JPH0782671B2 - Magneto-optical recording medium - Google Patents
Magneto-optical recording mediumInfo
- Publication number
- JPH0782671B2 JPH0782671B2 JP60186835A JP18683585A JPH0782671B2 JP H0782671 B2 JPH0782671 B2 JP H0782671B2 JP 60186835 A JP60186835 A JP 60186835A JP 18683585 A JP18683585 A JP 18683585A JP H0782671 B2 JPH0782671 B2 JP H0782671B2
- Authority
- JP
- Japan
- Prior art keywords
- magneto
- recording medium
- optical recording
- composition
- rare earth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
- G11B11/10586—Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material
- G11B11/10589—Details
Landscapes
- Thin Magnetic Films (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、光磁気記録媒体、例えばレーザー光等の照射
による加熱により書き換えが可能な記録媒体に関する。The present invention relates to a magneto-optical recording medium, for example, a rewritable recording medium by heating by irradiation with laser light or the like.
本発明は光磁気記録媒体において、従来から用いられて
きた重希土類金属Tb,Gd,Dy,遷移金属Fe,Co,Niのほか
に、軽希土類金属Sm,Pr,Nd,CeさらにCr,Ti,Al,Cuを添加
することにより、その光磁気特性を向上させ、スパッタ
リング用合金ターゲットの作製を容易に行なえ、さらに
光磁気特性を長期安定化できるようにしたものである。The present invention, in the magneto-optical recording medium, in addition to the heavy rare earth metals Tb, Gd, Dy, transition metals Fe, Co, Ni that have been conventionally used, light rare earth metals Sm, Pr, Nd, Ce and further Cr, Ti, By adding Al and Cu, the magneto-optical characteristics are improved, the alloy target for sputtering can be easily manufactured, and the magneto-optical characteristics can be stabilized for a long period of time.
従来の光磁気記録媒体は例えば、特開昭57-94948のよう
に重希土類金属Tb,Gd,Dyのうち1種類以上およびFeまた
はCoのうち1種類以上で構成された非晶質合金薄膜から
なる。A conventional magneto-optical recording medium is composed of, for example, an amorphous alloy thin film composed of one or more kinds of heavy rare earth metals Tb, Gd, Dy and one or more kinds of Fe or Co as in JP-A-57-94948. Become.
垂直磁化膜を得るための条件は公知のように Ku>▲2πM2 S▼ と書きあらわされる。但しKuは磁気異方性エネルギー
(erg/cc),Msは飽和磁化(emu/cc)である。スパッタ
リングにより作製された重希土類金属−鉄系および重希
土類金属−コバルト系合金は非晶質であり、その結晶質
と同様、フエリ磁性体となる。そのため、残留磁化が小
さくなり、保磁力が大きくなる組成からなる薄膜を光磁
気記録媒体として用いてきた。The condition for obtaining the perpendicularly magnetized film is written as Ku><2πM 2 S ▼, as is known. However, Ku is magnetic anisotropy energy (erg / cc) and Ms is saturation magnetization (emu / cc). The heavy rare earth metal-iron-based alloy and the heavy rare earth metal-cobalt-based alloy produced by sputtering are amorphous and, like their crystalline materials, become a ferrimagnetic material. Therefore, a thin film made of a composition having a small residual magnetization and a large coercive force has been used as a magneto-optical recording medium.
しかし、光磁気記録媒体として用いられるTb,Gd,Dyは公
知のように補償組成付近で遷移金属と金属間化合物を作
りやすく、それらを熔融し鋳造しただけでは割れやすい
という欠点があり、合金ターゲットを作製するには特殊
な技術が必要である。従って、スパッタリングにより薄
膜を作製するには複合ターゲットが用いられている。However, Tb, Gd, Dy used as a magneto-optical recording medium has a drawback that it is easy to form transition metals and intermetallic compounds in the vicinity of the compensating composition as known, and they are easily cracked only by melting and casting them. Special technology is required to fabricate. Therefore, a composite target is used to form a thin film by sputtering.
複合ターゲット法では 薄膜の組成制御が困難である。The composite target method makes it difficult to control the composition of thin films.
均一な組成の薄膜を得るためには、ペレットの配置
をくふうするなど、煩雑な手続きが必要である。という
欠点を有する。In order to obtain a thin film having a uniform composition, complicated procedures such as the placement of pellets are necessary. It has the drawback.
特に上記項は、薄膜組成の不均一が再生時のノイズの
原因となるため、光磁気記録媒体のC/N向上のためには
克服しなければならない重大な欠陥である。In particular, the above-mentioned item is a serious defect that must be overcome in order to improve the C / N of the magneto-optical recording medium because the non-uniformity of the thin film composition causes noise during reproduction.
さらに、一般に希土類は非常に酸化しやすく、光磁気記
録媒体として用いる場合には、特性の長期間にわたる安
定性が問題となる。Furthermore, rare earths are generally very susceptible to oxidation, and when used as a magneto-optical recording medium, stability of characteristics over a long period of time becomes a problem.
そこで、本発明はこのような問題点を解決するもので、
その目的とするところは均一な組成の膜を作製するため
に必要な合金ターゲットの作製を容易にし、長期間にわ
たる光磁気特性の安定性を向上させ、従来のものと比べ
て安価で高性能な光磁気記録媒体を提供することにあ
る。Therefore, the present invention solves such problems,
Its purpose is to facilitate the production of the alloy target required for producing a film with a uniform composition, improve the stability of the magneto-optical characteristics over a long period of time, and make it cheaper and have higher performance than conventional ones. It is to provide a magneto-optical recording medium.
本発明の光磁気記録媒体は、軽希土類金属(以下、LRと
いう)Sm,Nd,Pr,Ceのうち1種と、重希土類金属(以
下、HRという)Tb,Dy,TbGd又はDyTbの組合わせの中から
選択された1種と、遷移金属FeCo又はFeCoNiの組合わせ
の中から選択された1種及びその他の元素Cr,Ti,Al,Cu
のうち1種とからなり、組成式を{(LR)1-x(HR)x}
y(FeCo,FeCoNi)1-y-z(Cr,Ti,Al,Cu)zと表したと
き、 0.2<x≦0.8 0.1≦y≦0.5 0<z≦0.1 の範囲にあることを特徴とする。組成式を (LR1-xHRx)yTM1-y-z(Cr,Ti,Al,Cu)zとしたとき本発
明では、x、y、zは、0.1≦x≦0.8,0.2≦y≦0.5,0
<z≦0.1である。xはより好ましくは、0.4≦x≦0.
8。最も好ましくは、0.5≦x≦0.7である。xの上限を
規定したのは、これ以上では鋳造ターゲットを容易に作
成できなくなり、記録膜の強度に影響を与えることにな
るためであり、また、xの下限を規定したのは、これ以
下では垂直磁気異方性が得られず、光磁気記録媒体の記
録膜として利用できないからである。またyはより好ま
しくは0.25y0.4,最も好ましくは、0.3y0.4で
ある。またzはより好ましくは0.02z0.1、最も好
ましくは0.03z0.08である。The magneto-optical recording medium of the present invention is a combination of a light rare earth metal (hereinafter referred to as LR) Sm, Nd, Pr and Ce and a heavy rare earth metal (hereinafter referred to as HR) Tb, Dy, TbGd or DyTb. One selected from among the combinations of transition metals FeCo or FeCoNi and other elements Cr, Ti, Al, Cu
The composition formula is {(LR) 1-x (HR) x }.
When expressed as y (FeCo, FeCoNi) 1-yz (Cr, Ti, Al, Cu) z , it is characterized in that 0.2 <x ≤ 0.8 0.1 ≤ y ≤ 0.5 0 <z ≤ 0.1. When the composition formula is (LR 1-x HR x ) y TM 1-yz (Cr, Ti, Al, Cu) z , in the present invention, x, y, and z are 0.1 ≦ x ≦ 0.8, 0.2 ≦ y ≦ 0.5,0
<Z ≦ 0.1. x is more preferably 0.4 ≦ x ≦ 0.
8. Most preferably, 0.5 ≦ x ≦ 0.7. The upper limit of x is stipulated because the casting target cannot be easily prepared above this, and the strength of the recording film is affected, and the lower limit of x is stipulated below this. This is because the perpendicular magnetic anisotropy cannot be obtained and it cannot be used as a recording film of a magneto-optical recording medium. Further, y is more preferably 0.25 y0.4, and most preferably 0.3 y0.4. Further, z is more preferably 0.02z0.1, and most preferably 0.03z0.08.
実施例により、本発明の効果について述べる。本実施例
で示す薄膜はすべてスパッタリングにより作製した。な
お、組成式を {(LR)1-x(HR)x}y(TM)1-y-z(Cr,Ti,Al,Cu)zと
表わしたとき、x0.8の薄膜については、低周波溶解
炉で溶解し鋳造したのち、直径4インチ、厚さ4mmに成
形した合金をターゲットとして用いた。The effects of the present invention will be described with reference to examples. All the thin films shown in this example were formed by sputtering. When the composition formula is expressed as {(LR) 1-x (HR) x } y (TM) 1-yz (Cr, Ti, Al, Cu) z , the thin film of x0.8 has low frequency melting. After melting and casting in a furnace, an alloy having a diameter of 4 inches and a thickness of 4 mm was used as a target.
スパッタリング条件は初期真空度1×10-6Torr以下、ア
ルゴン圧5m Torr、基板バイアス0Vである。The sputtering conditions are an initial vacuum degree of 1 × 10 −6 Torr or less, an argon pressure of 5 m Torr, and a substrate bias of 0V.
第1図に(Nd0.4Dy0.6)0.35(Fe0.7Co0.3)0.65-z(C
r,Ti,Al,Cu)zのカー回転角(以下、θkとよぶ。)の
組成依存性を示す。第2図にCr,Ti,Alの添加によりカー
回転角はやや下がってしまう。しかし、これらの元素を
添加したことによる候向性の向上はそのような不利を補
うだけのものとなっている。Figure 1 shows (Nd 0.4 Dy 0.6 ) 0.35 (Fe 0.7 Co 0.3 ) 0.65-z (C
The composition dependence of the Kerr rotation angle of r, Ti, Al, Cu) z (hereinafter referred to as θk) is shown. In Fig. 2, the Kerr rotation angle is slightly lowered by adding Cr, Ti, and Al. However, the improvement of the weathering tendency due to the addition of these elements only compensates for such a disadvantage.
第2図に(Nd0.4Tb0.4Gd0.2)0.35(Fe0.7Ni0.1Co0.2)
0.60(Cr,Ti,Al,Cu)0.05の光の透過率変化の時間依存
性を示す。試料には保護膜をつけていない。透過率の増
大は、反射率の減少を意味するため、透過率が増大する
ことは読み出しの際に非常に不利となる。耐候性の向上
に対して添加効果が大きいのは、Cr,Ti,Al,Cuの順とな
っている。Fig. 2 shows (Nd 0.4 Tb 0.4 Gd 0.2 ) 0.35 (Fe 0.7 Ni 0.1 Co 0.2 )
The time dependence of the light transmittance change of 0.60 (Cr, Ti, Al, Cu) 0.05 is shown. The sample has no protective film. Since the increase of the transmittance means the decrease of the reflectance, the increase of the transmittance is very disadvantageous at the time of reading. Cr, Ti, Al, and Cu are in the order of large addition effect on the improvement of weather resistance.
第3図に(LR0.4Tb0.6)0.35(Fe0.7Co0.3)0.60Cr0.05
の光の透過率変化の時間依存性を示す。上の例と同じ傾
向を示している。Fig. 3 shows (LR 0.4 Tb 0.6 ) 0.35 (Fe 0.7 Co 0.3 ) 0.60 Cr 0.05
7 shows the time dependence of the change in the light transmittance of. It shows the same trend as the example above.
次に、第4図及び第1表に、軽希土類の組成の臨界点
(Xの範囲)に関するデータを示す。第4図は、第1表
に示される各組成のサンプルについての実効垂直磁気異
方性をプロットしたもので、サンプル2から3の間で負
の値から正の値に転じている。すなわち、光磁気記録媒
体は垂直磁化膜を記録膜として利用するので、この第4
図から軽希土類の組成の上限は、約0.9となる。Next, FIG. 4 and Table 1 show data on the critical point (range of X) of the composition of light rare earths. FIG. 4 is a plot of the effective perpendicular magnetic anisotropy for the samples having the respective compositions shown in Table 1, in which the negative value changes to the positive value between Samples 2 and 3. That is, since the magneto-optical recording medium uses the perpendicular magnetization film as a recording film,
From the figure, the upper limit of the composition of light rare earths is about 0.9.
〔発明の効果〕 以上述べたように本発明によれば、合金ターゲットを容
易に作製できる組成で従来用いられてきた光磁気記録媒
体と同等の特性を出すことができる。また資源的に僅少
なTbを豊富なNdで置換することができるため、将来、予
想される材料の枯渇からも逃れることができるという効
果を有する。 [Effects of the Invention] As described above, according to the present invention, it is possible to obtain the same characteristics as those of the magneto-optical recording medium that has been conventionally used with a composition that allows easy production of an alloy target. In addition, since Tb, which is scarce in terms of resources, can be replaced with abundant Nd, it has an effect of being able to escape from the depletion of materials expected in the future.
さらに、光磁気記録媒体では、不可欠な光磁気特性が長
期間にわたって安定しているという効果も有する。Further, the magneto-optical recording medium has an effect that essential magneto-optical characteristics are stable for a long period of time.
第1図(Nd0.4Dy0.6)0.35(Fe0.7Co0.3)0.65-z(Cr,T
i,Al,Cu)zのカー回転角のz依存性図。 第2図(Nd0.4Tb0.4Gd0.2)0.35(Fe0.7Co0.2Ni0.1)
0.60(Cr,Ti,Al,Cu)0.05の透過率と大気にさらした時
間の関係図。 第3図(LR0.4Tb0.6)0.35(Fe0.7Co0.3)0.60Cr0.05の
透過率と大気にさらした時間の関係図。 第4図 各組成のサンプルと実効垂直磁気異方性との関
係図。Fig. 1 (Nd 0.4 Dy 0.6 ) 0.35 (Fe 0.7 Co 0.3 ) 0.65-z (Cr, T
i, Al, Cu) z dependence view of Kerr rotation angle of z. Fig. 2 (Nd 0.4 Tb 0.4 Gd 0.2 ) 0.35 (Fe 0.7 Co 0.2 Ni 0.1 )
Relationship between the transmittance of 0.60 (Cr, Ti, Al, Cu) 0.05 and the time of exposure to the atmosphere. Fig. 3 Relation between transmittance of (LR 0.4 Tb 0.6 ) 0.35 (Fe 0.7 Co 0.3 ) 0.60 Cr 0.05 and time of exposure to the atmosphere. FIG. 4 is a diagram showing the relationship between each composition sample and effective perpendicular magnetic anisotropy.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 下川渡 聡 長野県諏訪市大和3丁目3番5号 株式会 社諏訪精工舎内 (72)発明者 杉本 守 長野県諏訪市大和3丁目3番5号 株式会 社諏訪精工舎内 (72)発明者 根橋 聡 長野県諏訪市大和3丁目3番5号 株式会 社諏訪精工舎内 (56)参考文献 特開 昭59−103314(JP,A) 特開 昭59−68854(JP,A) 特開 昭61−222104(JP,A) 特開 昭61−34744(JP,A) 特開 昭61−22608(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Satoshi Shimokawa 3-5 Yamato, Suwa, Nagano Prefecture 3-5 Suwa Seikosha Co., Ltd. (72) Mamoru Sugimoto 3-3.5 Yamato, Suwa, Nagano Prefecture No. Stock Company Suwa Seikosha Co., Ltd. (72) Inventor Satoshi Nehashi 3-5 Yamato, Suwa City, Nagano Prefecture Stock Company Suwa Seikosha Co., Ltd. (56) Reference JP-A-59-103314 Kai 59-68854 (JP, A) JP 61-222104 (JP, A) JP 61-34744 (JP, A) JP 61-22608 (JP, A)
Claims (1)
r,Ceのうち1種と、重希土類金属(以下、HRという)T
b,Dy,TbGd又はDyTbの組合わせの中から選択された1種
と、遷移金属FeCo又はFeCoNiの組合わせの中から選択さ
れた1種及びその他の元素Cr,Ti,Al,Cuのうち1種とか
らなり、組成式を{(LR)1-x(HR)x}y(FeCo,FeCoN
i)1-y-z(Cr,Ti,Al,Cu)zと表したとき、 0.2<x≦0.8 0.1≦y≦0.5 0<z≦0.1 の範囲にあることを特徴とする光磁気記録媒体。1. Light rare earth metal (hereinafter referred to as LR) Sm, Nd, P
One of r and Ce and heavy rare earth metal (hereinafter referred to as HR) T
1 selected from the combination of b, Dy, TbGd or DyTb, 1 selected from the combination of transition metals FeCo or FeCoNi and other elements Cr, Ti, Al, Cu The composition formula is {(LR) 1-x (HR) x } y (FeCo, FeCoN
i) 1-yz (Cr, Ti, Al, Cu) z , where expressed as 0.2 <x≤0.8 0.1≤y≤0.5 0 <z≤0.1.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60186835A JPH0782671B2 (en) | 1985-08-26 | 1985-08-26 | Magneto-optical recording medium |
NL8602167A NL8602167A (en) | 1985-08-26 | 1986-08-26 | Magneto=optical recording medium - with layer alloy of light and heavy rare earth metals, transition metal and chromium, titanium, aluminium or copper |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60186835A JPH0782671B2 (en) | 1985-08-26 | 1985-08-26 | Magneto-optical recording medium |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6247846A JPS6247846A (en) | 1987-03-02 |
JPH0782671B2 true JPH0782671B2 (en) | 1995-09-06 |
Family
ID=16195459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60186835A Expired - Lifetime JPH0782671B2 (en) | 1985-08-26 | 1985-08-26 | Magneto-optical recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0782671B2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1988001425A1 (en) * | 1986-08-22 | 1988-02-25 | Mitsui Petrochemical Industries, Ltd. | Optomagnetic recording medium and process for its manufacture |
JPS6376134A (en) * | 1986-09-19 | 1988-04-06 | Seiko Epson Corp | Magneto-optical recording medium |
JPS63100636A (en) * | 1986-10-16 | 1988-05-02 | Seiko Epson Corp | Magneto-optical recording medium |
US4950556A (en) * | 1987-10-26 | 1990-08-21 | Minnesota Mining And Manufacturing Company | Magneto-optic recording medium |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5938780A (en) * | 1982-04-10 | 1984-03-02 | Sharp Corp | Magnetooptic storage element |
JPS5968854A (en) * | 1982-09-28 | 1984-04-18 | Seiko Instr & Electronics Ltd | Photomagnetic recording medium |
JPS5984358A (en) * | 1982-11-04 | 1984-05-16 | Seiko Instr & Electronics Ltd | Photomagnetic recording medium |
JPS59103314A (en) * | 1982-12-03 | 1984-06-14 | Seiko Instr & Electronics Ltd | Photomagnetic recording medium |
JPS60101742A (en) * | 1983-11-05 | 1985-06-05 | Kyocera Corp | Photomagnetic recording medium |
JPS6122608A (en) * | 1984-07-11 | 1986-01-31 | Hitachi Ltd | Photomagnetic recording material |
JPS6134744A (en) * | 1984-07-25 | 1986-02-19 | Hitachi Ltd | Photoelectromagnetic recording medium |
JPH0670924B2 (en) * | 1984-11-12 | 1994-09-07 | 住友特殊金属株式会社 | Perpendicular magnetic recording medium |
JPS61196444A (en) * | 1985-02-27 | 1986-08-30 | Toshiba Corp | Photomagnetic disk |
-
1985
- 1985-08-26 JP JP60186835A patent/JPH0782671B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6247846A (en) | 1987-03-02 |
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Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |