JPH085160Y2 - 基板移し替え治具 - Google Patents

基板移し替え治具

Info

Publication number
JPH085160Y2
JPH085160Y2 JP1989055402U JP5540289U JPH085160Y2 JP H085160 Y2 JPH085160 Y2 JP H085160Y2 JP 1989055402 U JP1989055402 U JP 1989055402U JP 5540289 U JP5540289 U JP 5540289U JP H085160 Y2 JPH085160 Y2 JP H085160Y2
Authority
JP
Japan
Prior art keywords
carrier
fork
jig
substrates
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989055402U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02145240U (enrdf_load_html_response
Inventor
卓 大村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Casio Computer Co Ltd
Original Assignee
Casio Computer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Casio Computer Co Ltd filed Critical Casio Computer Co Ltd
Priority to JP1989055402U priority Critical patent/JPH085160Y2/ja
Publication of JPH02145240U publication Critical patent/JPH02145240U/ja
Application granted granted Critical
Publication of JPH085160Y2 publication Critical patent/JPH085160Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1989055402U 1989-05-15 1989-05-15 基板移し替え治具 Expired - Lifetime JPH085160Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989055402U JPH085160Y2 (ja) 1989-05-15 1989-05-15 基板移し替え治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989055402U JPH085160Y2 (ja) 1989-05-15 1989-05-15 基板移し替え治具

Publications (2)

Publication Number Publication Date
JPH02145240U JPH02145240U (enrdf_load_html_response) 1990-12-10
JPH085160Y2 true JPH085160Y2 (ja) 1996-02-14

Family

ID=31578320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989055402U Expired - Lifetime JPH085160Y2 (ja) 1989-05-15 1989-05-15 基板移し替え治具

Country Status (1)

Country Link
JP (1) JPH085160Y2 (enrdf_load_html_response)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61291335A (ja) * 1985-06-19 1986-12-22 Denkoo:Kk 半導体移換え装置
JPS6265843A (ja) * 1985-09-12 1987-03-25 Denkoo:Kk 半導体ウエハ取出し装置
JPS63102236U (enrdf_load_html_response) * 1986-12-23 1988-07-02

Also Published As

Publication number Publication date
JPH02145240U (enrdf_load_html_response) 1990-12-10

Similar Documents

Publication Publication Date Title
US5823736A (en) Substrate processing device and method for substrate from the substrate processing device
US20190232884A1 (en) Display holder
JPH085160Y2 (ja) 基板移し替え治具
WO1998043784A1 (fr) Panneau de commande d'apprentissage d'un robot
JP2000007113A (ja) 作業プレート用ストッカー
JPS633856Y2 (enrdf_load_html_response)
JP2002252277A (ja) 半導体ウェハーキャリア用保管棚
JPH0719187Y2 (ja) 電子装置ユニットの装着構造
JP7054940B2 (ja) 保護部材取り付け装置及び保護部材取り付け方法
JP2564432Y2 (ja) 基板移載用調整治具
JPH1110465A (ja) プラネタリギヤアッシーの組立方法とそのプラネタリギヤアッシー組立装置
JPS5931419Y2 (ja) 印字機のインクリボンカセツト保持装置
JP7501941B1 (ja) 電子機器および電子機器の搬送方法
JPS5850421Y2 (ja) デ−タ処理装置
CN215115424U (zh) 一种靶板点样装置
CN214263918U (zh) 横版车床
JPH0350750Y2 (enrdf_load_html_response)
JPS6227944Y2 (enrdf_load_html_response)
JPS6211037Y2 (enrdf_load_html_response)
JPH09283602A (ja) トレイの位置決め装置
JPH0674082B2 (ja) フオトマスクの保管装置
JP2542696Y2 (ja) ラック
JPH0634251U (ja) フレーム挿入補助治具
JPH0528043U (ja) ウエーハ保持板収納容器
JPH07165306A (ja) スライドフォーク