JPH078970A - Removal of alcohol in water - Google Patents
Removal of alcohol in waterInfo
- Publication number
- JPH078970A JPH078970A JP15876293A JP15876293A JPH078970A JP H078970 A JPH078970 A JP H078970A JP 15876293 A JP15876293 A JP 15876293A JP 15876293 A JP15876293 A JP 15876293A JP H078970 A JPH078970 A JP H078970A
- Authority
- JP
- Japan
- Prior art keywords
- water
- exchange resin
- alcohols
- tower
- activated carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Removal Of Specific Substances (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は水中のアルコール類の除
去方法に係り、特に、水中の低級アルコール類を効率的
に分解除去することができ、例えば半導体排水中に含ま
れる微量有機物質の除去処理に有効な水中のアルコール
類の除去方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for removing alcohols in water, and more particularly, it can efficiently decompose and remove lower alcohols in water. For example, removal of trace organic substances contained in semiconductor wastewater. It relates to a method for removing alcohols in water effective for treatment.
【0002】[0002]
【従来の技術】従来、半導体排水中に含まれる微量有機
物質の除去方法としては、活性炭吸着法、イオン交換
法、RO(逆浸透膜分離)法等が採用されている。2. Description of the Related Art Conventionally, an activated carbon adsorption method, an ion exchange method, an RO (reverse osmosis membrane separation) method and the like have been adopted as a method for removing a trace amount of organic substances contained in semiconductor waste water.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、上記従
来法はいずれも次のような問題点を有している。 活性炭吸着法:界面活性剤、フェノール類に対する
吸着量は高いが、低級アルコール類の吸着量は小さい。 イオン交換法:酸、塩基物質は除去できるが、低級
アルコール類の除去はできない。 RO法:プロパノール、エチレングリコールの除去
はできるが、メタノールの除去はできない。However, each of the above conventional methods has the following problems. Activated carbon adsorption method: The adsorption amount for surfactants and phenols is high, but the adsorption amount for lower alcohols is small. Ion exchange method: Acid and basic substances can be removed, but lower alcohols cannot be removed. RO method: Propanol and ethylene glycol can be removed, but methanol cannot be removed.
【0004】このように、従来の微量有機物質の除去法
では低級アルコール類を十分に除去することができな
い。As described above, the conventional methods for removing trace organic substances cannot sufficiently remove lower alcohols.
【0005】なお、従来において、半導体排水処理シス
テムとして、活性炭による吸着処理後、イオン交換処理
する方法も多用されているが、上述の如く、各々の処理
において、アルコール類の除去が困難であることから、
これらを組み合わせても、アルコール類の除去において
十分な効果は得られない。Conventionally, as a semiconductor wastewater treatment system, a method of ion-exchange treatment after adsorption treatment with activated carbon is often used, but as described above, it is difficult to remove alcohols in each treatment. From
Even if these are combined, a sufficient effect cannot be obtained in removing alcohols.
【0006】従ってこのようなことから、特に、低級ア
ルコール類を含む半導体排水の回収、再利用を可能とす
るために、従来法では除去困難な低級アルコール類を効
率的に除去する方法の開発が望まれている。Therefore, in particular, in order to enable recovery and reuse of semiconductor wastewater containing lower alcohols, a method for efficiently removing lower alcohols, which is difficult to remove by conventional methods, has been developed. Is desired.
【0007】本発明は上記従来の実情に鑑みてなされた
ものであって、水中のアルコール類を容易かつ効率的に
分解除去する方法を提供することを目的とする。The present invention has been made in view of the above conventional circumstances, and an object thereof is to provide a method for easily and efficiently decomposing and removing alcohols in water.
【0008】[0008]
【課題を解決するための手段】本発明の水中のアルコー
ル類の除去方法は、アルコール類を含む水を、活性炭を
担体とする金属触媒存在下に酸化剤と接触させた後、イ
オン交換樹脂と接触させることを特徴とする。The method for removing alcohols in water according to the present invention comprises the steps of contacting water containing alcohols with an oxidizing agent in the presence of a metal catalyst having activated carbon as a carrier, and then using an ion exchange resin. It is characterized in that they are brought into contact with each other.
【0009】以下に本発明を詳細に説明する。本発明の
方法において、活性炭を担体とする金属触媒に担持させ
る触媒金属としては、触媒効果の面から白金族系の貴金
属或いはそれを主成分とする合金が好ましく、その担持
量は0.05〜5重量%が好適である。なお、触媒の形
状には特に制限はない。The present invention will be described in detail below. In the method of the present invention, the catalytic metal supported on the metal catalyst having activated carbon as a carrier is preferably a platinum group noble metal or an alloy containing it as a main component from the viewpoint of catalytic effect, and the supported amount is 0.05 to 5% by weight is preferred. The shape of the catalyst is not particularly limited.
【0010】一方、酸化剤としては、過酸化水素(H2
O2 )、過硫酸ナトリウム、過硫酸カリウムが有効であ
る。On the other hand, hydrogen peroxide (H 2
O 2 ), sodium persulfate and potassium persulfate are effective.
【0011】このような酸化剤の使用量は被処理水中の
アルコール類の濃度や種類に応じて、当該アルコール類
がイオン交換樹脂に吸着されやすい化合物に酸化分解さ
れるに必要かつ十分な量となるように適宜決定される。The amount of such an oxidant to be used depends on the concentration and type of alcohols in the water to be treated, and is an amount necessary and sufficient for the oxidative decomposition of the alcohols into a compound that is easily adsorbed by the ion exchange resin. It is appropriately determined so that
【0012】反応温度は常温〜100℃の範囲で任意に
設定可能であるが、特に常温〜40℃の範囲とするのが
好適である。反応温度を超える高温になると、触媒層で
の反応効率は上昇するが、イオン交換樹脂の劣化の防止
のために、加圧及び冷却操作が必要となり、好ましくな
い。The reaction temperature can be arbitrarily set in the range of room temperature to 100 ° C., but particularly preferably in the range of room temperature to 40 ° C. When the temperature exceeds the reaction temperature, the reaction efficiency in the catalyst layer increases, but pressurization and cooling operations are required to prevent deterioration of the ion exchange resin, which is not preferable.
【0013】本発明の水中のアルコール類の除去方法の
実施方法としては、原水(アルコール類を含む水)に所
定量の酸化剤を添加混合した後、活性炭を担体とする金
属触媒を充填した触媒反応塔に通水した後、イオン交換
樹脂塔、例えば弱アニオン交換樹脂塔、強カチオン交換
樹脂塔及び強アニオン交換樹脂塔に順次通水する方法が
挙げられる。この際、原水の加温を必要とする場合に
は、原水を触媒反応塔に送給する配管と触媒反応塔の処
理水の排出配管に熱交換器を設けて原水の加温を行なう
と共に、触媒反応塔の処理水との熱交換を行なうのが好
ましい。As a method for carrying out the method for removing alcohols in water according to the present invention, a catalyst in which a predetermined amount of an oxidizing agent is added to and mixed with raw water (water containing alcohols) and then a metal catalyst having activated carbon as a carrier is filled therein is used. After passing water through the reaction tower, there may be mentioned a method of successively passing water through an ion exchange resin tower, for example, a weak anion exchange resin tower, a strong cation exchange resin tower and a strong anion exchange resin tower. At this time, when it is necessary to heat the raw water, a pipe for feeding the raw water to the catalytic reaction tower and a pipe for discharging the treated water of the catalytic reaction tower are provided with heat exchangers to heat the raw water, It is preferable to perform heat exchange with the treated water in the catalytic reaction column.
【0014】このような本発明の水中のアルコール類の
除去方法は、特に、有機酸等に比べて従来法では除去困
難な、炭素数1〜4の低級アルコール類の除去に極めて
有効である。具体的には、半導体製造工程から排出され
る半導体排水中に含まれる微量有機物質としての低級ア
ルコール類の分解除去に有効である。The method for removing alcohols in water according to the present invention is extremely effective for removing lower alcohols having 1 to 4 carbon atoms, which are more difficult to remove by conventional methods than organic acids. Specifically, it is effective for decomposing and removing lower alcohols as trace organic substances contained in semiconductor wastewater discharged from the semiconductor manufacturing process.
【0015】[0015]
【作用】活性炭を担体とする金属触媒の存在下に、アル
コール類と酸化剤、例えばH2O2 とを反応させると、
下記反応式に従って、アルコールは効率的に酸化分解さ
れて、アルデヒドとなる。When an alcohol is reacted with an oxidizing agent such as H 2 O 2 in the presence of a metal catalyst having activated carbon as a carrier,
According to the following reaction formula, alcohol is efficiently oxidatively decomposed into aldehyde.
【0016】 CH3 OH+H2 O2 → HCHO+2H2 O C2 H5 OH+H2 O2 → CH3 CHO+2H2 O このようにして生成したアルデヒド類は、イオン交換樹
脂により容易に捕捉されて除去される。CH 3 OH + H 2 O 2 → HCHO + 2H 2 O C 2 H 5 OH + H 2 O 2 → CH 3 CHO + 2H 2 O The aldehydes thus produced are easily captured and removed by the ion exchange resin.
【0017】前述の如く、従来、半導体排水処理システ
ムとして活性炭−イオン交換樹脂の処理系は多用されて
おり、従って、本発明の方法は、従来の装置において活
性炭に金属を担持させることにより、装置の設計変更を
要することなく、容易に実施できる。As described above, conventionally, a treatment system of activated carbon-ion exchange resin is frequently used as a semiconductor wastewater treatment system. Therefore, the method of the present invention is carried out by loading a metal on activated carbon in a conventional apparatus. It can be easily implemented without the need for design changes.
【0018】[0018]
【実施例】以下に実施例及び比較例を挙げて本発明をよ
り具体的に説明するが、本発明はその要旨を超えない限
り、以下の実施例に限定されるものではない。EXAMPLES The present invention will be described in more detail with reference to Examples and Comparative Examples, but the present invention is not limited to the following Examples unless it exceeds the gist.
【0019】実施例1 超純水にメタノール及びイソプロピルアルコールを各々
1mg/l添加した溶液を原水とし、これに酸化剤とし
て過酸化水素水40mg/lを添加して図1に示す処理
装置に通水して処理した。図1において、1は0.5重
量%Pt担持活性炭を充填した触媒反応塔、2は弱アニ
オン交換樹脂塔、3は強カチオン交換樹脂塔、4は強ア
ニオン交換樹脂塔であり、11〜15の各符号は配管で
ある。即ち、酸化剤を添加した原水は、触媒反応塔1を
通水させた後、弱アニオン交換樹脂塔2、強カチオン交
換樹脂塔3及び強アニオン交換樹脂塔4に順次通水させ
て処理した。Example 1 A solution prepared by adding 1 mg / l each of methanol and isopropyl alcohol to ultrapure water was used as raw water, and 40 mg / l of hydrogen peroxide solution was added as an oxidant to the solution, which was passed through the treatment apparatus shown in FIG. Treated with water. In FIG. 1, 1 is a catalytic reaction tower filled with 0.5 wt% Pt-supported activated carbon, 2 is a weak anion exchange resin tower, 3 is a strong cation exchange resin tower, 4 is a strong anion exchange resin tower, and 11 to 15 Each symbol of is a pipe. That is, the raw water containing the oxidizing agent was passed through the catalytic reaction tower 1 and then passed through the weak anion exchange resin tower 2, the strong cation exchange resin tower 3 and the strong anion exchange resin tower 4 in that order for treatment.
【0020】なお、触媒反応塔1の通水条件はSV=2
hr-1,温度20℃とし、各イオン交換樹脂塔2、3、
4の通水条件はSV=1hr-1とした。The water flow condition of the catalytic reaction tower 1 is SV = 2.
hr −1 , temperature 20 ° C., each ion exchange resin tower 2, 3,
The water flow condition of No. 4 was SV = 1 hr −1 .
【0021】得られた処理水について、微量TOC計
(ジャスコインタナショナル(株)製「700型高感度
TOC測定装置」)を用いて測定を行ない、TOCの除
去率を求めてアルコール類の分解除去性能を評価した。
結果を表1に示す。The treated water thus obtained is measured using a trace amount TOC meter (“700 type high-sensitivity TOC measuring device” manufactured by Jusco International Co., Ltd.), and the TOC removal rate is determined to decompose and remove alcohols. The performance was evaluated.
The results are shown in Table 1.
【0022】比較例1 触媒反応塔の代りに、金属触媒を担持していない活性炭
充填塔に原水を通水したこと以外は実施例1と同様に行
なって、分解除去性能を評価し、結果を表1に示した。Comparative Example 1 The decomposition and removal performance was evaluated in the same manner as in Example 1 except that raw water was passed through an activated carbon packed column which did not carry a metal catalyst instead of the catalytic reaction column, and the decomposition and removal performance was evaluated. The results are shown in Table 1.
【0023】比較例2 イオン交換樹脂塔2、3、4に通水せず、触媒反応塔1
のみに原水を通水したこと以外は実施例1と同様に行な
って、分解除去性能を評価し、結果を表1に示した。Comparative Example 2 Catalytic reaction tower 1 without passing water to ion exchange resin towers 2, 3 and 4.
The decomposition and removal performance was evaluated in the same manner as in Example 1 except that the raw water was passed through only. The results are shown in Table 1.
【0024】[0024]
【表1】 [Table 1]
【0025】表1より、本発明の方法によれば、アルコ
ール類を容易に分解除去できることが明らかである。From Table 1, it is clear that according to the method of the present invention, alcohols can be easily decomposed and removed.
【0026】[0026]
【発明の効果】以上詳述した通り、本発明の水中のアル
コール類の除去方法によれば、水中のアルコール類、特
に、従来除去困難とされていた低級アルコール類を、苛
酷な反応条件等を採用することなく、容易に分解除去す
ることができる。As described in detail above, according to the method for removing alcohols in water of the present invention, alcohols in water, particularly lower alcohols which have been conventionally difficult to remove, can be treated under severe reaction conditions. It can be easily decomposed and removed without using it.
【0027】本発明の方法は、特に、半導体排水中の微
量有機物質としての低級アルコールの分解除去に有効で
ある。The method of the present invention is particularly effective for decomposing and removing lower alcohols as trace organic substances in semiconductor wastewater.
【図1】実施例1で用いた処理装置の系統図である。FIG. 1 is a system diagram of a processing device used in a first embodiment.
1 触媒反応塔 2 弱アニオン交換樹脂塔 3 強カチオン交換樹脂塔 4 強アニオン交換樹脂塔 1 Catalytic Reaction Tower 2 Weak Anion Exchange Resin Tower 3 Strong Cation Exchange Resin Tower 4 Strong Anion Exchange Resin Tower
Claims (1)
とする金属触媒存在下に酸化剤と接触させた後、イオン
交換樹脂と接触させることを特徴とする水中のアルコー
ル類の除去方法。1. A method for removing alcohols from water, which comprises contacting water containing alcohols with an oxidizing agent in the presence of a metal catalyst having activated carbon as a carrier, and then contacting with an ion exchange resin.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15876293A JPH078970A (en) | 1993-06-29 | 1993-06-29 | Removal of alcohol in water |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15876293A JPH078970A (en) | 1993-06-29 | 1993-06-29 | Removal of alcohol in water |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH078970A true JPH078970A (en) | 1995-01-13 |
Family
ID=15678791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15876293A Pending JPH078970A (en) | 1993-06-29 | 1993-06-29 | Removal of alcohol in water |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH078970A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013208557A (en) * | 2012-03-30 | 2013-10-10 | Kurita Water Ind Ltd | Method for treating organic matter-containing water |
CN110052294A (en) * | 2019-04-18 | 2019-07-26 | 中峰化学有限公司 | Metal ion removes filter in isopropanol water solution |
-
1993
- 1993-06-29 JP JP15876293A patent/JPH078970A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013208557A (en) * | 2012-03-30 | 2013-10-10 | Kurita Water Ind Ltd | Method for treating organic matter-containing water |
CN110052294A (en) * | 2019-04-18 | 2019-07-26 | 中峰化学有限公司 | Metal ion removes filter in isopropanol water solution |
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