JPH08243889A - Planet gear type polishing device - Google Patents

Abstract

PURPOSE: To provide a planet gear type polishing device which can rotate a workpiece on its won axis and can revolve it around stably and further surely. CONSTITUTION: A plurality of work heads 6 of holding a workpiece 14 are circumferentially arranged to be rotatably supported to a head support member 11 mounted in a lower end of the first shaft 10a, and a head gear 12 mounted in a head shaft 6a of each work head 6 is meshed with a center gear 13 fixed to the first shaft 10a. A round rotating gear 17 is rotatably mounted in a lower end of the second shaft 10b externally fitted to the first shaft 10a, to be meshed with a drive gear 18 for driving the round rotating gear 17, also to be connected to the head support member 11 by a connecting bar 27, and when the head support member 11 is rotated by rotating the round rotating gear 17, each work head 6 is rotated around the first shaft 10a, simultaneously with rotating the work head 6 on its own axis with the head shaft 6a serving as the center.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is to polish one side of a work having a disk shape or a similar shape such as a semiconductor wafer, a magnetic disk substrate made of aluminum or ceramics, an optical disk substrate made of glass, etc. More specifically, the present invention relates to a planetary gear type polishing device for mirror-polishing while rotating and revolving the above-mentioned workpiece in a planetary gear type.

[0002]

2. Description of the Related Art As a polishing apparatus of this kind for polishing a workpiece while rotating and revolving the same, there is conventionally known Japanese Patent Laid-Open No. 5-2349.
The one disclosed in Japanese Patent Publication No. 69 is known. this is,
As shown in FIG. 7, at the center of the disc-shaped plate 40,
A transmission gear 41 having a pair of large and small gears 41a and 41b is provided at the upper and lower ends, and the gear 4 above the transmission gear 41 is provided.
1a is engaged with the driving gear 42, and the lower gear 41b of the transmission gear 41 is provided in the recess formed in the bottom of the plate 40 with the gear 44 at the upper end of the wafer holder 43 arranged in the recess. The wafer holder 4 is engaged with the wafer holder 4 via the transmission gear 41 by the drive gear 42.
While pressing the plate 40 downward by the pressurizing cylinder 45 via the transmission gear 41 while rotating 3, the wafer 46 held by the wafer holder 43 is moved to the surface plate 4
It is pressed against No. 7 and mirror-polished. As a result, the wafer 46 is given a rotational movement by the rotation of the wafer holder 43 and an orbital movement by the rotation of the plate 40.

However, in the above conventional polishing apparatus, the transmission gear 41 and the plate 40 are relatively rotatable, and the rotational force of the wafer holder 43 is obtained by the relative rotation of the transmission gear 41 with respect to the plate 40. Is a plurality of wafers 46 located on the inner and outer circumferences of the surface plate 47.
Since it is obtained by the difference in the acting force acting on the wafer, that is, the difference in the acting force based on the peripheral speed difference of the surface plate 47, the rotation and the revolution of the wafer 46 are always stably and reliably generated at a constant speed. This is almost impossible, and a decrease in polishing accuracy due to uneven rotation is unavoidable.

[0004]

SUMMARY OF THE INVENTION A technical object of the present invention is to provide a planetary gear type polishing apparatus capable of stably and reliably rotating and revolving a workpiece.

[0005]

In order to solve the above problems, a planetary gear type polishing apparatus of the present invention comprises a surface plate which is rotatable by a motor and a pressing unit which presses a work on the surface plate with a required force. And a plurality of work heads arranged circumferentially for holding a work, and a lifting means for lifting and lowering these work heads and applying a working pressure to each work head. And a revolving means for forcibly revolving each of the work heads around the array center, and a revolving means for forcibly rotating each of the work heads.

According to a specific configuration of the present invention, the elevating means is a shaft means supported by the machine body so as to be vertically movable at the center of arrangement of the work heads, and the work heads are attached to the shaft means. A revolving gear that has a head supporting member that supports it, and drive means that moves up and down the shaft means, and the revolving means is rotatably attached to the shaft means and meshes with a drive gear for driving; It has a connecting means for connecting the diversion gear and the head supporting member in the rotational direction, and the rotating means is attached to the center gear attached to the shaft means and meshes with the center gear attached to each work head. And headgear. According to another configuration mode of the present invention, the pressing unit has a block guide having head fitting holes in the same number and the same arrangement as the work heads, and the block guides are concentric with the arrangement center of the work heads. When the pressure unit is in the non-machining position, each work head occupies the position out of the head fitting hole of the block guide, and when the pressure unit is in the machining position, each work head is It occupies a position to be fitted in the head fitting hole. In order to stably support the rotation of the block guide, it is desirable to provide an appropriate supporting means. As a specific example, the supporting means is composed of at least one guide roller, and the guide roller is a block. It is desirable to be able to move between a support position that abuts the guide and a standby position that is separated from the block guide. In the present invention, a plurality of the pressure units can be arranged around the center of the surface plate with a required interval.

[0007]

In the planetary gear type polishing apparatus having the above structure, the work held by each work head of the pressurizing unit is pressed against the rotating surface plate while applying a required pressing force by the elevating means to perform the polishing process. is there. At this time, since the work heads are forcibly revolved by the revolving means and are forcibly revolved by the revolving means, the rotation and the revolution of the work are always stable and reliable, and uneven polishing occurs. There is no.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a planetary gear type polishing apparatus according to the present invention will be described in detail below with reference to the drawings. In FIG. 1, 1 is a machine body, 2 is a surface plate rotatably supported by the machine body 1 and connected to an electric motor (not shown), 3 is the machine body 1
2 shows a pressurizing unit that presses the plurality of held works 4 against the surface plate 2 with a required processing pressure, and a plurality of sets of pressure units 3 are installed around the rotation center of the surface plate 2 at a required interval. It is arranged in advance. However, the pressure unit 3
Can be just one set.

As shown in detail in FIGS. 2 to 4, the pressurizing unit 3 has a plurality of work heads 6 arranged in a circumferential shape for holding the work 4, and these work heads 6. Ascending / descending means 7 for controlling the ascending / descending and applying the processing pressure to each work head 6, an orbiting means 8 for forcibly revolving the above work heads 6 around their arrangement centers, and each work head 6 forcibly. It has a rotation means 9 for rotating itself.

The work head 6 holds the work 4 by an appropriate holding means such as adhesion with a wax or vacuum suction. The work head 6 has a disk shape rotatably attached to the lower end of the first shaft 10a of the elevating means 7. The head support member 11 is attached at regular intervals along the circumference centered on the first shaft 10a, and is rotatable at each position. Head shaft 6a of each work head 6
Are projected on the upper surface of the head support member 11, and the head shaft 6a
Head gears 12 are fixed to the tops of the head gears 12. These head gears 12 mesh with center gears 13 fixed to the first shaft 10a, respectively, and the head support member 11 rotates to move the work heads 6 to the first position. Shaft 10
When revolving around a, the work head 6 is forcibly rotated about the head shaft 6a by the rotation of the head gear 12 that orbits around the center gear 13 in a meshed state. The rotation means 9 is constituted by 12 and the center gear 13.

The elevating means 7 includes the first shaft 10a having a small diameter and the second shaft 1 having a large diameter, which are telescopically fitted to each other.
0b and shaft means 10. The large-diameter second shaft 10b is the guide cylinder 1 provided on the machine body 1.
6, a flange-shaped engaging portion 15 is formed at the upper end of the second shaft 10b so as to engage with the upper end of the guide cylinder 16 at the lower limit position, while at the lower end thereof,
The orbiting gear 17 is rotatably attached. The revolution gear 17 meshes with a drive gear 18 mounted on the rotation center of the surface plate 2 of the machine body 1, and is driven and rotated by the drive gear 18 connected to a drive source (not shown). . The drive gear 18 is a necessary shaft so that the meshing relationship between the drive gear 18 and the revolving gear 17 does not collapse even when the revolving gear 17 moves up and down between a non-processing position (FIG. 2) and a processing position (FIG. 6) as described later. Has a directional length.

On the other hand, the first shaft 10a having a small diameter has the head support member 11 and the center gear 13 attached to the lower end portion thereof as described above, and the upper end portion thereof is fixed to the support plate 20. The rods 21a of the two fluid pressure cylinders 21 which are the driving means for raising and lowering are connected to the shaft means 1 by these cylinders 21.
0 is moved up and down. Further, an abrasive supply nozzle 22 for supplying an abrasive during processing projects from the lower end of the first shaft 10a. The cylinder 21 has two built-in primary and secondary cylinder mechanisms so that it can be moved up and down in two steps, and is attached to a bracket 23 fixed to the machine body 1.

The revolving gear 17 and the head supporting member 11
Means a plurality of connecting rods 27 extending downward from a plurality of places of the revolution gear 17 and slidably penetrating the head supporting member 11.
Are connected to each other in the rotating direction, and when the revolving gear 17 rotates, the head supporting member 11 rotates together via the connecting rod 27, and each work head 6 supported by the head supporting member 11 is rotated. Revolves around the first shaft 10a, and the revolution gear 8 and the connecting rod 27 constitute the revolution means 8.

A disk-shaped block guide 29 is attached to the lower end of the connecting rod 27 so as to occupy a position concentric with the head support member 11. The block guide 29
Are head fitting holes 3 of the same number and the same arrangement as the work heads 6.
0, and a pocket portion 31 located at the center for supplying abrasives
When the work 4 is polished, the work head 6 and the work 4 held therein are fitted in the head fitting hole 30, and the abrasive material supply nozzle 22 is fitted in the pocket 31. In the combined state, the revolving gear 17 and the head support member 11 rotate together.

The two shafts 10a and 10b constituting the shaft means 10 are provided on the first shaft 10a when the first shaft 10a is lifted by the cylinder 21 (FIG. 2) when the work 4 is not processed. Stop member 3
3 engages with the lower end of the second shaft 10b, and both shafts 10a and 10b rise together to the position shown in FIG. 2, at which time each work head 6 moves upward from the head fitting hole 30 of the block guide 29. It occupies the position where it has slipped out, and when the workpiece 4 is machined, both shafts 10
a and 10b descend to the position where the block guide 29 and the work 4 come into contact with the surface plate 2 (FIG. 6), and at this time, the work head 6 and the work 4 move to the block guide 29.
It is adapted to be fitted in the head fitting hole 30.

As shown in FIG. 3, in order to enable the block guide 29 to rotate stably and smoothly during processing, the machine body 1 is provided with a supporting means 34 for supporting the rotation of the block guide 29. . This support means 34 is
It consists of a guide roller 35, and this guide roller 3
5 is rotatably attached to the tip of a support arm 36 whose base end is rotatably supported by the machine body 1 and supports the block guide 29 by abutting against the side surface of the block guide 29. The support arm 36
A rod 37a of a fluid pressure cylinder 37 is connected to the guide roller 35, and the cylinder 37 allows the guide roller 35 to move between a support position in contact with the block guide 29 and a standby position in which it is separated from the block guide 29. Although two sets of the guide rollers 35 are provided in the illustrated embodiment, one set may be provided.

When the work 4 is polished by the polishing apparatus having the above structure, the work heads 6 are held by the respective work heads 6 as shown in FIG. By shortening the rod 21a of the cylinder 21 in, the work head 6 and the block guide 29 are lowered. In this case, the first descending
In the next stage the two shafts 1 in the shaft means 10
0a and 10b descend together and the block guide 29 contacts the surface plate 2 as shown in FIG.
b stops at that position. Next, the first as the second stage
Only the shaft 10a further descends, and as shown in FIG.
When the work 4 held by each work head 6 is fitted into the head fitting hole 30 of the block guide 29 and comes into contact with the surface plate 2 with a predetermined pressing force, the descent is stopped.

Then, the supply of the abrasive from the abrasive supply nozzle 22 is started, the rotation of the surface plate 2 and the drive gear 18 is started, and the work 4 is polished for a required time. At this time, the revolving gear 17 is rotated by the drive gear 18, and the head supporting member 11 and the block guide 29, which are connected to the revolving gear 17 by the connecting rod 27, also rotate together. The thus-obtained work heads 6 and the work 4 revolve around the second shaft 10b while being fitted in the head fitting holes 30 of the block guide 29. At the same time, the headgear 12 of each work head 6 is moved to the center gear 13
Since it rotates by orbiting around in the meshed state,
Each work head 6 rotates together with the work 4 about the head shaft 6a. For example, as shown by the arrow in FIG. 4, when the drive gear 18 rotates clockwise, the revolution gear 1
7 rotates counterclockwise, and the headgear 12 and each work head 6 also rotate counterclockwise.

As a result, the rotation and revolution of the work 4 are always stably and reliably performed irrespective of the difference in peripheral speed between the inner and outer circumferences of the surface plate 2 and the difference in acting force acting on the work. Never comes down. When the polishing of the work 4 is completed, the supply of the abrasive is stopped, the rotation of the surface plate 2 and the drive gear 18 is stopped, and the cylinder 2 is stopped.
The rod 21a of No. 1 extends to lift the work head 6 and the block guide 29. In this case, first, the first shaft 10a rises, and as shown in FIG. 5, when the locking member 33 abuts and locks on the lower end of the second shaft 10b, both shafts 10a and 10b subsequently rise together. , Fig. 2
When the upper limit position shown in is reached, the ascending stops. Then, when the machined work held by each work head 6 is taken out and further machining is performed, a new unprocessed work is held by each work head 6 and the above steps are repeated.

[0020]

As described above, according to the present invention, since the work head is forcibly revolved by the revolving means, and the work head is forcibly revolved by the revolving means.
It is possible to always perform stable and reliable rotation and revolution of the work, and as a result, it is possible to prevent deterioration of polishing accuracy due to uneven rotation and easily realize high flatness of the work.

[Brief description of drawings]

FIG. 1 is a front view showing an embodiment of a planetary gear polishing device of the present invention.

FIG. 2 is an enlarged sectional view of a main part of FIG.

FIG. 3 is an enlarged cross-sectional view taken along the line AA of FIG.

FIG. 4 is a plan view showing the meshing relationship of gears that cause the workpiece to revolve and rotate.

FIG. 5 is an enlarged sectional view at the same position as in FIG. 2 showing a different operation state of the planetary gear polishing apparatus of the present invention.

FIG. 6 is an enlarged cross-sectional view at the same position as in FIG. 2, showing a further different operation state of the planetary gear polishing apparatus of the present invention.

FIG. 7 is a sectional view of a main part of a conventional polishing apparatus.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Airframe 2 Surface plate 3 Pressurizing unit 6 Work head 7 Elevating means 8 Revolving means 9 Spinning means 10 Shaft means 11 Head support member 12 Headgear 13 Center gear 17 Revolution gear 18 Drive gear 21 Cylinder 27 Connecting rod 29 Block guide 30 Head Mating hole 35 Guide roller

Claims (6)

[Claims] 1. A motor is provided with a surface plate that can be driven and rotated by a motor, and a pressure unit that presses a work on the surface plate with a required force. The pressure unit is arranged in a circumferential shape for holding the work. A plurality of work heads provided, an elevating means for raising and lowering these work heads and applying a processing pressure to each work head, and a revolving means for forcibly revolving each work head around the array center, A planetary gear type polishing apparatus, comprising: a rotation means for forcibly rotating each work head. 2. The planetary gear type polishing apparatus according to claim 1, wherein the elevating means is a shaft means supported by the machine body so as to be vertically movable at the center of arrangement of the work heads, and each of the works attached to the shaft means. A head support member for supporting the head, and a drive means for moving the shaft means up and down, wherein the revolution means is rotatably attached to the shaft means and meshes with a drive gear for driving; A rotating gear and a connecting means for connecting the head supporting member in the rotational direction, and the rotating means is attached to the shaft means and the center gear, and is attached to each work head and meshes with the center gear. What has a headgear, It is characterized by the above-mentioned. 3. The planetary gear type polishing apparatus according to claim 1 or 2, wherein the pressing unit has a block guide having head fitting holes of the same number and arrangement as the work heads, The work heads are provided at the concentric position with the center of arrangement, and when the pressure unit is in the non-machining position, each work head occupies the position where it has slipped out from the head fitting hole of the block guide, and the pressure unit is in the machining position. The work heads are arranged so as to occupy positions to be fitted in the head fitting holes. 4. The planetary gear type polishing apparatus according to claim 3, further comprising support means for supporting the rotation of the block guide. 5. The planetary gear type polishing apparatus according to claim 4, wherein the support means comprises at least one guide roller, and the guide roller is separated from the support position in contact with the block guide and the block guide. Those that can be moved to and from the standby position. 6. The planetary gear type polishing apparatus according to any one of claims 1 to 5, wherein a plurality of pressurizing units are arranged around a center of the surface plate at a required interval. What to do.