JPS5938780A - Magnetooptic storage element - Google Patents
Magnetooptic storage elementInfo
- Publication number
- JPS5938780A JPS5938780A JP14980782A JP14980782A JPS5938780A JP S5938780 A JPS5938780 A JP S5938780A JP 14980782 A JP14980782 A JP 14980782A JP 14980782 A JP14980782 A JP 14980782A JP S5938780 A JPS5938780 A JP S5938780A
- Authority
- JP
- Japan
- Prior art keywords
- amorphous magnetic
- thin film
- easily oxidizable
- film
- magnetic material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【発明の詳細な説明】
(技術範囲)
本発明はレーザ光を用いて情報の記録・再生・消去を行
なうことのできる磁気光学記憶素子に関する。DETAILED DESCRIPTION OF THE INVENTION (Technical Scope) The present invention relates to a magneto-optical storage element that can record, reproduce, and erase information using laser light.
(従来技術)
近年、情報の記録・再生・消去が可能な光記憶素子の開
発が磁気光学記憶素子を中心に活発に推進されている。(Prior Art) In recent years, the development of optical storage elements capable of recording, reproducing, and erasing information has been actively promoted, centering on magneto-optical storage elements.
又、この磁気光学記憶素子の構造て、高い評価を受けて
いるものとして反射膜構造の素子がある。第1図に反射
膜構造の素子の一例の側面図を示す。同図で/はガラス
アクリル樹脂等よりなる透明基板、2はSiO,5i
02゜Si3N4等の透明薄膜、3はG d T b
F e 、 T b I) y F c、GdCo、T
bFe、GdTbDyFe等の希土類、遷移金属合金か
らなる非晶質磁性体薄膜、グは5IO1S +02 、
S i3 N4等の透明薄膜、jはCu、AA。In addition, among the structures of this magneto-optical memory element, there is an element having a reflective film structure, which is highly evaluated. FIG. 1 shows a side view of an example of an element having a reflective film structure. In the figure, / is a transparent substrate made of glass, acrylic resin, etc., 2 is SiO, 5i
02゜Transparent thin film such as Si3N4, 3 is G d T b
F e , T b I) y F c, GdCo, T
Amorphous magnetic thin film made of rare earth or transition metal alloys such as bFe, GdTbDyFe, etc., 5IO1S +02,
Transparent thin film such as S i3 N4, j is Cu, AA.
A u s A g等の反射膜である。以上の反射膜構
造の素子は非晶質磁性体薄膜3の厚みを100A’程度
と非常に薄くしている為透明基板/側から入射した入射
レーザ光か非晶質磁性体薄膜3を透過し該透過した光が
反射膜jにて反射される。従って非晶質磁性体薄膜3表
面にて入射レーザ光が反射された光のカー効果と上記し
た非晶質磁性体薄膜3を透過し該透過した光が反射膜層
jにて反射され再び非晶質磁性体薄膜3を透過する光の
ファラデー効果とが相乗作用を起こしカー回転角の増大
を得るものである。又、透明薄膜−の内部て光1吐干渉
しそれによってもカー回転角の増大の作用を得るもので
ある。It is a reflective film such as AusAg. In the above reflective film structure element, the thickness of the amorphous magnetic thin film 3 is extremely thin, approximately 100A', so that the incident laser light incident from the transparent substrate/side is not transmitted through the amorphous magnetic thin film 3. The transmitted light is reflected by the reflective film j. Therefore, the Kerr effect of the incident laser beam reflected on the surface of the amorphous magnetic thin film 3 and the Kerr effect of the light transmitted through the amorphous magnetic thin film 3 described above are reflected by the reflective film layer j and are again non-conductive. The Faraday effect of the light transmitted through the crystalline magnetic thin film 3 acts synergistically to increase the Kerr rotation angle. Furthermore, the effect of increasing the Kerr rotation angle is also obtained by the interference of one beam of light inside the transparent thin film.
(発明が解決しようとする問題点)
上述の反射膜構造の素子は磁気光学効果の点から見れば
極めて優れた構造であるか、その一方で非晶質磁性体薄
膜3の酸化による特性劣化が大きい事か難点であること
が判明している。つまり、反射膜5及び透明薄膜グを通
過して外気が侵入し非晶質磁性体薄膜3を酸化せしめる
、あるいは反射膜5.透明薄膜グ内部に含まれていた酸
素が非晶質磁性体薄膜3を酸化せしめる現象が発生する
のである。非晶質磁性体薄膜3が酸化すれば保磁力が低
下し磁気光学効果による再生が困難となり極端な場合は
非晶質磁性体薄膜3の垂直磁気異方性が全く無くなり記
録・再生共に不可能となるという著しく不都合な問題が
発生する。(Problems to be Solved by the Invention) The element with the above-mentioned reflective film structure has an extremely excellent structure from the point of view of the magneto-optic effect, but on the other hand, the characteristics may deteriorate due to oxidation of the amorphous magnetic thin film 3. It turns out to be a big problem or a problem. That is, the outside air enters through the reflective film 5 and the transparent thin film and oxidizes the amorphous magnetic thin film 3, or the reflective film 5. A phenomenon occurs in which oxygen contained within the transparent thin film oxidizes the amorphous magnetic thin film 3. If the amorphous magnetic thin film 3 oxidizes, the coercive force decreases, making reproduction by the magneto-optic effect difficult, and in extreme cases, the perpendicular magnetic anisotropy of the amorphous magnetic thin film 3 disappears completely, making both recording and reproducing impossible. A very inconvenient problem arises.
(問題点を解決する為の手段)
本発明は上記問題点を解決する為に磁気光学記憶素子の
構成を、非晶質磁性体薄膜中にTi、Mg等の酸化容易
性金属物質を含有せしめた構成とすることによって、こ
の含有した酸化容易性金属物質にて侵入する酸素を消費
せしめ、非晶質磁性体薄膜の酸化を極力減少せんとする
ものである。(Means for Solving the Problems) In order to solve the above problems, the present invention has a structure of a magneto-optical memory element in which an easily oxidizable metal substance such as Ti or Mg is contained in an amorphous magnetic thin film. By adopting such a structure, the invading oxygen is consumed by the easily oxidizable metal substance contained therein, thereby reducing oxidation of the amorphous magnetic thin film as much as possible.
(実施例)
第一図に示すものは本発明に係る磁気光学記憶素子素子
の一実施例の側面図である。同図で/はカラス、アクリ
ル樹脂等よりなる透り1基板、!はS i O,5i0
2 、Si3N4等の透明薄膜、3′はG d T
l) F c、 TbDyFe、GdCo 、TbFe
、GdTbI)yFc等の希土類・遷移金属合金からな
る非晶質磁性体薄膜、グはSiO,5i02 、Si3
N4等の透明薄膜、5はCu、Affl、Au、Ag等
の反射膜であり、−]−記非晶質磁性体薄膜3′の中に
はf i 、 M g等の福七類金属以上に酸化し易い
酸化容易性金属物質か含有されている。同図の構成にお
いて透明薄膜2は無くとも構わない。(Example) What is shown in FIG. 1 is a side view of an example of the magneto-optical storage element according to the present invention. In the same figure, / is a transparent substrate made of crow, acrylic resin, etc. is S i O,5i0
2, transparent thin film such as Si3N4, 3' is G d T
l) Fc, TbDyFe, GdCo, TbFe
, GdTbI)yFc and other amorphous magnetic thin films made of rare earth/transition metal alloys, G is SiO, 5i02, Si3
A transparent thin film such as N4, 5 is a reflective film such as Cu, Affl, Au, Ag, etc. -]- In the amorphous magnetic thin film 3', there is a transparent thin film such as fi, Mg, etc. Contains easily oxidized metal substances. In the configuration shown in the figure, the transparent thin film 2 may be omitted.
以上の実施例の説明においては反射膜構造の素子におい
て本発明を適用したものを示したか本発明は非晶質磁性
体薄膜の膜厚が充分厚い(10o。In the above description of the embodiments, the present invention is applied to an element having a reflective film structure. However, in the present invention, the thickness of the amorphous magnetic thin film is sufficiently thick (10°).
A°程度)厚膜形の構造の素子、つまりカー効果迎みを
利用する素子においても適用が6丁能なものである。It can also be applied to devices with a thick film structure (about A°), that is, devices that utilize the Kerr effect.
(効 果)
不発り−1によれば非晶質磁性体薄膜中((含有したT
i、Mg等の希土類金属以上に酸化し易い酸化容易性金
属物質の存在により、非晶質磁性体薄膜の酸化を極力抑
制することができるので、この非晶質磁性体薄膜の磁気
的特性を安定化することができ、素子の信頼性が著しく
向上するものである。(Effect) According to Misfire-1, in the amorphous magnetic thin film ((containing T
The presence of easily oxidizable metal substances such as i, Mg, etc., which are more easily oxidized than rare earth metals, can suppress oxidation of the amorphous magnetic thin film as much as possible, so the magnetic properties of this amorphous magnetic thin film can be It can be stabilized and the reliability of the device can be significantly improved.
第1図は従来の磁気光学記憶素子の側面図、第2図は本
発明に係る磁気光学記憶素子の一実施例の側mi図を示
す。
図中、/:透明基板、 −二透明薄膜、3:非晶質磁性
体薄膜、 り:透明薄膜、j:反射膜、 3′ :酸化
容易性物質を含有した非晶質磁性体薄膜。
代理人 弁理士 福士愛彦(他!名)
第1図
第2図FIG. 1 is a side view of a conventional magneto-optical memory element, and FIG. 2 is a side view of an embodiment of the magneto-optic memory element according to the present invention. In the figure, /: transparent substrate, -2 transparent thin film, 3: amorphous magnetic thin film, ri: transparent thin film, j: reflective film, 3': amorphous magnetic thin film containing an easily oxidizable substance. Agent: Patent attorney Yoshihiko Fukushi (and others!) Figure 1 Figure 2
Claims (1)
る希土類、遷移金属合金からなる非晶質磁性体薄膜を形
成してなる磁気光学記憶素子において、前記非晶質磁性
体薄膜中にT i 、 M g等の希土鳩金属以上に酸
化し易い酸化容易性金属物質を含有したことを特徴とす
る磁気光学記憶素子。1. In a magneto-optical memory element formed by forming an amorphous magnetic thin film made of a rare earth or transition metal alloy having an axis of easy magnetization in a direction perpendicular to the film surface on a transparent substrate, the amorphous magnetic thin film contains A magneto-optical memory element characterized by containing an easily oxidizable metal substance such as T i and M g that is more easily oxidized than rare earth metals.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14980782A JPS5938780A (en) | 1982-04-10 | 1982-08-27 | Magnetooptic storage element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14980782A JPS5938780A (en) | 1982-04-10 | 1982-08-27 | Magnetooptic storage element |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4121805A Division JP2566097B2 (en) | 1992-05-14 | 1992-05-14 | Magneto-optical storage element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5938780A true JPS5938780A (en) | 1984-03-02 |
Family
ID=15483136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14980782A Pending JPS5938780A (en) | 1982-04-10 | 1982-08-27 | Magnetooptic storage element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5938780A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS616807A (en) * | 1984-06-20 | 1986-01-13 | Oki Electric Ind Co Ltd | Photomagnetic recording material |
JPS6154054A (en) * | 1984-08-23 | 1986-03-18 | Matsushita Electric Ind Co Ltd | Plate information recording medium |
JPS6247846A (en) * | 1985-08-26 | 1987-03-02 | Seiko Epson Corp | Photomagnetic recording medium |
JPH03162742A (en) * | 1989-11-21 | 1991-07-12 | Mitsubishi Electric Corp | Magneto-optical recording medium |
JPH0422226A (en) * | 1990-05-16 | 1992-01-27 | Matsushita Electric Ind Co Ltd | Demodulating device |
JPH05135417A (en) * | 1992-05-14 | 1993-06-01 | Sharp Corp | Magneto-optical memory element |
JPH05325277A (en) * | 1992-05-18 | 1993-12-10 | Mitsubishi Electric Corp | Magneto-optical recording medium and its manufacture |
-
1982
- 1982-08-27 JP JP14980782A patent/JPS5938780A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS616807A (en) * | 1984-06-20 | 1986-01-13 | Oki Electric Ind Co Ltd | Photomagnetic recording material |
JPS6154054A (en) * | 1984-08-23 | 1986-03-18 | Matsushita Electric Ind Co Ltd | Plate information recording medium |
JPH0580735B2 (en) * | 1984-08-23 | 1993-11-10 | Matsushita Electric Ind Co Ltd | |
JPS6247846A (en) * | 1985-08-26 | 1987-03-02 | Seiko Epson Corp | Photomagnetic recording medium |
JPH03162742A (en) * | 1989-11-21 | 1991-07-12 | Mitsubishi Electric Corp | Magneto-optical recording medium |
JPH0422226A (en) * | 1990-05-16 | 1992-01-27 | Matsushita Electric Ind Co Ltd | Demodulating device |
JPH05135417A (en) * | 1992-05-14 | 1993-06-01 | Sharp Corp | Magneto-optical memory element |
JPH05325277A (en) * | 1992-05-18 | 1993-12-10 | Mitsubishi Electric Corp | Magneto-optical recording medium and its manufacture |
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