JPH06246625A - Both side polishing device - Google Patents

Abstract

PURPOSE:To improve the smoothness by rotatably supporting the outer circumferential edge of a disk-shaped work which is placed vertically by three holding rollers, arranging polishing tools on both sides of the work, providing the holding rollers in an elevatable manner, and thereby providing a complicated working locus. CONSTITUTION:A portal supporting frame body 5 is vertically provided in the center of a horizontal supporting table 2, an elevating body 8 which is elevated/lowered by an elevating device 9 is provided, and two supporting shaft bodies are pivotably supported by this elevating body 8. Lower side holding rollers 13 to hold the outer circumferential edge of a work W are mounted on the tip part of the respective shaft bodies 12, and at the same time, an upper side holding roller 13 is mounted on the end part of a supporting arm 16 which is supported by the elevating body 8 and swayed by a cylinder 15, and the respective rollers 13, 17 are interlockingly rotated by the action of a motor 25. A polishing tool 44 which is supported by the respective holding bodies 42 arranged on both sides of the supporting frame body 5 through a rotary shaft body 43 is pressed against the work W by the action of a pushing cylinder 47, and the polishing work is executed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a double-side polishing apparatus for polishing both sides of a thin disk-shaped work such as a hard disk substrate.

[0002]

2. Description of the Related Art Conventionally, as a polishing apparatus for polishing both surfaces of a disk-shaped work of this type, a plurality of works are held in a large carrier, and a large-diameter polishing tool is arranged above and below the carrier. Then, the polishing tool and the carrier are rotated in a predetermined direction to simultaneously polish the front and back surfaces of a plurality of works.

[0003]

However, according to the polishing apparatus as described above, since a plurality of works are polished at one time, that is, the batch type processing, it is necessary to manage the polishing state for each batch. There was a problem that it occurred and was troublesome.

For example, when performing batch type polishing, it is necessary to always perform processing for each same batch over each process such as roughing and finishing. That is, in the batch type, the difference in the thickness of the work within the same batch is small and there is no problem, but since there is a difference in the thickness between different batches, the work to be processed in a certain process unless the thickness is controlled for each batch. And a workpiece that is not machined is generated, which affects the machined surface roughness and the machined surface flatness, increasing the number of defective products.

Further, in the above-mentioned batch type polishing, it is difficult to detect the supply position of the work and the position of the work after finishing the work, and the work and the polishing tool ring (contact) with the working liquid. It was also troublesome to separate the ringing work from the polishing tool.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a double-sided polishing apparatus which can solve the above problems.

[0007]

In order to solve the above problems, the first means of the present invention is to hold the outer peripheral edge of a disk-shaped material to be polished at the outer peripheral portion of the disk-shaped material to be polished. The roller is supported by an elevating member provided on a support so as to be vertically movable at at least three locations and rotatably about a horizontal axis, and the disk-shaped material to be polished is rotatably held by the respective holding rollers. At both sides, a rotary shaft that is movable toward and away from the material to be polished is disposed via a holder, and a polishing tool for polishing the front and back surfaces of the material to be polished is attached to the tip of this rotary shaft. A rotary drive for rotating the rotary shaft is provided, and both polishing tools are provided via the rotary shaft with a pressing device for pressing the front and back surfaces of the material to be polished with a predetermined biasing force, and A lifting drive that lifts the lifting member Digits is a double-side polishing apparatus.

In order to solve the above problems, the second means of the present invention is to support a holding roller for holding the outer peripheral edge of the disk-shaped material to be polished on the outer peripheral portion of the disk-shaped material to be polished. A disk-shaped material to be polished is rotatably supported on at least three locations around a horizontal axis and is rotatably held by each of the holding rollers. On the other hand, a rotary shaft body that can approach and separate is arranged, and at the tip of this rotary shaft body, a polishing tool for polishing the front and back surfaces of the material to be polished is attached, and a rotary drive device for rotating the rotary shaft body is provided, Both the polishing tools through the rotary shaft, a pressing device for pressing the front and back surfaces of the material to be polished with a predetermined biasing force, and the holding roller or polishing tool with respect to the respective rotation axis Both sides provided in an eccentric position A grinding apparatus.

[0009]

According to each of the above constructions, only one piece of the material to be polished is held by the holding roller, and the polishing tool is rotated by the rotation driving device and pressed against the material to be polished by the pressing device. Can be simultaneously polished with a polishing tool. Therefore, compared to batch processing of a plurality of polishing materials at one time, it is not necessary to control each batch, and it is not necessary to position the supply and removal positions of the polishing material, and Is held by the holding roller, so there is no concern about ringing with the polishing tool.

Further, since the holding roller for holding the material to be polished is moved up and down, or because the holding roller or the polishing tool is eccentric with respect to each rotational axis, the processing trajectory of the material to be polished is random. Therefore, the processing flatness of the material to be polished becomes good.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A first embodiment of the present invention will be described with reference to FIGS.
It will be explained based on. 1 to 4, reference numeral 1 denotes a double-side polishing apparatus for polishing both sides, that is, the front and back surfaces of a thin circular substrate (hereinafter, simply referred to as a work) W for a hard disk, which is roughly divided into a horizontal support table 2 and a horizontal support table 2. It is composed of a holding section 3 for the work W arranged in the central portion of the horizontal support base 2, and a polishing section 4 arranged on the horizontal support base 2 on both sides of the holding section 3.

The holding portion 3 is a gate-shaped support frame (support) 5 standing on the horizontal support base 2, and the support frame 5.
The flange portion 6a of the support tool 6 which is guided by the guide grooves 5a on both sides formed on the
And an elevating plate (elevating member) 8 which is elevatably supported by a supporting spring (compression spring) 7 inserted between the elevating plate 8 and a horizontal portion 5b of the supporting frame 5, and the elevating plate 8 is arranged at a predetermined distance. An elevating drive device 9 for elevating and lowering, two support shafts 12 rotatably projecting from the left and right positions of the elevating plate 8 via bearings 11, respectively, and attached to the tip ends of these support shafts 12, respectively. Along with the lower holding rollers 13 each having a groove portion 13a capable of holding the outer peripheral edge of the work W on the outer peripheral portion thereof, and also on the lift plate 8, as shown by an arrow a in FIG. ) And a supporting arm 16 which is oscillatably supported in the vertical plane by means of a oscillating cylinder device 15 mounted via a supporting bracket 14, and the supporting arm 16
An upper holding roller 17 which is rotatably attached to one end of the workpiece via a bearing (not shown) and has an outer peripheral portion formed with a groove 17a capable of holding the outer peripheral edge of the workpiece W. As shown in FIG. 4, the holding rollers 13 and 17 are arranged in the same vertical plane at predetermined intervals. The rod-shaped mounting portion 6b of the support 6 is
3 is inserted through a through hole 5c formed in the horizontal portion 6b of the support frame 5, as shown in FIG.

Each of the holding rollers 13 and 17 is made of synthetic resin, and the two lower holding rollers 13 are rotationally driven. That is, at the other end of the support shaft 12 that supports each lower holding roller 13,
The driven pulley 21 is attached, the driven pulleys 21 are linked to each other by a coupling belt (not shown), and the driven pulley 21 is linked to the driven pulley 21 via a driving belt 23. The first electric motor 25 for rotating the pulley 24 is the horizontal support base 2
It is placed on top.

Therefore, by driving the first electric motor 25, both lower holding rollers 13 can be rotated at a predetermined speed. Further, the lifting drive device 9 is
As shown in FIG. 3, it is rotatably provided on the horizontal portion 5b of the support frame 5 and above the flange portion 6a of the support tool 6 via the drive shaft 31, and the flange portion 6a is provided at a predetermined distance. The cam body 32 for moving up and down, and this cam body 3
2 and a cam electric motor (not shown) for rotating the shaft 2 via the drive shaft 31. Reference numeral 33 is a casing of the lifting drive device 9, and the cam body 32 can be directly rotated by a cam motor.

Therefore, by rotating the cam body 32 against the urging force of the support spring 7 by the cam motor, the lift plate 8, that is, the holding rollers 13 and 17 can be lifted and lowered by a predetermined distance. Become.

Next, the left and right polishing parts 4 will be described. The main structure of the left and right polishing parts 4 is the same, and the difference is that there is only one rotary drive source. In the following, the description will focus on the polishing section 4A on the left side.

That is, the polishing section 4A is composed of the support frame 5
A holder 42 supported via a support bracket 41 on the left horizontal support base 2, a rotary cylinder (not shown) rotatably arranged in the holder 42, and a rotary cylinder (not shown) inside the rotary cylinder. The rotary shaft body 43 inserted through the serration portion, that is, slidably and also capable of transmitting rotation.
The polishing tool 44 attached to the tip of the rotary shaft 43, and the other end of the rotary shaft 43 supported by the horizontal support base 2 via the support bracket 45.
It is composed of a pressing cylinder device (pressing device) 47 for pressing the polishing tool 44 against the surface of the work W by pressing the rotary cylinder body and a rotary drive unit for rotating the rotary cylinder.

As described above, this rotary drive unit is designed to drive the both-side polishing units 4A and 4B at the same time.
That is, as shown in FIG. 2, the transmission shaft body 51 is rotatably supported on the horizontal support base 2 in parallel with the rotation axis center of the polishing tool 44, and the rotary cylinder bodies are provided at both ends thereof. Connected belt 5 to driven pulley 52 attached to the end of
A driven intermediate pulley 54, which is interlocked and connected via 3, is attached to the drive shaft 51, and a drive intermediate pulley 55 is attached to the drive intermediate pulley 55 midway near one end of the transmission shaft body 51. A second electric motor (rotational drive device) 58 that rotates a drive pulley 57 that is interlocked and coupled via a drive belt 56 is arranged on the horizontal support base 2.

Further, the polishing section 4 is provided with a control device 61 for controlling the movement amount of the rotary shaft body 43. As shown in FIG. 1, the control device 61 includes a positioning member 62 attached to a connecting member 46 that connects the rotating shaft body 43 and the pressing cylinder device 47, and a holding body 42.
A positioning cylinder device (also referred to as a knock cylinder) 63 that is attached to the side of the positioning member 62 and has a retractable rod portion 63a that can contact the tip of the positioning member 62.

The cylinder devices 15, 47,
As 63, for example, an air cylinder is used. Next, the work of polishing the work W will be described.

First, with the swing cylinder device 15,
After swinging the upper holding roller 17 upward so that the work W is supported by the lower holding roller 13, the upper holding roller 17 is lowered, and by the three holding rollers 13 and 17, accurately each roller. Grooves 13a and 17a of 13 and 17
And hold it (see FIG. 4).

Next, by the pressing cylinder device 47,
The rotary shaft bodies 43 on both sides are moved to the work W side. During this movement, until the positioning member 62 abuts on the retractable rod portion 63a of the positioning cylinder device 63,
The rotating shaft body 43 advances.

Then, the positioning member 62 contacts the projecting / retracting rod portion 63a to stop the forward movement of the rotary shaft body 43. In this state, the polishing tool 44 maintains a predetermined clearance with respect to both surfaces of the work W. Has been done.

In this state, the electric motors 25 and 58 are driven to rotate the polishing tools 44 on both sides in the same direction through the lower holding roller 13 and the rotary shaft body 43, and the positioning cylinder device 63 is projected. Both surfaces of the work W are softly polished by pulling the retracting rod portion 63a little by little and pressing the polishing tool 44 with the same pressing force to both surfaces of the work W. Of course, at this time, the working liquid is sprayed onto the work W by the spray nozzle 65 as shown in FIG.

At this time, as the work W rotates, the elevation plate 8 is moved up and down by the rotation of the cam body 32, so that the surface of the work W is randomly polished.

When the elevating plate 8 moves up and down, the first
Only the lower holding roller 13 moves up and down with respect to the electric motor 25, so that the drive belt 23 thereof is provided with, for example, a movable intermediate pulley so as to absorb the up and down movement.

Further, the pulling-in control of the withdrawal rod portion 63a is performed by bleeding the air in the cylinder body, and the precise control of the flow rate of the bleeding air is performed by the polishing tool on both sides of the work W. The pressing force of 44 can always be made equal.

As described above, since the workpieces W to be polished are held one by one and both surfaces thereof are polished by the polishing tool, as compared with the conventional one that batch-processes a plurality of workpieces at a time. Therefore, there is no need to manage the work for each batch, there is no need to position the supply and take-out positions of the work, and since the work is held by the holding roller, there is no concern about ringing with the polishing tool. .

Further, since the holding roller for holding the work W is moved up and down by a predetermined distance, the machining locus of the work W becomes non-monotonous, and therefore, the adverse effects of the habit of the polishing tool and the like are prevented. The processing flatness of W becomes good.

Next, a second embodiment of the present invention will be described with reference to FIGS. That is, in the first embodiment described above, the lifting plate that supports the holding roller that holds the work W is moved up and down, but in the second embodiment, instead of moving the lifting plate up and down, the lower side The holding roller is configured to be movable in the vertical plane.

That is, as shown in FIG. 5, the center position of the lower holding roller 13 attached to the tip of each support shaft 12 is set to a predetermined distance c with respect to the center axis b of the support shaft 12.
The support arm 16 that is eccentric only and that supports the upper holding roller 17 has a guide space portion formed in the central plate portion 71 on the support frame body (in this case, the elevating plate is not provided) 5 side. A compression spring 74 is provided as a pressing member that is mounted on an elevating body 73 that is inserted in 72 so as to elevate and lower, and that presses the elevating body 73 downward.

Therefore, in this structure, when the lower holding roller 13 is rotated, the lower holding roller 13 has an eccentric distance (a distance substantially equal to c) as shown by the phantom line and the solid line in FIG. 13, that is, the work W moves up and down, and the flatness of the polished surface of the work W becomes good as in the above.

Of course, when the lower holding roller 13 swings in the vertical direction, the upper holding roller 17 can follow the movement of the lifting body 73. Further, in the second embodiment, the lower holding roller 13 is eccentric with respect to the rotation axis b of the support shaft body 12 so that the polishing surface of the work W is randomly moved. However, even if the rotation center of the left and right polishing tools 44 is eccentric with respect to the rotation axis of the rotation shaft body 43 by a predetermined distance, the same effect as described above can be obtained.

By the way, in each of the above embodiments, three holding rollers for holding the work are provided, but the number of holding rollers is not limited to three and may be four, for example. Further, in each of the above-described embodiments, the lower holding roller is rotated by the first electric motor. However, like the upper holding roller, for example, the lower holding roller may be rotatably supported via the bearing. You may In this case, as shown in FIG. 4, since the polishing tool 44 is provided at a position eccentric with respect to the rotation center of the work W, the inner peripheral side and the outer peripheral side of the contact surface of the work W are Due to the relative speed difference of the work W, the work W itself is naturally rotated.

Further, in the above-mentioned embodiment, the working liquid is sprayed onto the work by the spray nozzle 65. However, for example, a working liquid supply hole is formed inside the rotary shaft body 43, and the rotary shaft body 43 is used to polish the work liquid. The working fluid may be supplied to the 44 side.

[0036]

As described above, according to the structure of the present invention, since the materials to be polished are held one by one and both surfaces thereof are polished by the polishing tool, a plurality of materials to be polished can be conventionally used. It is not necessary to manage each batch, and it is not necessary to position the supply and removal positions of the material to be polished, compared with the case where batch processing is performed at once, and the material to be polished is held by a holding roller. Therefore, you do not have to worry about ringing with the polishing tool.

Further, since the holding roller for holding the material to be polished can be moved up and down by a predetermined distance, or because the holding roller or the polishing tool is eccentric with respect to each rotation axis, the processing locus of the material to be polished is obtained. Is not monotonous, and therefore is prevented from being adversely affected by the habit of the polishing tool or the like, so that the processing flatness is improved.

[Brief description of drawings]

FIG. 1 is an overall side view of a polishing apparatus according to a first embodiment of the present invention.

FIG. 2 is a view on arrow AA of FIG.

FIG. 3 is a front view of a main part of a lifting drive device of the polishing apparatus of the embodiment.

FIG. 4 is a front view of relevant parts for explaining a polishing operation in the embodiment.

FIG. 5 is a cross-sectional view of essential parts of a polishing apparatus in a second embodiment of the present invention.

FIG. 6 is a front view of relevant parts for explaining a polishing operation in the second embodiment.

[Explanation of symbols]

 W work 1 double-sided polishing device 2 horizontal support 3 holding part 4 polishing part 5 support frame 6 support 8 lift plate 9 lifting drive device 13 lower holding roller 17 upper holding roller 25 first electric motor 32 cam body 42 holding body 43 Rotating shaft 44 Polishing tool 47 Cylinder device for pressing 58 Second electric motor

Claims (2)

[Claims] 1. An outer peripheral portion of a disk-shaped material to be polished,
A holding roller for holding the outer peripheral edge of the disk-shaped material to be polished is supported by an elevating member provided on a support so as to be vertically movable at at least three locations and rotatably around a horizontal axis,
Rotating shafts that are movable toward and away from the material to be polished are disposed at both sides of the disk-shaped material to be polished rotatably held by each of the holding rollers via a holder. A polishing tool for polishing the front and back surfaces of the material to be polished is attached to the tip portion, and a rotary drive device for rotating the rotary shaft body is provided. A double-sided polishing apparatus, comprising: a pressing device for pressing with a predetermined biasing force, and an elevating drive device for elevating the elevating member. 2. An outer peripheral portion of a disk-shaped material to be polished,
A holding roller that holds the outer peripheral edge of the disk-shaped material to be polished is rotatably supported by at least three locations around a horizontal axis on a support, and is held rotatably by the holding rollers. A rotary shaft that is movable toward and away from the material to be polished is placed on both sides of the material to be polished via a holder, and the front and back surfaces of the material to be polished are polished at the tip of this rotary shaft. A tool is attached and a rotation drive device for rotating the rotary shaft is provided, and a pressing device for pressing both the polishing tools via the rotary shaft to the front and back surfaces of the material to be polished with a predetermined biasing force. A double-sided polishing apparatus, characterized in that the holding roller or the polishing tool is provided at a position eccentric with respect to each rotation axis.