JPH0412632U - - Google Patents
Info
- Publication number
- JPH0412632U JPH0412632U JP5228190U JP5228190U JPH0412632U JP H0412632 U JPH0412632 U JP H0412632U JP 5228190 U JP5228190 U JP 5228190U JP 5228190 U JP5228190 U JP 5228190U JP H0412632 U JPH0412632 U JP H0412632U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- rotating shaft
- terminal
- holder
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5228190U JPH085548Y2 (ja) | 1990-05-18 | 1990-05-18 | 薄膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5228190U JPH085548Y2 (ja) | 1990-05-18 | 1990-05-18 | 薄膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0412632U true JPH0412632U (enExample) | 1992-01-31 |
| JPH085548Y2 JPH085548Y2 (ja) | 1996-02-14 |
Family
ID=31572454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5228190U Expired - Fee Related JPH085548Y2 (ja) | 1990-05-18 | 1990-05-18 | 薄膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH085548Y2 (enExample) |
-
1990
- 1990-05-18 JP JP5228190U patent/JPH085548Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH085548Y2 (ja) | 1996-02-14 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |