JP2001038588A - Method and device for grinding work - Google Patents

Abstract

PROBLEM TO BE SOLVED: To hardly wear the wheel surface of a grinding wheel, to eliminate a need to frequently exchange the grinding wheel, and to perform grinding of a part of the edge part of a work with machining shape precision maintained. SOLUTION: A work 23 formed of a circular sheet is rotated around its center serving as an axis L1. Disc-form rotary grinding wheels 27 and 28 are fed in a space between two surfaces of a surface and a back along the outer peripheral edge part 23a of the work 23 as the grinding wheels are rotated centering around an axis L3 extending in a direction approximately paralleling the plane of the work 23 and crossing the radial direction of the work. This constitution grinds the outer peripheral edge part 23a of the work 23 by the outer peripheral surfaces of the rotary grinding wheels 27 and 28. In this case, the two grinding wheels 27 and 28 for a coarse grinding use and a finishing grinding use are provided as a disc-form rotary grinding wheel. It is desirable that coarse grinding and finish grinding are carried out on the same station.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for grinding a peripheral edge of a work made of a circular thin plate such as a semiconductor wafer.

[0002]

2. Description of the Related Art Conventionally, in the case of grinding a circular thin plate-shaped work of this type, a grinding method as shown in FIG. 11 has been employed, for example. That is, in this conventional method, the work 7
1 is rotated about its center as the axis L1, and the formed grindstone 72 is moved along the axis L parallel to the center axis L1 of the workpiece 71.
The workpiece 71 is fed and moved toward the outer peripheral edge 71a of the work 71 while being rotated about the center. Thus, the outer peripheral edge portion 71a of the workpiece 71 is ground at the concave grindstone surface 72a on the outer periphery of the formed grindstone 72.

[0003]

However, in this conventional work grinding method, the outer peripheral edge 71a of the work 71 is ground at one time by the concave grindstone surface 72a of the forming grindstone 72. The concave grindstone surface 72a of the formed grindstone 72 was easily worn and collapsed. For this reason, especially in the finishing processing, one form-shaped whetstone 72
The outer peripheral edge portion 7 of a large number of workpieces 71
It is extremely difficult to keep the machining shape accuracy of 1a constant, and it is necessary to frequently replace the forming grindstone 72,
There was a problem in processing accuracy and processing cost.

The present invention has been made by paying attention to such problems existing in the conventional technology. An object of the present invention is to provide a work grinding method and a work grinding apparatus which can grind an outer peripheral edge portion of a work while maintaining a constant machining shape accuracy and do not need to frequently change a grindstone. is there.

[0005]

Means for Solving the Problems and Effects of the Invention In order to achieve the above object, the present invention relates to a method of grinding a work.
In the invention described in (1), while rotating a work made of a circular thin plate around its center as an axis, and rotating a disc-shaped rotary grindstone around an axis substantially parallel to the plane of the work, the front and back along the edge of the work The edge portion of the work is ground on the outer peripheral surface of the rotating grindstone by relatively moving between both surfaces.

Here, the rotating grindstone includes a pad, and the grinding includes polishing. The following is also used as a similar term. Therefore, as compared with the conventional grinding method in which the edge portion of the work is ground using the general-purpose grindstone, the grindstone surface of the grindstone is less likely to lose its shape, and it is not necessary to frequently replace the grindstone. Further, since the whetstone surface of the whetstone is hardly deformed, it is possible to maintain the edge portion of the work to be accurately ground into a predetermined processing shape. For this reason, it is not necessary to frequently replace the rotating grindstone, and the grinding can be performed at low cost.

Further, by controlling the relative feed of the work and the rotary grindstone, the edge of the work can be finished to an arbitrary shape with the same grindstone. According to a second aspect of the present invention, in the method for grinding a workpiece according to the first aspect, the axis of the rotating grindstone is disposed so as to intersect the radial direction of the workpiece. Therefore, the work relatively moves in the width direction to the outer peripheral surface of the rotating grindstone, and the entire width of the outer peripheral grindstone surface of the rotating grindstone is effectively used to uniformly and effectively grind the edge portion of the work. be able to.

According to a third aspect of the present invention, in the method for grinding a workpiece according to the first or second aspect, the grinding includes rough grinding and finish grinding. Therefore, the grinding of the edge portion of the work can be performed efficiently and with high precision separately from the rough grinding and the finish grinding, and the high precision and low cost processing described above can be performed in both the rough grinding and the finish grinding. Will be possible.

According to a fourth aspect of the present invention, in the method for grinding a workpiece according to the third aspect, the rough grinding and the finish grinding are performed in the same station. Therefore, it is not necessary to transport the work to another station, and it is possible to continuously perform the rough grinding and the finish grinding on the edge portion in a state where the work is arranged at the same station, thereby improving the work efficiency. . Further, there is no need to provide both processing stations for rough grinding and finish grinding, and the configuration of the apparatus can be simplified.

According to a fifth aspect of the present invention, in the method of grinding a workpiece according to the third or fourth aspect, at least a rotary grindstone for finishing is formed by fixing silicon dioxide into fixed abrasive grains. Things.

Therefore, the edge of the work can be ground with a high ground surface roughness by the chemical action of the reducing action of silicon dioxide. According to a sixth aspect of the present invention, in the work grinding method according to any one of the third to fifth aspects, as a final finish, the disk-shaped polishing pad is applied to the workpiece while rotating, and the polishing pad and the workpiece are rotated. In the meantime, the process is performed while supplying a slurry in which abrasive grains are mixed into a dispersion liquid.

Therefore, a relatively soft polishing pad is used, and the ground portion can be constantly cooled by the slurry, so that the roughness of the ground surface of the edge portion of the work can be further increased.

According to the seventh aspect of the present invention, the first to sixth aspects are provided.
In the method for grinding a workpiece according to any one of the above, the outer peripheral edge portion is ground. Therefore, the above-described effects of claims 1 to 6 can be obtained in grinding the outer peripheral edge portion.

According to an eighth aspect of the present invention, in the method for grinding a work according to the seventh aspect, the rotary grinding wheel for cylindrical grinding is parallel to a center axis of the workpiece in a process prior to grinding with the disk-shaped rotary grinding wheel. It is characterized in that the work is rotated about an axis and the edge of the work is roughly removed by cylindrical grinding.

[0015] Therefore, the cylindrical grinding which can secure a large amount of grinding per unit time in the preceding process is employed, so that the grinding can be performed efficiently. Moreover, since the cylindrical grinding is rough, even if the shape of the outer peripheral surface of the rotary grinding wheel for cylindrical grinding is slightly deformed, there is almost no problem in accuracy.

According to the ninth aspect of the present invention, the work made of a circular thin plate is rotated about the center thereof, and the rotary grindstone for cylindrical grinding is rotated about an axis parallel to the center axis of the work. The edge part is roughened by cylindrical grinding, and then the disc-shaped rotary grindstone is rotated around an axis that is almost parallel to the plane of the work and extends in a direction that intersects the radial direction of the work. The edge portion of the workpiece is ground on the outer peripheral surface of the disk-shaped rotary grindstone by moving the front and rear surfaces along the relative feed.

Accordingly, by roughing the edge of the work in advance in the previous process, the subsequent grinding of the edge of the work can be performed efficiently. In addition, the grinding wheel surface of the disk-shaped rotating grindstone is less likely to be worn, so that the rotating grindstone does not need to be replaced frequently, and the edge portion of the work can be accurately ground to a fixed processing shape.

According to a tenth aspect of the present invention, in the method for grinding a workpiece according to the ninth aspect, the disc-shaped rotary grindstone has at least two grindstones for rough grinding and finish grinding. It is characterized by performing rough grinding and finish grinding after roughing.

Therefore, the grinding of the edge portion of the work can be performed efficiently and with high precision separately from the rough grinding and the finish grinding, and the configuration of the apparatus can be simplified and reduced in size by also using the processing station. it can.

[0020] According to the eleventh aspect of the present invention, in the first aspect,
6. The method for grinding a work according to any one of the above 6, wherein the inner peripheral edge of the work having a circular hole formed at the center is ground.

Therefore, the above-described effects of the first to sixth aspects can be obtained in grinding the inner peripheral edge portion. Further, in the invention according to claim 12 relating to a work grinding apparatus, a work holding means for holding a work made of a circular thin plate and rotating the work around its own axis,
It has a disk-shaped rotating grindstone, and while rotating the rotating grindstone around an axis substantially parallel to the plane of the work, it relatively moves between the front and back surfaces along the edge of the work to move the edge of the work. And grinding means for performing grinding.

Therefore, as described above, the whetstone surface of the whetstone is hard to be worn, so that the whetstone does not need to be replaced frequently, and the outer peripheral edge or the inner peripheral edge of the work is accurately formed into a predetermined processing shape. An apparatus capable of grinding can be realized.

Further, the edge of the work can be finished to an arbitrary shape with the same grindstone by controlling the relative feed of the work and the rotary grindstone.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. As shown in FIGS. 1 to 3, a column 22 is erected on a bed 21 of the grinding apparatus, and the column 22 serves as a work holding means for holding a work 23 made of a circular thin plate such as a semiconductor wafer. A work holding mechanism 24 is provided. A grinding mechanism 25 as a grinding means is provided on the bed 21 corresponding to the work holding mechanism 24. The grinding mechanism 25 includes a rotary grindstone 26 for cylindrical grinding for roughing the outer peripheral edge portion 23a of the work 23, and two disc-shaped rotary grinders for rough grinding and finish grinding of the outer peripheral edge portion 23a of the work 23. Rotary whetstones 27 and 28 are provided.

In this embodiment, the finishing rotary grindstone 28 is obtained by solidifying particles of silicon dioxide (SiO 2) with a bond and converting the silicon dioxide into fixed abrasive grains.

A loading station 29 is provided on the bed 21 on the left side of the grinding mechanism 25, and a cassette 30 containing a plurality of unprocessed works 23 is loaded into the loading station 29. Loading station 2
9, a first work robot 31 is mounted, and the first work robot 31 takes out the unprocessed works 23 one by one from the cassette 30 to form a work holding mechanism 2
Passed to 4.

An unloading station 32 is provided on the bed 21 on the right side of the grinding mechanism 25, and a cleaning mechanism 33 is provided below the unloading station 32. A second work robot 34 is provided at the rear of the unloading station 32, and the processed work 23 is received from the work holding mechanism 24 by the second work robot 34, passes through the cleaning mechanism 33, and is mounted on the unloading station 32. It is stored in the cassette 30.

Next, the structure of the work holding mechanism 24 will be described in detail. As shown in FIG. 3, a work head 37 is supported on the side surface of the column 22 via a guide rail 38 so as to be movable in the Z-axis direction (vertical direction). A rotary shaft 39 is rotatably supported on the work head 37 about an axis L1 extending in the Z-axis direction, and a suction cup 40 for sucking and holding the work 23 is provided at a lower end thereof.

A work rotating motor 41 is provided on the work head 37, and the motor 41
9 is rotated, and the work 23 sucked and held by the suction cup 40 is rotated.
Are rotated about the axis L1. A Z-axis moving motor 42 is provided on the column 22.
As a result, the ball screw 43 is rotated, and the work head 37 is moved in the Z-axis direction via the nut 44.

Next, the configuration of the grinding mechanism 25 will be described in detail. As shown in FIG. 2 and FIG.
1, a support table 47 is provided with a pair of guide rails 48.
Are provided so as to be movable in the X-axis direction (left-right direction) via the. A saddle 49 is supported on the support table 47 via a pair of guide rods 50 so as to be movable in the Y-axis direction (front-back direction).

An X-axis moving motor 5 is provided on the bed 21.
1, the ball screw 52 is rotated by the motor 51, and the support table 47 is
It is moved in the axial direction. A Y-axis moving motor 54 is provided at the rear of the support table 47, and the motor 54 rotates a ball screw 55 to move the saddle 49 in the Y-axis direction via a nut 56. X-axis moving motor 5
1, Y-axis moving motor 54 and Z-axis moving motor 42
Are controlled by NC, and automatic control is enabled based on the NC program.

At the upper left side of the support table 47, a first
A grindstone rotating motor 57 is provided, and the cylindrical grinding rotary grindstone 26 is attached to a motor shaft 58 protruding from the upper surface thereof. The cylindrical grinding rotary grindstone 26 is rotated by a first grindstone rotating motor 57 about an axis L2 parallel to the central axis L1 of the work 23.

A second grindstone rotating motor 59 is disposed on the saddle 49, and the disc-shaped rough grinding rotary grindstone 27 and finish grinding rotary grindstone 28 are provided on a motor shaft 60 projecting from the left side surface. It is installed at intervals.
The rough grindstone 27 and the finish grindstone 28 are rotated by a second grindstone motor 59 about an axis L3 parallel to the plane of the workpiece 23.

Next, a description will be given of a grinding method when the outer peripheral edge portion 23a of the work 23 is ground by using the grinding apparatus having the above-described configuration. In this work grinding method, as shown in FIG. 4, the outer peripheral edge 23a of the work 23 is ground in the same station in three steps. That is, first, as shown in FIG.
Of the outer peripheral edge portion 23a is roughened. Next, as shown in FIG. 4, the outer peripheral edge portion 23 a after roughing is roughly ground by a disk-shaped rough grinding wheel 27.
As shown in (c), the outer peripheral edge 23a after the rough grinding is finish-ground by the finishing rotary grindstone 28.

Therefore, the roughing step will first be described in detail. As shown in FIGS. 5A and 5B, in a state where the work 23 is sucked and held on the suction cup 40 of the work holding mechanism 24, the work 23 is moved by the Z-axis moving motor 42 to the rotating grindstone 26 for cylindrical grinding. It is moved and arranged at the corresponding height position. In this state, the work 23 is rotated around the axis L1 by the work rotation motor 41, and the cylindrical grinding rotary grindstone 26 is moved by the first grindstone rotation motor 57 to the axis L2 parallel to the central axis L1 of the work 23. Rotated around center. At the same time, the rotary grinding wheel 26 for cylindrical grinding
The workpiece 23 is fed and moved toward the outer peripheral edge 23 a of the workpiece 23 by the shaft moving motor 51. As a result, FIG.
As shown by a chain line in (a) and FIG.
Of the outer peripheral edge portion 23a is roughly removed by cylindrical grinding.

Subsequently, in the rough grinding step, FIG.
As shown in (b), while the work 23 is being suction-held by the suction cup 40, the rotary grinding wheel 27 for coarse grinding is moved to a position corresponding to the axis L1 of the work 23 by the motor 51 for X-axis movement. Be placed. In this state, the work 23
Is rotated by the work rotating motor 41,
The coarse grinding rotary grindstone 27 is rotated by the second grindstone rotating motor 59 about an axis L3 extending in a direction parallel to the plane of the work 23 and orthogonal to the radial direction of the work 23.

At the same time, the preset NC
The work 23 is driven by the Z-axis movement motor 4 based on the program.
2, the rough grinding rotary grindstone 27 is moved in the Y-axis direction by the Y-axis moving motor 54, and the rotary grindstone 27 is moved as shown in FIG. Is moved along the outer peripheral edge portion 23a of the work 23 so as to draw a predetermined movement locus between the front and back surfaces. As a result, as shown by a chain line in FIGS. 4B, 6B and 7, the outer peripheral edge portion 23 a of the work 23 is located at the same station as in the roughing step, and at the outer peripheral grindstone surface of the rotary grindstone 27. For example, rough grinding is performed so as to have a tapered shape having a circular arc tip.

Further, in the finish grinding step, FIG.
As shown in (a) and (b), the work 23 is
The X-axis movement motor 51
Accordingly, the finish grinding rotary grindstone 28 is moved and arranged at a position corresponding to the axis L1 of the work 23. In this state, the workpiece 23 is rotated by the workpiece rotation motor 41, and the finishing rotary grindstone 28 is rotated about the axis L3 by the second grinding wheel rotary motor 59.

At the same time, a preset NC
The work 23 is driven by the Z-axis movement motor 4 based on the program.
2, the finishing grindstone 28 is moved in the Y-axis direction by the Y-axis moving motor 54, and the rotating grindstone 28 is moved by the simultaneous two-axis control, as shown in FIG. The workpiece 23 is fed and moved along the outer peripheral edge 23a of the workpiece 23 between the front and back surfaces so as to draw a predetermined movement locus. As a result, as shown by chain lines in FIGS. 4C, 8B and 9, the outer peripheral edge 23 a of the work 23 is moved to the same station as the roughing step and the rough grinding step, and the outer peripheral edge 23 Finish grinding to a desired shape is performed on the grindstone surface.

In this case, as shown in FIG.
Has a crystal orientation 23b extending substantially in parallel with the front and back surfaces of the work 23, and different crystal plane angles appear at the outer peripheral edge 23a of the work 23. Therefore, in accordance with the angle of the crystal plane, the feed movement direction of the finish grinding rotary grindstone 28 with respect to the outer peripheral edge portion 23a of the work 23 and the rotation direction of the rotary grindstone 28 are changed, so that the grinding conditions are changed. It has become so.

Specifically, the outer peripheral edge portion 2 of the work 23
3a is not ground continuously between the front and back surfaces, but is separately ground on the front surface side and the rear surface side. That is, as shown in FIG. 9 (a), first, while the rotary wheel 28 for finish grinding is rotated in one direction, the work 2 is rotated.
3 is moved from the surface side of the outer peripheral edge portion 23a to the distal end side, and the surface side of the outer peripheral edge portion 23a is finish-ground. Thereafter, as shown in FIG. 9B, the rotating grindstone 28 is fed from the back side of the outer peripheral edge portion 23a to the tip side while rotating in the opposite direction, and the back surface side of the outer peripheral edge portion 23a is finish-ground. Is done.

Further, after the outer peripheral edge portion 23a of the work 23 is finish-ground as described above, the work 23 is conveyed from the grinding device to another station while being stored in the cassette 30. Then, in this another station, the final finishing of the outer peripheral edge portion 23a of the work 23 is performed using a disc-shaped polishing pad (not shown) and slurry. That is, a disk-shaped polishing pad is used in the same manner as the rotary grindstones 27 and 28, and the outer peripheral surface thereof is brought into contact with the outer peripheral surface of the work 23, and abrasive grains are mixed into the dispersion between the polishing pad and the work 23. And supply the adjusted slurry. By doing so, the edge portion 23a of the work 23 is super-finished by the abrasive grains in the slurry.

The effects that can be expected from the above embodiment will be described below. In the method of grinding a work according to the present embodiment, the work 23 made of a circular thin plate is rotated around the center thereof as the axis L1, and the disk-shaped rotary grindstones 27 and 28 are rotated about the axis L3 substantially parallel to the plane of the work 23. , And is relatively fed between the front and back surfaces along the outer peripheral edge portion 23a of the work 23. Thus, the outer peripheral edge 23a of the work 23 is ground on the outer peripheral grindstone surfaces of the rotary grindstones 27 and 28.

For this reason, as compared with the conventional grinding method in which the outer peripheral edge portion of the work is ground using the formed grindstone, the grindstone surfaces of the rotary grindstones 27 and 28 are hardly deformed, and the rotary grindstones 27 and 28 are not deformed. The need for frequent replacement of 28 is eliminated. Therefore, the material cost and the operation cost of the rotary grindstones 27 and 28 can be reduced, and as a result, the processing cost can be reduced. In addition, since the grindstone surfaces of the rotary grindstones 27 and 28 are not easily deformed, the outer peripheral edge portion 23a of the work 23 can be precisely ground into a predetermined processing shape.

Further, the edge portion 23a of the work 23 can be finished in an arbitrary shape by the same grindstone 27, 28 by the relative feed control of the work 23 and the rotary grindstones 27, 28.

In the work grinding method of this embodiment, the axis L 3 of the rotary grindstones 27 and 28 is arranged to be orthogonal to the radial direction of the work 23. For this reason, the rotation of the work 23 is performed so as to cross the outer peripheral surfaces of the rotary grindstones 27 and 28. In other words, the work 23 is
It will move relatively in the width direction of 7, 28. Therefore,
By effectively using the entire width of the outer peripheral grindstone surfaces of the rotary grindstones 27 and 28, the outer peripheral edge portion 23a of the work 23 can be uniformly and effectively ground.

In the work grinding method of the present embodiment, the rotary grindstone is composed of two grindstones 27 and 28 for rough grinding and finish grinding, and rough grinding and finish grinding are performed by these grindstones 27 and 28. It is supposed to do. For this reason, the outer peripheral edge portion 23a of the work 23 can be separated into rough grinding and finish grinding, and can be continuously and efficiently performed with high accuracy.

In the work grinding method of the present embodiment, the rough grinding and the finish grinding of the outer peripheral edge portion 23a of the work 23 are performed in the same station. Therefore, it is not necessary to transport the work 23 to another station or to change the work 23, and to continuously perform the rough grinding and the finish grinding on the outer peripheral edge portion 23a in a state where the work 23 is arranged at the same station. Thus, the work position accuracy can be maintained and the work efficiency can be improved. Further, it is not necessary to separately provide stations for rough grinding and finish grinding, so that the configuration of the grinding device can be simplified and the size can be reduced.

In the work grinding method of the present embodiment, a fixed abrasive of silicon dioxide is used as the finishing rotary grindstone 28. For this reason, the outer peripheral edge portion 23a of the work 23 can be ground with high finish ground surface roughness by the chemical action of the reducing action of silicon dioxide.

In the work grinding method of the present embodiment, the cylindrical grinding rotary grindstone 26 is centered on the axis L2 parallel to the center axis L1 of the work 23 in a process before grinding by the disk-shaped rotary grindstones 27 and 28. To work 23
Is roughened by cylindrical grinding. For this reason, by roughing the outer peripheral edge portion 23a of the work 23 in advance in the previous process, the subsequent outer peripheral edge portion 23a of the work 23 can be efficiently ground, and the efficiency of the entire operation can be increased. Can be planned. In addition, cylindrical grinding requires a large amount of grinding per unit time, so that roughing can be performed efficiently.
Even if the outer peripheral surface is slightly deformed, the machining accuracy is hardly affected, and frequent replacement of the grindstone is unnecessary.

In the work grinding method of this embodiment, after the outer peripheral edge portion 23a of the work 23 is roughly ground and finish ground using the rotary grindstones 27 and 28, the work is performed with a disc-shaped polishing pad at another station. The final finishing is performed using the slurry. For this reason, the flexibility of the polishing pad contributes to high-precision processing, and the slurry cools the processed portion of the work 23, so that the ground surface roughness of the outer peripheral edge portion 23a of the work 23 can be further increased, and the super-finishing is performed. Processing can be performed.

In the work grinding method of this embodiment, the finish grinding rotary grindstone 28 is rotated in one direction, and is moved from the surface side of the outer peripheral edge portion 23a of the work 23 to the distal end side to move the outer peripheral edge 23a. The surface side of the portion 23a is finish-ground, and then, while rotating the grindstone 28 in the other direction, the workpiece 23 is fed and moved from the back side of the outer peripheral edge portion 23a to the front end side, and the back side of the outer peripheral edge portion 23a is moved. Finish grinding is performed.

Therefore, the outer peripheral edge portion 23 of the work 23
The grinding conditions can be changed between the front side and the back side of the a in accordance with the angle of the crystal plane appearing in the outer peripheral edge portion 23a. Variations in degrees can be prevented.
Therefore, it is possible to grind the outer peripheral edge portion 23a of the work 23 with high uniformity with a uniform ground surface roughness.

(Modification) This embodiment can be modified and embodied as follows. In the grinding device of the embodiment, as shown in FIG. 10A, the second grindstone rotating motor 59 is supported on the saddle 49 by the support shaft 63 so as to be index-rotatable. The rough grinding rotary grindstone 27 and the finish grinding rotary grindstone 28 are attached to the protruding motor shaft 60.

In this configuration, when the second grindstone rotating motor 59 is rotated by an index, one of the rough grinding rotary grindstone 27 and the finish grinding rotary grindstone 28 corresponds to the axis L1 of the work 23. Placed in Then, in the corresponding arrangement state, the rough grinding and the finish grinding of the outer peripheral edge portion 23a of the work 23 can be sequentially performed at the same station.

In the grinding apparatus of the above embodiment, as shown in FIG. 10B, a disk-shaped rough grinding rotary grindstone 27 is attached to a motor shaft 60 projecting from the left side surface of the second grindstone rotation motor 59. The finish grindstone 28 and the polishing pad 64 are attached at predetermined intervals.

In the case of such a configuration, the rough grinding rotary grindstone 27 and the finish grinding rotary grindstone 28 are used.
After rough grinding and finish grinding of the outer peripheral edge portion 23a of the work 23, the final finishing of the outer peripheral edge portion 23a can be performed using the polishing pad 64 and the slurry at the same station as the grinding.

In the grinding device of the above embodiment, as shown in FIG. 10C, the second grindstone rotation motor 59 is supported on the saddle 49 by the support shaft 63 so as to be index-rotatable. The rough grinding rotary grindstone 2 is attached to the motor shaft 60 protruding from the left and right side surfaces and the rear surface of the motor 59.
7. Finishing grinding wheel 28 and polishing pad 6
Attach 4.

In this configuration, when the second grindstone rotating motor 59 is index-rotated, any one of the rough grindstone 27, the finish grindstone 28 and the polishing pad 64 is moved along the axis L1 of the work 23.
Is arranged at a position corresponding to. Then, in the corresponding arrangement state, rough grinding of the outer peripheral edge portion 23a of the work 23 is performed.
Finish grinding and final finishing can be performed sequentially at the same station.

In the grinding apparatus of the above-described embodiment, as the rotary grindstone 27 for rough grinding, similarly to the rotary grindstone 28 for finish grinding, a fixed abrasive of silicon dioxide is used.

Use of normally used silicon carbide or the like as fixed abrasive grains of the rotary grinding stone 28 for finish grinding. In the grinding apparatus of the above embodiment, the rough grinding of the outer peripheral edge portion 23a of the work 23 by the rough grinding rotary grindstone 27 is also performed in the same manner as the finish grinding shown in FIG. And do it separately.

In the grinding apparatus of the above embodiment, a rough grinding wheel is used as the rotary grinding wheel 26 for roughing. A moving mechanism in the Z-axis direction is provided on the grindstones 27 and 28, and the outer peripheral edge 23a of the work 23 is ground by the feed movement in the Z-axis direction and the Y-axis direction on the grindstones 27 and 28 without moving the work 23. thing. Alternatively, the work 23 can be moved in the X-axis direction and the Y-axis direction,
28 side should be movable in the Z-axis direction.

As shown in FIG. 12, a circular hole 2 is provided at the center.
The workpiece having 3c is defined as a workpiece 23 and an outer peripheral edge portion 23
In addition, grinding the peripheral edge of the circular hole 23c, that is, the inner peripheral edge portion 23d. That is, the work 23 is sucked by the suction cup 40 having the space 40a in the center, and the smaller grinding wheel 27 or the finishing grinding wheel 28 is placed on the front and back of the work 23 in the same manner as the above-described grinding of the outer peripheral edge portion 23a. The inner peripheral edge portion 23d can be ground by moving the two surfaces relative to each other. In this case, the outer peripheral edge portion 23a and the inner peripheral edge portion 23d of the work 23 can be continuously ground using the same grindstone at the same processing station, so that the apparatus configuration becomes compact and the processing shape accuracy is improved. Can be improved.

Further, technical ideas other than the claims grasped by the above embodiment will be described below together with their effects. In the method of grinding a work according to any one of claims 1 to 9, the rotary grindstone is rotated in one direction, and is fed from the surface side of the edge portion of the work to the tip side to move the surface side of the edge portion. A method of grinding a workpiece, wherein the workpiece is fed from the back side of the edge portion of the work to the tip side while the rotating grindstone is rotated in the other direction, and then the back side of the edge portion is ground.

According to this grinding method, the grinding conditions can be changed between the front side and the back side of the edge portion of the work in accordance with the angle of the crystal plane appearing at the edge portion. Variations in the roughness of the ground surface can be prevented from occurring with the back surface side. Therefore, the edge portion of the work can be ground with high uniformity at a uniform ground surface roughness.

[Brief description of the drawings]

FIG. 1 is a partially broken plan view showing an embodiment of a grinding device.

FIG. 2 is an enlarged plan view of a main part of the grinding device of FIG. 1;

FIG. 3 is an enlarged sectional view of a main part of the grinding device of FIG. 1;

FIG. 4 is an explanatory view showing a method of grinding an outer peripheral edge portion in a process order.

FIG. 5 is a front view and a plan view showing a roughing step.

FIG. 6 is a front view and a plan view showing a rough grinding step in the same manner.

FIG. 7 is an enlarged side view showing the rough grinding step of FIG. 6;

FIG. 8 is a front view and a plan view showing a finish grinding step in the same manner.

FIG. 9 is an enlarged partial side view showing the finish grinding step of FIG. 8;

FIG. 10 is a plan view showing another embodiment of the grindstone head.

FIG. 11 is an explanatory view showing a conventional work grinding method.

FIG. 12 is a sectional view showing a modification.

[Explanation of symbols]

23 ... Work, 23a ... Outer edge, 23c ... Circular hole, 23d ... Inner edge, 24 ... Work holding mechanism as work holding means, 25 ... Grinding mechanism as grinding means, 26 ... Rotary grindstone for cylindrical grinding, 27: Disk-shaped rotary grinding wheel for rough grinding, 28: Disk-shaped rotary grinding wheel for finish grinding, 3
7 work head, 40 suction cup, 41 work rotation motor, 42 Z-axis movement motor, 47 support table,
49: saddle, 51: motor for moving the X axis, 54: motor for moving the Y axis, 57: motor for rotating the first grindstone, 59: second
Whetstone rotating motor, L1: central axis of the workpiece, L2: axis parallel to the central axis of the workpiece, L3: axis parallel to the plane of the workpiece.

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Muneaki Kaga 100 Fukuno-cho, Higashi-Tonami-gun, Toyama Prefecture Inside the Toyama Plant, Hihira Toyama (72) Michihiro Takada 100 Fukuno-cho, Higashi Tonami-gun, Toyama Toyama Toyama, Inc In-plant (72) Inventor Toyohisa Wada 1 Shinmeicho, Yokosuka-shi, Kanagawa F-term in Niihira Toyama Technical Center Co., Ltd. AA07 AA11 AA16 AA18 AB03 AB06 AC04 BB02 BB06 BC02 CB01

Claims (12)

[Claims] 1. A work made of a circular thin plate is rotated about its center as an axis, and a disk-shaped rotary grindstone is rotated about an axis substantially parallel to a plane of the work, while the front and back surfaces are aligned along the edge of the work. A grinding method for a workpiece, characterized in that an edge portion of the workpiece is ground on an outer peripheral surface of a rotating grindstone by moving the workpiece relative to each other. 2. The method for grinding a workpiece according to claim 1, wherein an axis of the rotating grindstone is arranged to intersect a radial direction of the workpiece. 3. The method for grinding a work according to claim 1, wherein the grinding includes rough grinding and finish grinding. 4. The method for grinding a work according to claim 3, wherein the rough grinding and the finish grinding are performed in the same station. 5. The method for grinding a work according to claim 3 or 4, wherein at least the finishing grindstone includes:
A work grinding method characterized by using a fixed abrasive of silicon dioxide. 6. The method for grinding a work according to claim 3, wherein the final polishing is performed by rotating a disk-shaped polishing pad against the work, and dispersing the polishing pad between the polishing pad and the work. A grinding method for a workpiece, wherein the method is performed while supplying a slurry in which abrasive grains are mixed in a liquid. 7. A method for grinding a workpiece according to claim 1, wherein an outer peripheral edge portion is ground. 8. The method for grinding a work according to claim 7, wherein in a pre-process of grinding with the disk-shaped rotary grindstone, the rotary grindstone for cylindrical grinding is rotated about an axis parallel to a central axis of the work. A work grinding method characterized by roughing the edge of the work by cylindrical grinding. 9. A work made of a circular thin plate is rotated about its center as an axis, and a rotary grindstone for cylindrical grinding is rotated about an axis parallel to the center axis of the work, and the edge of the work is cylindrically ground. Roughing, and then rotating the disc-shaped rotary grindstone around an axis that is almost parallel to the plane of the work and that extends in a direction that intersects the radial direction of the work, while moving the front and back surfaces relative to each other along the edge of the work A work grinding method characterized in that an edge portion of a work is ground on an outer peripheral surface of the disc-shaped rotary grindstone by feeding and moving. 10. The method for grinding a workpiece according to claim 9, wherein the disc-shaped rotary grindstone has at least two grindstones for rough grinding and finish grinding, and after the roughing, rough grinding is performed. Grinding method for workpieces characterized by performing finish grinding. 11. The method for grinding a work according to claim 1, wherein an inner peripheral edge of the work having a circular hole formed at the center is ground. 12. A work holding means for holding a work made of a circular thin plate and rotating the work about its own axis, and a disk-shaped rotating grindstone, wherein the rotating grindstone is substantially parallel to the plane of the work. A grinding apparatus for grinding a workpiece, comprising: grinding means for grinding the edge of the workpiece by relatively moving between the front and back surfaces along the edge of the workpiece while rotating about the axis.