JP3192963B2 - Polishing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing apparatus used for polishing a metal flat object to be polished.

[0002]

2. Description of the Related Art Conventionally, as a polishing apparatus of this type, FIG.
As shown in FIG. 10, there is one in which a polishing tool 83 is attached to the tip of a rotating shaft 82 held in a main body 81. The main body 81 is provided with a motor 84 for rotatingly driving the rotating shaft 82. A polishing material or a polishing pad is affixed to a tip surface of the polishing tool 83.

According to this, by driving the motor 84, the rotating shaft 82 rotates and the polishing tool 83 rotates. Then, the operator holds the main body 81 and holds the polishing tool 83
Is pressed against the upper surface of the object to be polished 85, and the main body 81 is rotated about the center point A as shown in FIG. I was

[0004]

However, in the above-mentioned conventional type, since the operator manually revolves the polishing tool 83, there is a problem that polishing accuracy is low and labor is required.

[0005] In view of the above, the first aspect of the present invention aims at achieving high precision polishing and reducing labor by rotating a polishing tool while rotating it mechanically. is there.

[0006]

In order to achieve the above-mentioned object, the invention according to claim 1 of the present invention is arranged such that the support is set above the support for supporting an object to be polished. A polishing tool is provided which is pressed against the upper surface of the object to be polished and polishes the object to be polished. The polishing tool is provided at the lower end of a rotating shaft which is rotatable around a first vertical axis and holds the rotating shaft. A rotating mechanism for rotating the rotating shaft on a holder that can be moved up and down with respect to the support, a rotating drive for rotating the rotating mechanism, and a rotating shaft parallel to the first vertical axis. A revolving mechanism for revolving around a second vertical axis, and a revolving drive device for rotating the revolving mechanism are provided . The polishing tool is mounted below the rotating shaft via a universal joint.
At the end, the universal joint is a
Between the annular body provided at the lower end of the rotating shaft
A pair of first connecting pieces positioned on the outer periphery of the annular body,
Provided on the polishing tool side and located on the outer periphery of the annular body
The pair of second connecting pieces, the annular body and each of the first connecting pieces are
A first connecting pin, an annular body and each second connecting piece
And a second connecting pin for rotatably connecting
The first connecting pieces and the first connecting pins are connected to the first vertical axis.
The two second connection members are disposed on a first horizontal axis orthogonal to each other.
The piece and the second connecting pin are connected to the first vertical axis and the first horizontal
It is arranged on a second horizontal axis perpendicular to the axis .

According to this, the polishing tool is rotated about the first vertical axis together with the rotation axis by operating the rotation driving device to rotate the rotation mechanism.
By operating the revolving drive device to rotate the revolving mechanism, the polishing tool is revolved about the second vertical axis together with the rotating shaft. Then, by lowering the holder and pressing the polishing tool against the upper surface of the object to be polished set on the support portion, the polishing tool revolves while rotating and polishes the object to be polished.

As described above, the object to be polished can be polished by rotating the polishing tool while revolving mechanically, so that high-precision polishing can be performed, and the labor of the operator can be reduced. .

In addition, during polishing, the polishing tool and the workpiece are
If foreign matter intervenes in the middle, the polishing tool
Rock about a horizontal axis or a second horizontal axis
By the above, the foreign matter is between the polishing tool and the object to be polished.
Easily eliminated. Also, the upper surface of the object to be polished is slightly inclined
Even when polishing, the polishing tool is
It is inclined following the inclination of the upper surface of the polished object. For this reason,
High-precision polishing is possible even if the upper surface of the polishing object is slightly inclined
I can do it.

Further, the invention according to claim 2 is a rotation mechanism.
Is rotated around the second vertical axis by the rotation driving device
Free rotation axis and sun tooth provided under this rotation axis
The car and the upper part of the rotating shaft mesh with the sun gear
And supplies the polishing liquid to the polishing tool.
Supply flow paths are formed in the rotation axis and the rotation axis, respectively.
And a lower rotary jaw provided at the lower end of the rotation shaft.
Rotary outlet provided at the outlet of the
And the inlet of the joint is connected by a connection hose.
Entrance of the upper rotary joint provided at the upper end of the
Is connected to a supply hose for supplying a polishing liquid .

According to this, the supply hose is connected to the upper rotor.
The polishing liquid supplied to the lead joint is supplied inside the rotation shaft.
Flow through the flow path and rotate the rotary shaft from the lower rotary joint.
Flow to the rotary joint, and the supply flow path in the rotating shaft
And supplied to the polishing tool. With this, polishing tools
When polishing the work with
Processing debris is removed by the polishing liquid to prevent clogging of the polishing tool and
Prevents foreign matter from entering between the polishing tool and the workpiece
it can. Also, the polishing liquid is placed inside the rotating shaft and inside the rotating shaft, respectively.
Of the polishing equipment
Can be

Furthermore, the invention of claim 3 is the lower end of the rotary shaft, the movable member being pressed in the downward direction is provided by the pressing force of the movable and and pressing means moves in the vertical direction, the
The movable body is provided with a mounting board via a universal joint, and is polished.
The tool is mounted on the mounting base so as to be eccentric with respect to the first vertical axis.
It is attached to a board .

According to this, when the upper surface of the object to be polished is being polished by the polishing tool, the polishing tool is pressed downward by the pressing force of the pressing means via the movable body. For this reason,
Even if there is a slight height difference on the upper surface of the object to be polished, the polishing tool moves up and down following the height difference on the upper surface of the object to be polished via the movable body. The polishing tool is pressed against the upper surface, so that the pressing force of the polishing tool against the workpiece can be kept substantially constant. Therefore, even when there is a height difference on the upper surface of the object to be polished, scratches and uneven polishing can be prevented, and highly accurate polishing can be performed. Further
Then, the polishing tool is decentered with respect to the first vertical axis,
Polishing eliminates unpolished parts
You.

[0014]

FIG. 1 is a block diagram showing an embodiment of the present invention.
This will be described with reference to FIG. As shown in FIGS. 2 and 3,
Reference numeral 1 denotes a support table 1 (an example of a support section) that supports a metal plate-like polishing object 2. Above the support table 1, three polishing tools 3 are provided which are pressed against the upper surface of the work 2 set on the support table 1 and polish the work 2. Each of these polishing tools 3 is provided at the lower end of three rotating shafts 5 that are rotatable around a first vertical axis 4, and these rotating shafts 5 are held by a holder 6.

The holding member 6 is formed in a box shape.
The lower portion of the rotating shaft 5 projects downward from an opening 8 formed in the bottom wall 7 of the holder 6. The holding body 6 includes a rotation mechanism 9 for rotating each of the rotation shafts 5, a rotation motor 10 for rotating the rotation mechanism 9 (an example of a rotation driving device), and the rotation shaft 5. A revolving mechanism 12 for revolving around a second vertical axis 11 parallel to the first vertical axis 4;
A revolving motor 13 (an example of a revolving drive device) that rotationally drives the revolving mechanism 12 is provided. The three rotating shafts 5 are spaced apart from each other by a fixed distance in the radial direction about the second vertical axis 11 and are distributed every 120 ° in the circumferential direction.

The rotation mechanism 9 includes the second vertical axis 11.
One rotation shaft 15 rotatable around, and the rotation motor
The drive pulley 16 provided on the drive shaft 10 and the rotation shaft 15
A drive belt 18 wound around a driven pulley 17 provided at the upper end of the vehicle, and a sun gear provided below the rotation shaft 15
19, and a planetary gear 20 provided on the upper part of each rotating shaft 5 and meshing with the sun gear 19. Above rotation axis
15 is inserted through a sleeve body 21 provided on the upper wall 41 of the holding body 6 and is rotatably held by the sleeve body 21 via a bearing 22.

The revolving mechanism 12 includes an upper rotating body 23 for integrally connecting the upper ends of the three rotating shafts 5, an intermediate rotating body 24 for integrally connecting the intermediate parts, and a lower rotating body 24 for integrally connecting the intermediate parts. A lower rotating body 25 for integrally connecting
A revolving shaft 27 rotatable around a third vertical axis 26 parallel to 11
A drive pulley 28 provided on a drive shaft of the revolving motor 13 and a driven pulley provided on an upper end of the revolving shaft 27.
A drive belt 30 wound between the gear 29 and a gear 31 provided below the revolving shaft 27, a gear 32 meshed with the gear 31 and provided on the outer periphery of the intermediate rotating body 24, It is composed of

The revolving shaft 27 is held by a pair of upper and lower bearing devices 33 provided inside the holder 6. Further, as shown in FIGS.
Is formed in a ring shape, and the upper end of each rotating shaft 5 is inserted into the upper rotating body 23 and is rotatably held via a bearing 34.

As shown in FIGS. 2 and 3, the intermediate rotating body 24 is formed of a cylindrical portion 24a and a disk portion 24b provided at the upper end of the cylindrical portion 24a. It is held inside the holding body 6 via a bearing 35 externally fitted to the shaft, and is rotatable around the second vertical axis 11. Further, an intermediate portion of each rotating shaft 5 is provided with an intermediate portion rotating body 24.
And is rotatably held via a bearing 36.

As shown in FIGS. 1 and 2, the lower rotating body 25 is formed in a disk shape, and is held inside the holding body 6 via a bearing 37 fitted on the outer peripheral surface. It is rotatable around the second vertical axis 11. further,
The lower part of each rotating shaft 5 is inserted into the lower rotating body 25 and is rotatably held via a bearing 38.

Further, the second vertical axis 11 is inserted through the intermediate rotating body 24 and the lower rotating body 25 along with the intermediate rotating body 24 and the lower rotating body 25 on the second vertical axis 11. A connection shaft 39 rotatable around 11 is provided. This connecting shaft 39
A disk-shaped cover plate 40 that covers the opening 8 of the bottom wall 7 of the holder 6 is attached to the lower end of the holder 6. The rotation motor 10 and the revolution motor 13 are respectively installed on the upper wall 41 of the holder 6, and the rotation speed can be individually adjusted by inverter control.

As shown in FIG. 1 and FIG.
A cylindrical holding member 42 is provided at the lower end of the cylinder, and each of the holding members 42 has a cylindrical movable body 43 slidable in the vertical direction.
Is inserted. Inside each of the movable bodies 43 and the holding member 42, a compression coil spring 44 (an example of a pressing unit) that presses each of the movable bodies 43 in the downward movement direction is provided.

A flange 43a is provided at the lower part of each movable body 43.
A mounting board 47 is provided on each of these flange portions 43a via a universal joint 46. Each of the polishing tools 3 is formed in a disk shape, and the first vertical axis 4
It is mounted on each mounting board 47 so as to be eccentric with respect to.
Note that an abrasive or a polishing pad is attached to each polishing tool 3.

As shown in FIGS. 1, 5 and 6, the universal joint 46 is provided on an annular body 46a provided between the movable body 43 and the mounting board 47 and on a flange 43a of the movable body 43. And a pair of first connecting pieces 46b positioned on the outer periphery of the annular body 46a.
A pair of second connecting pieces 46c provided on the mounting board 47 and located on the outer periphery of the annular body 46a; and first connecting pins 46d rotatably connecting the annular body 46a and the first connecting pieces 46b. And a second connecting pin 46e for rotatably connecting the annular body 46a and each second connecting piece 46c. That is, both the first connecting pieces 46b and the first connecting pins 46d are disposed on a first horizontal axis 48 orthogonal to the first vertical axis 4, and the two second connecting pieces 46b 46c and the second connecting pin 46e,
It is arranged on a second horizontal axis 49 orthogonal to the first vertical axis 4 and the first horizontal axis 48. As a result, as shown in FIG. 6, each mounting board 47 is capable of swinging about the first horizontal axis 48 and the second horizontal axis 49 which cross each other in a plan view. I have.

As shown in FIG. 2 and FIG.
Is a hollow shaft in which a supply flow path 50 for supplying a polishing liquid to the polishing tool 3 is formed. The supply flow path 50 includes a rotating shaft 5
1, and communicates with an upper supply hole 51 formed in the holding member 42 as shown in FIG. In each of the mounting substrates 47, a lower supply hole 53 communicating with a polishing liquid supply port 52 formed in the polishing tool 3 is formed, and the upper supply hole 51 and the lower supply hole 53 are connected to the movable body. They are communicated by a flexible tube 54 inserted inside 43. The lower portion of the flexible tube 54 is fitted into the lower supply hole 53, and the mounting board 47 moves up and down integrally with the movable body 43. Has become.

As shown in FIG. 2, similarly to the rotating shaft 5, the rotating shaft 15 is also a hollow shaft in which a supply flow path 55 for supplying a polishing liquid is formed inside both upper and lower ends. Rotary joints 56, 57, 58 are provided at both upper and lower ends of the rotation shaft 15 and at the upper end of the rotation shaft 5, respectively. Among them, the outlet of the lower rotary joint 57 provided at the lower end of the rotation shaft 15 is branched into three corresponding to each rotary shaft 5, and the outlet of the lower rotary joint 57 and the rotary shaft 5
Of the rotary joint 58 is connected by a connection hose 59 (see FIG. 4). A supply hose for supplying the polishing liquid pumped from the tank by a pump is provided at an inlet of an upper rotary joint 56 provided at an upper end of the rotation shaft 15.
60 is connected.

Further, as shown in FIG.
Is movable up and down with respect to the support table 1 by being guided by a guide rail 61, and is driven up and down by a plurality of up and down cylinder devices 62.

The operation of the above configuration will be described below.
As shown in FIG. 2, by driving the rotation motor 10, the rotation shaft is rotated via the pulleys 16 and 17 and the drive belt 18.
15 is rotated, and the three rotating shafts 5 rotate around the first vertical axis 4 via the sun gear 19 and the planetary gear 20, respectively. Tool 3
Rotates around the first vertical axis 4.

Further, by driving the revolving motor 13, the revolving shaft 27 is rotated via the pulleys 28 and 29 and the drive belt 30, and the intermediate portion rotating body 24 is rotated via the both gears 31 and 32. By rotating around the second vertical axis 11, the three rotating shafts 5 revolve around the second vertical axis 11. At this time, the upper rotating body 23, the lower rotating body 25, the connecting shaft 39, and the cover plate 40 rotate around the second vertical axis 11 integrally with the rotating shafts 5 together with the intermediate rotating body 24.

The holder 6 is lowered by extending the piston rod 62a of the lifting / lowering cylinder device 62, and each polishing tool 3 is pressed against the upper surface of the workpiece 2 set on the support table 1. You. Accordingly, each of the polishing tools 3 rotates around each of the first vertical axes 4 while rotating the second vertical axes 11.
The object to be polished 2 is polished around the periphery.

As described above, since the polishing tool 3 can be revolved while being mechanically rotated, the workpiece 2 can be polished, so that high-precision polishing can be performed and the labor of the operator can be reduced. Can be reduced.

At this time, the rotation speed of the polishing motor 3 and the rotation speed of the polishing tool 3 can be individually changed by adjusting the rotation speed of the rotation motor 10 and the rotation speed of the revolution motor 13 by inverter control. Since the polishing streak (polishing line) formed on the upper surface of the object to be polished 2 as shown in FIG. Can be selected. Further, by independently changing the rotation speed and the revolving speed of the polishing tool 3, uniform polishing can be performed even on the central portion and the peripheral portion of the workpiece 2 or the overlapping portion of the polishing streaks.

When the upper surface of the workpiece 2 is polished by each of the polishing tools 3, each of the polishing tools 3 pushes the compression coil spring 44 through the movable member 43 as shown in FIG. It is pressed downward by pressure. For this reason, even when there is a slight height difference on the upper surface of the object 2, each polishing tool 3 moves up and down following the height difference of the upper surface of the object 2 with the vertical movement of the movable body 43. Each of the polishing tools 3 is constantly pressed against the upper surface of the workpiece 2 so that the pressing force of each of the polishing tools 3 against the workpiece 2 can be kept substantially constant.
Therefore, even when there is a slight difference in height on the upper surface of the object 2 to be polished, scratches and uneven polishing can be prevented, and highly accurate polishing can be performed.

Further, as shown in FIG.
The polishing liquid supplied to the upper rotary joint 56 flows through the supply channel 55 in the rotation shaft 15, flows from the lower rotary joint 57 to the rotary joint 58 of each rotation shaft 5, and further flows into the rotation joint 5. As shown in FIG. 1, each supply flow path 50 passes through the flexible tube 54 through the upper supply hole 51 through the flexible tube 54, and passes through the lower supply hole 53 from the supply port 52 to the polishing surface 63 of each polishing tool 3. Supplied. Thus, when the polishing object 3 is being polished by the polishing tools 3, dust and processing debris on the upper surface of the polishing object 2 are eliminated by the polishing liquid, thereby preventing clogging of each polishing tool 3 and preventing each polishing tool 3 from being clogged. 3 and object to be polished 2
Foreign matter can be prevented from being caught in the space.

Further, when foreign matter intervenes between the polishing tool 3 and the workpiece 2 during polishing, as shown in FIGS. By oscillating about the first horizontal axis 48 or the second horizontal axis 49 of 46, the foreign matter is easily removed from between the polishing tool 3 and the workpiece 2. Even when the upper surface of the object 2 is slightly inclined, each polishing tool 3 is inclined to follow the inclination of the upper surface of the object 2 by swinging. Therefore, even if the upper surface of the workpiece 2 is slightly inclined, highly accurate polishing can be performed.

In the above-described polishing, since each polishing tool 3 is not eccentric with respect to the first vertical axis 4 as shown in FIG. 2, as shown in FIG. A small unpolished portion 64 that is not polished due to no contact with the polishing tool 3 is generated at the center of the surface. In such a case, as shown in FIG.
Then, by performing the polishing after decentering by a predetermined amount L in the same direction, the unpolished portion 64 can be eliminated as shown in FIG.

In the above-described embodiment, the polishing apparatus can be downsized by forming the supply channels 50 and 55 for the polishing liquid in each of the rotary shafts 5 and the rotation shafts 15, respectively. In the above embodiment, three polishing tools 3 are provided as shown in FIG. 3, but a plurality of polishing tools other than three or one polishing tool may be used.

In the above embodiment, as shown in FIG.
Flexible supply of upper supply hole 51 and lower supply hole 53
Although communicating at 54, a rigid tube such as a steel tube may be used.

[0039]

As described above, according to the first aspect of the present invention, the polishing tool is rotated together with the rotating shaft by operating the rotation driving device to rotate the rotation mechanism. The polishing tool is revolved about the second vertical axis together with the rotating shaft by rotating the revolving mechanism around the vertical axis and rotating the revolving mechanism by operating the revolving drive device. Then, by lowering the holder and pressing the polishing tool against the upper surface of the object to be polished set on the support portion, the polishing tool revolves while rotating and polishes the object to be polished.

As described above, the object to be polished can be polished by revolving the polishing tool while rotating it mechanically, so that high-precision polishing can be performed and the labor of the operator can be reduced. .

During the polishing, the polishing tool and the workpiece are
If foreign matter intervenes in the middle, the polishing tool
Rock about a horizontal axis or a second horizontal axis
By the above, the foreign matter is between the polishing tool and the object to be polished.
Easily eliminated. Also, the upper surface of the object to be polished is slightly inclined
Even when polishing, the polishing tool is
It is inclined following the inclination of the upper surface of the polished object. For this reason,
High-precision polishing is possible even if the upper surface of the polishing object is slightly inclined
I can do it.

[0042] Further, according to the second aspect of the invention, provided
The ground supplied from the supply hose to the upper rotary joint
The polishing liquid flows through the supply flow path in the rotation shaft, and
From the point to the rotary joint of the rotating shaft.
Flows through the supply flow path in the rotating shaft and is supplied to the polishing tool.
You. As a result, the workpiece is polished with the polishing tool
When polishing, dust and debris on the upper surface of the work
To prevent clogging of the polishing tool and between the polishing tool and the workpiece.
It is possible to prevent a foreign substance from being caught between them. Also, in the rotation axis
The polishing liquid supply flow path was formed in
Thus, the polishing apparatus can be downsized.

Further, according to the third aspect of the invention, when the upper surface of the object to be polished is polished by the polishing tool, the polishing tool is pressed downward by the pressing force of the pressing means via the movable body. I have. For this reason, even when there is a slight height difference on the upper surface of the object to be polished, the polishing tool moves up and down through the movable body to follow the height difference on the upper surface of the object to be polished. The polishing tool is pressed against the upper surface of the polishing object, and the pressing force of the polishing tool against the polishing object can be kept substantially constant. Therefore, even when there is a height difference on the upper surface of the object to be polished, scratches and uneven polishing can be prevented, and highly accurate polishing can be performed. Further, the polishing tool is connected to the first vertical axis.
By eccentrically polishing the unpolished part
You can eliminate minutes.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a mounting portion of a polishing tool of a polishing apparatus according to an embodiment of the present invention.

FIG. 2 is a side view showing an internal configuration of the polishing apparatus.

FIG. 3 is a view as viewed in the direction of arrows AA in FIG. 2;

FIG. 4 is a detailed view of an upper end portion of a rotating shaft.

FIG. 5 is a partially cutaway side view of the universal joint.

FIG. 6 is a view as viewed in the direction of arrows AA in FIG. 5;

FIG. 7 is a plan view showing polishing streaks when each polishing tool is not eccentric with respect to a first vertical axis.

FIG. 8 is a plan view showing polishing streaks when each polishing tool is decentered with respect to a first vertical axis.

FIG. 9 is a side view of a conventional polishing apparatus.

FIG. 10 is a plan view showing a polishing method using a conventional polishing apparatus.

[Description of Signs] 1 Support (support portion) 2 Object to be polished 3 Polishing tool 4 First vertical axis 5 Rotation axis 6 Holder 9 Rotation mechanism 10 Rotation motor (Rotation drive device) 11 Second vertical Axis 12 Revolution mechanism 13 Revolution motor (revolution drive device) 43 Movable body 44 Compression coil spring (pressing means) 46 Universal joint 50 Supply flow path

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-5-318296 (JP, A) JP-A-6-206159 (JP, A) JP-A-8-1404 (JP, A) 40349 (JP, U) Japanese Utility Model Showa 60-161555 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) B24B 7/04 B24B 47/10

Claims (3)

(57) [Claims] A polishing tool is provided above a support for supporting an object to be polished, which is pressed against the upper surface of the object to be polished set on the support and polishes the object to be polished. A rotation mechanism provided at a lower end of a rotation shaft rotatable around the vertical axis of the first rotation shaft and holding the rotation shaft and capable of moving up and down with respect to the supporting portion; A rotation driving device for rotating a mechanism, a revolving mechanism for revolving the rotating shaft around a second vertical axis parallel to the first vertical axis, and a revolving drive for rotating the revolving mechanism Doo is provided, attached to the lower end of the rotary shaft above the polishing tool via a universal joint
Is, the universal joint is provided between the rotary shaft and the grinding tool
An annular body, provided on the lower end side of the rotating shaft, outside the annular body;
A pair of first connecting pieces located circumferentially and provided on the polishing tool side
A pair of second connecting pieces positioned on the outer periphery of the annular body
And a first member for rotatably connecting the annular member and each of the first connecting pieces.
The connecting pin, the annular body and each second connecting piece are rotatably connected.
The second is composed of a connecting pin, said first vertical axis and the both first connecting piece and the first connecting pin to
The second connecting piece and the second connecting pin are disposed on a first horizontal axis perpendicular to the center, and are connected to the first vertical axis.
Arranged on a second horizontal axis orthogonal to the center and the first horizontal axis.
A polishing apparatus characterized by being provided . The rotation mechanism is driven by a rotation drive device.
And a rotation axis that is rotatable about a vertical axis.
The sun gear provided at the bottom, and the sun gear provided at the top of the rotating shaft
And a planetary gear meshing with the sun gear, and a supply flow path for supplying a polishing liquid to the polishing tool is provided inside the rotation shaft.
Each is formed with the rotary shaft, the lower rotary join provided at the lower end of the rotation axis
Rotary joystick provided at the outlet of the
The upper rotary joint, which is connected to the inlet of the
The supply hose that supplies the polishing liquid is connected to the inlet of the
The polishing apparatus according to claim 1, wherein the are. The lower end of 3. A rotating shaft, a movable member which is pressed in the downward direction is provided by the pressing force of the movable and and pressing means moves in the vertical direction, to the movable body, attached via a universal joint substrate The polishing tool is provided such that the polishing tool is eccentric with respect to the first vertical axis.
The polishing apparatus according to claim 1, wherein the polishing apparatus is attached to an attached substrate .