JP4250594B2 - Moving device and plane polishing machine using planetary gear mechanism - Google Patents

Description

  The present invention relates to a moving device and a plane polishing machine using a planetary gear mechanism, and more particularly to a moving device capable of generating a movement of a quadrilateral locus and a plane polishing machine equipped with the moving device.

  Generally, in order to move an object through a quadrilateral locus, an X, Y biaxial slide mechanism or a double cam is used. However, when the former is used, the cost is high, and when the latter is used, it is difficult to obtain an accurate quadrilateral locus.

  In addition, a single cam having a group of rollers on the peripheral surface and a driven body having a rectangular inner peripheral surface that is inscribed through the roller group, and the driven body moves through a square locus by the rotation of the cam. A motion mechanism (Patent Document 1) having a structure is known.

  Further, as a conventional surface polishing machine, there is a Hopmann type as shown in FIGS. FIG. 10 is a perspective view thereof, and FIG. 11 is a plan view thereof. In these drawings, 37 is a sun gear rotated around the rotation drive shaft 101, 39 is arranged concentrically with the sun gear 37 and is stationary. The internal gear 38, which is maintained in the state, is four planetary gears meshed with the sun gear 37 and the internal gear 39. Each planetary gear 38 is formed with a square hole 40 into which the square work 33 is inserted. Reference numeral 41 denotes a lower lapping machine that rotates around the rotary drive shaft 102 while supporting the lower surface of the work 33 inserted into the square hole 40, and 42 denotes the upper surface of the work 33 inserted into the square hole 40. The upper lapping machine is rotated around the rotation drive shaft 103 under the pressed state. The upper lapping machine 42 can be moved up and down to supply the work 33 to the planetary gear 38 and to take out the work 33 from the planetary gear 38.

  When machining the workpiece 33, the upper lapping machine 42 is raised and the workpiece 33 is supplied into the square holes 40 of the planetary gears 38, and then the upper lapping machine 42 is lowered so that the upper surface of each workpiece 33 is appropriately adjusted. Press with pressure. At this time, each work 33 is in a state where the lower surface is pressed by the lower lapping machine 41 with the same pressing force. Thereafter, the sun gear 37 is rotated at an appropriate speed. At this time, the upper lapping machine 42 and the lower lapping machine 41 are rotated in an appropriate direction and at an appropriate speed depending on the processing situation. As a result, the workpieces 33 are moved in the same body as the planetary gears 38 according to their rotational and revolving displacements, and the upper and lower surfaces are simultaneously polished by the upper and lower lapping machines 42 and 41.

  This processing machine escapes the difference of the total movement distance due to the difference in the distance from the center of each of the two lap machines 41 and 42 of the workpiece 33 by simultaneously performing the rotation displacement and the revolution displacement. Therefore, high-quality polishing is performed by making the total movement distances of all the points in each workpiece 33 the same.

JP 2002-168316 A

  However, in the case of using the conventional single cam, the structure is complicated and expensive, and the follower is temporarily stopped in the vicinity of each corner point, so that the movement speed of the quadrangular locus is from 0 to the maximum speed. There was a drawback that the vibration occurred repeatedly.

  Further, the Hopman method has the following drawbacks.

  FIG. 12 shows two arbitrary points of one workpiece w when the upper and lower lapping machines 42 and 41 are stationary and only the sun gear 37 is rotated 180 degrees in a Hopman type plane polishing machine, that is, the corresponding planetary gears. The total movement trajectory of each point P not matching the point Q matching the rotation center 38 is shown. As is apparent from this figure, the movement trajectories of these two points P and Q do not coincide with each other and are different. That is, in this surface polishing machine, the moving distance of each point of each workpiece 33 is not the same. This difference in the movement distance of each point can be ignored in practice if the workpiece 33 is small, but cannot be ignored as the workpiece 33 becomes larger. That is, this difference results in a difference in the polishing amount of the processed surface that is the upper and lower surfaces of the workpiece 33, making it difficult to finish the processed surface into a flat shape, and uneven wear of the polishing planes of the upper and lower lapping machines 42 and 41. Is also generated.

  Each planetary gear 38 is in contact with the lower lap disk 41 and rotates about the rotation drive shaft 101, so that the rotation about the rotation drive shaft 101 and the rotation drive shaft 102 of the lower lap disk 41 are centered. The movement distances of the inner and outer points in the radial direction of the lower lapping machine 41 are variously different in relation to the rotation direction relative to the rotating direction. The amount of abrasion gradually increases toward the outer radius direction of the polishing plane, or conversely decreases, and the lower surface of each workpiece 33 cannot be properly polished.

  Further, the flatness of the polishing plane of the lower lapping machine 41 is important for high-quality polishing, and it is necessary to correct the polishing plane whose wear amount gradually changes as described above with a jig. Become. However, this modification is not only skillful but also difficult to complete. Such a problem related to the relative rotation between the planetary gear 38 and the lower lap machine 41 becomes more important in large workpieces.

  The present invention eliminates the above-mentioned drawbacks.

A moving device using the planetary gear mechanism of the present invention includes a sun gear, an internal gear arranged concentrically outside the sun gear, held stationary, and a space between the sun gear and the internal gear. Three or more planetary gears arranged in a circumferential direction so as to mesh with each other in a space formed in the above, and any one of the planetary gears at a position eccentric from the rotation center axis It consists of a planetary gear mechanism comprising a projecting drive pin and a moving means driven by the drive pin of the planetary gear mechanism , and the number of teeth of the sun gear is ½ of the number of teeth of the internal gear. The number of teeth of the planetary gear is ¼ of the number of teeth of the internal gear. The rotation of the sun gear causes the planetary gear to rotate four times while revolving around the sun gear to move the planetary gear. The means is driven along a substantially quadrilateral trajectory And features.

Further, the surface polishing machine of the present invention is formed between a sun gear, an internal gear arranged concentrically on the outside of the sun gear and held stationary, and between the sun gear and the internal gear. Three or more planetary gears that are spaced apart from each other in a circumferential direction so as to mesh with them, and any one of the planetary gears protrudes at a position eccentric from the rotation center axis. A planetary gear mechanism comprising a drive pin ; a moving means driven by the drive pin of the planetary gear mechanism ; and a plane polishing means driven by the moving means. The number of teeth of the sun gear is the internal gear. The number of teeth of the planetary gear is ¼ of the number of teeth of the internal gear, and the planetary gear revolves around the sun gear once by the rotation of the sun gear. 4 times in between, and the moving means is almost Characterized in that it is driven along the trajectory of the edge shape.

  According to the surface polishing machine of the present invention, it is possible to perform highly accurate surface polishing by moving the workpiece through the quadrilateral locus with an extremely simple configuration, and the diameter of the planetary gear mechanism is increased to increase the quadrilateral locus. If the length of one side is increased, it is possible to perform surface polishing of a large workpiece, and further, it is possible to perform efficient surface polishing by moving the workpiece at a high speed.

  Embodiments of the present invention will be described below with reference to the drawings.

  1 to 3 relate to a surface polishing machine according to the present invention, FIG. 1 is a front view, FIG. 2 is a plan view, and FIG. 3 is a side view. The surface polishing machine of the present invention includes a bed 43. A lower lap machine 35 is fixed horizontally on the bed 43, and a carrier plate 29 is disposed in the vicinity of the upper lap machine 35 as shown in FIG. Thus, the follower 3 is arranged on the right side of the carrier plate 29. Further, the drive motor 104 is fixed to the bed 43, and the planetary gear mechanism 1 having the sun gear 37 driven by the output shaft of the drive motor 104 is provided at the lower position of the follower 3.

  A wrapping agent distribution tank 51 and an air cylinder 49 are arranged above the bed 43, and the upper wrapping machine 36 is fixed to the lower end of the slide head 52 connected to the output shaft of the air cylinder 49 via a universal joint 109. .

As shown in FIGS. 4 and 5, the planetary gear mechanism 1 includes a sun gear 37 that is rotated by a drive motor 104, and an internal gear 39 that is concentrically arranged with the sun gear 37 and is held stationary. Three planetary gears 38 arranged 120 ° apart from each other in the circumferential direction so as to mesh with each other in a space formed between the sun gear 37 and the internal gear 39, A drive pin 2 projecting at a position eccentric from the rotation center axis of the arbitrary one, and the number of teeth (diameter) of the sun gear 37 is ½ that of the internal gear 39; 38 number of teeth (diameter) is 1/4 of the internal gear 3 9 number of teeth (diameter), while the planetary gears 38 revolve once around the sun gear 37 by the rotation of the sun gear 37 Try to rotate 4 times.

  6 and 7, the carrier plate 29 is formed of a relatively large horizontal square frame plate. The carrier plate 29 is formed with a square hole 29a, and a plurality of workpieces 33 are formed in the square hole 29a. The work pin 32 is fitted to the driven body 3, and one side of the carrier plate 29 is coupled to the driven body 3, and a drive pin is provided on the planetary gear 38 in a hole formed in the driven body 3. 2 and the driven body 3 are held by the parallelogram link mechanism 4 so that the carrier plate 29 and the driven body 3 can move in the XY directions in a horizontal plane.

  Since the planar polishing machine of the present invention is configured as described above, when the sun gear 37 of the planetary gear mechanism 1 is rotated at a constant speed by the drive motor 104, the planetary gear 38 is connected to the sun gear 37 as shown in FIG. The drive pin 2 provided eccentrically because it rotates four times during one revolution of the surroundings has a quadrilateral locus 6 different from the circular locus 5 of the rotation center of the planetary gear 38.

  The speed of the circular locus 5 is constant, but the speed of the locus 6 is not constant. For example, when the drive pin 2 is on the outermost periphery of the planetary gear 38, the drive pin 2 is the most from the sun gear 37. At a distant point, the speed becomes zero as shown in FIG. 9, and the speed increases as the sun gear 37 is approached. Therefore, the locus 6 becomes a zigzag shape having four acute angles as shown in FIG. .

  However, if the degree of eccentricity from the center of the drive pin 2 is reduced, for example, as shown in FIG. 8, a substantially quadrangular locus 6 in which the speed does not become zero (that is, does not become an acute angle) at the corner can be obtained. .

  As described above, according to the surface polishing machine of the present invention, it is possible to perform highly accurate surface polishing by moving the workpiece through the quadrilateral locus with a very simple configuration, and the diameter of the planetary gear mechanism is increased. By increasing the length of one side of the quadrilateral locus, it is possible to perform surface polishing of a large workpiece, and further, it is possible to perform efficient surface polishing by moving the workpiece at a high speed.

It is a front view of the plane grinding machine concerning the present invention. It is a top view of the plane polishing machine shown in FIG. It is a side view of the plane polishing machine shown in FIG. It is a top view of the principal part of the drive means in the moving apparatus of this invention. It is a vertical front view of the drive means shown in FIG. It is a top view of the moving apparatus of this invention. It is a longitudinal cross-sectional view of the moving apparatus shown in FIG. It is operation | movement explanatory drawing of the drive means shown in FIG. It is operation | movement explanatory drawing of the drive means shown in FIG. It is a perspective view which shows the surface polishing machine of the Hopman system of a prior art example. It is a top view which shows the surface polishing machine shown in FIG. It is explanatory drawing which shows the total moving distance of the 2 points | pieces of the workpiece | work in the grinding | polishing operation | movement by the plane grinder shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Planetary gear mechanism 2 Drive pin 3 Follower 4 Parallelogram link mechanism 5 Circular locus 6 Quadrilateral locus 29 Carrier plate 29a Square hole 33 Work 35 Lower lapping machine 36 Upper lapping machine 37 Sun gear 38 Planetary gear 39 Internal gear 40 square hole 41 lower lapping machine 42 upper lapping machine 43 bed 49 air cylinder 51 distribution tank 52 slide head 101 rotation drive shaft 102 rotation drive shaft 103 rotation drive shaft 104 drive motor 109 universal joint

Claims (2)

The sun gear, the internal gear arranged concentrically on the outside of the sun gear and held stationary, and in mesh with each other in a space formed between the sun gear and the internal gear. A planetary gear mechanism comprising three or more planetary gears spaced apart from each other in the circumferential direction, and a drive pin projecting from any one of the planetary gears at a position eccentric from the center axis of rotation; The planetary gear mechanism comprises a moving means driven by the drive pin . The number of teeth of the sun gear is ½ of the number of teeth of the internal gear, and the number of teeth of the planetary gear is the number of teeth of the internal gear. The number of teeth is 1/4. The rotation of the sun gear causes the planetary gear to rotate four times while revolving around the sun gear, and the moving means is driven along a substantially quadrangular locus. Moving device using planetary gear mechanism The sun gear, the internal gear arranged concentrically on the outside of the sun gear and held stationary, and in mesh with each other in a space formed between the sun gear and the internal gear. A planetary gear mechanism comprising three or more planetary gears spaced apart from each other in the circumferential direction, and a drive pin projecting from any one of the planetary gears at a position eccentric from the center axis of rotation; It consists of moving means driven by the drive pin of the planetary gear mechanism , and planar polishing means driven by the moving means, and the number of teeth of the sun gear is ½ of the number of teeth of the internal gear, The number of teeth of the planetary gear is ¼ of the number of teeth of the internal gear, and the planetary gear rotates four times while rotating around the sun gear by the rotation of the sun gear. Is driven along a substantially quadrilateral trajectory Surface grinding machine, characterized in that.

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