JPH085548Y2 - 薄膜形成装置 - Google Patents

薄膜形成装置

Info

Publication number
JPH085548Y2
JPH085548Y2 JP1990052281U JP5228190U JPH085548Y2 JP H085548 Y2 JPH085548 Y2 JP H085548Y2 JP 1990052281 U JP1990052281 U JP 1990052281U JP 5228190 U JP5228190 U JP 5228190U JP H085548 Y2 JPH085548 Y2 JP H085548Y2
Authority
JP
Japan
Prior art keywords
substrate
terminal
rotating shaft
thin film
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990052281U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0412632U (enExample
Inventor
一 橋本
克夫 松原
一彦 入澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1990052281U priority Critical patent/JPH085548Y2/ja
Publication of JPH0412632U publication Critical patent/JPH0412632U/ja
Application granted granted Critical
Publication of JPH085548Y2 publication Critical patent/JPH085548Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1990052281U 1990-05-18 1990-05-18 薄膜形成装置 Expired - Fee Related JPH085548Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990052281U JPH085548Y2 (ja) 1990-05-18 1990-05-18 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990052281U JPH085548Y2 (ja) 1990-05-18 1990-05-18 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPH0412632U JPH0412632U (enExample) 1992-01-31
JPH085548Y2 true JPH085548Y2 (ja) 1996-02-14

Family

ID=31572454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990052281U Expired - Fee Related JPH085548Y2 (ja) 1990-05-18 1990-05-18 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPH085548Y2 (enExample)

Also Published As

Publication number Publication date
JPH0412632U (enExample) 1992-01-31

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees