JPH085570Y2 - 圧力センサ - Google Patents

圧力センサ

Info

Publication number
JPH085570Y2
JPH085570Y2 JP1990066890U JP6689090U JPH085570Y2 JP H085570 Y2 JPH085570 Y2 JP H085570Y2 JP 1990066890 U JP1990066890 U JP 1990066890U JP 6689090 U JP6689090 U JP 6689090U JP H085570 Y2 JPH085570 Y2 JP H085570Y2
Authority
JP
Japan
Prior art keywords
diffusion
gauge
central
diffusion gauge
gauges
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990066890U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0425256U (US06521211-20030218-C00004.png
Inventor
貢一 糸魚川
仁 岩田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai Rika Co Ltd
Original Assignee
Tokai Rika Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai Rika Co Ltd filed Critical Tokai Rika Co Ltd
Priority to JP1990066890U priority Critical patent/JPH085570Y2/ja
Publication of JPH0425256U publication Critical patent/JPH0425256U/ja
Application granted granted Critical
Publication of JPH085570Y2 publication Critical patent/JPH085570Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP1990066890U 1990-06-25 1990-06-25 圧力センサ Expired - Fee Related JPH085570Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990066890U JPH085570Y2 (ja) 1990-06-25 1990-06-25 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990066890U JPH085570Y2 (ja) 1990-06-25 1990-06-25 圧力センサ

Publications (2)

Publication Number Publication Date
JPH0425256U JPH0425256U (US06521211-20030218-C00004.png) 1992-02-28
JPH085570Y2 true JPH085570Y2 (ja) 1996-02-14

Family

ID=31599986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990066890U Expired - Fee Related JPH085570Y2 (ja) 1990-06-25 1990-06-25 圧力センサ

Country Status (1)

Country Link
JP (1) JPH085570Y2 (US06521211-20030218-C00004.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4617732B2 (ja) * 2004-06-17 2011-01-26 株式会社日立製作所 力学量測定装置
US11099093B2 (en) 2019-08-09 2021-08-24 Rosemount Aerospace Inc. Thermally-matched piezoresistive elements in bridges

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658440U (US06521211-20030218-C00004.png) * 1979-10-08 1981-05-19
JPS5710271A (en) * 1980-06-23 1982-01-19 Fuji Electric Co Ltd Semiconductor pressure converter
JPS6170765A (ja) * 1984-09-14 1986-04-11 Fujikura Ltd 半導体圧力センサ−
JPS63114048U (US06521211-20030218-C00004.png) * 1987-01-16 1988-07-22

Also Published As

Publication number Publication date
JPH0425256U (US06521211-20030218-C00004.png) 1992-02-28

Similar Documents

Publication Publication Date Title
US8161820B2 (en) Pressure sensor
US6796193B2 (en) Pressure transducer with composite diaphragm
JPS60128673A (ja) 半導体感圧装置
JPH085570Y2 (ja) 圧力センサ
US5170237A (en) Semiconductor pressure sensor
JP2009139258A (ja) 半導体圧力センサ
JPH0637334A (ja) 圧力センサの構造
JP2733136B2 (ja) 半導体圧力センサ
JPS62268167A (ja) 薄膜圧力センサ
JPH1038726A (ja) 半導体圧力差圧検出器
JP2756067B2 (ja) ダイアフラム式歪みセンサの配線パターン
JPH03229470A (ja) 半導体圧力センサ
JP2660405B2 (ja) マスクアライメント方法
JPS6154270B2 (US06521211-20030218-C00004.png)
JP2573540Y2 (ja) 半導体圧力センサ
JPS63193572A (ja) 薄膜圧力センサの製造方法
JPS60182259A (ja) 長尺アレイ
JP2768802B2 (ja) 圧力センサーおよびその製造方法
JPH06160221A (ja) 歪みセンサの配線パターン
JP2535980B2 (ja) カラ―固体撮像素子の製造方法
JPH0239474A (ja) 半導体圧力センサー
JP2768804B2 (ja) 圧力センサの製造方法
JPH0712940U (ja) 半導体圧力センサ
JPH03209778A (ja) 半導体圧力センサの製造方法
JPH01316974A (ja) 歪みセンサ及びその製造方法

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees