JPH079374Y2 - ウエハ支持具 - Google Patents
ウエハ支持具Info
- Publication number
- JPH079374Y2 JPH079374Y2 JP1988158690U JP15869088U JPH079374Y2 JP H079374 Y2 JPH079374 Y2 JP H079374Y2 JP 1988158690 U JP1988158690 U JP 1988158690U JP 15869088 U JP15869088 U JP 15869088U JP H079374 Y2 JPH079374 Y2 JP H079374Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support
- end plates
- side frames
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 94
- 230000003014 reinforcing effect Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 11
- 238000005452 bending Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 238000003466 welding Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 238000007665 sagging Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
- 238000005493 welding type Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988158690U JPH079374Y2 (ja) | 1988-12-06 | 1988-12-06 | ウエハ支持具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988158690U JPH079374Y2 (ja) | 1988-12-06 | 1988-12-06 | ウエハ支持具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0279023U JPH0279023U (en, 2012) | 1990-06-18 |
| JPH079374Y2 true JPH079374Y2 (ja) | 1995-03-06 |
Family
ID=31439242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988158690U Expired - Lifetime JPH079374Y2 (ja) | 1988-12-06 | 1988-12-06 | ウエハ支持具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079374Y2 (en, 2012) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5346670A (en) * | 1976-10-08 | 1978-04-26 | Matsushita Electric Ind Co Ltd | Electrostatic capaciyt coupling type touch switch |
| JPS5920629U (ja) * | 1982-07-30 | 1984-02-08 | 株式会社テクニスコ | 拡散治具 |
| JPS5940443U (ja) * | 1982-09-08 | 1984-03-15 | 三井造船株式会社 | 赤道リング建造用吊足場 |
| JPS5940444U (ja) * | 1982-09-10 | 1984-03-15 | 住友軽金属工業株式会社 | 吊足場 |
| JPS6346670A (ja) * | 1986-08-14 | 1988-02-27 | Matsushita Commun Ind Co Ltd | デイスクカ−トリツジ |
| JPH0810680B2 (ja) * | 1987-05-08 | 1996-01-31 | 東京エレクトロン東北株式会社 | 熱処理用ボ−ト |
| JPH02123736A (ja) * | 1988-11-02 | 1990-05-11 | Tel Sagami Ltd | 縦型熱処理炉用ウェハボート |
-
1988
- 1988-12-06 JP JP1988158690U patent/JPH079374Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0279023U (en, 2012) | 1990-06-18 |
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