JPH085160Y2 - 基板移し替え治具 - Google Patents
基板移し替え治具Info
- Publication number
- JPH085160Y2 JPH085160Y2 JP1989055402U JP5540289U JPH085160Y2 JP H085160 Y2 JPH085160 Y2 JP H085160Y2 JP 1989055402 U JP1989055402 U JP 1989055402U JP 5540289 U JP5540289 U JP 5540289U JP H085160 Y2 JPH085160 Y2 JP H085160Y2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- fork
- jig
- substrates
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Liquid Crystal (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989055402U JPH085160Y2 (ja) | 1989-05-15 | 1989-05-15 | 基板移し替え治具 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989055402U JPH085160Y2 (ja) | 1989-05-15 | 1989-05-15 | 基板移し替え治具 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02145240U JPH02145240U (US20100012521A1-20100121-C00001.png) | 1990-12-10 |
JPH085160Y2 true JPH085160Y2 (ja) | 1996-02-14 |
Family
ID=31578320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989055402U Expired - Lifetime JPH085160Y2 (ja) | 1989-05-15 | 1989-05-15 | 基板移し替え治具 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH085160Y2 (US20100012521A1-20100121-C00001.png) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61291335A (ja) * | 1985-06-19 | 1986-12-22 | Denkoo:Kk | 半導体移換え装置 |
JPS6265843A (ja) * | 1985-09-12 | 1987-03-25 | Denkoo:Kk | 半導体ウエハ取出し装置 |
JPS63102236U (US20100012521A1-20100121-C00001.png) * | 1986-12-23 | 1988-07-02 |
-
1989
- 1989-05-15 JP JP1989055402U patent/JPH085160Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH02145240U (US20100012521A1-20100121-C00001.png) | 1990-12-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH085160Y2 (ja) | 基板移し替え治具 | |
WO1998043784A1 (fr) | Panneau de commande d'apprentissage d'un robot | |
JP4465900B2 (ja) | 半導体ウェハーキャリア用保管棚 | |
JPS5931419Y2 (ja) | 印字機のインクリボンカセツト保持装置 | |
JP7501941B1 (ja) | 電子機器および電子機器の搬送方法 | |
JPH0719187Y2 (ja) | 電子装置ユニットの装着構造 | |
JPH07276170A (ja) | 位置決め装置及び該位置決め装置を備えた印刷装置 | |
JPS5850421Y2 (ja) | デ−タ処理装置 | |
CN215115424U (zh) | 一种靶板点样装置 | |
CN214263918U (zh) | 横版车床 | |
JPH0350750Y2 (US20100012521A1-20100121-C00001.png) | ||
JPS6227944Y2 (US20100012521A1-20100121-C00001.png) | ||
JPS6211037Y2 (US20100012521A1-20100121-C00001.png) | ||
JPS62113222A (ja) | グラフイツク端末装置 | |
JP2537106Y2 (ja) | フロッピーディスクドライブのローディング装置 | |
JPH0730222Y2 (ja) | 溶接治具 | |
JPH0674082B2 (ja) | フオトマスクの保管装置 | |
JP2542696Y2 (ja) | ラック | |
JPH0328024Y2 (US20100012521A1-20100121-C00001.png) | ||
JPH072308U (ja) | プラスチック基板収納カセット | |
JPH0448486A (ja) | 磁気記録装置の着脱装置 | |
JPH04108233U (ja) | キーボード | |
JPH10279011A (ja) | 基板用カセット | |
JPH0529149U (ja) | 真空ピンセツト | |
JPH0331992U (US20100012521A1-20100121-C00001.png) |