JPH0826877B2 - ターボ分子ポンプ - Google Patents
ターボ分子ポンプInfo
- Publication number
- JPH0826877B2 JPH0826877B2 JP3043601A JP4360191A JPH0826877B2 JP H0826877 B2 JPH0826877 B2 JP H0826877B2 JP 3043601 A JP3043601 A JP 3043601A JP 4360191 A JP4360191 A JP 4360191A JP H0826877 B2 JPH0826877 B2 JP H0826877B2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- pump
- tangential flow
- pump stage
- stator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT67163A/90 | 1990-03-09 | ||
IT67163A IT1241431B (it) | 1990-03-09 | 1990-03-09 | Pompa turbomolecolare perfezionata. |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04224295A JPH04224295A (ja) | 1992-08-13 |
JPH0826877B2 true JPH0826877B2 (ja) | 1996-03-21 |
Family
ID=11300124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3043601A Expired - Lifetime JPH0826877B2 (ja) | 1990-03-09 | 1991-03-08 | ターボ分子ポンプ |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0445855B1 (it) |
JP (1) | JPH0826877B2 (it) |
AT (1) | ATE113343T1 (it) |
DE (1) | DE69104749T2 (it) |
ES (1) | ES2064873T3 (it) |
HK (1) | HK1000016A1 (it) |
IT (1) | IT1241431B (it) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4314418A1 (de) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
GB9318801D0 (en) * | 1993-09-10 | 1993-10-27 | Boc Group Plc | Improved vacuum pumps |
US5456575A (en) * | 1994-05-16 | 1995-10-10 | Varian Associates, Inc. | Non-centric improved pumping stage for turbomolecular pumps |
US5449270A (en) * | 1994-06-24 | 1995-09-12 | Varian Associates, Inc. | Tangential flow pumping channel for turbomolecular pumps |
IT1287016B1 (it) * | 1996-07-18 | 1998-07-24 | Varian Spa | Pompa da vuoto. |
IT1288738B1 (it) * | 1996-10-08 | 1998-09-24 | Varian Spa | Unita' elettronica di comando per pompa da vuoto. |
IT1288737B1 (it) * | 1996-10-08 | 1998-09-24 | Varian Spa | Dispositivo di pompaggio da vuoto. |
US5709528A (en) * | 1996-12-19 | 1998-01-20 | Varian Associates, Inc. | Turbomolecular vacuum pumps with low susceptiblity to particulate buildup |
IT1289811B1 (it) | 1996-12-27 | 1998-10-16 | Varian Spa | Metodo ed apparato di diagnosi per pompa da vuoto. |
IT1297347B1 (it) | 1997-12-24 | 1999-09-01 | Varian Spa | Pompa da vuoto. |
US6071092A (en) * | 1998-03-10 | 2000-06-06 | Varian, Inc. | Vacuum pump with improved back-up bearing assembly |
US6074165A (en) * | 1998-03-10 | 2000-06-13 | Varian, Inc. | Vacuum pump with magnetic bearing system and back-up bearings |
TW504548B (en) | 1998-06-30 | 2002-10-01 | Ebara Corp | Turbo molecular pump |
US6179573B1 (en) * | 1999-03-24 | 2001-01-30 | Varian, Inc. | Vacuum pump with inverted motor |
DE60101368T2 (de) * | 2001-02-22 | 2004-10-14 | Varian S.P.A., Leini | Vakuumpumpe |
US20070227357A1 (en) * | 2006-03-31 | 2007-10-04 | Mcdermott Wayne T | Turbomolecular pump system for gas separation |
US8247315B2 (en) * | 2008-03-17 | 2012-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing apparatus and method for manufacturing semiconductor device |
US8148839B2 (en) | 2008-07-02 | 2012-04-03 | Rosefsky Jonathan B | Ribbon drive power generation and method of use |
DE102013108482A1 (de) * | 2013-08-06 | 2015-02-12 | Pfeiffer Vacuum Gmbh | Vakuumpumpstufe |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE239213C (it) * | ||||
FR1443239A (fr) * | 1965-05-05 | 1966-06-24 | Pompe à vide mécanique rotative | |
US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
KR890004933B1 (ko) * | 1985-07-31 | 1989-11-30 | 가부시기가이샤 히다찌세이사꾸쇼 | 터어보분자펌프 |
JPS62113887A (ja) * | 1985-11-13 | 1987-05-25 | Hitachi Ltd | 真空ポンプ |
JPH0610477B2 (ja) * | 1987-05-13 | 1994-02-09 | 株式会社日立製作所 | タ−ボ真空ポンプ |
JP2536571B2 (ja) * | 1987-12-25 | 1996-09-18 | ダイキン工業株式会社 | 渦流形タ―ボ機械 |
JPH01247794A (ja) * | 1988-03-29 | 1989-10-03 | Daikin Ind Ltd | 複合形真空ポンプ |
DE3919529C2 (de) * | 1988-07-13 | 1994-09-29 | Osaka Vacuum Ltd | Vakuumpumpe |
JPH0249996A (ja) * | 1988-08-11 | 1990-02-20 | Daikin Ind Ltd | 渦流形真空ポンプ |
-
1990
- 1990-03-09 IT IT67163A patent/IT1241431B/it active IP Right Grant
-
1991
- 1991-02-13 EP EP91200302A patent/EP0445855B1/en not_active Expired - Lifetime
- 1991-02-13 AT AT91200302T patent/ATE113343T1/de not_active IP Right Cessation
- 1991-02-13 ES ES91200302T patent/ES2064873T3/es not_active Expired - Lifetime
- 1991-02-13 DE DE69104749T patent/DE69104749T2/de not_active Expired - Lifetime
- 1991-03-08 JP JP3043601A patent/JPH0826877B2/ja not_active Expired - Lifetime
-
1997
- 1997-07-09 HK HK97101526A patent/HK1000016A1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
HK1000016A1 (en) | 1997-10-03 |
IT9067163A1 (it) | 1991-09-09 |
IT1241431B (it) | 1994-01-17 |
DE69104749D1 (de) | 1994-12-01 |
EP0445855B1 (en) | 1994-10-26 |
ATE113343T1 (de) | 1994-11-15 |
JPH04224295A (ja) | 1992-08-13 |
ES2064873T3 (es) | 1995-02-01 |
IT9067163A0 (it) | 1990-03-09 |
EP0445855A1 (en) | 1991-09-11 |
DE69104749T2 (de) | 1995-03-30 |
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