JPH0826877B2 - ターボ分子ポンプ - Google Patents

ターボ分子ポンプ

Info

Publication number
JPH0826877B2
JPH0826877B2 JP3043601A JP4360191A JPH0826877B2 JP H0826877 B2 JPH0826877 B2 JP H0826877B2 JP 3043601 A JP3043601 A JP 3043601A JP 4360191 A JP4360191 A JP 4360191A JP H0826877 B2 JPH0826877 B2 JP H0826877B2
Authority
JP
Japan
Prior art keywords
rotor
pump
tangential flow
pump stage
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3043601A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04224295A (ja
Inventor
カサロ ファウスト
ドルチノ ルイジ
ハブラニアン マルス
レビ ジャンパオロ
Original Assignee
バリアン ソチエタ ペル アツィオニ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by バリアン ソチエタ ペル アツィオニ filed Critical バリアン ソチエタ ペル アツィオニ
Publication of JPH04224295A publication Critical patent/JPH04224295A/ja
Publication of JPH0826877B2 publication Critical patent/JPH0826877B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP3043601A 1990-03-09 1991-03-08 ターボ分子ポンプ Expired - Lifetime JPH0826877B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT67163A/90 1990-03-09
IT67163A IT1241431B (it) 1990-03-09 1990-03-09 Pompa turbomolecolare perfezionata.

Publications (2)

Publication Number Publication Date
JPH04224295A JPH04224295A (ja) 1992-08-13
JPH0826877B2 true JPH0826877B2 (ja) 1996-03-21

Family

ID=11300124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3043601A Expired - Lifetime JPH0826877B2 (ja) 1990-03-09 1991-03-08 ターボ分子ポンプ

Country Status (7)

Country Link
EP (1) EP0445855B1 (it)
JP (1) JPH0826877B2 (it)
AT (1) ATE113343T1 (it)
DE (1) DE69104749T2 (it)
ES (1) ES2064873T3 (it)
HK (1) HK1000016A1 (it)
IT (1) IT1241431B (it)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
US5456575A (en) * 1994-05-16 1995-10-10 Varian Associates, Inc. Non-centric improved pumping stage for turbomolecular pumps
US5449270A (en) * 1994-06-24 1995-09-12 Varian Associates, Inc. Tangential flow pumping channel for turbomolecular pumps
IT1287016B1 (it) * 1996-07-18 1998-07-24 Varian Spa Pompa da vuoto.
IT1288738B1 (it) * 1996-10-08 1998-09-24 Varian Spa Unita' elettronica di comando per pompa da vuoto.
IT1288737B1 (it) * 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
US5709528A (en) * 1996-12-19 1998-01-20 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptiblity to particulate buildup
IT1289811B1 (it) 1996-12-27 1998-10-16 Varian Spa Metodo ed apparato di diagnosi per pompa da vuoto.
IT1297347B1 (it) 1997-12-24 1999-09-01 Varian Spa Pompa da vuoto.
US6071092A (en) * 1998-03-10 2000-06-06 Varian, Inc. Vacuum pump with improved back-up bearing assembly
US6074165A (en) * 1998-03-10 2000-06-13 Varian, Inc. Vacuum pump with magnetic bearing system and back-up bearings
TW504548B (en) 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
US6179573B1 (en) * 1999-03-24 2001-01-30 Varian, Inc. Vacuum pump with inverted motor
DE60101368T2 (de) * 2001-02-22 2004-10-14 Varian S.P.A., Leini Vakuumpumpe
US20070227357A1 (en) * 2006-03-31 2007-10-04 Mcdermott Wayne T Turbomolecular pump system for gas separation
US8247315B2 (en) * 2008-03-17 2012-08-21 Semiconductor Energy Laboratory Co., Ltd. Plasma processing apparatus and method for manufacturing semiconductor device
US8148839B2 (en) 2008-07-02 2012-04-03 Rosefsky Jonathan B Ribbon drive power generation and method of use
DE102013108482A1 (de) * 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpstufe

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE239213C (it) *
FR1443239A (fr) * 1965-05-05 1966-06-24 Pompe à vide mécanique rotative
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
KR890004933B1 (ko) * 1985-07-31 1989-11-30 가부시기가이샤 히다찌세이사꾸쇼 터어보분자펌프
JPS62113887A (ja) * 1985-11-13 1987-05-25 Hitachi Ltd 真空ポンプ
JPH0610477B2 (ja) * 1987-05-13 1994-02-09 株式会社日立製作所 タ−ボ真空ポンプ
JP2536571B2 (ja) * 1987-12-25 1996-09-18 ダイキン工業株式会社 渦流形タ―ボ機械
JPH01247794A (ja) * 1988-03-29 1989-10-03 Daikin Ind Ltd 複合形真空ポンプ
DE3919529C2 (de) * 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vakuumpumpe
JPH0249996A (ja) * 1988-08-11 1990-02-20 Daikin Ind Ltd 渦流形真空ポンプ

Also Published As

Publication number Publication date
HK1000016A1 (en) 1997-10-03
IT9067163A1 (it) 1991-09-09
IT1241431B (it) 1994-01-17
DE69104749D1 (de) 1994-12-01
EP0445855B1 (en) 1994-10-26
ATE113343T1 (de) 1994-11-15
JPH04224295A (ja) 1992-08-13
ES2064873T3 (es) 1995-02-01
IT9067163A0 (it) 1990-03-09
EP0445855A1 (en) 1991-09-11
DE69104749T2 (de) 1995-03-30

Similar Documents

Publication Publication Date Title
US5238362A (en) Turbomolecular pump
JPH0826877B2 (ja) ターボ分子ポンプ
EP0568069B1 (en) Turbomolecular vacuum pumps
JP4395210B2 (ja) 真空ポンプの改良
US7488151B2 (en) Vortical flow rotor
JP3995419B2 (ja) デュアルインレット真空ポンプ
US5813834A (en) Centrifugal fan
US5810557A (en) Fan wheel for an inline centrifugal fan
JP2003129990A (ja) 真空ポンプ
US5143511A (en) Regenerative centrifugal compressor
JP2003515037A5 (it)
JP3048583B2 (ja) 高真空ポンプ用のポンプ段
US6371735B1 (en) Vacuum pumps
US7445422B2 (en) Hybrid turbomolecular vacuum pumps
KR890004933B1 (ko) 터어보분자펌프
GB2057568A (en) Two-stage centrifugal compressor
CN1025574C (zh) 分子泵
JPH0553955B2 (it)
KR100790305B1 (ko) 원심형 터보 임펠라 구동방식의 축류형 송풍장치
KR100339550B1 (ko) 터보 압축기의 디퓨져 구조
JPH10231798A (ja) 遠心形多翼送風機
JPH02264196A (ja) ターボ真空ポンプ
JP3045418B2 (ja) ターボ真空ポンプ
JPS6321394A (ja) 多段型オイルフリ−真空ポンプ
JPH07217588A (ja) 渦流ブロア

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090321

Year of fee payment: 13

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100321

Year of fee payment: 14

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100321

Year of fee payment: 14

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110321

Year of fee payment: 15

EXPY Cancellation because of completion of term