CN111136574A - Double-sided grinding and polishing machine - Google Patents
Double-sided grinding and polishing machine Download PDFInfo
- Publication number
- CN111136574A CN111136574A CN201911413959.7A CN201911413959A CN111136574A CN 111136574 A CN111136574 A CN 111136574A CN 201911413959 A CN201911413959 A CN 201911413959A CN 111136574 A CN111136574 A CN 111136574A
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- Prior art keywords
- grinding
- disc
- double
- polishing machine
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
- B24B37/16—Lapping plates for working plane surfaces characterised by the shape of the lapping plate surface, e.g. grooved
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/28—Work carriers for double side lapping of plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
The invention discloses a double-sided grinding and polishing machine, which comprises a machine body, a lower disc device and an upper disc device, wherein the machine body comprises a driving device, a supporting arm and a machine case, the bottom end of the supporting arm is fixedly connected with the machine case, the upper disc device comprises an air cylinder arranged at the top end of the supporting arm, the lower end of a piston rod of the air cylinder is rotatably connected with a fixed disc, and the fixed disc is fixedly connected with an upper grinding disc through a fixed column; the lower disc device comprises a hollow shaft penetrating out of the upper part of the case, the hollow shaft is fixedly connected with a lower grinding disc, the lower disc device also comprises a driving shaft which penetrates out of the hollow shaft upwards, and the driving shaft is rotatably connected with a gear and a spline shaft which is fixedly connected with a central connecting cavity arranged on the upper grinding disc; when grinding and polishing are carried out, the periphery of the die positioned between the upper grinding disc and the lower grinding disc is meshed with the gear and the lower grinding disc to rotate.
Description
Technical Field
The invention relates to the technical field of grinding and polishing machine machinery, in particular to a double-sided grinding and polishing machine.
Background
The grinding and polishing machine is mainly used for grinding parts needing double-side grinding or single-side grinding, the grinding part of the existing ceramic chip grinding machine mainly comprises an upper grinding disc and a lower grinding disc, one of the upper grinding disc and the lower grinding disc is of a fixed structure (namely does not rotate), and the other one rotates to grind the surface of a product. For the ceramic wafer, the surfaces of two sides need to be ground and polished, the existing grinding machine is used for grinding and polishing, in the grinding and polishing process, one surface is firstly ground and polished, then the ceramic wafer is turned over by 180 degrees up and down through manual operation and then placed on a station for grinding the other surface.
Obviously, the existing grinding and polishing machine has low working efficiency and long grinding and polishing time, and the grinding precision and the smoothness of the surface of the part cannot meet the use requirements of downstream products because only one grinding disc rotates to grind the surface of the part.
Disclosure of Invention
The invention aims to provide a double-sided grinding and polishing machine which can grind the surface of a workpiece at the same time, has high working efficiency, effectively improves the surface smoothness and precision of parts and can meet the use requirements of downstream products.
In order to achieve the purpose, the invention adopts the following technical scheme:
a double-sided grinding and polishing machine comprises a machine body, a lower disc device and an upper disc device, wherein the machine body comprises a driving device, a supporting arm and a machine case, the bottom end of the supporting arm is fixedly connected to the machine case, the upper disc device comprises an air cylinder arranged at the top end of the supporting arm, the lower end of a piston rod of the air cylinder is rotatably connected with a fixed disc, and the fixed disc is fixedly connected with an upper grinding disc through a fixed column; the lower disc device comprises a hollow shaft penetrating out of the upper part of the case, the hollow shaft is fixedly connected with a lower grinding disc, the lower disc device also comprises a driving shaft which penetrates out of the hollow shaft upwards, and the driving shaft is rotatably connected with a gear and a spline shaft which is fixedly connected with a central connecting cavity arranged on the upper grinding disc; when grinding and polishing are carried out, the periphery of the die positioned between the upper grinding disc and the lower grinding disc is meshed with the gear and the lower grinding disc to rotate.
According to a further improvement scheme of the invention, a raised edge is arranged on the periphery of the lower grinding disc, and a gear ring meshed with a mold is arranged on the inner side of the raised edge.
According to a further improvement of the invention, the diameter of the upper grinding disc is slightly smaller than the inner diameter of the raised edge of the lower grinding disc.
According to a further improvement scheme of the invention, a fixed seat is arranged on the lower part of the lower grinding disc in a circle, and the lower surface of the fixed seat is connected to the upper surface of the case in a rolling manner. The rolling connection means that a plane bearing is arranged between the two.
According to a further improvement scheme of the invention, the plurality of fixing columns are equally arranged by taking the circle centers of the grinding disc and the fixed disc as centers.
According to a further improvement scheme of the invention, a circle of first grooves are formed in the upper surface of the fixed disc, liquid outlets of the grinding liquid pipe are positioned above the first grooves formed in the fixed disc, a plurality of first liquid outlet holes are formed in the bottom of the first grooves, a circle of second grooves are formed in the upper surface of the grinding disc, and second liquid outlet holes are densely distributed in the bottoms of the grooves.
According to a further improved scheme of the invention, the lower part of the first liquid outlet hole is communicated with a grinding liquid branch pipe, and a liquid outlet of the grinding liquid branch pipe is positioned above a second groove arranged on the upper grinding disc; the liquid outlet of the grinding liquid branch pipe (7) is a flat opening, and the width of the flat opening is equal to that of the second groove. .
According to a further improvement scheme of the invention, the driving device is a motor, an output shaft of the first motor is in transmission connection with the hollow shaft, and an output shaft of the second motor is in transmission connection with the driving shaft.
According to the further improved scheme of the invention, a plurality of coaxial placing holes for the parts to be ground are arranged in the die, and the height of the die is smaller than the thickness of the parts to be ground.
According to a further improvement scheme of the invention, the diameter of the placing hole of the workpiece to be ground is slightly larger than that of the workpiece to be ground.
Compared with the prior art, the invention has the following beneficial effects:
according to the double-sided grinding and polishing machine provided by the invention, the lower grinding disc is matched with the upper grinding disc (namely the lower grinding disc and the upper grinding disc rotate simultaneously), and meanwhile, the mold which is arranged between the lower grinding disc and the upper grinding disc and is provided with a workpiece to be ground rotates automatically, so that double-sided grinding and polishing of a product are realized, and the working efficiency of equipment is improved.
And secondly, because the die provided with the workpiece to be ground rotates, the upper surface and the lower surface of the workpiece are ground in various directions, and the smoothness (grinding precision) of the surface of the workpiece is improved.
In the invention, liquid outlet holes are densely distributed at the bottom of the groove arranged on the upper grinding disc, and liquid is distributed to the workpiece below all the time in the grinding process, so that the workpiece is well lubricated, the smoothness of the surface of the workpiece is further improved, and the abrasion of equipment is reduced.
In the invention, the liquid outlet of the grinding liquid branch pipe 7 is a flat opening, the width of the flat opening is equal to the width of a second groove arranged on the upper grinding disc, and the design is to ensure that the grinding liquid is better distributed in a working area and uniformly supplies liquid to a lower workpiece.
Fifthly, in the invention, a plurality of coaxial workpiece placing holes to be ground are arranged in the die, and the height of the die is smaller than the thickness of the workpiece to be ground. The design scheme is that the surfaces of the upper grinding disc and the lower grinding disc are only contacted with the surface of a workpiece to be ground, the upper end surface and the lower end surface of the die are not stressed, and the abrasion of the die and the upper grinding disc and the lower grinding disc is reduced.
Sixth, in the invention, the diameter of the placing hole of the workpiece to be ground is slightly larger than that of the workpiece to be ground, so that the workpiece can be conveniently placed in and taken out, and the periphery of the workpiece is prevented from being damaged.
Drawings
FIG. 1 is a schematic side view of a double-side polishing machine according to the present invention;
FIG. 2 is an enlarged top view of the upper polishing disk of FIG. 1;
fig. 3 is an enlarged top view of the die (with the external toothing, not shown).
In the figure: 1 piston rod, 2 cylinders, 3 supporting arms, 4 grinding fluid pipes, 5 fixed disks, 6 fixed columns, 7 grinding fluid branch pipes, 8 upper grinding disks, 9 driving shafts, 10 gears, 11 lower grinding disks, 12 bases, 13 cases, 14 dies, 15 placing holes, 17 spline shafts and 18 second liquid outlet holes.
Detailed Description
In the following, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention, and it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have specific orientations, be constructed in specific orientations, and operate, and thus, should not be construed as limiting the present invention.
As shown in fig. 1, the present invention includes a machine body, a lower disc device and an upper disc device, wherein the machine body includes a driving device, a supporting arm 3 and a case 13, and the bottom end of the supporting arm 3 is fixedly connected to the case 13.
The hanging wall device is including setting up the cylinder 2 on 3 tops of support arm, 1 lower extreme of piston rod of cylinder 2 rotates and connects fixed disk 5, fixed disk 5 is through fixed column 6 fixed connection abrasive disc 8, fixed column 6 is equipped with many to the centre of a circle of abrasive disc 8 and fixed disk 5 is the equal partition setting of center, and welded connection abrasive disc 8 and fixed disk 5 are distinguished to fixed column 6 upper and lower end, or threaded connection abrasive disc 8 and fixed disk 5 adopt threaded connection in this embodiment.
The lower disc device comprises a hollow shaft penetrating out of the upper part of the case 13, a lower grinding disc 11 is fixedly connected to the hollow shaft, the lower disc device also comprises a driving shaft 9 penetrating out of the hollow shaft upwards, a gear 10 is rotatably connected to the driving shaft 9, and a spline shaft 17 matched with a central connecting cavity arranged on the upper grinding disc 8 is fixedly connected to the driving shaft; when grinding and polishing are carried out, the periphery of the die between the upper grinding disc and the lower grinding disc is meshed with the gear 10 to rotate, a raised edge is arranged on the periphery of the lower grinding disc 11, and an inner gear ring meshed with the die is arranged on the inner side of the raised edge.
The diameter of the upper grinding disc 8 is slightly smaller than the inner diameter of the convex edge of the lower grinding disc 11. In operation, the upper abrasive disk 8 is located within the raised edge of the lower abrasive disk 11.
A fixed seat 12 is arranged on the lower portion of the lower grinding disc 11 in a circle, and the lower surface of the fixed seat 12 is connected to the upper surface of the case 13 in a rolling mode through a plane bearing.
The upper surface of the fixed disk 5 is provided with a circle of first groove, the liquid outlet of the grinding liquid pipe 4 is positioned above the first groove formed in the fixed disk 5, the bottom of the first groove is provided with a plurality of first liquid outlet holes, the lower part of each first liquid outlet hole is communicated with a grinding liquid branch pipe 7, the liquid outlet of each grinding liquid branch pipe 7 is positioned above a second groove formed in the upper grinding disk 8 (the upper surface of the upper grinding disk 8 is provided with a circle of second groove), and the bottom of the groove is densely distributed with second liquid outlet holes 18. The liquid outlet of the grinding liquid branch pipe 7 is a flat opening (a plurality of liquid outlet through holes are arranged in the flat opening), and the width of the flat opening is equal to that of the second groove.
The grinding fluid pipe 4 is communicated with a grinding fluid storage tank, and the grinding fluid storage tank is an elevated tank, that is, the liquid inlet of the grinding fluid pipe 4 is higher than the liquid outlet (not shown).
The driving device is arranged in the case 13 and is a motor, an output shaft of the first motor is in transmission connection with the hollow shaft, an output shaft of the second motor is in transmission connection with the driving shaft 9, the hollow shaft is in rotation connection with the driving shaft 9 through a bearing, and the driving shaft 9 is in rotation connection with the base. The first motor mounting location is located above the second motor. The drive means and its transmission are not shown and are of conventional design and can be implemented by a person skilled in the art in light of the above description.
The die is internally provided with a plurality of workpiece placing holes to be ground in the same axial direction, and the height of the die is smaller than the thickness of the workpiece to be ground. The diameter of the placing hole of the part to be ground is slightly larger than that of the part to be ground.
In the specific working process of this embodiment, a workpiece (in this embodiment, a ceramic sheet) is placed in the placing hole 15 of the mold 14, the mold is disposed on the lower grinding plate 11, and a circle of the mold is engaged with the gear 10 and the gear ring of the lower grinding plate. And starting the air cylinder to enable the central connecting cavity of the upper grinding disc to be in fit connection with the spline shaft 17. At this time, the lower surface of the upper abrasive disk is pressed against the upper surface of the workpiece to be abraded. And opening the grinding fluid pipe 4 to supply fluid to the first groove of the fixed disc, conveying the grinding fluid in the first groove into a second groove of the upper grinding disc by the grinding fluid branch pipe 7, and conveying the grinding fluid to the workpiece through a second fluid outlet hole formed in the bottom of the second groove.
The first motor and the second motor are started, the hollow shaft drives the lower grinding disc to rotate, the driving shaft 9 drives the gear 10, the upper grinding disc 8 and the fixed disc 5 to rotate (the rotating directions of the hollow shaft and the driving shaft 9 are opposite), the mold starts to rotate, and the product surface is ground by the rotating upper and lower grinding discs and the mold. When the grinding time reaches the set time, the first motor and the second motor are turned off, the cylinder 2 lifts the upper grinding disc 8, and the workpiece is taken out. This is repeated.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (10)
1. A double-sided grinding and polishing machine is characterized by comprising a machine body, a lower disc device and an upper disc device, wherein the machine body comprises a driving device, a supporting arm (3) and a case (13), the bottom end of the supporting arm (3) is fixedly connected to the case (13), the upper disc device comprises an air cylinder (2) arranged at the top end of the supporting arm (3), the lower end of a piston rod (1) of the air cylinder (2) is rotatably connected with a fixed disc (5), and the fixed disc (5) is fixedly connected with an upper grinding disc (8) through a fixed column (6); the lower disc device comprises a hollow shaft penetrating through the upper part of the case (13), the hollow shaft is fixedly connected with a lower grinding disc (11), the lower disc device also comprises a driving shaft (9) penetrating through the hollow shaft upwards, a gear (10) is rotatably connected onto the driving shaft (9), and a spline shaft (17) matched with a central connecting cavity arranged on the upper grinding disc (8) is fixedly connected onto the driving shaft; when grinding and polishing are carried out, the periphery of the die positioned between the upper grinding disc and the lower grinding disc is meshed with the gear (10) and the lower grinding disc (11) to rotate.
2. A double-sided grinding and polishing machine according to claim 1, characterized in that the lower grinding disk (11) is provided with a raised edge around the circumference, and an inner gear ring engaged with the mold is arranged inside the raised edge.
3. A double side grinder/polisher in accordance with claim 1 or 2 characterized by the upper grinding disk (8) diameter slightly smaller than the lower grinding disk (11) convex inside diameter.
4. A double-sided grinding and polishing machine as claimed in claim 1 or 2, characterized in that a fixed seat (12) is provided around the lower part of the lower grinding disc (11), and the lower surface of the fixed seat (12) is connected to the upper surface of the cabinet (13) in a rolling manner.
5. A double-sided grinding and polishing machine according to claim 1, characterized in that the fixed columns (6) are provided in plural numbers, equally divided centering on the circle center of the grinding disk (8) and the fixed disk (5).
6. A double-sided grinding and polishing machine as claimed in claim 1 or 5, characterized in that the upper surface of the fixed plate (5) is provided with a circle of first grooves, the liquid outlet of the grinding liquid pipe (4) is positioned above the first grooves provided on the fixed plate (5), the bottom of the first grooves is provided with a plurality of first liquid outlet holes, the upper surface of the grinding plate (8) is provided with a circle of second grooves, and the bottom of the grooves is densely distributed with second liquid outlet holes (18).
7. A double-sided grinding and polishing machine as claimed in claim 6, characterized in that the lower part of the first liquid outlet hole is communicated with a grinding liquid branch pipe (7), and the liquid outlet of the grinding liquid branch pipe (7) is positioned above the second groove arranged on the upper grinding disc (8); the liquid outlet of the grinding liquid branch pipe (7) is a flat opening, and the width of the flat opening is equal to that of the second groove.
8. A double-sided grinding and polishing machine according to claim 1, characterized in that the drive means is an electric motor, the first motor output shaft is in driving connection with the hollow shaft, and the second motor output shaft is in driving connection with the drive shaft (9).
9. The double-sided grinding and polishing machine according to claim 1, wherein the die is provided with a plurality of coaxial placing holes for the to-be-ground parts, and the height of the die is smaller than the thickness of the to-be-ground parts.
10. The double-sided grinding and polishing machine according to claim 9, wherein the diameter of the workpiece placement hole is slightly larger than the diameter of the workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911413959.7A CN111136574A (en) | 2019-12-31 | 2019-12-31 | Double-sided grinding and polishing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911413959.7A CN111136574A (en) | 2019-12-31 | 2019-12-31 | Double-sided grinding and polishing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111136574A true CN111136574A (en) | 2020-05-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911413959.7A Pending CN111136574A (en) | 2019-12-31 | 2019-12-31 | Double-sided grinding and polishing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111136574A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113284941A (en) * | 2021-05-19 | 2021-08-20 | 山东天岳先进科技股份有限公司 | High-quality silicon carbide substrate and preparation method thereof |
| CN113618623A (en) * | 2021-08-02 | 2021-11-09 | 菲特晶(南京)电子有限公司 | 3-inch quartz wafer double-side grinding device and method |
| CN115008300A (en) * | 2022-06-22 | 2022-09-06 | 锡斌光电(江苏)有限公司 | High-efficient monolithic two-sided machine of throwing that grinds |
| CN116512109A (en) * | 2023-02-23 | 2023-08-01 | 安徽名正电子装备有限公司 | Wafer polishing and grinding equipment and grinding process thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5938506A (en) * | 1997-06-03 | 1999-08-17 | Speedfam-Ipec Corporation | Methods and apparatus for conditioning grinding stones |
| CN205310026U (en) * | 2016-01-27 | 2016-06-15 | 赖任科 | Double -side grinding machine |
| CN106425830A (en) * | 2016-11-14 | 2017-02-22 | 宜兴市晶科光学仪器有限公司 | Double-side grinding and polishing machine |
| CN207534607U (en) * | 2017-11-14 | 2018-06-26 | 温岭市天湖机械密封件厂 | Grinder |
| CN209207222U (en) * | 2018-11-06 | 2019-08-06 | 南京瑞杜新材料科技有限公司 | A kind of twin grinder |
-
2019
- 2019-12-31 CN CN201911413959.7A patent/CN111136574A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5938506A (en) * | 1997-06-03 | 1999-08-17 | Speedfam-Ipec Corporation | Methods and apparatus for conditioning grinding stones |
| CN205310026U (en) * | 2016-01-27 | 2016-06-15 | 赖任科 | Double -side grinding machine |
| CN106425830A (en) * | 2016-11-14 | 2017-02-22 | 宜兴市晶科光学仪器有限公司 | Double-side grinding and polishing machine |
| CN207534607U (en) * | 2017-11-14 | 2018-06-26 | 温岭市天湖机械密封件厂 | Grinder |
| CN209207222U (en) * | 2018-11-06 | 2019-08-06 | 南京瑞杜新材料科技有限公司 | A kind of twin grinder |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113284941A (en) * | 2021-05-19 | 2021-08-20 | 山东天岳先进科技股份有限公司 | High-quality silicon carbide substrate and preparation method thereof |
| CN113284941B (en) * | 2021-05-19 | 2023-02-28 | 山东天岳先进科技股份有限公司 | High-quality silicon carbide substrate and preparation method thereof |
| CN113618623A (en) * | 2021-08-02 | 2021-11-09 | 菲特晶(南京)电子有限公司 | 3-inch quartz wafer double-side grinding device and method |
| CN113618623B (en) * | 2021-08-02 | 2022-07-01 | 菲特晶(南京)电子有限公司 | 3-inch quartz wafer double-side grinding device and method |
| CN115008300A (en) * | 2022-06-22 | 2022-09-06 | 锡斌光电(江苏)有限公司 | High-efficient monolithic two-sided machine of throwing that grinds |
| CN115008300B (en) * | 2022-06-22 | 2023-12-12 | 锡斌光电(江苏)有限公司 | High-efficiency single-chip double-sided polishing machine |
| CN116512109A (en) * | 2023-02-23 | 2023-08-01 | 安徽名正电子装备有限公司 | Wafer polishing and grinding equipment and grinding process thereof |
| CN116512109B (en) * | 2023-02-23 | 2024-02-13 | 安徽名正电子装备有限公司 | Wafer polishing and grinding equipment and grinding process thereof |
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Application publication date: 20200512 |