JPH083901Y2 - 冷却機能付きクリーン対応保管庫 - Google Patents

冷却機能付きクリーン対応保管庫

Info

Publication number
JPH083901Y2
JPH083901Y2 JP1990068225U JP6822590U JPH083901Y2 JP H083901 Y2 JPH083901 Y2 JP H083901Y2 JP 1990068225 U JP1990068225 U JP 1990068225U JP 6822590 U JP6822590 U JP 6822590U JP H083901 Y2 JPH083901 Y2 JP H083901Y2
Authority
JP
Japan
Prior art keywords
storage
heat exchanger
clean
air
cooled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990068225U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0427365U (enExample
Inventor
正純 福島
哲夫 山下
恭彦 岡下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Priority to JP1990068225U priority Critical patent/JPH083901Y2/ja
Publication of JPH0427365U publication Critical patent/JPH0427365U/ja
Application granted granted Critical
Publication of JPH083901Y2 publication Critical patent/JPH083901Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Central Air Conditioning (AREA)
JP1990068225U 1990-06-27 1990-06-27 冷却機能付きクリーン対応保管庫 Expired - Fee Related JPH083901Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990068225U JPH083901Y2 (ja) 1990-06-27 1990-06-27 冷却機能付きクリーン対応保管庫

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990068225U JPH083901Y2 (ja) 1990-06-27 1990-06-27 冷却機能付きクリーン対応保管庫

Publications (2)

Publication Number Publication Date
JPH0427365U JPH0427365U (enExample) 1992-03-04
JPH083901Y2 true JPH083901Y2 (ja) 1996-01-31

Family

ID=31602476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990068225U Expired - Fee Related JPH083901Y2 (ja) 1990-06-27 1990-06-27 冷却機能付きクリーン対応保管庫

Country Status (1)

Country Link
JP (1) JPH083901Y2 (enExample)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5148922Y2 (enExample) * 1972-10-20 1976-11-25
JPS5737640A (en) * 1980-08-20 1982-03-02 Shimizu Constr Co Ltd System for varying draft of air in clean room
JPS5911653A (ja) * 1982-07-12 1984-01-21 Toshiba Corp 冷却装置
JPS60232442A (ja) * 1984-04-28 1985-11-19 Mitsubishi Electric Corp 空気調和装置
JPH0438174Y2 (enExample) * 1987-08-10 1992-09-08

Also Published As

Publication number Publication date
JPH0427365U (enExample) 1992-03-04

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees