JPH086184Y2 - クリーンルームの床下気流制御構造 - Google Patents
クリーンルームの床下気流制御構造Info
- Publication number
- JPH086184Y2 JPH086184Y2 JP12659690U JP12659690U JPH086184Y2 JP H086184 Y2 JPH086184 Y2 JP H086184Y2 JP 12659690 U JP12659690 U JP 12659690U JP 12659690 U JP12659690 U JP 12659690U JP H086184 Y2 JPH086184 Y2 JP H086184Y2
- Authority
- JP
- Japan
- Prior art keywords
- curtain
- floor
- clean room
- air
- control structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Ventilation (AREA)
- Air-Flow Control Members (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12659690U JPH086184Y2 (ja) | 1990-11-30 | 1990-11-30 | クリーンルームの床下気流制御構造 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12659690U JPH086184Y2 (ja) | 1990-11-30 | 1990-11-30 | クリーンルームの床下気流制御構造 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0485037U JPH0485037U (enrdf_load_stackoverflow) | 1992-07-23 |
JPH086184Y2 true JPH086184Y2 (ja) | 1996-02-21 |
Family
ID=31874141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12659690U Expired - Lifetime JPH086184Y2 (ja) | 1990-11-30 | 1990-11-30 | クリーンルームの床下気流制御構造 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH086184Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5738646B2 (ja) * | 2011-03-27 | 2015-06-24 | 三機工業株式会社 | クリーンルーム内床開口作業用囲い |
-
1990
- 1990-11-30 JP JP12659690U patent/JPH086184Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0485037U (enrdf_load_stackoverflow) | 1992-07-23 |
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