JPH08240599A - 大面積サンプル表面の非破壊測定用光学式プローブ顕微鏡 - Google Patents

大面積サンプル表面の非破壊測定用光学式プローブ顕微鏡

Info

Publication number
JPH08240599A
JPH08240599A JP7274618A JP27461895A JPH08240599A JP H08240599 A JPH08240599 A JP H08240599A JP 7274618 A JP7274618 A JP 7274618A JP 27461895 A JP27461895 A JP 27461895A JP H08240599 A JPH08240599 A JP H08240599A
Authority
JP
Japan
Prior art keywords
tip
fiber
chip
dither
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP7274618A
Other languages
English (en)
Japanese (ja)
Inventor
Harold Maclyn Marchman
マックリン マーチマン ハロルド
Jay K Trautman
ケネス トラウトマン ジェイ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Publication of JPH08240599A publication Critical patent/JPH08240599A/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
JP7274618A 1994-10-24 1995-10-24 大面積サンプル表面の非破壊測定用光学式プローブ顕微鏡 Withdrawn JPH08240599A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32829794A 1994-10-24 1994-10-24
US08/328297 1994-10-24

Publications (1)

Publication Number Publication Date
JPH08240599A true JPH08240599A (ja) 1996-09-17

Family

ID=23280384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7274618A Withdrawn JPH08240599A (ja) 1994-10-24 1995-10-24 大面積サンプル表面の非破壊測定用光学式プローブ顕微鏡

Country Status (5)

Country Link
US (1) US5693938A (enExample)
EP (1) EP0709704A1 (enExample)
JP (1) JPH08240599A (enExample)
KR (1) KR960014991A (enExample)
TW (1) TW280928B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2903211B2 (ja) * 1996-04-09 1999-06-07 セイコーインスツルメンツ株式会社 プローブとプローブ製造方法及び走査型プローブ顕微鏡
US5811796A (en) * 1996-06-03 1998-09-22 Lucent Technologies Inc. Optical probe microscope having a fiber optic tip that receives both a dither motion and a scanning motion, for nondestructive metrology of large sample surfaces
DE19631498A1 (de) * 1996-08-03 1998-02-05 Huels Chemische Werke Ag Verfahren und Vorrichtung zur optischen Rasternahfeldmikroskopie an Probekörpern in Flüssigkeiten
JP3249419B2 (ja) * 1997-03-12 2002-01-21 セイコーインスツルメンツ株式会社 走査型近接場光学顕微鏡
JPH10288618A (ja) * 1997-04-16 1998-10-27 Seiko Instr Inc 表面分析装置
US6043485A (en) * 1997-10-30 2000-03-28 Fuji Photo Film Co., Ltd. Sample analyzer
US6504618B2 (en) * 2001-03-21 2003-01-07 Rudolph Technologies, Inc. Method and apparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measurement system
CN100565099C (zh) * 2001-07-13 2009-12-02 鲁道夫科技公司 用于提高光声膜厚度测量系统中的信噪比的方法和设备
US7372584B2 (en) * 2005-04-11 2008-05-13 Rudolph Technologies, Inc. Dual photo-acoustic and resistivity measurement system
US11506877B2 (en) 2016-11-10 2022-11-22 The Trustees Of Columbia University In The City Of New York Imaging instrument having objective axis and light sheet or light beam projector axis intersecting at less than 90 degrees
US10234670B2 (en) * 2017-03-29 2019-03-19 Hikari Instruments, Llc Microscope focusing device
CN117849399B (zh) * 2023-11-10 2025-07-15 北京航空航天大学 开放式模块化的扫描探针显微镜控制系统

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4758065A (en) * 1985-03-08 1988-07-19 Mechanical Technology Incorporated Fiber optic sensor probe
DE69026780T2 (de) * 1989-09-22 1996-11-07 Fuji Photo Film Co Ltd Rastermikroskop und Rastermechanismus dafür
US5198715A (en) * 1990-05-23 1993-03-30 Digital Instruments, Inc. Scanner for scanning probe microscopes having reduced Z-axis non-linearity
JPH0527177A (ja) * 1991-07-25 1993-02-05 Fuji Photo Film Co Ltd 走査型顕微鏡
US5196713A (en) * 1991-08-22 1993-03-23 Wyko Corporation Optical position sensor with corner-cube and servo-feedback for scanning microscopes
US5254854A (en) 1991-11-04 1993-10-19 At&T Bell Laboratories Scanning microscope comprising force-sensing means and position-sensitive photodetector
US5308974B1 (en) * 1992-11-30 1998-01-06 Digital Instr Inc Scanning probe microscope using stored data for vertical probe positioning

Also Published As

Publication number Publication date
TW280928B (enExample) 1996-07-11
US5693938A (en) 1997-12-02
EP0709704A1 (en) 1996-05-01
KR960014991A (ko) 1996-05-22

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Legal Events

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A300 Application deemed to be withdrawn because no request for examination was validly filed

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20030107