JPH06170729A - Double side polishing device - Google Patents

Abstract

PURPOSE:To dispense with positioning for supply and taking-out of a work by holding the outer peripheral edge of a disk-like material to be polished at plural points by a holding roller capable of being rotated around a horizontal shaft, and by pressing polishing tools attached to rotary shaft tips onto the front and back surfaces of the material to be polished from both sides thereof in a polishing device of a substrate for a hard disk, etc. CONSTITUTION:A pair of holding rollers 14, 19 are provided rotatably on a box-like frame body 11 at three points around a horizontal shaft, so as to support the outer peripheral edge of a disk-like work. The work is rotated by the rotation of the holding rollers 14, 19. Rotary shaft bodies 34 capable of being in contact with and separated from the work are arranged on the both side portions of the work through holding cylinders 32, and polishing tools 35 are attached on the tips thereof. The polishing tools 35 press the front and the back of the work with a fixed energization force by means of pressing cylinders 38, and the polishing tools 35 are rotated by the rotation of the rotary shaft bodies 34, thereby the front and back surfaces of the rotating work are polished.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a double-side polishing apparatus for polishing both sides of a thin disk-shaped work such as a hard disk substrate.

[0002]

2. Description of the Related Art Conventionally, as a polishing apparatus for polishing both surfaces of a disk-shaped work of this type, a plurality of works are held in a large carrier, and a large-diameter polishing tool is arranged above and below the carrier. Then, the polishing tool and the carrier are rotated in a predetermined direction to simultaneously polish the front and back surfaces of a plurality of works.

[0003]

However, according to the polishing apparatus as described above, since a plurality of works are polished at one time, that is, the batch type processing, it is necessary to manage the polishing state for each batch. There was a problem that it occurred and was troublesome.

For example, when performing batch type polishing, it is necessary to always perform processing for each same batch over each process such as roughing and finishing. That is, in the batch type, the difference in the thickness of the work within the same batch is small and there is no problem, but since there is a difference in the thickness between different batches, the work to be processed in a certain process unless the thickness is controlled for each batch. And a workpiece that is not machined is generated, which affects the machined surface roughness and the machined surface flatness, increasing the number of defective products.

Further, in the above batch type polishing,
It is difficult to detect the supply position of the work and the position of the work after finishing, and the work and the polishing tool ring (contact) with the processing liquid, but it is troublesome to separate the ringed work from the polishing tool. there were.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a double-sided polishing apparatus which can solve the above problems.

[0007]

In order to solve the above problems, a double-sided polishing apparatus of the present invention is a holding roller for holding the outer peripheral edge of a disk-shaped material to be polished at the outer peripheral portion of the disk-shaped material to be polished. Is rotatably supported on a support at least at three locations and about a horizontal axis, and is placed on both sides of the disk-shaped material to be rotatably held by each of the holding rollers via a holding body. A rotary drive device is provided in which a rotary shaft body that is capable of approaching and separating from an abrasive is disposed, a polishing tool for polishing the front and back surfaces of a material to be polished is attached to the tip end of the rotary shaft, and the rotary shaft is rotated. Along with
A pressing device for pressing the above-described both polishing tools against the front and back surfaces of the material to be polished with a predetermined biasing force via the rotary shaft is provided.

[0008]

With the above construction, only one piece of the material to be polished is held by the holding roller, and the polishing tool is rotated by the rotary driving device and pressed against the material to be polished by the pressing device, so that both surfaces of the material to be polished are pressed. It can be simultaneously polished with a polishing tool. Therefore, compared to batch processing of a plurality of polishing materials at once, there is no need to manage each batch, and there is no need to position the supply and removal positions of the polishing material. Is held by the holding roller, so there is no concern about ringing with the polishing tool.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 1 to 3, reference numeral 1 denotes a thin circular substrate (hereinafter simply referred to as a work) A for a hard disk, for example.
It is a double-sided polishing device for polishing both sides, that is, the front and back surfaces.
A holding part 3 for the work W arranged in the central part of the workpiece W and a polishing part 4 arranged on the horizontal support bases 2 on both sides of the holding part 3.
It consists of and.

The holding portion 3 is rotatable via a box-shaped frame body (support body) 11 capable of accommodating the entire polished portion and a side wall portion 11a of the box-shaped frame body 11 via bearings 12, respectively. Of the two support shafts 13 and the groove portions 1 attached to the tip ends of the respective support shafts 13 and capable of holding the outer peripheral edge of the work W on the outer peripheral portions thereof.
As shown by an arrow a in FIG. 1, the lower holding roller 14 on which the 4a is formed and the one side wall portion 11a of the box-shaped frame body 11 are swingable in a vertical plane via a mounting pin 15. A support arm 18 supported by the rocking cylinder device 17 supported on the side of the box-shaped frame 11 via a support bracket 16 and a bearing (not shown) at one end of the support arm 18. ), And an upper holding roller 19 having a groove portion 19a capable of holding the outer peripheral edge of the work W formed on the outer peripheral portion thereof. Figure 4
As shown in FIG. 5, they are arranged at a predetermined interval in the same vertical plane.

Each of the holding rollers 14 and 19 is made of synthetic resin, and two lower holding rollers 14 are provided.
About, it is designed to be rotated. That is, the driven pulley 21 is attached to the other end of each lower holding roller 14, both driven pulleys 21 are interlockingly connected by the connecting belt 22, and one driven pulley 21 is driven by the drive belt. First to rotate the drive pulley 24 that is interlockingly connected via 23
The electric motor 25 is arranged at a predetermined position on the horizontal support base 2.

Therefore, by driving the first electric motor 24, both lower holding rollers 14 can be rotated at a predetermined speed. Next, the left and right polishing sections 4 will be described. The main configuration of the left and right is the same, and the difference is that there is only one rotary drive source. Therefore, in this embodiment, The description will be made focusing on the polishing section 4A on the left side.

That is, the polishing section 4A is the box-shaped frame 1
1. A holding cylinder body (holding body) 32 supported on a horizontal support base 2 on the left side of 1 through a support bracket 31, a rotating cylinder body 33 rotatably arranged in the holding cylinder body 32, and a rotation cylinder body 33. A rotary shaft body 34 inserted through the serration portion in the cylindrical body 33, that is, slidably and also capable of transmitting rotation, and one end portion of the rotary shaft body 34 in the box-shaped frame body 11. Polishing tool 35 attached to the horizontal support base 2
Is supported via a support bracket 36 and the other end of the rotary shaft 34 is pressed via a connecting member 37 to polish the polishing tool 3
It is composed of a pressing cylinder device (pressing device) 38 for pressing 5 onto the surface of the work W, and a rotation drive unit for rotating the rotary cylinder 33.

As described above, this rotary drive unit is designed to drive both side polishing units 4A and 4B at the same time.
That is, the transmission shaft 41 is rotatably supported on the horizontal support base 2 in parallel with the rotation axis of the polishing tool 35, and both ends of the conduction shaft 41 are attached to the ends of the rotary cylinders 33. The driven intermediate pulley 44, which is linked to the driven pulley 42 via the connecting belt 43, is attached to the driven pulley 42.
A drive intermediate pulley 45 is attached midway to one end of the transmission shaft body 41, and a drive pulley 47 linked to the drive intermediate pulley 45 via a drive belt 46 is rotated. A second electric motor (rotary driving device) 48 is arranged on the horizontal support base 2.

The polishing section 4 is also provided with a control device 51 for controlling the amount of movement of the rotary shaft body 34. That is, as shown in FIG. 1, the control device 51 includes a positioning bolt 52 attached to a connecting member 37 that connects the rotating shaft body 34 and the pressing cylinder device 38.
And a rod portion 53 for withdrawal, which is attached to the holding cylinder 32 side and is capable of contacting the tip of the positioning bolt 52.
and a positioning cylinder device (also referred to as a knock cylinder) 53 having a.

Further, one side wall portion 11 of the box-shaped frame body 11
As shown in FIG. 4, a spray nozzle 61 for spraying the working liquid onto the workpiece W being polished is provided in a. An air cylinder, for example, is used as each of the cylinder devices 17, 38, 53.

Next, the work of polishing the work W will be described. First, the swing cylinder device 17 swings the upper holding roller 19 upward so that the work W is supported by the lower holding roller 14, and then the upper holding roller 19 is lowered to lower the three holding rollers 14. , 19 accurately guides and holds the grooves 14a, 19a of the rollers 14, 19 respectively.

Next, by the pressing cylinder device 38,
The rotating shafts 34 on both sides are moved to the work W side. During this movement, the rotary shaft body 34 moves forward until the positioning bolt 52 comes into contact with the retracting rod portion 53a of the positioning cylinder device 53.

Then, the positioning bolt 52 contacts the projecting / retracting rod portion 53a to stop the forward movement of the rotary shaft 34. In this state, the polishing tool 35 has a predetermined clearance with respect to both surfaces of the work W. Is held.

In this state, the machining liquid is sprayed from the spray nozzle 61 toward the work W, and the electric motors 2
5 and 48 are driven to rotate the polishing tools 35 on both sides in the same direction via the lower holding roller 14 and the rotary shaft 34, and the retracting rod portion 53a of the positioning cylinder device 53 is pulled in little by little. By pressing the polishing tool 35 on both sides of the work W with equal pressing force, both sides of the work W are softly polished.

The pulling-in control of the withdrawal rod portion 53a is performed by bleeding the air in the cylinder body, and the precise control of the flow rate of the bleeding air is performed by the polishing tool on both sides of the work W. The pressing force of 35 can always be made equal.

As described above, since the workpieces W to be polished are held one by one and both surfaces thereof are polished by the polishing tool, compared to the conventional one in which a plurality of workpieces are batch processed at one time. Therefore, there is no need to manage the work for each batch, there is no need to position the supply and take-out positions of the work, and since the work is held by the holding roller, there is no concern about ringing with the polishing tool. .

By the way, in the above embodiment, three holding rollers for holding the work are provided, but the number is not limited to three, and for example, four holding rollers may be provided. In the above embodiment, the lower holding roller is rotated by the first electric motor. However, like the upper holding roller, the lower holding roller is simply rotatably supported by the bearing. May be. In this case, as shown in FIG.
Since 5 is provided at an eccentric position, due to the relative speed difference between the inner peripheral side and the outer peripheral side on the contact surface of the work W,
The work W itself is naturally rotated.

Further, in the above-described embodiment, the working liquid is sprayed onto the work by the spray nozzle. For example, a working liquid supply hole is formed inside the rotary shaft 34, and the rotary shaft 34 is grounded to the polishing tool 35. You may make it supply a working liquid to it.

[0025]

As described above, according to the structure of the present invention, since the materials to be polished are held one by one and both surfaces thereof are polished by the polishing tool, a plurality of materials to be polished can be conventionally used. It is not necessary to manage each batch, and it is not necessary to position the supply and removal positions of the material to be polished, compared with the case where batch processing is performed at once, and the material to be polished is held by a holding roller. Therefore, you do not have to worry about ringing with the polishing tool.

[Brief description of drawings]

FIG. 1 is an overall side view of a polishing apparatus according to an embodiment of the present invention.

FIG. 2 is an overall plan view of a partially cutaway polishing apparatus according to the embodiment.

FIG. 3 is a view taken in the direction of arrows CC in FIG.

FIG. 4 is a front view of relevant parts for explaining a polishing operation in the embodiment.

[Explanation of symbols]

 W Work 1 Polishing device 2 Horizontal support 3 Holding part 4 Polishing part 11 Box frame 14 Lower holding roller 19 Upper holding roller 25 1st electric motor 32 Holding cylinder 33 Rotating cylinder 34 Rotating shaft 35 Polishing tool 38 Pressing Cylinder device 48 Second electric motor 51 Control device

Claims (1)

[Claims] 1. An outer peripheral portion of a disk-shaped material to be polished,
A holding roller that holds the outer peripheral edge of the disk-shaped material to be polished is rotatably supported by at least three locations around a horizontal axis on a support, and is held rotatably by the holding rollers. A rotary shaft that is movable toward and away from the material to be polished is placed on both sides of the material to be polished via a holder, and the front and back surfaces of the material to be polished are polished at the tip of this rotary shaft. A pressing device for attaching a tool and providing a rotation drive device for rotating the rotary shaft body, and for pressing both the polishing tools through the rotary shaft body against the front and back surfaces of the material to be polished with a predetermined biasing force. A double-sided polishing device characterized by being provided with.