KR200339454Y1 - Up down apparatus of Internal gear in Lapping machine - Google Patents

Abstract

The present invention relates to a device for raising and lowering an internal gear of a lapping machine that raises and lowers the internal gear in a lapping machine, which is a kind of machine tool, and more specifically, by grinding a plane of a workpiece such as metal, glass, semiconductor wafer, and the like. In the lapping machine, which is a kind of grinding machine, it is possible to raise and lower the internal gear supporting the workpiece.

In the present invention, in the lapping machine, which sets and rotates the workpiece through the carrier 4 on the lower plate 1 and the upper plate 101 processes the upper surface of the workpiece with the opposite rotation, the lower plate 1 The internal gear 2 supporting the carrier 4 on which the workpiece is set at the periphery of the lower portion is rotated by the support 208 which is lifted to the cylinder 3 supported by the boss 701 of the main shaft 7. It is made to be possible to support.

Accordingly, the present invention provides a structure that can easily raise and lower the internal gear, and to facilitate the take-out of the work, and to automate such lifting and lowering drive, and in particular, to have a structure that can have durability. It is an effective and useful design.

Description

Internal gear lifting device of lapping machine {Up down apparatus of Internal gear in Lapping machine}

The present invention relates to an internal gear lifting apparatus for a lapping machine that lowers and raises the internal gear in a lapping machine, which is a kind of machine tool. More specifically, the grinding of a plane such as metal, glass, semiconductor wafer, and the like is performed. Lapping machine, which is a kind of grinding machine, makes it possible to lift and lower the internal gear supporting the workpiece.

Among machine tools, lapping machine is a kind of grinding machine, and it is a device for processing flat-faced workpieces into mirror surface. The grinding method for precision grinding includes lapping and polishing, and the mechanical composition of lapping and polishing is the same. According to the type of water, lapping and polishing are selected, and accordingly, the surface plate is replaced and the abrasive used is selected and the work is divided into lapping and polishing, and the device consists of the main body, the upper and lower plates, and the rotation driving source. The workpiece is processed while rotating in the position, and the workpiece installed on the lower plate is supported and rotated by the carrier supported by the internal gear and the central sun gear, and the tip mounted on the upper plate is rotated by the upper plate. By rotating and rotating relative to the work at the same time, the upper surface is lowered and the abrasive body Adhered, and is polished to a surface of a workpiece by an abrasive In between the estimated half and the workpiece and hajeong half and the workpiece.

However, the lapping machine as described above has a higher internal gear than the lower plate, so that the teeth of the sun gear and the internal gear are mounted in order to mount a carrier for mounting a workpiece (usually a thin plate such as a wafer) on the lower plate. Since it is inconvenient to install the workpiece and take out the processed workpiece, the carrier equipped with the workpiece should be lifted out of the internal gear above the internal gear when the workpiece is taken out.But the carrier is in close contact with the carrier. The lack of space to lift the work is cumbersome, uncomfortable, and labor-intensive, and dropped the work when taking out, there was a defect such as defects.

The invention proposed to improve the above problems is the "internal gear raising and lowering device of the lapping machine" of the Republic of Korea Utility Model Registration No. 20-0276138, which is shown in the configuration in Figure 5 and shown in cross-section in Figure 6, The upper plate 101 is provided with an upper and lower plate 101 which is operated to elevate the upper portion of the body, and the lower plate 1 and the sun gear 5 are installed on the lower side thereof, and the internal gear 2 is provided on the outside of the lower plate 1 so that the upper plate is provided. (101) and the lower platen (1), the sun gear (5) and the internal gear (2) rotate, respectively, and install a ring gear between the sun gear (5) and the internal gear (2) inside the ring gear. In the conventional lapping machine for fixing the workpiece (W) through the carrier (4): the rotary shaft 202 is installed on the outer periphery of the central axis of the lower plate (1) and the support plate (201) is placed on the upper portion of the rotary shaft (202). The inner support gear 2 is coupled to the upper portion of the support plate 201, and the support hole 205 equipped with the rotary hole 203 is provided on the lower side of the support plate 201, and the cylinder 3 is disposed below the connector 204. Equipped with the operation of the forward and backward operating port 301 by the operation of the operating port 301 is formed in the inclined surface of the upper surface to be in contact with the rotating hole 203 and the internal gear (in the upper inner circumference of the rotating shaft 202) 2 06) and the external gear 207 of the connector 204 and the internal gear 206 of the rotary shaft 202 by coupling the connector 204 having the external gear 207 on top of the internal gear rotation shaft (6) The internal gear 206 is raised and lowered along the teeth of the external gear 207 so that the internal gear 2 moves and rotates.

Therefore, by raising and lowering the internal gear, the internal gear is raised to engage with the carrier during machining, and the internal gear is lowered when mounting and taking out the workpiece so as to lift the internal gear without lifting the carrier equipped with the workpiece. By pulling or pushing outward, the ring gear can be mounted and taken out to facilitate the installation and withdrawal of the workpiece.

That is, in the conventional lapping machine, since the internal gear is located at a position higher than the lower plate at the side of the lower plate, there is a problem that interference occurs when the workpiece is taken out to the side, and the conventional design proposed to improve the internal gear is an internal gear. Although it was possible to raise and lower the rotary plate at the bottom of the supporting plate, the operating sphere is operated through this. When the lower plate is rotated, a large friction is generated in this part, which causes the loss of power and the life of the device. Other problems and problems that automation is not easy to come to occur.

The present invention is a result of the careful attention to the above problems over a long period of time, and the effort to improve it is a devised design, it is possible to raise and lower the internal gear to facilitate the removal of the workpiece, and to easily automate such lifting and driving It is to provide a structure, and in particular to be able to have a structure that can have a durability.

To this end, the present invention is made by mounting a cylinder in the middle of the rotary support for supporting the internal gear in the wrapping machine consisting of the upper and lower surface plate and the internal gear and the drive unit.

1 is a state of use of the present invention,

2 is a configuration state of the present invention,

3 is a longitudinal cross-sectional view of FIG.

Figure 4 is a longitudinal cross-sectional view of the installation state of the present invention,

5 is a configuration diagram of a conventional design,

6 is a cross-sectional view of a conventional design.

* Explanation of code of the main parts in the drawing

1. Bottom plate

101. Presumption

2. Internal gear

201.Base plate 202.Rotary shaft 203.Rotator

204. End Connections 205. Base Supports 206. Internal Gears

207. External gear 208. Support 209. Bearing

3. Cylinder

301. Actuation port 302. Piston 303. Euro

4. Carrier

5. Sun Gear

6. Internal gear rotation shaft

7. Spindle

701.Boss Part

W. Workpiece

The present invention provided to solve the above problems is made of the following structure.

1 is a state of use of the wrapping machine used to be applied to the present invention, Figure 2 is a configuration diagram showing only the present invention, Figure 3 is to pass through the center of Figure 2 to know the main part of the present invention 4A shows a state in which the internal gear 2 is raised to perform a machining operation, and FIG. 4B shows a state in which the internal gear 2 descends and the work is finished and the work W is taken out. It is sectional drawing which shows.

The present invention, in the lapping machine for setting the workpiece to the lower plate 1 through the carrier 4 and rotating, and the upper plate 101 to reverse the rotation and processing the upper surface of the workpiece, the lower plate 1 The lower gear is supported by an internal gear 2 for supporting the carrier 4 on which the work piece is set at the periphery of the supporter 208. The lower portion is supported by the support 208 that lifts and lowers the cylinder 3 supported by the boss 701 of the main shaft 7. It is made to rotatably support.

In the above configuration, the cylinder 3 is more preferably characterized by being a unitary body surrounding the main shaft 7.

In the above configuration, it is more preferable that the cylinder 3 is provided with two or more sets spaced at equal angles with respect to the main shaft 7.

4 is a schematic view of the operation of the present invention.

It looks at the operation of the present invention described above with reference to FIG.

According to one configuration of the present invention constituted as described above, the present invention is a polishing body that is set and rotates the workpiece on the lower plate 1 through the carrier 4 and the upper plate 101 is mounted on the reverse rotation while Applied to the lapping machine for processing the upper surface of the workpiece as a team, Figure 1 is shown as an illustration of the present invention is applied, but the present invention is not necessarily limited to those applied to this apparatus.

In addition, a support for lifting and lowering the cylinder 3 which is supported by the boss 701 of the main shaft 7, the internal gear 2 supporting the carrier 4 on which the workpiece is set at the periphery of the lower plate 1. 208 is configured to rotatably support the lower part, wherein a workpiece such as glass, a semiconductor wafer, a metal, or the like is mounted on the carrier 4 mounted on the lower plate 1 between the internal gear 2 and the sun gear 5. The upper surface of the workpiece W is machined by lowering the upper plate 101 in the set state (FIG. 4A state), and the upper plate 101 may itself serve as a tool, or assume It is also possible to set the tool (Tip) in the panel 101, and to process it. When the processing is finished, the upper panel 101 is raised and the workpiece is taken out (Fig. 4b state), in which a separate switch (with a control box) Installed), or automatically The lower 3 lowers the support 208 so that the internal gear 2 located above the support 208 is lowered (FIG. 4B state), and in this state, no obstacle is placed on the side of the lower plate 1. Since it is not present, the workpiece W can be taken out by pushing the carrier 4 set to the side to be easily taken out.

In this state, if the switch is operated after setting the carrier 4 with the new workpiece W set again, the cylinder 3 raises the support 208 again to move the internal gear 2 to the normal position (working position). (A state of FIG. 4A), the workpiece W is normally set in this state, and processing is performed.

In addition, in the machining operation, the cylinder 3 is supported by the boss 701 which is blocked from rotational force with the main shaft 7, and thus means such as a bearing 209 at the connection portion between the cylinder 3 and the support 208. It is preferable to make it firmly supported.

According to another configuration of the present invention, in addition to the above-described configuration, the cylinder 3 is characterized by being a unitary body surrounding the main shaft (7), a large diameter cylinder (3) surrounding the outer circumference around the main shaft (7) If the internal gear 2 and the support 208 have a large load, they can be smoothly raised and lowered even if they have a large load.

According to another configuration of the present invention, in addition to the above-described configuration, the cylinder 3 is characterized in that two or more sets spaced at equal angles about the main shaft (7), wherein the cylinder (3) is a conventional When the cylindrical cylinder 3 is installed spaced apart from the main shaft 7 by a predetermined distance, it is separated from the main shaft 7 which is the center of rotation and the center of gravity so that pairing is applied, thereby stably supporting the cylinder 3 symmetrically. In order to achieve this, the more the number of the cylinder (3) is installed, the higher the bearing capacity, but the installation cost is increased, in particular, a plurality of cylinders (3) installed a plurality of cylinders to operate smoothly to operate smoothly internal gear ( It is preferable to adjust the quantity according to the specification and weight of 2).

As described above, the present invention provides a structure that can easily raise and lower the internal gear, and facilitate the take-out of the work, and automate such lifting and lowering, and in particular, to have a structure that can have durability. It is an effective and useful design.

Claims (3)

In the wrapping machine which sets and rotates the workpiece through the carrier 4 in the lower plate 1 and the upper plate 101 rotates in reverse, processing the upper surface of the workpiece, A support 208 which raises and lowers the internal gear 2 which supports the carrier 4 on which the workpiece is set in the periphery of the lower plate 1 to the cylinder 3 supported by the boss 701 of the main shaft 7. Internal gear lifting device of the wrapping machine made to support the lower part by rotatable). The method of claim 1, Internal gear lifting device of the wrapping machine, characterized in that the cylinder (3) is a unitary body surrounding the main shaft (7). The method of claim 1, The internal gear lifting device of a lapping machine, characterized in that the cylinder (3) is installed at least two sets spaced at an equal angle around the main shaft (7).