JPH0754916Y2 - イオン注入装置 - Google Patents
イオン注入装置Info
- Publication number
- JPH0754916Y2 JPH0754916Y2 JP5768990U JP5768990U JPH0754916Y2 JP H0754916 Y2 JPH0754916 Y2 JP H0754916Y2 JP 5768990 U JP5768990 U JP 5768990U JP 5768990 U JP5768990 U JP 5768990U JP H0754916 Y2 JPH0754916 Y2 JP H0754916Y2
- Authority
- JP
- Japan
- Prior art keywords
- holder
- holder shaft
- linear motion
- ion
- motion mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005468 ion implantation Methods 0.000 claims description 17
- 238000010884 ion-beam technique Methods 0.000 claims description 16
- 238000007789 sealing Methods 0.000 claims description 4
- 238000002347 injection Methods 0.000 description 8
- 239000007924 injection Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 230000002441 reversible effect Effects 0.000 description 4
- 238000012856 packing Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5768990U JPH0754916Y2 (ja) | 1990-05-30 | 1990-05-30 | イオン注入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5768990U JPH0754916Y2 (ja) | 1990-05-30 | 1990-05-30 | イオン注入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0416862U JPH0416862U (cs) | 1992-02-12 |
| JPH0754916Y2 true JPH0754916Y2 (ja) | 1995-12-18 |
Family
ID=31582629
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5768990U Expired - Lifetime JPH0754916Y2 (ja) | 1990-05-30 | 1990-05-30 | イオン注入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0754916Y2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2555059Y2 (ja) * | 1991-08-09 | 1997-11-19 | 日新電機株式会社 | イオン注入装置 |
-
1990
- 1990-05-30 JP JP5768990U patent/JPH0754916Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0416862U (cs) | 1992-02-12 |
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