JPH0426206Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] This invention relates to a grindstone forming machine, and more specifically, the tip shape or This invention relates to an improvement of a grindstone forming machine used for truing and dressing (hereinafter referred to as dressing, etc.) of grindstone width accuracy.

[Conventional technology] With recent technological developments, semiconductors are also becoming smaller and thinner, and ultra-thin grindstones (with a thickness of approximately several μm to 0.5 mm) are being used to cut and groove semiconductor components. There is. This ultra-thin grindstone requires high processing accuracy and processing efficiency, and the precision of the tip shape of the grindstone is particularly important. Therefore, in order to reuse a whetstone that has been used to some extent, it is necessary to dress the processed surface of the whetstone.

[Problems to be solved by the invention] However, in the past, there was no dedicated grindstone forming machine for dressing this type of grindstone, and a general-purpose cylindrical grinder or tool grinder was used to dress the grindstone. I'm going. However, in such general-purpose tool grinders, etc., the thickness of the grinding wheel is
When the diameter is less than 0.5 mm, it is difficult to perform a satisfactory dressing.

Therefore, there is currently a need for the development of a dressing device or the like having a tip shape for an ultra-thin grindstone.

This idea was devised in view of the above circumstances, and in order to solve the above technical problems, it is possible to process a three-dimensional angle in order to correspond to the tip shape of the whetstone (width accuracy of the whetstone, precision of the uneven shape of the tip, etc.) The present invention aims to provide a grindstone forming machine equipped with a grindstone for use.

[Means for solving the problem] In other words, this invention consists of a work head that rotatably supports a grindstone to be processed around a horizontal axis, and a grindstone that rotatably supports a grindstone for processing around a horizontal axis. a first swivel base that supports the above-mentioned whetstone head so as to be rotatable about a vertical axis; a first traverse mechanism that controls horizontal linear movement of the first swivel base; Provided is a grindstone forming machine comprising: a second swivel base that rotatably supports the first traverse mechanism with the rotation center at , and a second traverse mechanism that controls horizontal linear movement of the second swivel base. It is something to do.

In this invention, the first and second traverse mechanisms are arbitrary as long as they move the first swivel table that supports the grinding wheel head or the second swivel table that supports the first traverse mechanism in the horizontal direction. For example, it may be a mechanism that manually or automatically converts rotational motion into linear motion, or a mechanism that only performs linear motion. In this case, it is preferable that the first traverse mechanism has a mechanism for converting rotational motion into linear motion, and that the drive source for the rotational motion is formed by intermittent rotation drive means.

The processing grindstone may have any shape as long as it can process a three-dimensional angle that maintains the uneven shape and width accuracy of the tip of the processing grindstone, but preferably, the end surface and It is preferable to use a cup-shaped grindstone with an enlarged opening having a dresser surface on the outer peripheral surface adjacent to this end surface.

In addition, the above-mentioned processing whetstone needs to be processed in a state where the forming process state can be recognized, but it is better to use a means for recognizing this with a microscope and a television camera that can be observed and projected on a monitor. is preferred.

[Effect] The above technical means works as follows.

After rotatably supporting the workpiece grindstone on the work head, the second swivel table is rotated to set the traverse direction of the first traverse mechanism, the second swivel table is fixed, and then the first swivel table is rotated. After rotating the table and setting the processing position of the processing grindstone and fixing the first turning table, the second traverse mechanism aligns the processing grindstone with the position of the workpiece grindstone, and then the first traverse By moving the processing grindstone using the mechanism, the tip shape of the grindstone to be processed is dressed to a predetermined accuracy.

[Example] An example of this invention will be described below based on the drawings.

FIG. 1 shows a front view of essential parts of a first embodiment of the grindstone forming machine of this invention, and FIG. 2 shows a plan view thereof.

The grindstone forming machine of this invention includes a work head 10 that supports a workpiece grindstone 11 rotatably about a horizontal axis, and a grindstone stand 22 on which a processing grindstone 20 is mounted rotatably about a horizontal axis. ,
A first swivel base 24 that supports this grindstone head 22 so as to be able to rotate about a vertical axis, a first traverse mechanism 30 that controls horizontal linear movement of this first swivel base 24, and a first traverse mechanism 30 that controls horizontal linear movement of this first swivel base 24. A second swivel base 26 that supports the traverse mechanism 30 in a horizontally pivotable manner.
and a second traverse mechanism 40 that controls the horizontal linear movement of the second swivel base 26.

The work head 10 is movable back and forth by a first workpiece grindstone support 14 connected to a drive motor 12 via a speed reducer 13 and a moving means 15 at a position facing the first workpiece grindstone support 14. It consists of a second workpiece grindstone support part 16 that is held, and both workpiece grindstone support parts 14,
16 holds the workpiece grindstone 11 in a vertical plane between them, and supports the workpiece grindstone 11 so that it can be rotated in this state. In this case, the moving means 15 includes a fixed bed 17 having a dovetail groove (not shown), and is slidably fitted into the dovetail groove of the fixed bed 17 and supports the second workpiece grindstone support portion 16. It is composed of a movable body 19 to which a rotatably supported centering shaft 18 is attached, and a mechanism (not shown) that converts the rotational motion of the handle 19a into linear motion. The structure is such that the movable body 19, that is, the second workpiece grindstone support portion 16 can be moved forward and backward.

The grindstone head 22 is formed into a block shape on which a processing grindstone 20 is rotatably mounted around a horizontal axis, and a processing drive motor 21 that controls the rotation of the processing grindstone 20 is mounted thereon. .
In this case, the machining side drive motor 21 is designed to rotate at a higher speed than the drive motor 12 of the work head 10 (specifically, the work head 10
The rotation speed of the drive motor 12 is 5 to 95 r.pm, while the rotation speed of the processing side drive motor 21 is 90 to 1700 r.pm.
pm). A first rotary shaft 25 erected in the first swivel base 24 is rotatably fitted into the recess 23 provided on the lower end surface of the grindstone head 22 via a bearing 25a. The grindstone head 22 is supported so as to be able to rotate within a horizontal plane (see FIGS. 3 and 4). Further, a flange portion 22a is protruded from the lower end of the whetstone head 22, and a fixing bolt 22c passing through a through hole 22b drilled in the flange portion 22a is loosely fitted into the first swivel head 24. By being screwed into the buried truncated conical piece 22d, the grindstone head 22 is connected to the first turning base 2.
It is now fixed at 4. This whetstone head 2
As shown in FIG. 5, the processing grindstone 20 attached to the grinding wheel 2 is a cup-shaped cup made of diamond abrasive grains with an enlarged opening and has dresser surfaces 20a and 20b formed on the end face and the outer circumferential face adjacent to this end face, respectively. It is formed using a grindstone.

As shown in FIG. 3, the first traverse mechanism 30 slidably supports the first swivel base 24 via a linear sliding bearing 31, and
A first sliding table 34 having a guide groove 33 that slidably guides a rectangular movable element 32 protruding from the lower surface of the first rotating table 24;
The movable element 3 is rotatably supported by the movable element 3.
The first screw is inserted into the screw hole 35 formed in the second
a step motor 37 which is an intermittent rotation driving means that controls the rotation of the first screw shaft 36;
The intermittent rotation of the step motor 37 is changed into linear motion, the first swivel table 24 is moved along the first sliding table 34, and the traverse width of the processing grindstone 20 can be adjusted arbitrarily. It is now configurable.

A second rotating shaft 27 is protruded from the second rotating base 26 that supports the first traverse mechanism 30 so as to be able to rotate in a horizontal plane.
is fitted into the recess 28 provided on the lower surface of the first sliding table 34 via a bearing 27a,
The first traverse mechanism 30 is supported so as to be rotatable in a horizontal plane. In this case, the first sliding table 3
A flange portion 34a is protruded from the lower end of 4, and a through hole 3 formed in this flange portion 34a is provided.
A truncated cone-shaped piece 34d has a fixing bolt 34c penetrating through the second swivel base 26 and is loosely embedded in the second swivel base 26.
By being screwed together, the first sliding base 34 is fixed to the second swivel base 26.

Further, the second traverse mechanism 40 has a third
As shown in the figure and FIG. 4, the dovetail groove 43 provided on the lower surface of the second swivel table 26 can be slid on the dovetail guide protrusion 42 provided protrudingly on the second sliding table 41. At the same time, the rectangular mover 44 protruding from the lower surface of the second swivel base 26 is slidably fitted into the guide groove 45 provided on the second sliding base 41. The second sliding table 41 is rotatably supported on the second sliding table 41.
The screw shaft 46 is inserted into the screw hole 4 carved in the mover 44
7, and the second swivel base 26 can be moved in the horizontal direction by rotating an operating handle 48 attached to the second screw shaft 46.

In the grindstone forming machine of this invention constructed as described above, the turning angle of the grindstone head 22 supported by the first turning stand 24 is determined by the first traverse mechanism 30.
The rotation angle of the first traverse mechanism 30 supported by the second swivel table 26 is within ±60° with respect to the traverse direction of the first traverse mechanism 30.
The range is 90°, totaling 180°.

On the other hand, a zoom microscope 53 is attached via a bracket 52 to a support 51 erected on the upper side of the base 50 of the grindstone forming machine, and a television camera 54 is also attached. The grindstone processing portion is projected onto a monitor 55.

Next, the truing and dressing processes of the grindstone forming machine of this invention will be explained.

◎ Width precision machining of the workpiece grindstone FIG. 6 is an explanatory diagram showing one mode of width precision machining of the workpiece whetstone 11, in which one surface of the workpiece grindstone 11 is attached to the dresser surface 20b on the outer surface of the workpiece grindstone 20. This is the case when dressing etc. In this case, first,
The first traverse mechanism 30 is rotated 90 degrees with respect to the second swivel base 26, the second swivel base 26 is fixed,
Set the traverse direction. Next, the grindstone head 22 on the first turning base 24 is moved to the first traverse mechanism 30.
The first swivel base 24 is fixed by rotating by 45° (downward in the plan view) with respect to the traverse direction. After aligning the outer dresser surface 20b of the processing grindstone 20 with the workpiece grindstone 11 by the second traverse mechanism 40, the first traverse mechanism 3
The step motor 37 of No. 0 operates to move the grindstone 1 to be processed.
One side of 1 is subjected to dressing or the like.

To dress the other surface of the workpiece grindstone 11, after setting the traverse direction in the same manner as described above, turn the grindstone head 22 by 45° in the opposite direction to the traverse direction, that is, upward in the plan view. If the first rotating table 24 is fixed, the other surface of the grindstone 11 to be processed can be dressed (see FIG. 7).

◎ Machining of unevenness on the end face of the grindstone to be processed Figures 8 and 9 are explanatory diagrams showing one aspect of the unevenness processing of the end face of the grindstone to be processed 11, in which both sides of the end face on the tip side of the grindstone to be processed 11 are set at a constant angle (45°). This is the case when dressing etc. In this case, first, the first traverse mechanism 30 is moved to the second swivel base 26.
Turn by 135°, fix the second swivel base 26, and set the traverse direction. Next, the first swivel base 24
The upper whetstone head 22 is rotated by 90 degrees with respect to the traverse direction of the first traverse mechanism 30, and the first turning table 24 is fixed. After the second traverse mechanism 40 aligns the end dresser surface 20a (hereinafter referred to as end dresser surface) of the processing grindstone 20 with the workpiece grindstone 11, the step motor 37 of the first traverse mechanism 30 When activated, one inclined surface of the grindstone 11 to be processed is dressed (see FIG. 8).

When dressing the other slope,
The traverse direction can be set by turning the first traverse mechanism 30 by 90 degrees with respect to the above-mentioned 135 degree turning position (see FIG. 9).

Incidentally, the end face unevenness machining of the grindstone 11 to be processed does not necessarily have to be performed using the end face dresser surface 20a of the processing grindstone 20, and dressing etc. can also be performed using the dresser surface 20b (outer dresser surface) on the outer surface of the processing grindstone 20. It is possible to do so (see Figure 10).

◎ Flattening of the end face of the grindstone to be processed FIG. 11 is an explanatory view showing one mode of flattening the end face of the grindstone to be processed 11, in which the end face of the grindstone for processing 20 is dressed with the end face dresser surface 20a of the grindstone for processing 20, etc. This is the case. In this case, first, the first traverse mechanism 30 is placed in a state parallel to the direction of the rotation axis of the work head 10, the second swivel table 26 is fixed, and the traverse direction is set. Next, the grindstone head 22 on the first swivel table 24 is rotated by 90 degrees with respect to the traverse direction of the first traverse mechanism 30, and the first swivel table 24 is fixed. Then, a second
After the end face dresser surface 20a of the processing grindstone 20 is aligned with the workpiece grindstone 11 by the traverse mechanism 40, the step motor 37 of the first traverse mechanism 30 is operated to dress the end face of the workpiece grindstone 11. .

◎ Width precision machining of multi-grinding wheels Figure 12 shows multiple grinding wheels (the drawing shows the case of two wheels)
This is an explanatory diagram showing one mode of width precision machining of a multi-grindstone having workpiece grindstones 11, 11, in which the width precision machining of each workpiece grindstone 11, 11 of the multi-grindstone is performed on the outer dresser surface 20b of the processing whetstone 20. This is the case when dressing etc. In this case, first, the first traverse mechanism 30 is rotated 90 degrees with respect to the second swivel base 26.
swivel, fix the second swivel base 26, and set the traverse direction. Next, the grindstone head 22 on the first swivel table 24 is rotated by 45° (downward in the plan view) with respect to the traverse direction of the first traverse mechanism 30, and the first swivel table 24 is fixed. Then, after the second traverse mechanism 40 aligns the outer dresser surface 20b of the processing grindstone 20 with the workpiece grindstone 11, the step motor 37 of the first traverse mechanism 30 is activated to move one side of the workpiece grindstone 11. The sloped surface is dressed.

[Effects of the invention] As explained above, according to the grindstone forming machine of this invention, the first traverse mechanism and the second Since the traverse mechanism is formed so as to be able to rotate at two positions, the following effects can be obtained.

1 The machining whetstone is double-swiveled and has a double traverse, allowing for three-dimensional angle adjustment, and one type of machining whetstone can be used to determine the width of the workpiece and to process the tip of the whetstone with high precision. be able to.

2. By using a cup-shaped grindstone as a processing grindstone, dressing of a multi-grindstone having a plurality of workpiece grindstones can be performed simultaneously.

3. Regardless of whether it is an ultra-thin whetstone or a wide whetstone, it is possible to improve the width accuracy of the whetstone and dress the tip with unevenness.

[Brief explanation of the drawing]

Figure 1 is a front view showing one mode of use of the grindstone forming machine of this invention, Figure 2 is its top view, and Figure 3 is the second
4 is a sectional view of FIG. 3, FIG. 5 is a perspective view of the processing grindstone of this invention, and FIGS. 6 to 12 are different views of the grindstone forming machine of this invention. It is an explanatory view showing a processing mode. Explanation of symbols, 10... Work head, 11... Processing grindstone, 20... Processing grindstone, 20a... End dresser surface, 20b... Outer dresser surface, 22...
...Whetstone head, 24...First swivel head, 26...Second
swivel base, 30...first traverse mechanism, 37
...Step motor (intermittent rotation drive means), 40
...Second traverse mechanism.

Claims (1)

[Scope of Claim for Utility Model Registration] (1) A work head that rotatably supports a workpiece grindstone around a horizontal axis; a grindstone stand that rotatably supports a processing grindstone about a horizontal axis; a first swivel base that rotatably supports the above-mentioned grindstone head about a vertical axis; a first traverse mechanism that controls horizontal linear movement of the first swivel base; A grindstone forming machine comprising: a second swivel base that rotatably supports a first traverse mechanism; and a second traverse mechanism that controls horizontal linear movement of the second swivel base. (2) The first traverse mechanism has a mechanism for converting rotational motion into linear motion, and the driving source for the rotational motion is formed by an intermittent rotational drive means. Grindstone forming machine. (3) The grindstone forming machine according to claim 1, wherein the processing grindstone is a cup-shaped grindstone with an enlarged opening having a dresser surface on an end face and an outer peripheral surface adjacent to the end face.