衝撃や
熱変形によって変化しても、ゲル状樹脂の変形は、せん
断方向への変形になるので、変形しやすくなるとともに
バネ性も有する。一方、フィン部が樹脂中に入り込んで
いることによって伝導距離が短くなる。さらに、フィン
部で面積拡大されているので、熱伝導に寄与する面積が
大きなり、フィンはゲル状樹脂よりかなり大きい熱伝導
率を有するので、小さい熱抵抗で発熱部材から放熱部材
に熱が伝わり、発熱部材が効率よく冷却される。
Further, since a part of the fin is made to penetrate into the resin having high heat conductivity and is molded, the distance between the heat generating member and the heat radiating member is applied from the outside due to impact or thermal deformation. The gel-like resin is deformed in the shearing direction even if it is changed by the above-mentioned method, so that it is easily deformed and has a spring property. On the other hand, the conduction distance is shortened because the fin portion is embedded in the resin. Furthermore, since the area of the fin portion is expanded, the area that contributes to heat conduction is large, and the fin has a much higher thermal conductivity than gel-like resin, so heat is transmitted from the heat generating member to the heat radiating member with a small thermal resistance. The heat generating member is efficiently cooled.

【0022】また、熱伝導部材を、複数の発熱部材が搭
載される配線基板と金属製筐体壁との間に介在させたの
で、発熱部材間に高さのばらつきがあっても各々の発熱
部材と金属製筐体壁とが効率良く熱的に接続されるとと
もに、金属製筐体の高い熱伝導率のために熱が広く筐体
壁に拡散され高い放熱性能が得られる。したがって、効
率的に発熱素子を冷却することができる。
Further, since the heat conducting member is interposed between the wiring board on which a plurality of heat generating members are mounted and the metal casing wall, even if the heights of the heat generating members vary, heat is generated by each heat generating member. The member and the metal housing wall are efficiently and thermally connected to each other, and due to the high thermal conductivity of the metal housing, the heat is widely diffused to the housing wall and high heat dissipation performance is obtained. Therefore, the heating element can be cooled efficiently.

【0023】[0023]

【実施例】本発明の第1の実施例を図1から図5により
説明する。図1は本実施例の電子機器の横断面図、図2
から図5はそれぞれ熱伝導部材の縦断面図である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a cross-sectional view of the electronic device of this embodiment, and FIG.
5 to FIG. 5 are vertical sectional views of the heat conducting member.

【0024】本実施例は、熱伝導部材を電子機器の冷却
に適用した例を示しており、電子機器の全体構成を示し
ている図1から分かるように、本実施例の電子機器で
は、配線基板2の特に発熱量の大きい半導体素子21
a、21bを搭載した面を金属筐体39に対向させて設
置し、半導体素子21a、21bの面と金属筐体との間
に熱伝導部材1を介在させている。筐体39壁には、爪
38が設けられており、この爪38によって熱伝導部材
1が脱落することを防止している。
The present embodiment shows an example in which a heat conducting member is applied to cooling an electronic device, and as can be seen from FIG. 1 showing the overall configuration of the electronic device, the electronic device of the present embodiment has a wiring. The semiconductor element 21 of the substrate 2 having a particularly large heat generation amount
The surfaces on which a and 21b are mounted are installed so as to face the metal housing 39, and the heat conduction member 1 is interposed between the surfaces of the semiconductor elements 21a and 21b and the metal housing. A claw 38 is provided on the wall of the housing 39, and the claw 38 prevents the heat conducting member 1 from falling off.

【0025】熱伝導部材1は、次のように構成されてい
る。図2に示すように、熱伝導部材1は、袋状に成形し
た可とう性膜6の中に、流動性を有しかつ高い熱伝導性
を有するグリース4、接触面に対して接触面を押す方向
に力を発生するように面方向に広がりを持つ板バネ5を
封入して形成されている。この熱伝導部材1は、配線基
板2上に搭載された発熱電子部品21と放熱部材3との
間に介在されている。放熱部材3は、筐体を構成する金
属壁、もしくは放熱フィンなどで構成されている。熱伝
導性グリース4は、シリコンオイル中にZnO、ダイヤ
モンド、あるいは金属系の粒子を混入したものである。
可とう性膜6は、多層構造になっており、外側は融点の
比較的高い樹脂層、中間はアルミ箔層、内側は最外層の
樹脂より融点の低い樹脂層でフィルム状に構成され、内
側の樹脂層の熱融着によってフィルム同士が接着されて
いる。アルミ箔は、グリースのオイル成分に対してバリ
ア性を有する。板バネ5は、リン青銅、黄銅などの銅系
合金の板を用い、板の両端をU字状に曲げて形成してい
る。材質を銅系の金属にする理由は、このように構成す
ることによってバネ自体にも高い熱伝導をもたせるため
である。板バネ5の板厚は、板バネ5の押付け力に応じ
て選定されるが、0.5mm以下程度の厚さのものを用
いる。また、さらに、端部を折り返して折り返し部51
を形成し、この折り返し部51に、極端な変形によって
板バネ5が弾性変形範囲内から逸脱しないようにストッ
パの機能を持たせている。
The heat conducting member 1 is constructed as follows. As shown in FIG. 2, the heat conductive member 1 includes a flexible film 6 formed in a bag shape, a grease 4 having fluidity and high heat conductivity, and a contact surface with respect to the contact surface. It is formed by enclosing a leaf spring 5 having a spread in the surface direction so as to generate a force in the pushing direction. The heat conducting member 1 is interposed between the heat generating electronic component 21 mounted on the wiring board 2 and the heat radiating member 3. The heat dissipating member 3 is composed of a metal wall forming a housing, a heat dissipating fin, or the like. The thermally conductive grease 4 is obtained by mixing particles of ZnO, diamond, or metal in silicone oil.
The flexible film 6 has a multi-layer structure. The outer side is a resin layer having a relatively high melting point, the middle is an aluminum foil layer, and the inner side is a resin layer having a lower melting point than the resin of the outermost layer, and is formed into a film shape. The films are adhered to each other by heat fusion of the resin layer. The aluminum foil has a barrier property against the oil component of grease. The leaf spring 5 is formed of a copper alloy plate such as phosphor bronze or brass, and is formed by bending both ends of the plate into a U shape. The reason why the material is a copper-based metal is that the spring itself also has high heat conduction by such a configuration. The plate thickness of the plate spring 5 is selected according to the pressing force of the plate spring 5, but a plate spring having a thickness of about 0.5 mm or less is used. In addition, the end portion is folded back to form the folded portion 51.
The folded portion 51 is provided with a function of a stopper so that the leaf spring 5 does not deviate from the elastic deformation range due to extreme deformation.

【0026】本実施例の熱伝導部材1は、可とう性膜6
の袋中に流動性を有するグリースが封入されているので
柔軟性を有する。さらに、板バネ5を封入しているの
で、板バネ5の押しつけ力によって、発熱電子部品21
と放熱部材3との間の距離が外部から加わる衝撃や熱変
形によって変化しても、その距離の変化に追従して適正
な力で発熱電子部品21と放熱部材3とに押し付けられ
る。また、板バネ5は、接触面方向に広がった金属面を
有するように形成されているので、熱伝導率の高い金属
面を通して接触面方向に熱が拡散される。従って、金属
面の接触面方向の全断面が熱伝達に寄与し、熱伝導部材
3の熱伝導と、高い熱伝導率の熱伝導性グリースによっ
て小さい熱抵抗で発熱電子部品21から放熱部材3に熱
が伝わるため、発熱電子部品が効率よく冷却される。
The heat-conducting member 1 of this embodiment has a flexible film 6
Since the grease having fluidity is enclosed in the bag, it has flexibility. Further, since the leaf spring 5 is enclosed, the heat generating electronic component 21 is pressed by the pressing force of the leaf spring 5.
Even if the distance between the heat radiating member 3 and the heat radiating member 3 changes due to an external impact or thermal deformation, the change in the distance is followed and the heat generating electronic component 21 and the heat radiating member 3 are pressed with appropriate force. Further, since the leaf spring 5 is formed to have a metal surface that spreads in the contact surface direction, heat is diffused in the contact surface direction through the metal surface having high thermal conductivity. Therefore, the entire cross section in the contact surface direction of the metal surface contributes to heat transfer, and the heat conduction of the heat conduction member 3 and the heat conduction grease having high heat conductivity from the heat generating electronic component 21 to the heat radiation member 3 with a small heat resistance. Since heat is transmitted, the heat-generating electronic components are efficiently cooled.

【0027】図3に熱伝導部材の変形例を示す。この例
は、図2と同様な構成であるが、板バネ5の舌片部5a
の数を増やして、バネ自体の熱伝導による熱伝達を高
め、熱抵抗をさらに小さくするものである。板バネ5
は、一枚の板から複数の舌片部5aを形成しても良く、
この場合は、板の中央部から舌片部5aを折り返すよう
にして形成する。又、図2で説明したような板バネに、
後から舌片部5aを接合して形成しても良い。板バネ5
の舌片部5aの数を増加させると押し付け力が増大する
ため、この押し付け力を適正に調節するためには、板厚
を薄くする必要がある。板バネ5のバネ定数は、板厚の
3乗に比例するため、例えば、舌片数5aを2倍に増や
した場合、同じ板厚のときバネ力は2倍になるので、第
1の実施例と同じバネ力に設定するためには板バネ5a
の板厚を0.79倍する。この場合板厚は0.79にな
るだけであるので、板バネ5自体の熱伝導はあまり低下
せず、上記したように熱抵抗を小さくする効果は、それ
ほど損なわれない。なお、発熱電子部品の発熱量が比較
的小さい場合などは、板バネ5だけ熱伝導部材を構成し
ても良い。
FIG. 3 shows a modification of the heat conducting member. This example has the same configuration as that of FIG. 2, but the tongue portion 5a of the leaf spring 5 is
To increase the heat transfer by the heat conduction of the spring itself and further reduce the thermal resistance. Leaf spring 5
May form a plurality of tongue pieces 5a from one plate,
In this case, the tongue piece 5a is formed by folding it back from the center of the plate. In addition, in the leaf spring as described in FIG.
It may be formed by joining the tongue pieces 5a later. Leaf spring 5
When the number of the tongue pieces 5a is increased, the pressing force increases. Therefore, in order to properly adjust the pressing force, it is necessary to reduce the plate thickness. Since the spring constant of the leaf spring 5 is proportional to the cube of the plate thickness, for example, when the number of tongues 5a is doubled, the spring force doubles at the same plate thickness. To set the same spring force as the example, the leaf spring 5a
The plate thickness of 0.79 times. In this case, since the plate thickness is only 0.79, the heat conduction of the plate spring 5 itself does not decrease so much, and the effect of reducing the thermal resistance as described above is not so impaired. In addition, when the heat generation amount of the heat generating electronic component is relatively small, the heat conduction member may be configured by only the leaf spring 5.

【0028】なお、図1に示す例では、筐体底面部を放
熱面として利用している例を示したが、例えば、キ−ボ
−ド36を支持している金属板63を放熱面として利用
するように配線基板2及び熱伝導部材1を設置しても良
い。
In the example shown in FIG. 1, the bottom surface of the housing is used as a heat radiation surface. However, for example, the metal plate 63 supporting the keyboard 36 is used as a heat radiation surface. The wiring board 2 and the heat conducting member 1 may be installed so as to be used.

【0029】図4にさらに熱伝導部材の変形例を示す。
この例は、図2に示す実施例と同様に袋状に成形した可
とう性フィルム6の中に、流動性を有しかつ高熱伝導性
のグリース4とともに発熱電子部品の面積と同程度ある
いはそれ以上の接触面積のベースを有する金属性のフィ
ン7をそのフィンが対向するように組み合わせ、本実施
例では、フィン7の中央部にコイルバネ8を、フィン7
の両端のベース部に板バネ52を接触させて封入してい
る。ここで、金属性のフィン7としてはアルミ、銅など
が用いられる。なお、コイルバネ8及び板バネ52は両
方設けてもよく、どちらか一方でも良い。
FIG. 4 shows a modification of the heat conducting member.
In this example, in the same manner as the embodiment shown in FIG. 2, in the flexible film 6 formed in a bag shape, together with the grease 4 having fluidity and high thermal conductivity, the same area as that of the heat-generating electronic component or its The metal fins 7 having the bases having the above contact areas are combined so that the fins face each other. In this embodiment, the coil spring 8 is provided at the center of the fins 7.
The leaf springs 52 are brought into contact with the base portions at both ends of the to seal. Here, aluminum, copper, or the like is used as the metallic fin 7. Both the coil spring 8 and the leaf spring 52 may be provided, or either one may be provided.

【0030】本実施例によれば、熱伝導部材1は、図
2、図3に示す実施例で説明したと同様、柔軟性を有
し、発熱電子部品と放熱部材との間の適切な押し付け力
が得られる。また、フィン7は、接触面方向に広がった
ベース部を有するので、熱伝導率の高い金属によって接
触面方向に熱が拡散されるため、熱伝導部材が熱伝導に
寄与するとともに、フィン部で面積が拡大されており、
効率の高い熱伝導が得られる。なお、フィン間のギャッ
プは小さい方が熱伝導距離が小さくなるため、熱伝導性
能は向上するが、柔軟性が低下するので、発熱電子部品
の機器への搭載条件に応じて適正なフィン厚さ、枚数、
フィン間ギャップが選定される。
According to the present embodiment, the heat conducting member 1 has flexibility as described in the embodiment shown in FIGS. 2 and 3, and is appropriately pressed between the heat generating electronic component and the heat radiating member. Power is gained. Further, since the fin 7 has a base portion that spreads in the contact surface direction, heat is diffused in the contact surface direction by the metal having a high thermal conductivity, so that the heat conducting member contributes to the heat conduction and at the fin portion. The area has been expanded,
Highly efficient heat transfer can be obtained. The smaller the gap between the fins is, the shorter the heat conduction distance becomes, so the heat conduction performance is improved, but the flexibility is lowered. Therefore, the fin thickness appropriate for the mounting condition of the heat-generating electronic component in the equipment is required. , Number of sheets,
The inter-fin gap is selected.

【0031】図5にさらに熱伝導部材の変形例を示す。
この例は、配線基板2上に搭載された高さの異なる複数
の発熱電子部品21、22と放熱部材3との間に、一つ
の熱伝導部材1を介在させてこの高さの異なる複数の発
熱電子部品を一括して冷却する場合の例である。熱伝導
部材1の構成は、図1に示す実施例と同様であるが、放
熱部材3側に設けられた一つの板バネ5に、発熱電子部
品21、22に対応した位置に複数の舌片5a、5b、
5cを設けて、各々の発熱電子部品21、22に押し付
け力を発生させている。舌片5a、5b、5cは、一枚
の金属板である板バネ5の各部分からU字状に折り返し
た構造、あるいは一枚の金属板である板バネ5に複数の
舌片5a、5b、5cを接合した構造のものでも良い。
FIG. 5 shows a modification of the heat conducting member.
In this example, one heat conducting member 1 is interposed between a plurality of heat generating electronic components 21 and 22 mounted on the wiring board 2 and having different heights, and a plurality of heat conducting members 1 having different heights. This is an example of a case where the heat-generating electronic components are collectively cooled. The structure of the heat conduction member 1 is the same as that of the embodiment shown in FIG. 1, but one leaf spring 5 provided on the heat dissipation member 3 side is provided with a plurality of tongue pieces at positions corresponding to the heat generating electronic components 21 and 22. 5a, 5b,
5c is provided to generate a pressing force on each of the heat generating electronic components 21 and 22. The tongues 5a, 5b, 5c have a structure in which each part of the leaf spring 5 which is a single metal plate is folded back in a U shape, or a plurality of tongues 5a, 5b are provided on the leaf spring 5 which is a single metal plate. It may have a structure in which 5c are joined.

【0032】本実施例によれば、複数の高さの異なる発
熱電子部品を配線基板2上に搭載した場合であっても一
括して効率よく冷却することができる。
According to the present embodiment, even when a plurality of heat-generating electronic components having different heights are mounted on the wiring board 2, it is possible to efficiently cool them collectively.

【0033】本発明の第2の実施例を図6、図7により
説明する。図6、図7はそれぞれ本実施例の熱伝導部材
の縦断面図である。
A second embodiment of the present invention will be described with reference to FIGS. 6 and 7 are vertical cross-sectional views of the heat conducting member of this embodiment.

【0034】図6から分かるように、本実施例の熱伝導
部材は、図5に示す実施例と同様な構成であるが、配線
基板2、複数の半導体チップ23、24、熱伝導部材
1、放熱フィン31で構成されたマルチチップモジュー
ルの例である。本実施例のマルチチップモジュールは、
配線基板2上に大きさあるいは高さの異なる複数の半導
体チップ23、24が搭載されて電子回路が構成されて
おり、放熱フィン31が配線基板2に固定されている。
半導体チップ23、24と放熱フィン31との間には、
熱伝導部材1が設置されている。熱伝導部材1の構成
は、図4に示す実施例と同様に、一つの板バネ5に半導
体チップに対応した位置に複数の舌片5a、5b、5c
を設けて各々の半導体チップ23、24に押し付け力を
発生させている。舌片5a、5b、5cは、一枚の金属
板である板バネ5の各部分からU字状に折り返した構
造、あるいは一枚の金属板である板バネに複数の舌片を
接合した構造のものでも良い。本実施例によれば、高さ
の異なる複数の半導体チップが混在したモジュールであ
っても、全ての半導体素子で発生する熱を放熱フィンに
効率よく熱伝達でき、効率よく冷却できる。従って、各
々の半導体素子にそれぞれに個別に放熱フィンを取り付
ける必要がなく簡単な構造にできる。
As can be seen from FIG. 6, the heat conducting member of this embodiment has the same structure as that of the embodiment shown in FIG. 5, but the wiring board 2, the plurality of semiconductor chips 23 and 24, the heat conducting member 1, It is an example of a multi-chip module configured by a radiation fin 31. The multi-chip module of this embodiment is
A plurality of semiconductor chips 23, 24 having different sizes or heights are mounted on the wiring board 2 to form an electronic circuit, and the radiation fins 31 are fixed to the wiring board 2.
Between the semiconductor chips 23, 24 and the radiation fin 31,
The heat conduction member 1 is installed. As in the embodiment shown in FIG. 4, the heat conduction member 1 has a plurality of tongue pieces 5a, 5b, 5c on one leaf spring 5 at positions corresponding to semiconductor chips.
Is provided to generate a pressing force on each of the semiconductor chips 23 and 24. The tongues 5a, 5b, and 5c have a structure in which each part of the leaf spring 5 that is a single metal plate is folded back in a U shape, or a structure in which a plurality of tongues are joined to a leaf spring that is a single metal plate. It can be one. According to the present embodiment, even in a module in which a plurality of semiconductor chips having different heights are mixed, the heat generated in all the semiconductor elements can be efficiently transferred to the heat radiation fins and efficiently cooled. Therefore, it is not necessary to individually attach a radiation fin to each semiconductor element, and a simple structure can be obtained.

【0035】図7に変形例を示す。この例は、放熱フィ
ン31と熱伝導部材1とを一体化している構成のもので
ある。放熱フィン3の底部には凹部が形成され、この凹
部に熱伝導グリース4と複数の舌片部を有する板バネ5
を設置して、可とう性フィルム6によって封止してい
る。熱伝導性グリース4、板バネ5、可とう性フィルム
6は、これまで述べた実施例のものと同様の構成であ
る。本実施例によれば、発熱部材の面の平面度が一様に
形成されていない場合や、例えば図6に示したように複
数の発熱部材が並んで構成されている場合でも、簡単な
構造の一つの放熱フィンを取り付けるだけで冷却するこ
とができる。
FIG. 7 shows a modification. In this example, the radiation fin 31 and the heat conducting member 1 are integrated. A recess is formed at the bottom of the heat dissipation fin 3, and the heat conductive grease 4 and the leaf spring 5 having a plurality of tongue pieces are provided in this recess.
Is installed and sealed by the flexible film 6. The heat conductive grease 4, the leaf spring 5, and the flexible film 6 have the same configurations as those of the embodiments described above. According to this embodiment, even when the flatness of the surface of the heat generating member is not formed uniformly, or when a plurality of heat generating members are arranged side by side as shown in FIG. 6, for example, a simple structure is provided. It can be cooled simply by attaching one radiating fin.

【0036】なお、図2から図7で示した実施例におい
ては、熱伝導性グリースを適用した例を示したが、熱伝
導率の大きいシリコンオイルなどの液体でも良い。
In the embodiments shown in FIGS. 2 to 7, the example in which the heat conductive grease is applied is shown, but a liquid such as silicone oil having a high heat conductivity may be used.

【0037】本発明の第3の実施例を図8から図10に
より説明する。図8から図10はそれぞれ本実施例の熱
伝導部材の縦断面図である。
A third embodiment of the present invention will be described with reference to FIGS. 8 to 10 are vertical cross-sectional views of the heat conducting member of this embodiment.

【0038】図8から分かるように、熱伝導部材1を、
発熱電子部品21の面積と同程度あるいはそれ以上の接
触面を有する金属性のベースに金属性のフィン41を、
高い熱伝導性を有するゲル状樹脂10中にフィン41の
一部が樹脂中に入り込むように成形して形成されてい
る。この熱伝導部材1を、配線基板2上に搭載された発
熱電子部品21と放熱部材3との間に介在させている。
ここで、ゲル状樹脂10とフィン41の底部との間に空
間42が形成されており、ゲル状樹脂10の変形が吸収
できるようになっている。本実施例では、高い熱伝導性
を有するゲル状樹脂10中に、フィン41の一部が入り
込むように成形しているので、発熱電子部品21と放熱
部材3との間の距離が外部から加わる衝撃や熱変形によ
って変化しても、ゲル状樹脂の変形はせん断方向への変
形になるので、変形しやすいとともにバネ性も有する。
一方、フィン41部をゲル状樹脂10中に入り込むよう
に構成することによって伝導距離が短くしている、フィ
ン41部を設けているので面積を拡大し、熱伝導に寄与
する面積を大きくしているので、フィン41はゲル状樹
脂10よりかなり大きい熱伝導率を有するため、小さい
熱抵抗で発熱電子部品21から放熱部材3に熱が伝わ
り、発熱電子部品21を効率よく冷却することができ
る。
As can be seen from FIG. 8, the heat conducting member 1 is
A metal fin 41 is provided on a metal base having a contact surface that is as large as or larger than the area of the heat-generating electronic component 21.
The fin 41 is formed by molding so that a part of the fin 41 is inserted into the gel-like resin 10 having high thermal conductivity. The heat conducting member 1 is interposed between the heat generating electronic component 21 mounted on the wiring board 2 and the heat radiating member 3.
Here, a space 42 is formed between the gel-like resin 10 and the bottom portion of the fin 41 so that the deformation of the gel-like resin 10 can be absorbed. In the present embodiment, the fin 41 is molded so that a part of the fin 41 is inserted into the gel resin 10 having high thermal conductivity. Therefore, the distance between the heat generating electronic component 21 and the heat radiating member 3 is added from the outside. Even if it changes due to impact or thermal deformation, the gel-like resin is deformed in the shearing direction, so that it is easily deformed and has a spring property.
On the other hand, the conduction distance is shortened by configuring the fin 41 portion so as to enter into the gel-like resin 10. Since the fin 41 portion is provided, the area is expanded and the area contributing to heat conduction is increased. Since the fins 41 have much higher thermal conductivity than the gel resin 10, the heat is transmitted from the heat generating electronic component 21 to the heat radiating member 3 with a small thermal resistance, and the heat generating electronic component 21 can be cooled efficiently.

【0039】図9に変形例を示す。この例は、図8に示
す実施例と同様な構成であるが、ゲル状樹脂10の両側
に金属性のフィン41を配置し、ゲル状樹脂10の両面
からフィン41の一部がゲル状樹脂10中にそれぞれの
フィン41が噛み合う形で入り込むように成形してい
る。本実施例においても、ゲル状樹脂10とフィン41
底部との間に空間42が形成されており、ゲル状樹脂1
0の変形を吸収できるようになっている。本実施例によ
れば、フィン41はゲル状樹脂10よりかなり高い熱伝
導率を有するので、伝導距離がフィン間のギャップだけ
で決まるとともに、熱伝導に寄与する面積を大幅に大き
くすることができるので、小さい熱抵抗で熱伝達でき
る。なお、図8、図9で示したフィン41の形状として
は、平行平板フィンや、ピン状フィンを適用する。ま
た、フィン41の先端部を鋭角に形成することによっ
て、柔軟性に富むようにすることができる。
FIG. 9 shows a modification. This example has the same configuration as that of the embodiment shown in FIG. 8, except that metallic fins 41 are arranged on both sides of the gel-like resin 10, and the fins 41 are partially covered with the gel-like resin 10 from both sides of the gel-like resin 10. The fins 41 are formed so as to be engaged with each other. Also in this embodiment, the gel resin 10 and the fins 41 are used.
A space 42 is formed between the gel resin 1 and the bottom.
It can absorb 0 deformation. According to the present embodiment, the fins 41 have much higher thermal conductivity than the gel resin 10, so that the conduction distance is determined only by the gap between the fins, and the area contributing to heat conduction can be significantly increased. Therefore, heat can be transferred with a small heat resistance. As the shape of the fin 41 shown in FIGS. 8 and 9, a parallel plate fin or a pin-shaped fin is applied. Further, by forming the tips of the fins 41 at acute angles, it is possible to make the fins 41 highly flexible.

【0040】ここで、フィン41間のギャップを小さく
することによって熱抵抗を小さくすることができるが、
柔軟性を損なうことになる。そのため、フィンの幅(ピ
ン状フィンの場合はピンの直径がこれに相当する。)を
小さくすることによって、フィンの熱伝導率がゲル状樹
脂のそれよりかなり大きいことを利用して、熱抵抗を増
大させることなく柔軟性に富ますことができる。なお、
発熱電子部品の発熱量などによって適正な寸法が選定さ
れる。
Although the thermal resistance can be reduced by reducing the gap between the fins 41,
You will lose flexibility. Therefore, by reducing the width of the fin (in the case of a pin-shaped fin, the diameter of the pin corresponds to this), the fact that the thermal conductivity of the fin is much larger than that of the gel-like resin is used to improve the thermal resistance. Can be very flexible without increasing. In addition,
Appropriate dimensions are selected according to the amount of heat generated by the heat-generating electronic components.

【0041】図10にさらに変形例を示す。この例は、
放熱部材3に凹凸部を形成し、この放熱部材3の凹凸部
がゲル状樹脂10中にくい込むように形成して、ゲル状
樹脂10側を配線基板2上に搭載された発熱電子部品2
1に押し当てている。ゲル状樹脂10中の発熱電子部品
21との接触面の近傍には接触面方向に広がる金属板1
1が設けられている。ここで、放熱部材3に形成する凹
凸部は、先端が鋭角状に形成するのが好ましい。
FIG. 10 shows a further modified example. This example
An uneven portion is formed on the heat dissipation member 3, and the uneven portion of the heat dissipation member 3 is formed so as to fit into the gel-like resin 10, and the gel-like resin 10 side is mounted on the wiring board 2.
It is pressed against 1. In the vicinity of the contact surface of the gel-like resin 10 with the heat-generating electronic component 21, the metal plate 1 spread in the contact surface direction.
1 is provided. Here, the uneven portion formed on the heat dissipation member 3 preferably has a sharp tip.

【0042】本実施例においても、図8、図9に示す実
施例と同様、発熱電子部品21と放熱部材3との間の距
離が外部から加わる衝撃や熱変形によって変化しても、
ゲル状樹脂10の変形は、放熱部3の凹凸部のせん断方
向の変形となるので、変形しやすくできるとともにバネ
性も有する。又、接触面方向に広がった金属面を有する
ので、熱伝導率の高い金属によって、接触面方向に熱が
拡散される。このため、熱伝導部材の接触面方向の全断
面が熱伝達に寄与し、簡単な構造でかつ小さい熱抵抗で
発熱電子部品から放熱部材に熱が伝わり、発熱電子部品
が効率よく冷却される。
Also in this embodiment, as in the embodiment shown in FIGS. 8 and 9, even if the distance between the heat-generating electronic component 21 and the heat radiating member 3 changes due to external impact or thermal deformation,
Since the deformation of the gel-like resin 10 is the deformation of the uneven portion of the heat dissipation portion 3 in the shearing direction, it can be easily deformed and has a spring property. Further, since the metal surface is spread in the contact surface direction, the heat is diffused in the contact surface direction by the metal having high thermal conductivity. Therefore, the entire cross section of the heat conducting member in the contact surface direction contributes to heat transfer, the heat is transmitted from the heat generating electronic component to the heat radiating member with a simple structure and a small thermal resistance, and the heat generating electronic component is efficiently cooled.

【0043】本発明の第4の実施例を図11により説明
する。図11は本実施例の電子機器の部分横断面図であ
る。
A fourth embodiment of the present invention will be described with reference to FIG. FIG. 11 is a partial cross-sectional view of the electronic device of this embodiment.

【0044】本実施例は、熱伝導部材を電子機器の冷却
に適用した例を示しているが、本実施例においては、電
子機器を構成する配線基板2のうち、発熱量の特に大き
い半導体素子21a、21bを搭載している電子回路部
を別基板60として分離し、両者をコネクタ61で電気
的に接続している。分離する電子回路部は、回路の動作
速度を考慮して複数の半導体素子を搭載することもでき
る。高発熱部を含む基板60は、特に発熱量の大きい半
導体素子面を金属筐体39に対向させて設置しており、
半導体素子面と金属筐体39との間に熱伝導部材1を介
在させている。図11では、筐体39の底面部を放熱面
とした例を示したが、スペ−スに余裕がある場合は、筐
体39の上面部あるいは側面部を放熱面としてもよい。
Although this embodiment shows an example in which the heat conducting member is applied to the cooling of electronic equipment, in the present embodiment, among the wiring boards 2 constituting the electronic equipment, a semiconductor element having a particularly large heat generation amount. The electronic circuit part on which 21a and 21b are mounted is separated as another board 60, and both are electrically connected by a connector 61. A plurality of semiconductor elements can be mounted in the separated electronic circuit section in consideration of the operating speed of the circuit. The substrate 60 including the high heat generating portion is installed with the semiconductor element surface having a particularly large heat generation facing the metal casing 39.
The heat conducting member 1 is interposed between the semiconductor element surface and the metal casing 39. Although FIG. 11 shows an example in which the bottom surface of the housing 39 is used as the heat radiation surface, the top surface or the side surface of the housing 39 may be used as the heat radiation surface if the space is large.

【0045】本実施例によれば、複数の発熱部材と金属
筐体壁との間が柔軟な熱伝導部材で接続されるので、発
熱部材間に高さのばらつきがあっても各々の発熱部材と
金属製筐体壁とが効率良く熱的に接続される。又、金属
製筐体の高い熱伝導率のために熱が広く筐体壁に拡散さ
れ高い放熱性能が得られるとともに、筐体壁が部分的に
高い温度になることがない。
According to the present embodiment, since the plurality of heat generating members and the metal casing wall are connected by the flexible heat conducting member, even if there is a variation in height among the heat generating members, the respective heat generating members are different. And the metal housing wall are efficiently and thermally connected. Further, due to the high thermal conductivity of the metal case, the heat is widely diffused to the case wall to obtain high heat dissipation performance, and the case wall is not locally heated to a high temperature.

【0046】なお、以上説明した実施例では、電子機器
の発熱電子部品を冷却する例を示したが、電子機器以外
の発熱部材を有する機器の冷却にも適用できる。
In the embodiment described above, an example of cooling the heat-generating electronic components of the electronic equipment has been shown, but the invention can also be applied to cooling equipment having a heat-generating member other than the electronic equipment.

【0047】[0047]

【発明の効果】以上説明したように、本発明によれば、
第1に発熱部材と放熱部材との距離が変動してもそれに
追従し、適正な押し付け力を発生する柔軟な構造の小さ
い熱抵抗で熱を伝導できる熱伝導部材及びそれを用いた
電子機器を提供できる。
As described above, according to the present invention,
Firstly, a heat conducting member capable of conducting heat with a small thermal resistance of a flexible structure that follows the fluctuation of the distance between the heat generating member and the heat radiating member and generates an appropriate pressing force, and an electronic device using the same. Can be provided.

【0048】第2に柔軟な構造で、かつ発熱部材の接触
面方向に熱拡散させることによって小さい熱抵抗で熱を
伝導する熱伝導部材及びそれを用いた冷却装置、電子機
器を提供できる。
Secondly, it is possible to provide a heat conducting member which has a flexible structure and conducts heat with a small heat resistance by diffusing the heat in the contact surface direction of the heat generating member, and a cooling device and electronic equipment using the heat conducting member.

【0049】第3に熱伝導部材は、可とう性フィルムの
袋中に流動性を有するグリースが封入されているので柔
軟性を有する。又、板バネを封入しているので、板バネ
の押し付け力によって、発熱部材と放熱部材との間の距
離が変化しても、それに追従して適正な力で押し付ける
ことができる。又、板バネは、接触面方向に広がった金
属面を有するので、金属の大きい熱伝導率によって、接
触面方向に熱が拡散され、熱伝導部材の全断面が熱伝導
に寄与する。これにより、小さい熱抵抗で発熱部材から
放熱部材に熱を伝えることができる。
Thirdly, the heat conducting member has flexibility because the fluid grease is filled in the flexible film bag. Further, since the leaf spring is enclosed, even if the distance between the heat generating member and the heat radiating member changes due to the pressing force of the leaf spring, it is possible to follow it and press it with an appropriate force. Further, since the leaf spring has a metal surface that spreads in the contact surface direction, heat is diffused in the contact surface direction due to the large thermal conductivity of the metal, and the entire cross section of the heat conducting member contributes to heat conduction. Thereby, heat can be transmitted from the heat generating member to the heat radiating member with a small heat resistance.

【0050】[0050]

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例である電子機器の斜視図
である。
FIG. 1 is a perspective view of an electronic device that is a first embodiment of the present invention.

【図2】本実施例の熱伝導部材の縦断面図である。FIG. 2 is a vertical cross-sectional view of a heat conducting member of this embodiment.

【図3】本実施例の熱伝導部材の縦断面図である。FIG. 3 is a vertical cross-sectional view of a heat conducting member of this embodiment.

【図4】本実施例の熱伝導部材の縦断面図である。FIG. 4 is a vertical cross-sectional view of a heat conducting member of this embodiment.

【図5】本実施例の熱伝導部材の縦断面図である。FIG. 5 is a vertical cross-sectional view of a heat conducting member of this embodiment.

【図6】本発明の第2の実施例を示す熱伝導部材の縦断
面図である。
FIG. 6 is a vertical cross-sectional view of a heat conducting member showing a second embodiment of the present invention.

【図7】本実施例の熱伝導部材の縦断面図である。FIG. 7 is a vertical cross-sectional view of the heat conducting member of the present embodiment.

【図8】本発明の第3の実施例を示す熱伝導部材の縦断
面図である。
FIG. 8 is a vertical cross-sectional view of a heat conducting member showing a third embodiment of the present invention.

【図9】本実施例の熱伝導部材の縦断面図である。FIG. 9 is a vertical cross-sectional view of the heat conducting member of the present embodiment.

【図10】本実施例の熱伝導部材の縦断面図である。FIG. 10 is a vertical cross-sectional view of a heat conducting member of this embodiment.

【図11】本発明の第4の実施例である電子機器の斜視
図である。
FIG. 11 is a perspective view of an electronic device according to a fourth embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1…熱伝導部材、2…配線基板、3…放熱部材、4…熱
伝導性グリース、5…板バネ、6…可とう性フィルム、
7…フィン、10…ゲル状樹脂、21…発熱電子部品、
31、41…フィン、39…金属製筐体。
DESCRIPTION OF SYMBOLS 1 ... Thermal conductive member, 2 ... Wiring board, 3 ... Heat dissipation member, 4 ... Thermal conductive grease, 5 ... Leaf spring, 6 ... Flexible film,
7 ... Fins, 10 ... Gel resin, 21 ... Heat-generating electronic components,
31, 41 ... Fins, 39 ... Metal casing.

フロントページの続き (72)発明者 岩井 進 神奈川県海老名市下今泉810番地 株式会 社日立製作所オフィスシステム事業部内Continued Front Page (72) Inventor Susumu Iwai 810 Shimoimaizumi, Ebina, Kanagawa Pref., Office Systems Division, Hitachi, Ltd.

Claims (16)

【特許請求の範囲】[Claims] 【請求項1】発熱部材と放熱部材との間に介在され、該
発熱部材で発生する熱を放熱部材に伝熱する熱伝導部材
であって、該熱伝導部材が、袋状に形成された可とう性
の膜と、該袋状の膜内に封入された流動性を有する液状
媒体と前記膜に押し付け力を発生するバネ部材とを備え
ていることを特徴とする熱伝導部材。
1. A heat-conducting member interposed between a heat-generating member and a heat-dissipating member for transmitting heat generated by the heat-generating member to the heat-dissipating member, wherein the heat-conducting member is formed in a bag shape. A heat-conducting member comprising a flexible film, a liquid medium having fluidity enclosed in the bag-shaped film, and a spring member for generating a pressing force against the film.
【請求項2】発熱部材と放熱部材との間に介在され、該
発熱部材で発生する熱を放熱部材に伝熱する熱伝導部材
であって、該熱伝導部材が、袋状に形成された可とう性
の膜と、該袋状の膜内に封入された高い熱伝導性を有す
る液状媒体と前記膜に押し付け力を発生し発熱部材との
接触面と平行な方向に拡がる面を有する高い熱伝導性を
有するバネ部材とを備えていることを特徴とする熱伝導
部材。
2. A heat conducting member which is interposed between a heat generating member and a heat radiating member and which transfers heat generated in the heat generating member to the heat radiating member, wherein the heat conducting member is formed in a bag shape. A flexible film, a liquid medium having a high thermal conductivity enclosed in the bag-shaped film, and a surface having a surface that spreads in a direction parallel to a contact surface that generates a pressing force against the film and the heating member. A heat-conducting member, comprising: a spring member having heat conductivity.
【請求項3】発熱部材と放熱部材との間に介在され、該
発熱部材で発生する熱を放熱部材に伝熱する熱伝導部材
であって、該熱伝導部材が、袋状に形成された可とう性
の膜を有するものであり、高い熱伝導性を有する液状媒
体と、発熱部材との接触面と平行な方向に拡がる面のベ
ースを有するフィンと、前記膜に押し付け力を発生する
高い熱伝導性を有するバネ部材を前記袋状の膜内に封入
して形成されていることを特徴とする熱伝導部材。
3. A heat conducting member which is interposed between a heat generating member and a heat radiating member and which transfers heat generated in the heat generating member to the heat radiating member, wherein the heat conducting member is formed in a bag shape. A liquid medium having a flexible film, having a high thermal conductivity, a fin having a base having a surface extending in a direction parallel to the contact surface with the heat generating member, and a high pressing force for the film. A heat-conducting member formed by enclosing a spring member having heat conductivity in the bag-shaped film.
【請求項4】発熱部材と放熱部材との間に介在され、該
発熱部材で発生する熱を放熱部材に伝熱する熱伝導部材
であって、該熱伝導部材が、前記放熱部材に形成された
凹部に流動性を有する液状媒体とバネ部材を収納すると
ともに可とう性の膜により膜内に封入されたものであ
り、前記バネ部材が前記膜に押し付け力を発生するよう
に構成されていることを特徴とする熱伝導部材。
4. A heat conducting member which is interposed between a heat generating member and a heat radiating member and which transfers heat generated in the heat generating member to the heat radiating member, the heat conducting member being formed on the heat radiating member. A liquid medium having fluidity and a spring member are housed in the concave portion and enclosed by a flexible film in the film, and the spring member is configured to generate a pressing force against the film. A heat conduction member characterized by the above.
【請求項5】複数の発熱部材と放熱部材との間に介在さ
れ、該複数の発熱部材で発生する熱を放熱部材に伝熱す
る熱伝導部材であって、該熱伝導部材が、前記複数の発
熱部材に接触する袋状に形成された可とう性の膜と、該
袋状の膜内に封入された高い熱伝導性を有する液状媒体
と前記膜に前記複数の発熱部材の個々に対応した押し付
け力を発生し発熱部材との接触面と平行な方向に拡がる
面を有する高い熱伝導性を有するバネ部材とを備えてい
ることを特徴とする熱伝導部材。
5. A heat-conducting member interposed between a plurality of heat-generating members and a heat-dissipating member for transmitting heat generated by the plurality of heat-generating members to the heat-dissipating member, wherein the heat-conducting member is a plurality of the heat-conducting members. A flexible film formed in a bag shape that contacts the heat generating member, a liquid medium having high heat conductivity enclosed in the bag film, and the film corresponding to each of the plurality of heat generating members. And a spring member having a high thermal conductivity, the surface having a surface that spreads in a direction parallel to the contact surface with the heat generating member and that generates the pressing force.
【請求項6】発熱部材と放熱部材との間に介在され、発
熱部材で発生する熱を放熱部材に伝熱する熱伝導部材で
あって、該熱伝導部材が、発熱部材との接触面と平行な
方向に拡がる面のベースを有するフィンの一部をフィン
の底部が空間を有するようにゲル状樹脂中に入り込ませ
て成形されているものであることを特徴とする熱伝導部
材。
6. A heat conducting member interposed between a heat generating member and a heat radiating member for transmitting heat generated in the heat generating member to the heat radiating member, the heat conducting member having a contact surface with the heat generating member. A heat-conducting member, characterized in that a part of a fin having a base whose surface extends in a parallel direction is inserted into a gel-like resin so that the bottom of the fin has a space.
【請求項7】発熱部材と放熱部材との間に介在され、発
熱部材で発生する熱を放熱部材に伝熱する熱伝導部材で
あって、該熱伝導部材が、ゲル状樹脂中に発熱部材との
接触面と平行な方向に拡がる面を有する金属板を設け、
かつ前記放熱部材に形成された凹凸部の一部を該凹凸部
の底部が空間を有するようにゲル状樹脂中に入り込ませ
て成形されているものであることを特徴とする熱伝導部
材。
7. A heat-conducting member interposed between a heat-generating member and a heat-dissipating member, for transmitting heat generated by the heat-generating member to the heat-dissipating member, the heat-conducting member being contained in a gel resin. Provide a metal plate having a surface extending in a direction parallel to the contact surface with
Further, the heat conducting member is characterized in that a part of the uneven portion formed on the heat dissipating member is inserted into the gel resin so that the bottom of the uneven portion has a space, and is molded.
【請求項8】前記バネ部材が板バネであって、複数の舌
片部を具備するものである請求項1から5のいずれかに
記載の熱伝導部材。
8. The heat conducting member according to claim 1, wherein the spring member is a leaf spring and is provided with a plurality of tongue pieces.
【請求項9】前記発熱部材が複数個搭載されているもの
であって、前記バネ部材の複数の舌片部が前記複数の発
熱部材に対応する位置に形成されている請求項8に記載
の熱伝導部材。
9. The heat generating member according to claim 8, wherein a plurality of the heat generating members are mounted, and a plurality of tongue pieces of the spring member are formed at positions corresponding to the plurality of heat generating members. Heat conduction member.
【請求項10】前記可とう性の膜が、外側は融点の比較
的高い樹脂層、中間はアルミ箔層、内側は最外層の樹脂
より融点の低い樹脂層でフィルム状に構成され、内側の
樹脂層の熱融着によってフィルム同士が接着されている
ものである請求項1から5、8、9のいずれかに記載の
熱伝導部材。
10. The flexible film comprises a resin layer having a relatively high melting point on the outer side, an aluminum foil layer on the middle side, and a resin layer having a lower melting point than the resin of the outermost layer on the inner side in the form of a film. The heat conductive member according to claim 1, wherein the films are adhered to each other by heat fusion of the resin layer.
【請求項11】前記熱伝導部材の厚さが5mm以下であ
る請求項1から5のいずれかに記載の熱伝導部材。
11. The heat conducting member according to claim 1, wherein the thickness of the heat conducting member is 5 mm or less.
【請求項12】前記液状媒体が、シリコンオイル中にZ
nO、ダイヤモンド、あるいは金属系の粒子を混入した
ものである請求項1から5のいずれかに記載の熱伝導部
材。
12. The liquid medium is Z in silicone oil.
The heat conducting member according to claim 1, wherein nO, diamond, or metal-based particles are mixed.
【請求項13】前記フィンが2つ設けられるものであっ
て、該2つのフィンを組み合わせて配置し、面その組み
合わせ部に前記ゲル状樹脂を充填した請求項6に記載の
熱伝導部材。
13. The heat conducting member according to claim 6, wherein two fins are provided, the two fins are arranged in combination, and the gel resin is filled in the combined portion of the faces.
【請求項14】請求項2、3、5、6のいずれかに記載
の熱伝導部材を発熱部材側に前記平行な方向に拡がる面
を有するバネ部材もしくはベースを配置して前記発熱部
材と放熱部材との間に介在させて構成したことを特徴と
する冷却装置。
14. A heat-conducting member according to claim 2, wherein a heat-radiating member is provided with a spring member or a base having a surface extending in the parallel direction on the heat-generating member side. A cooling device characterized by being interposed between a member and a member.
【請求項15】複数の半導体素子を搭載した電子回路基
板及びその周辺装置が金属面を有する筐体内に収容され
てなる電子機器において、請求項1から13のいずれか
に記載の熱伝導部材を前記半導体素子と前記筐体の金属
面との間に介在させたことを特徴とする電子機器。
15. An electronic device in which an electronic circuit board on which a plurality of semiconductor elements are mounted and peripheral devices thereof are housed in a housing having a metal surface, and the heat conducting member according to claim 1 is used. An electronic device characterized by being interposed between the semiconductor element and a metal surface of the housing.
【請求項16】複数の半導体素子を搭載した電子回路基
板及びその周辺装置が金属製の筐体内に収容されてなる
電子機器において、半導体素子を搭載した電子回路基板
のうち特定の半導体素子が搭載された面を筐体の金属壁
面と対向して設置し、該特定の半導体素子と前記筐体の
金属壁面との間に請求項1から13のいずれかに記載の
熱伝導部材を介在させたことを特徴とする電子機器。
16. An electronic device in which an electronic circuit board on which a plurality of semiconductor elements are mounted and peripheral devices thereof are housed in a metal housing, and a specific semiconductor element is mounted on the electronic circuit board on which the semiconductor elements are mounted. The heat conducting member according to any one of claims 1 to 13 is interposed between the specific semiconductor element and the metal wall surface of the housing. An electronic device characterized by the above.
JP6195140A 1994-08-19 1994-08-19 Heat conducting member and cooler and electronic apparatus employing the same Pending JPH0864731A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6195140A JPH0864731A (en) 1994-08-19 1994-08-19 Heat conducting member and cooler and electronic apparatus employing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6195140A JPH0864731A (en) 1994-08-19 1994-08-19 Heat conducting member and cooler and electronic apparatus employing the same

Publications (1)

Publication Number Publication Date
JPH0864731A true JPH0864731A (en) 1996-03-08

Family

ID=16336120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6195140A Pending JPH0864731A (en) 1994-08-19 1994-08-19 Heat conducting member and cooler and electronic apparatus employing the same

Country Status (1)

Country Link
JP (1) JPH0864731A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1328022A2 (en) * 2002-01-14 2003-07-16 Arnold Müller GmbH & Co. KG Cooling apparatus for electronic devices
WO2003079436A1 (en) * 2002-03-13 2003-09-25 Tiqit Computers, Inc. Computer assembly for facilitating heat dissipation
JP2006253601A (en) * 2005-03-14 2006-09-21 Oki Electric Ind Co Ltd Heat radiator and heat radiating structure using same
CN100380561C (en) * 2002-04-04 2008-04-09 松下电器产业株式会社 Method for manufacturing plasma display panel
JP2008171976A (en) * 2007-01-11 2008-07-24 Denso Corp Method of manufacturing bonding structure
CN105611804A (en) * 2015-12-30 2016-05-25 杭州华为数字技术有限公司 Heat conducting pad, heat radiator and electronic product
JPWO2015064240A1 (en) * 2013-10-29 2017-03-09 ポリマテック・ジャパン株式会社 Liquid-filled heat dissipation member
JP2018117135A (en) * 2018-02-21 2018-07-26 日立オートモティブシステムズ株式会社 Electronic controller
JP2019012720A (en) * 2017-06-29 2019-01-24 北川工業株式会社 Heat conduction liquid pack
WO2021245983A1 (en) * 2020-06-05 2021-12-09 日立Astemo株式会社 Vehicle-mounted electronic control device

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1328022A2 (en) * 2002-01-14 2003-07-16 Arnold Müller GmbH & Co. KG Cooling apparatus for electronic devices
EP1328022A3 (en) * 2002-01-14 2004-12-01 Arnold Müller GmbH & Co. KG Cooling apparatus for electronic devices
WO2003079436A1 (en) * 2002-03-13 2003-09-25 Tiqit Computers, Inc. Computer assembly for facilitating heat dissipation
CN100380561C (en) * 2002-04-04 2008-04-09 松下电器产业株式会社 Method for manufacturing plasma display panel
JP2006253601A (en) * 2005-03-14 2006-09-21 Oki Electric Ind Co Ltd Heat radiator and heat radiating structure using same
JP2008171976A (en) * 2007-01-11 2008-07-24 Denso Corp Method of manufacturing bonding structure
JPWO2015064240A1 (en) * 2013-10-29 2017-03-09 ポリマテック・ジャパン株式会社 Liquid-filled heat dissipation member
US10356944B2 (en) 2013-10-29 2019-07-16 Sekisui Polymatech Co., Ltd. Liquid-encapsulation heat dissipation member
CN105611804A (en) * 2015-12-30 2016-05-25 杭州华为数字技术有限公司 Heat conducting pad, heat radiator and electronic product
JP2019012720A (en) * 2017-06-29 2019-01-24 北川工業株式会社 Heat conduction liquid pack
JP2018117135A (en) * 2018-02-21 2018-07-26 日立オートモティブシステムズ株式会社 Electronic controller
WO2021245983A1 (en) * 2020-06-05 2021-12-09 日立Astemo株式会社 Vehicle-mounted electronic control device

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