JPH079359Y2 - プラズマ装置 - Google Patents
プラズマ装置Info
- Publication number
- JPH079359Y2 JPH079359Y2 JP1986061399U JP6139986U JPH079359Y2 JP H079359 Y2 JPH079359 Y2 JP H079359Y2 JP 1986061399 U JP1986061399 U JP 1986061399U JP 6139986 U JP6139986 U JP 6139986U JP H079359 Y2 JPH079359 Y2 JP H079359Y2
- Authority
- JP
- Japan
- Prior art keywords
- resonator
- plasma
- rectangular waveguide
- waveguide
- microwaves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010168 coupling process Methods 0.000 claims description 20
- 230000008878 coupling Effects 0.000 claims description 19
- 238000005859 coupling reaction Methods 0.000 claims description 19
- 230000005684 electric field Effects 0.000 claims description 19
- 230000005540 biological transmission Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000010453 quartz Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 239000004020 conductor Substances 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 230000005672 electromagnetic field Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986061399U JPH079359Y2 (ja) | 1986-04-23 | 1986-04-23 | プラズマ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986061399U JPH079359Y2 (ja) | 1986-04-23 | 1986-04-23 | プラズマ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62175048U JPS62175048U (enrdf_load_stackoverflow) | 1987-11-06 |
| JPH079359Y2 true JPH079359Y2 (ja) | 1995-03-06 |
Family
ID=30894700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986061399U Expired - Lifetime JPH079359Y2 (ja) | 1986-04-23 | 1986-04-23 | プラズマ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079359Y2 (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61131454A (ja) * | 1984-11-30 | 1986-06-19 | Fujitsu Ltd | マイクロ波プラズマ処理方法と装置 |
-
1986
- 1986-04-23 JP JP1986061399U patent/JPH079359Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62175048U (enrdf_load_stackoverflow) | 1987-11-06 |
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