JPS5737640A - System for varying draft of air in clean room - Google Patents

System for varying draft of air in clean room

Info

Publication number
JPS5737640A
JPS5737640A JP11440680A JP11440680A JPS5737640A JP S5737640 A JPS5737640 A JP S5737640A JP 11440680 A JP11440680 A JP 11440680A JP 11440680 A JP11440680 A JP 11440680A JP S5737640 A JPS5737640 A JP S5737640A
Authority
JP
Japan
Prior art keywords
air
clean room
dust
draft
room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11440680A
Other languages
Japanese (ja)
Inventor
Heihachiro Nakada
Koichi Futaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimizu Construction Co Ltd
Original Assignee
Shimizu Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimizu Construction Co Ltd filed Critical Shimizu Construction Co Ltd
Priority to JP11440680A priority Critical patent/JPS5737640A/en
Publication of JPS5737640A publication Critical patent/JPS5737640A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Abstract

PURPOSE:To prevent excessive purification of air in a clean room and to thereby save the power required for driving fans, by detecting the necessary draft of air in the clean room automatically through checking of dust conditions in the clean room. CONSTITUTION:Air in a clean room 1 is sampled by a dust sensor 8, and an electric signal indicating the dust conditions in the room 1 is given to a dust counter 9. The counter 9 checks the dust conditions in the room 1 and gives an electric signal to a microcomputor 10, which in turn judges whether the draft of air in the clean room 1 is to be increased or decteased and affords an instruction signal to an air supply means 2. In response to the instruction signal, fans 5 feed air through a duct 3 at a required draft rate and issues the same from outlet ports 4 into the clean room 1.
JP11440680A 1980-08-20 1980-08-20 System for varying draft of air in clean room Pending JPS5737640A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11440680A JPS5737640A (en) 1980-08-20 1980-08-20 System for varying draft of air in clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11440680A JPS5737640A (en) 1980-08-20 1980-08-20 System for varying draft of air in clean room

Publications (1)

Publication Number Publication Date
JPS5737640A true JPS5737640A (en) 1982-03-02

Family

ID=14636879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11440680A Pending JPS5737640A (en) 1980-08-20 1980-08-20 System for varying draft of air in clean room

Country Status (1)

Country Link
JP (1) JPS5737640A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5833930U (en) * 1981-08-27 1983-03-05 株式会社朝日工業社 Dust monitor for clean room or clean unit
JPS59183231A (en) * 1983-04-01 1984-10-18 Shinwa Boeki Kk Indoor air purifier
JPS60164141A (en) * 1984-02-06 1985-08-27 Takasago Thermal Eng Co Lts Clean room device with simultaneous controlling mechanism for cleanness and room pressure
JPS60172329A (en) * 1984-01-13 1985-09-05 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Control of concentration of fine particulate contaminant in dustless chamber environment
JPS60216139A (en) * 1984-04-11 1985-10-29 Kajima Corp Controlling system of air conditioning in clean room
JPS62134542A (en) * 1985-12-07 1987-06-17 Hitachi Electronics Eng Co Ltd Data processing system of fine particle detector
JPS63180032A (en) * 1987-01-20 1988-07-25 Nec Kyushu Ltd Clean room
JPH03160262A (en) * 1989-11-20 1991-07-10 Fujita Corp Controlling method for air in clean space
JPH0427365U (en) * 1990-06-27 1992-03-04
JPH0650892U (en) * 1992-12-24 1994-07-12 貫六 奥村 Oval drafter

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5833930U (en) * 1981-08-27 1983-03-05 株式会社朝日工業社 Dust monitor for clean room or clean unit
JPH0127081Y2 (en) * 1981-08-27 1989-08-14
JPS59183231A (en) * 1983-04-01 1984-10-18 Shinwa Boeki Kk Indoor air purifier
JPS60172329A (en) * 1984-01-13 1985-09-05 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Control of concentration of fine particulate contaminant in dustless chamber environment
JPS60164141A (en) * 1984-02-06 1985-08-27 Takasago Thermal Eng Co Lts Clean room device with simultaneous controlling mechanism for cleanness and room pressure
JPS60216139A (en) * 1984-04-11 1985-10-29 Kajima Corp Controlling system of air conditioning in clean room
JPS62134542A (en) * 1985-12-07 1987-06-17 Hitachi Electronics Eng Co Ltd Data processing system of fine particle detector
JPH0577017B2 (en) * 1985-12-07 1993-10-25 Hitachi Electr Eng
JPS63180032A (en) * 1987-01-20 1988-07-25 Nec Kyushu Ltd Clean room
JPH03160262A (en) * 1989-11-20 1991-07-10 Fujita Corp Controlling method for air in clean space
JPH0427365U (en) * 1990-06-27 1992-03-04
JPH0650892U (en) * 1992-12-24 1994-07-12 貫六 奥村 Oval drafter

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